Reducing connection structure of furnace body

Abstract

An embodiment of the utility model provides a furnace body reducing connecting structure, which relates to the technical field of single crystal furnaces and comprises a furnace barrel, a furnace cover is arranged at the upper end of the furnace barrel, a reducing flange is fixedly connected to the upper edge of the furnace barrel and comprises a connecting disc body and a positioning portion mounted at the upper end of the connecting disc body, and the positioning portion is movably inserted into the upper end of the connecting disc body. When furnace barrels with different diameters need to be installed, the furnace barrels with different diameters can be welded to the variable-diameter flange, the appropriate furnace barrel is connected with the furnace cover at the upper end, the furnace cover is installed at the upper end of the variable-diameter flange in an embedded mode, and then the furnace cover is positioned through the positioning parts evenly arranged at the upper end of the variable-diameter flange. Therefore, the center of the furnace cover and the center of the furnace barrel are coaxially arranged, the furnace cover can be conveniently connected with the furnace barrels with different diameters at the lower end, it can be guaranteed that when only the furnace barrel is replaced, fixing is achieved through the variable-diameter flange and the furnace cover, convenience and rapidness are achieved, the furnace cover at the upper end and the auxiliary furnace chamber do not need to be replaced, and cost is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a furnace body diameter-changing connection structure. Background Art

[0002] A single crystal furnace is a type of crystal growth equipment. It is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and uses the Czochralski method to grow single crystals without dislocation. It is mainly composed of: a pulling head, a sub-chamber, a furnace cover, a furnace barrel and other components. There are two ways to name single crystal furnace models, one is the feeding amount, and the other is the furnace chamber diameter. For example, the 85 furnace refers to the diameter of the main furnace barrel, and the 120, 150 and other models are determined by the charging amount.

[0003] In actual production, the diameter of the existing furnace barrel is relatively small, which limits the amount of raw material dissolved and affects the output of single crystal rods. If other types of single crystal furnaces are used for production, the entire equipment needs to be replaced. It is inconvenient to replace the furnace barrel at the lower end alone, and the cost is relatively high. Utility Model Content

[0004] The utility model aims to provide a furnace body variable diameter connection structure, which can avoid the problem that when changing to other types of single crystal furnace production, the entire equipment needs to be replaced, and it is inconvenient to replace the furnace barrel at the lower end separately.

[0005] The utility model provides a furnace body variable diameter connection structure, comprising:

[0006] A furnace drum, wherein a furnace cover is arranged at the upper end of the furnace drum, a reducing flange is fixedly connected to the upper edge of the furnace drum, the reducing flange is connected to the furnace drum by welding, and the furnace cover is mounted on the upper end of the reducing flange;

[0007] The reducer flange comprises a connecting disc body and a positioning portion installed on the upper end of the connecting disc body, and the positioning portion is movably inserted in the upper end of the connecting disc body.

[0008] Preferably, the positioning part includes a fixing part for supporting and installing and a positioning pin fixedly installed at the lower end of the fixing part, the positioning pin is inserted into a socket opened on the upper surface of the connecting disk body of the reducing flange, and a clamping part is movably installed on the upper end of the fixing part.

[0009] Preferably, the inner side of the clamping member is arranged in a downwardly inclined shape and in an arc shape.

[0010] Preferably, a connecting groove is provided at the upper end of the fixing member, a transmission member fixedly installed at the lower end of the clamping member is slidably installed inside the connecting groove and matches the size of the connecting groove, a movable screw is movably installed inside the connecting groove, the movable screw passes through the transmission member and is threadedly connected to the transmission member.

[0011] Preferably, an adjusting head is fixedly mounted on the end of the movable screw, and the adjusting head and the movable screw are embedded and mounted inside the fixing member.

[0012] Preferably, a marking portion is provided on one side of the fixing member.

[0013] Preferably, a positioning groove is formed at the upper end of the connecting disc body, and the positioning parts are evenly distributed on the edge of the positioning groove.

[0014] Preferably, a sealing strip is arranged inside the positioning groove, and the sealing strip can be fixed to the upper surface of the connecting disc body by gluing or embedding.

[0015] Preferably, a water cooling part is installed inside the notch of the reducing flange, and one end of the water cooling part is connected to a delivery pump.

[0016] Preferably, the water cooling pipe is spirally arranged inside the notch of the reducing flange.

[0017] The embodiment of the utility model provides a furnace body reducing connection structure. When furnace barrels with different diameters need to be installed, the furnace barrels with different diameters can be welded to the reducing flanges respectively, and then the appropriate furnace barrel is connected to the furnace cover at the upper end. The furnace cover is embedded and installed on the upper end of the reducing flange, and then positioned by the positioning parts evenly arranged on the upper end of the reducing flange, so that the center of the furnace cover and the center of the furnace barrel are coaxially arranged, which facilitates the connection of the furnace cover with the furnace barrels with different diameters at the lower end, and can ensure that when only the furnace barrel is replaced, it is fixed by the reducing flange and the furnace cover, which is convenient and quick, and there is no need to replace the upper furnace cover and the auxiliary furnace chamber, thereby saving costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the implementation mode of the utility model, the drawings required for use in the implementation mode will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the utility model.

[0020] Figure 2 This is a schematic diagram of the reducer flange structure of an embodiment of the utility model.

[0021] Figure 3 It is a schematic diagram of the cross-sectional structure of the connecting disc body of an embodiment of the utility model.

[0022] Figure 4 It is a schematic diagram of the positioning part structure of an embodiment of the utility model.

[0023] Figure 5 This is a schematic diagram of the fixing structure of an embodiment of the utility model.

[0024] Figure 6 For the utility model embodiment Figure 3 Enlarged structural diagram at A in the middle.

[0025] Figure 7 This is a schematic diagram of the water cooling structure of an embodiment of the utility model.

[0026] Description of the drawings: 100, furnace drum; 200, furnace cover; 300, auxiliary furnace chamber; 400, reducing flange; 410, connecting disc; 420, water cooling part; 430, jack; 440, positioning groove; 450, sealing strip; 500, positioning part; 510, fixing part; 511, connecting groove; 512, moving screw; 513, adjusting head; 520, positioning pin; 530, clamping part; 531, transmission part. DETAILED DESCRIPTION

[0027] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the embodiments of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0028] In the description of the embodiments of the present invention, it should be understood that the terms "length", "vertical", "horizontal", "top", "bottom", etc. indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present invention.

[0029] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0030] In the embodiments of the present utility model, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0031] The disclosure below provides many different embodiments or examples for realizing different structures of the embodiments of the present utility model. In order to simplify the disclosure of the embodiments of the present utility model, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the embodiments of the present utility model. In addition, the embodiments of the present utility model can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed.

[0032] In order to better understand the purpose, structure and function of the utility model, the following is a further detailed description of a furnace body variable diameter connection structure of the utility model in conjunction with the accompanying drawings.

[0033] like Figure 1-Figure 7 As shown, an embodiment of the utility model provides a furnace body reducing diameter connection structure, including a furnace barrel 100, a furnace body for containing and processing raw materials for crystal production, a furnace cover 200 for sealing the furnace barrel 100 is arranged at the upper end of the furnace barrel 100, an auxiliary furnace chamber 300 is arranged at the upper end of the furnace cover 200, a reducing flange 400 for assisting in reducing diameter is fixedly connected to the upper edge of the furnace barrel 100, the reducing flange 400 is connected to the furnace barrel 100 by welding, and the furnace cover 200 is mounted on the upper end of the reducing flange 400.

[0034] The reducing flange 400 includes a connecting disk body 410 for connection and fixation and a positioning portion 500 installed on the upper end of the connecting disk body 410 for positioning the furnace cover 200. The positioning portion 500 is movably inserted in the upper end of the connecting disk body 410. The positioning portion 500 includes a fixing member 510 for support and installation and a positioning pin 520 fixedly installed at the lower end of the fixing member 510 for installing the positioning portion 500. The positioning pin 520 is inserted into the inside of a socket 430 opened on the upper surface of the connecting disk body 410 of the reducing flange 400. A clamping member 530 for pushing and centering the furnace cover 200 is movably installed on the upper end of the fixing member 510.

[0035] When it is necessary to install furnace barrels 100 of different diameters, the furnace barrels 100 of different diameters can be welded to the reducing flanges 400 respectively, and then the appropriate furnace barrel 100 can be connected to the furnace cover 200 at the upper end. The furnace cover 200 is embedded and installed on the upper end of the reducing flange 400, and then positioned by the positioning parts 500 evenly arranged on the upper end of the reducing flange 400, so that the center of the furnace cover 200 and the center of the furnace barrel 100 are coaxially arranged, which facilitates the connection of the furnace cover 200 with the furnace barrel 100 of different diameters at the lower end. It can ensure that when only the furnace barrel 100 is replaced, it is fixed by the reducing flange 400 and the furnace cover 200, which is convenient and quick, and there is no need to replace the upper furnace cover 200 and the auxiliary furnace chamber 300, thereby saving costs.

[0036] The inner side of the clamp 530 is arranged in a downward tilted shape and in an arc shape, which is convenient for fixing the circular furnace cover 200 when the reducing flange 400 and the furnace cover 200 are fixed, better matching the edge of the furnace cover 200, and facilitating the furnace cover 200 to fall to the inner side of the clamp 530.

[0037] A connecting groove 511 for installing a clamping member 530 installed at the upper end is provided at the upper end of the fixing member 510. A transmission member 531 fixedly installed at the lower end of the clamping member 530 is slidably installed inside the connecting groove 511 and matches the size of the connecting groove 511. A moving screw 512 for driving the transmission member 531 to move is movably installed inside the connecting groove 511. The moving screw 512 is installed through the transmission member 531 and is threadedly connected to the transmission member 531. When fixing furnace covers 200 of different sizes, the moving screw 512 can be rotated for adjustment, and the clamping member 530 is driven to move by the transmission member 531 threadedly installed at the upper end, thereby adjusting the position, so that the clamping member 530 is conveniently positioned against the internal furnace cover 200.

[0038] An adjusting head 513 for driving the moving screw 512 to rotate is fixedly installed at the end of the moving screw 512. The adjusting head 513 and the moving screw 512 are embedded in the interior of the fixing member 510, and a slot for adjusting and rotating the adjusting head 513 is provided on one side of the adjusting head 513, so as to facilitate inserting a tool into the slot to rotate the moving screw 512, thereby adjusting the transmission member 531 installed inside.

[0039] An identification portion is provided on one side of the fixing member 510 to facilitate the operator to observe and adjust the movement of the clamping member 530, thereby adjusting each group of furnace covers 200 to the same position to ensure that the center of the furnace cover 200 is coaxially arranged with the center of the furnace drum 100.

[0040] A positioning groove 440 for assisting in positioning the furnace cover 200 is provided at the upper end of the connecting disc body 410. The positioning parts 500 are evenly distributed on the edges of the positioning grooves 440, and at least three groups are designed. The positioning grooves 440 can simply limit the furnace cover 200 within a certain range, thereby avoiding large offset between the furnace cover 200 and the reducing flange 400 during installation, and facilitating the subsequent fixation of the positioning parts 500.

[0041] A sealing strip 450 is arranged on the inner side of the positioning groove 440 for auxiliary sealing of the reducing flange 400 and the furnace cover 200. The sealing strip 450 can be fixed to the upper surface of the connecting plate body 410 by gluing or interlocking. When the furnace cover 200 is connected to the reducing flange 400, the sealing strip 450 seals the connection to prevent the gap in the connection from affecting the connection and use of the reducing flange 400 and the furnace cover 200.

[0042] A water cooling part 420 for cooling the reducing flange 400 is installed inside the groove of the reducing flange 400. One end of the water cooling part 420 is connected to a conveying pump. Since pulling single crystals has requirements for the external environmental temperature and humidity, water is passed through the water cooling part 420 to cool the inside of the reducing flange 400, which facilitates crystal production.

[0043] The water cooling part 420 pipe is spirally arranged inside the notch of the reducer flange 400 and can be arranged in one layer or multiple layers. The amount of cooling water introduced and the installation method of the cooling water pipe are selected according to the situation to facilitate cooling the inside of the reducer flange 400.

[0044] A furnace body reducing connection structure working principle: when it is necessary to install furnace barrels 100 of different diameters, the furnace barrels 100 of different diameters can be welded to the reducing flanges 400 respectively, and then the appropriate furnace barrel 100 can be connected to the furnace cover 200 at the upper end, and the furnace cover 200 is installed on the upper end of the reducing flange 400, and then positioned by the positioning parts 500 evenly arranged on the upper end of the reducing flange 400, so that the center of the furnace cover 200 and the center of the furnace barrel 100 are coaxially arranged, which is convenient for connecting the furnace cover 200 with the furnace barrel 100 of different diameters at the lower end, and can ensure that when only the furnace barrel 100 is replaced, it is fixed by the reducing flange 400 and the furnace cover 200, which is convenient and quick, and there is no need to replace the upper furnace cover 200 and the auxiliary furnace chamber 300, thereby saving costs.

[0045] It is understood that the present invention is described by some embodiments, and those skilled in the art are aware that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to adapt to specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the scope of protection of the present invention.

Claims

1. A furnace body variable diameter connection structure, characterized in that: include: A furnace drum, wherein a furnace cover is arranged at the upper end of the furnace drum, a reducing flange is fixedly connected to the upper edge of the furnace drum, the reducing flange is connected to the furnace drum by welding, and the furnace cover is mounted on the upper end of the reducing flange; The reducer flange comprises a connecting disc body and a positioning portion installed on the upper end of the connecting disc body, and the positioning portion is movably inserted in the upper end of the connecting disc body.

2. A furnace body diameter reducing connection structure according to claim 1, characterized in that: The positioning part includes a fixing part for supporting and installing and a positioning pin fixedly installed at the lower end of the fixing part. The positioning pin is inserted into the socket opened on the upper surface of the connecting disk body of the reducing flange. A clamping part is movably installed on the upper end of the fixing part.

3. A furnace body diameter-changing connection structure according to claim 2, characterized in that: The inner side of the clamping member (530) is arranged in a downwardly inclined shape and in an arc shape.

4. A furnace body diameter reducing connection structure according to claim 3, characterized in that: A connecting groove is provided at the upper end of the fixing member, and a transmission member fixedly installed at the lower end of the clamping member is slidably installed inside the connecting groove and matches the size of the connecting groove. A movable screw is movably installed inside the connecting groove, and the movable screw passes through the transmission member and is threadedly connected to the transmission member.

5. A furnace body diameter reducing connection structure according to claim 4, characterized in that: An adjusting head is fixedly mounted on the end of the movable screw rod, and the adjusting head and the movable screw rod are embedded and mounted inside the fixing member.

6. The furnace body reducing connection structure according to claim 5, characterized in that: A marking portion is provided on one side of the fixing member.

7. A furnace body diameter reducing connection structure according to claim 6, characterized in that: A positioning groove is formed at the upper end of the connecting disc body, and the positioning parts are evenly distributed on the edge of the positioning groove.

8. The furnace body reducing connection structure according to claim 7, characterized in that: A sealing strip is arranged inside the positioning groove, and the sealing strip can be fixed to the upper surface of the connecting disc body by gluing or embedding.

9. The furnace body reducing diameter connection structure according to claim 8, characterized in that: A water cooling part is installed inside the notch of the reducing flange, and one end of the water cooling part is connected to the delivery pump.

10. The furnace body diameter-changing connection structure according to claim 9, characterized in that: The water cooling pipe is spirally arranged inside the notch of the reducing flange.

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