Module substrate camber measuring tool

Abstract

The utility model discloses a module substrate camber measuring tool which comprises a motion measuring assembly, a module measuring platform, a clamping robot and a circulating transmission assembly, the clamping robot and the circulating transmission assembly are both installed on the front side of the motion measuring assembly, and the side, facing the clamping robot, of the motion measuring assembly is provided with a measuring platform; the clamping robot can move the modules on the circulating transmission assembly to the module measuring platform, and then the modules are measured through the motion measuring assembly. According to the utility model, through mutual cooperation of the motion measurement assembly, the module measurement platform, the clamping robot and the circulation transmission assembly, the IGBT module can realize integrated design from loading, measurement and unloading, and each assembly is fully-automatically controlled, so that the operation is convenient and accurate, and the production efficiency is improved. And meanwhile, an image monitoring piece is arranged in the motion measurement assembly to position the module, then full-automatic measurement of the camber of the module is carried out through a laser probe, and the measurement precision and efficiency are further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of crown measurement of IGBT modules, in particular to a module substrate crown measurement tool. Background Art

[0002] IGBT (Insulated Gate Bipolar Transistor) is a new type of power semiconductor field-controlled self-turning device that integrates the power MOS (Metal Oxide Semiconductor) field-effect transistor and the low resistance of bipolar devices. It has the characteristics of high input impedance, low power consumption of voltage control, simple control circuit, high voltage resistance, and large current bearing. It is widely used in various power conversions. In order to meet the large market demand, high-efficiency, flexible and intelligent packaging has become the main packaging form of IGBT.

[0003] IGBT modules mainly include copper-clad ceramic substrate structure (DBC), IGBT chip, diode chip, NTC temperature sensor, power terminal, signal terminal, etc. Among them, copper substrate is particularly important as the core component of IGBT module. Different types of substrate arch have a certain impact on the stress of IGBT module, and the reliability of IGBT module is strongly related to stress. Reasonable substrate arch value can make the substrate and heat sink in close contact. At present, the market mostly adopts the method of manual measurement of substrate arch, which cannot guarantee the continuity of production and is too low in efficiency, affecting the packaging efficiency of IGBT module. Utility Model Content

[0004] The technical problem to be solved by the utility model is how to efficiently realize the measurement of the IGBT module crown.

[0005] In order to solve the above technical problems, the utility model provides the following technical solutions:

[0006] A module substrate arch measurement tool comprises a motion measurement component, a module measurement platform, a gripping robot and a circulating transmission component. The gripping robot and the circulating transmission component are both installed on the front side of the motion measurement component. A measurement platform is provided on the side of the motion measurement component facing the gripping robot. The gripping robot can move the module on the circulating transmission component to the module measurement platform, and then measure it through the motion measurement component.

[0007] The utility model can realize an integrated design of IGBT module from loading, measuring and unloading through the mutual cooperation of motion measurement components, module measurement platform, clamping robot and circulating transmission components, and each component is fully automatically controlled, and the operation is convenient and accurate. At the same time, an image monitoring component is arranged in the motion measurement component of the present application to realize the positioning of the module, and then the curvature of the module is fully automatically measured by a laser probe, so as to further improve the measurement accuracy.

[0008] As a further solution of the utility model: the motion measurement component includes a motor drive device and a measurement module installed on the motor drive device, wherein the measurement module includes a camera for image positioning of the module and a laser probe for measuring the module.

[0009] As a further solution of the utility model: the motor drive device includes a platform base plate, horizontal beams are symmetrically installed on both sides of the top of the platform base plate, a cross beam is slidably connected between the two horizontal beams, a motor component 1 capable of driving the cross beam to move is provided on the horizontal beam, the cross beam is detachably connected to the measuring module, and a motor component 2 capable of driving the measuring module to move is provided on the cross beam.

[0010] As a further solution of the utility model: the module measurement platform includes a platform bracket, wherein the platform bracket is an arch-shaped structure, and one end can extend into the middle recess of the measurement module, and a module fixing component is installed on the top of the platform bracket, wherein the module fixing component is located between the image monitoring component and the laser probe.

[0011] As a further solution of the utility model: the module fixing assembly includes a left fixed module device and a right fixed module device, wherein the bottom of the left fixed module device and the right fixed module device are both slidably connected to the guide rails arranged on the platform bracket, and the top of the platform bracket and located on the outside of the left fixed module device and the right fixed module device are provided with a first telescopic cylinder and a second telescopic cylinder for driving them to move.

[0012] As a further solution of the utility model: a cylinder front buffer and a cylinder rear buffer are respectively provided on the top of the platform bracket and located at the front and rear sides of the left fixed module device and the right fixed module device.

[0013] As a further solution of the utility model: the left fixed module device includes a product support plate, wherein the top of the product support plate is provided with a Y-direction cylinder in the Y direction and an X-direction cylinder in the X direction, and the top of the product support plate is also provided with a support fixture and a product clamping fixture 2.

[0014] As a further solution of the utility model: the gripping robot comprises a base, a four-axis robot is installed on the top of the base, wherein the output shaft of the four-axis robot is connected to an electric gripper for gripping the module through a connecting piece.

[0015] As a further solution of the utility model: the circulating transmission component includes a conveying mechanism and a module carrier mechanism, wherein the module carrier mechanism is located above the conveying mechanism, and an incoming carrier detection component and a discharging carrier detection component are installed above the conveying mechanism;

[0016] A first lifting mechanism and a second lifting mechanism for driving the module carrier mechanism to move vertically are also provided above the conveying mechanism.

[0017] As a further solution of the utility model: the first lifting mechanism has the same structure as the second lifting mechanism, wherein the first lifting mechanism includes a third support frame, a first positioning plate is provided on the top of the third support frame, and a first positioning pin is provided on the top of the first positioning plate for positioning with the module carrier mechanism; wherein the first positioning plate is connected to a first guide rod arranged in the third support frame.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] 1. The utility model can realize an integrated design of IGBT module from loading, measuring and unloading through the cooperation of motion measurement components, module measurement platform, gripping robot and circulation transmission components, and each component is fully automatically controlled, easy to operate and accurate. At the same time, the motion measurement component of the present application is provided with an image monitoring component to locate the position of the module, and then the module is fully automatically measured for the camber through the laser probe, so as to further improve the measurement accuracy;

[0020] Second, the utility model sets two groups of symmetrical horizontal beams, a crossbeam is set between the two horizontal beams, and a measuring module is installed on the crossbeam. A driving motor is set on both groups of horizontal beams to drive the crossbeam to drive the measuring module to move in the Y-axis direction. At the same time, a driving motor is also set on the crossbeam to drive the measuring module to move in the X-axis direction. The above settings can realize the omnidirectional movement of the measuring module, thereby improving the adaptability of the present application;

[0021] 3. The utility model is provided with a lens, a light source and a laser probe in the measuring module, wherein the position of the module is located by the cooperation of the lens and the light source, and the ranging value of the laser probe is obtained after the positioning is completed, and all the measured values ​​are obtained as the preprocessing data of the substrate curvature, and then the curvature value of the substrate is calculated to improve the accuracy of the substrate measurement;

[0022] Fourth, the utility model platform bracket is provided with a movable left fixed module device and a right fixed module device, and both fixed module devices are movable, and cylinder buffers are also provided on the front and rear sides of the fixed module device to protect the fixed module device, and the movement of the fixed module device can be adjusted accordingly according to the measuring module, so as to ensure the flexibility of measurement;

[0023] 5. The module carrier of the utility model can move on the conveying mechanism, and an incoming material carrier detection component and a discharging material carrier detection component for positioning the module carrier are also provided on the conveying mechanism, thereby realizing incoming material detection and discharging material detection of the module. A lifting mechanism for driving the module carrier to move upward is also provided at the bottom of the conveying mechanism to facilitate the clamping of the clamping robot. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a structural schematic diagram of a module substrate camber measuring tool according to an embodiment of the utility model;

[0025] Figure 2 This is a schematic diagram of the structure of the motion measurement component of the embodiment of the utility model;

[0026] Figure 3 This is a schematic diagram of the structure of the measurement module of the embodiment of the utility model;

[0027] Figure 4 This is a schematic diagram of the structure of the module measurement platform of the utility model embodiment;

[0028] Figure 5 This is a schematic structural diagram of the left fixing module device of an embodiment of the utility model;

[0029] Figure 6 This is a schematic diagram of the structure of the gripping robot according to an embodiment of the utility model;

[0030] Figure 7 This is a schematic diagram of the structure of a circulating transmission component according to an embodiment of the utility model;

[0031] Figure 8 This is a schematic diagram of the structure of the first lifting mechanism of the embodiment of the utility model;

[0032] Description of reference numerals:

[0033] 1. Motion measurement assembly; 11. Motor drive device; 111. Y direction motor 1; 112. Crossbeam; 113. Y direction motor 2; 114. X direction motor; 115. Platform bottom plate; 12. Measurement module; 121. Camera mounting sheet metal; 122. Camera; 123. Lens fixing device; 124. Lens; 125. Light source; 126. Light source mounting sheet metal; 127. Laser probe; 128. Probe clamping block;

[0034] 2. Module measurement platform; 20. Platform bracket; 21. Cylinder front buffer; 22. Left fixed module device; 221. Product support plate; 2211. Support fixture; 222. X-direction cylinder; 223. Product clamping fixture 1; 224. Product clamping fixture 2; 225. Y-direction cylinder; 23. Laser calibration fixture; 24. Right fixed module device; 25. Cylinder rear buffer; 26. First telescopic cylinder; 27. Second telescopic cylinder;

[0035] 3. Gripping robot; 31. Connecting piece; 32. Electric gripper; 33. Base; 34. Four-axis robot;

[0036] 4. Circular transmission component; 411. Incoming carrier detection component; 412. Discharging carrier detection component; 42. Conveying mechanism; 421. Support frame; 422. Conveying belt; 423. Secondary transmission module; 424. Conveying motor; 425. Primary transmission module; 426. Controller; 43. Module carrier one; 431. First assembly hole; 44. Upper limit block; 45. Module carrier two; 46. Second lifting mechanism; 47. First lifting mechanism; 471. First lifting cylinder; 472. First positioning plate; 4721. First height matching block; 4722. First positioning pin; 473. Third support frame; 474. First guide rod. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution in the embodiments of the utility model will be clearly and completely described below in combination with the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0038] Reference Figure 1 A module substrate arch measurement tool includes a motion measurement component 1, a module measurement platform 2, a clamping robot 3 and a circulating transmission component 4. The clamping robot 3 and the circulating transmission component 4 are both installed on the front side of the motion measurement component 1. The motion measurement component 1 is provided with a measuring platform 2 on the side facing the clamping robot 3. The clamping robot 3 can clamp the module on the circulating transmission component 4 and move it to the module measurement platform 2 for fully automatic measurement of the arch.

[0039] Reference Figure 2 The motion measurement component 1 includes a motor drive device 11 and a measurement module 12, wherein the measurement module 12 is installed above the motor drive device 11, and the motor drive device 11 can drive the measurement module 12 to achieve all-round movement, and the module measurement platform 2 is arranged on the motor drive device 11, and the motor drive device 11 can adjust the measurement module 12 accordingly according to the position of the module measurement platform 2, so that the module on the module measurement platform 2 can be measured accordingly through the measurement module 12.

[0040] Further, see Figure 2The motor drive device 11 includes a Y-direction motor 111, a crossbeam 112, a Y-direction motor 113, an X-direction motor 114 and a platform bottom plate 115. The platform bottom plate 115 is arranged at the bottom and acts as a base. Two groups of symmetrical horizontal beams are arranged on the top of the platform bottom plate 115 in the Y-axis direction, wherein a crossbeam 112 is arranged between the two horizontal beams in the X-axis direction, and both ends of the crossbeam 112 can slide on the horizontal beams, and a Y-direction motor 111 and a Y-direction motor 2 113 are arranged inside the two horizontal beams respectively, and the crossbeam 112 can be driven to slide on the horizontal beam by the Y-direction motor 111 and the Y-direction motor 2 113, and the crossbeam 112 then drives the measurement module 12 connected thereto to realize the movement in the Y-axis direction;

[0041] At the same time, a slide rail is provided on the side of the beam 112 facing the module measurement platform 2, and the measurement module 12 is slidably connected to the slide rail. An X-direction motor 114 is provided on the beam 112. The X-direction motor 114 can drive the measurement module 12 to move in the X-axis direction on the slide rail. This process can realize the all-round movement of the measurement module 12.

[0042] Reference Figure 3 The measuring module 12 includes a bracket, which has a plate-like structure with a concave middle. The concave part can just allow the front end of the module measuring platform 2 to extend into it, ensuring that the module on the module measuring platform 2 can be moved to just below the testing part of the measuring module 12; a camera 122 for image positioning of the module is provided on the top of the bracket, and the camera 122 is installed on the top of the bracket through a camera mounting sheet metal 121; a light source 125 is detachably installed at the bottom of the bracket through a light source mounting sheet metal 126, wherein the light source 125 is located just below the bottom lens 124 of the camera 122; a laser probe 127 is also detachably installed on the outside of the light source 125 through a probe clamping block 128.

[0043] Reference Figure 4 The measuring platform 2 includes a platform bracket 20, wherein the platform bracket 20 is an arch-shaped structure, and one end of the platform bracket can extend into the middle recess of the measuring module 12 bracket. A left fixed module device 22 and a right fixed module device 24 are installed on the top of the platform bracket 20. The left fixed module device 22 and the right fixed module device 24 have the same structure and are symmetrically arranged. Both the left fixed module device 22 and the right fixed module device 24 can drive the modules fastened thereon to move between the camera 122 and the laser probe 127.

[0044] Furthermore, the bottoms of the left fixed module device 22 and the right fixed module device 24 are slidably connected to the guide rails set on the platform bracket 20, and the top of the platform bracket 20 and the outer sides of the left fixed module device 22 and the right fixed module device 24 are provided with a first telescopic cylinder 26 and a second telescopic cylinder 27 for driving their movement. The first telescopic cylinder 26 and the second telescopic cylinder 27 can drive the left fixed module device 22 and the right fixed module device 24 to move in the Y-axis direction on the bottom guide rail; the top of the platform bracket 20 and the front and rear sides of the left fixed module device 22 and the right fixed module device 24 are respectively provided with a cylinder front buffer 21 and a cylinder rear buffer 25, where the cylinder front buffer 21 and the cylinder rear buffer 25 are used to protect the left fixed module device 22 and the right fixed module device 24 when they move forward and backward.

[0045] A laser calibration fixture 23 is also provided on the top of the platform bracket 20 to calibrate the accuracy of the test of the laser probe 127. The staff can check whether the measurement of the laser probe 127 is stable at intervals.

[0046] Further, see Figure 5 Since the left fixed module device 22 and the right fixed module device 24 have the same structure, the structural relationship is now introduced by taking the left fixed module device 22 as an example. The left fixed module device 22 includes a product support plate 221, wherein a Y-direction cylinder 225 is provided at the top of the product support plate 221 in the Y direction; an X-direction cylinder 222 is provided in the X direction, and the Y-direction cylinder 225 and the X-direction cylinder 222 are used to tighten and position the module. A support fixture 2211 and a second product clamping fixture 224 are also provided at the top of the product support plate 221, and the support fixture 2211 and the second product clamping fixture 224 are used to limit the module.

[0047] Reference Figure 6 The gripping robot 3 includes a base 33, a four-axis robot 34 is installed on the top of the base 33, wherein the output shaft of the four-axis robot 34 is connected to an electric gripper 32 for gripping the module through a connector 31, the electric gripper 32 can grip the module on the circulating transmission component 4, and then drive it to the measuring platform 2 through the four-axis robot 34, and then measure and process the module through the measuring module 12.

[0048] Reference Figure 7The circulating transmission component 4 includes a conveying mechanism 42, a module carrier 1 43 and a module carrier 2 45, wherein the module carrier 1 43 and the module carrier 2 45 are located above the conveying mechanism 42, and an incoming carrier detection component 411 and a discharge carrier detection component 412 are installed above the conveying mechanism 42, wherein an upper limit block 44 for limiting the module carrier 1 43 and the module carrier 2 45 is also installed above the conveying mechanism 42; a first lifting mechanism 47 and a second lifting mechanism 46 for driving the module carrier 1 43 and the module carrier 2 45 to move in the vertical direction are also provided below the conveying mechanism 42.

[0049] Furthermore, the conveying mechanism 42 includes a support frame 421 and a conveying belt 422 arranged on the support frame 421, and a secondary transmission module 423, an upper limit block 424 and a primary transmission module 425 are also provided on the support frame 421. The upper limit block 424 is installed on the support frame 421, and the primary transmission module 425 is installed on the upper limit block 424. The secondary transmission module 423 for driving the conveying belt 422 is installed on the inner side of the support frame 421, and the primary transmission module 425 drives the secondary transmission module 423 to rotate; a controller 426 for controlling the operation of the primary transmission module 425 is also installed on the outer side of the support frame 421.

[0050] Further, see Figure 8 The first lifting mechanism 47 has the same structure as the second lifting mechanism 46, wherein the first lifting mechanism 47 includes a third support frame 473, a first positioning plate 472 is provided on the top of the third support frame 473, and a first positioning pin 4722 is provided on the top of the first positioning plate 472 for positioning with the module carrier 1 43 and the module carrier 2 45; wherein the first positioning plate 472 is connected to the first guide rod 474 provided in the third support frame 473, and a first lifting cylinder 471 is installed inside the third support frame 473, and the top of the first lifting cylinder 471 is connected to the first positioning plate 472, and the first positioning plate 472 can be driven to move up by the first lifting cylinder 471, thereby driving the corresponding module carrier 1 43 and the module carrier 2 45 to move up, and a first assembly hole 431 in contact with the first positioning pin 4722 is provided on both the module carrier 1 43 and the module carrier 2 45.

[0051] The specific operating principles of this application are as follows:

[0052] The utility model first places the IGBT module on the module carrier 1 43 or the module carrier 2 45 on the circulating transmission component 4, and then drives the module carrier 1 43 or the module carrier 2 45 to move up through the corresponding lifting cylinder, and then clamps the IGBT module through the electric clamp 32 on the clamping robot 3, and then clamps and moves it to the left fixed module device 22 or the right fixed module device 24 on the measuring platform 2, and then moves the position of the measuring module 12 according to the position of the IGBT module. The position of the measuring module 12 is driven by the motors in the Y-axis direction and the X-axis direction in the motor drive device 11 until the measuring module 12 is located at the position of the IGBT module, and then fine-tunes the position of the IGBT module through the first telescopic cylinder 26 and the second telescopic cylinder 27, and then limits the position through the camera 122 on the measuring module 12, and performs high-precision measurement with the laser ranging probe 127. After the measurement is completed, the IGBT module is clamped by the clamping robot 3 and moved back to the module carrier 1 43 or the module carrier 2 45.

[0053] The camera 122 can guide the accurate measurement of the curvature of the position specified by the user; the laser ranging probe 127 can achieve high-precision measurement; thereby achieving high-speed, high-precision, high-precision and stable measurement of the curvature of the module. Guide the camera to take three positioning images on the IGBT, and determine the conversion matrix relationship of the coordinate system between the camera center and the measured product as follows, wherein a, b, c, d are scaling and rotation coefficients, and e, f are translation amounts; the matrix relationship is the parameter values ​​of a, b, c, d, e, f; then, according to the relative position of the center of the camera 122 and the center of the laser probe 127, the coordinate system conversion relationship between the center of the laser probe and the measured product is obtained, and the measured coordinates of the product are converted into the motion coordinates of the linear motor through this conversion matrix, and the motors in the Y-axis direction and the X-axis direction in the motor driving device 11 are driven to move the moving position in turn. After the movement is completed, the ranging value of the laser probe is obtained, and all the measured values ​​are obtained as the preprocessing data of the substrate curvature, and then all the values ​​are fitted into a plane through the least squares method, and the distance set from all the measuring points to the plane is calculated, and the extreme value of the distance set is calculated as the curvature value of the substrate.

[0054] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A module substrate camber measurement tool, characterized in that: The invention comprises a motion measurement component (1), a module measurement platform (2), a gripping robot (3) and a circulation transmission component (4), wherein the gripping robot (3) and the circulation transmission component (4) are both installed on the front side of the motion measurement component (1), and a measurement platform (2) is provided on the side of the motion measurement component (1) facing the gripping robot (3); the gripping robot (3) can move the module on the circulation transmission component (4) to the module measurement platform (2), and then measure it through the motion measurement component (1).

2. The module substrate camber measuring tool according to claim 1, characterized in that: The motion measurement assembly (1) comprises a motor drive device (11) and a measurement module (12) mounted on the motor drive device (11), wherein the measurement module (12) comprises a camera (122) for performing image positioning on the module and a laser probe (127) for measuring the module.

3. The module substrate camber measuring tool according to claim 2, characterized in that: The motor drive device (11) comprises a platform bottom plate (115), horizontal beams are symmetrically installed on both sides of the top of the platform bottom plate (115), a crossbeam (112) is slidably connected between the two horizontal beams, a motor component 1 capable of driving the crossbeam (112) to move is provided on the horizontal beam, the crossbeam (112) is detachably connected to the measurement module (12), and a motor component 2 capable of driving the measurement module (12) to move is provided on the crossbeam (112).

4. The module substrate camber measuring tool according to claim 1, characterized in that: The module measurement platform (2) comprises a platform bracket (20), wherein the platform bracket (20) is an arch-shaped structure, and one end of the platform bracket (20) can extend into the middle recess of the measurement module (12), and a module fixing component is installed on the top of the platform bracket (20), wherein the module fixing component is located between the image monitoring component and the laser probe (127).

5. The module substrate camber measuring tool according to claim 4, characterized in that: The module fixing assembly comprises a left fixing module device (22) and a right fixing module device (24), wherein the bottoms of the left fixing module device (22) and the right fixing module device (24) are both slidably connected to guide rails provided on the platform bracket (20), and a first telescopic cylinder (26) and a second telescopic cylinder (27) for driving the movement of the left fixing module device (22) and the right fixing module device (24) are provided at the top of the platform bracket (20) and on the outer sides of the left fixing module device (22) and the right fixing module device (24).

6. The module substrate camber measuring tool according to claim 5, characterized in that: A cylinder front buffer (21) and a cylinder rear buffer (25) are respectively provided on the top of the platform bracket (20) and located at the front and rear sides of the left fixed module device (22) and the right fixed module device (24).

7. The module substrate camber measuring tool according to claim 5, characterized in that: The left fixed module device (22) comprises a product support plate (221), wherein a Y-direction cylinder (225) is provided in the Y direction of the top of the product support plate (221), and an X-direction cylinder (222) is provided in the X direction, and a supporting fixture (2211) and a second product clamping fixture (224) are also provided on the top of the product support plate (221).

8. The module substrate crown measurement tool according to claim 1, characterized in that: The gripping robot (3) comprises a base (33), a four-axis robot (34) is installed on the top of the base (33), wherein the output shaft of the four-axis robot (34) is connected to an electric gripper (32) for gripping the module via a connecting piece (31).

9. The module substrate camber measuring tool according to claim 1, characterized in that: The circulating transmission component (4) comprises a conveying mechanism (42) and a module carrier mechanism, wherein the module carrier mechanism is located above the conveying mechanism (42), and an incoming material carrier detection component (411) and an unloading material carrier detection component (412) are installed above the conveying mechanism (42); A first lifting mechanism (47) and a second lifting mechanism (46) for driving the module carrier mechanism to move in a vertical direction are also provided below the conveying mechanism (42).

10. The module substrate crown measurement tool according to claim 9, characterized in that: The first lifting mechanism (47) has the same structure as the second lifting mechanism (46), wherein the first lifting mechanism (47) includes a third support frame (473), a first positioning plate (472) is provided on the top of the third support frame (473), and a first positioning pin (4722) is provided on the top of the first positioning plate (472) for positioning with the module carrier mechanism; The first positioning plate (472) is connected to a first guide rod (474) disposed in the third support frame (473).

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