Scanning electron microscope objective table suitable for irregular sample detection
By using elastic plates and adjustment units in the scanning electron microscope stage, the precise adjustment of irregular sample angles is achieved, and the problem of difficult angle control in the prior art is solved, and the work efficiency and observation stability are improved.
Patent Information
- Application Number
- CN202420778305.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-16
- Publication Date
- 2024-12-24
- Estimated Expiration
- 2034-04-16
AI Technical Summary
The existing scanning electron microscope stages are difficult to accurately adjust the angle of irregular samples, which makes it difficult to maintain the level of the observation surface, and the operation steps are cumbersome, which reduces work efficiency.
Using a design including elastic plate, adjustment unit and electric slide rail, the deformation of the elastic plate is achieved through the relative displacement of the adjustment rod, so that the observation surface of irregular samples is always level, and the adjustment process is accurately controlled through the electric slide rail and limit teeth. .
It effectively avoids sample tilt and overturning, improves the accuracy and efficiency of angle adjustment, reduces operation difficulty, and reduces heat conduction between the stage and the microscope, improving observation stability and clarity.
Smart Images
Figure CN222232488U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a scanning electron microscope stage, in particular to a scanning electron microscope stage suitable for irregular sample detection. Background Art
[0002] Scanning electron microscopy is an observation method between transmission electron microscopy and optical microscopy. It uses a focused high-energy electron beam to scan the surface of the sample, stimulates various physical information through the interaction between electrons and matter, collects, amplifies and re-images this information, and thus achieves the characterization of the microscopic morphology of the material. Scanning electron microscopy has many significant characteristics and advantages, so it is widely used in many fields. It is often used in the study of rock and soil, graphite, ceramics, and nanomaterials. In the field of biology, scanning electron microscopy also plays an important role and can observe the ultrastructure of the cell surface.
[0003] The prior art CN219370963U discloses a sample stage for a scanning electron microscope. When placing an irregular sample, the support plate can be moved inward, and then the sample is placed on the support plate, and then the height of the left and right lifting rods are adjusted, and then the height of the left and right support plates are adjusted, so that the inclination of the irregular sample can be changed, so that the flat surface of the irregular sample can face upward, which is convenient for the microscope to scan and observe the irregular sample.
[0004] However, the prior art has the following technical problems:
[0005] (1) Since the size of the irregular samples that need to be observed by the scanning electron microscope is generally small, it is difficult to adjust the angle of the irregular sample by directly adjusting the height of the stage, and it is also difficult to ensure that the observed surface of the irregular sample always remains horizontal.
[0006] (2) In the prior art, the steps for adjusting the angle of irregular samples are relatively complicated, which increases the difficulty of operation and reduces work efficiency.
[0007] Therefore, there is an urgent need for a scanning electron microscope stage suitable for detecting irregular samples to solve the technical problems existing in the prior art. Summary of the invention
[0008] The utility model overcomes the shortcomings of the prior art and provides a scanning electron microscope stage suitable for detecting irregular samples.
[0009] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a scanning electron microscope stage suitable for irregular sample detection, comprising: a control unit, a carrier, an elastic plate, and two groups of adjustment units both slidably connected to the carrier;
[0010] The adjustment unit includes: a slider, an adjustment plate, a first adjustment rod installed at one end of the adjustment plate, and a second adjustment rod abutting against the other end of the adjustment plate; a plurality of groups of equally spaced limiting grooves are provided at the abutment between the adjustment plate and the second adjustment rod, the first adjustment rod and the second adjustment rod are respectively located on the upper and lower sides of the elastic plate, the adjustment plate and the slider are connected by a support, the distance between the support and the first adjustment rod is greater than the distance between the support and the second adjustment rod, the displacement directions of the first adjustment rod and the second adjustment rod under the same time condition are opposite, and the elastic plate is made of soft material. Therefore, during the scanning process, the deformation of the elastic plate can be achieved by changing the relative positions of the first adjustment rod and the second adjustment rod, so that the observed surface of the irregular sample placed on the elastic plate is always kept horizontal, which is more convenient for observation.
[0011] In a preferred embodiment of the utility model, both sides of the carrier are provided with electric slide rails, the slider can slide in the electric slide rails, and the control unit is used to control the moving distance of the slider in the slide rails. Thus, the moving position of the slider can be controlled more accurately, thereby providing a certain limit on the deformation degree of the elastic plate. At the same time, the second adjustment rod installed on the slider can also play a good positioning effect on the observed sample, avoiding the sample from falling off due to tilting and tipping.
[0012] In a preferred embodiment of the utility model, a plurality of groups of limiting teeth are arranged on one side of the slider, a limiting convex plate capable of meshing with the limiting teeth is arranged on one side of the second adjustment rod, and a spring return member for changing the meshing condition between the limiting teeth and the limiting convex plate is arranged at the limiting convex plate. Thus, the second adjustment rod can be connected to the slider simply and conveniently through meshing, and at the same time, the displacement distance of the second adjustment rod can be kept equal each time, which is more conducive to fine-tuning the deformation of the elastic plate.
[0013] In a preferred embodiment of the utility model, the second adjustment rod is provided with a plurality of groups of fill-in mirrors arranged at equal distances, and anti-slip grooves are provided between each two adjacent groups of fill-in mirrors, so as to ensure that the sample has good light conditions during the observation process, and also provide support for the sample that has tipped over due to tilting, so as to prevent the sample from falling off the elastic plate.
[0014] In a preferred embodiment of the utility model, the outer sides of the first adjustment rod and the second adjustment rod are sleeved with anti-slip rod sleeves, so as to increase the friction between the adjustment rod and the elastic plate, thereby ensuring the deformation process of the elastic plate.
[0015] In a preferred embodiment of the present invention, the abutting ends of the first adjusting rod, the second adjusting rod and the elastic plate are all arc-shaped, thereby protecting the surface of the elastic plate and avoiding damage.
[0016] In a preferred embodiment of the utility model, the maximum inclination angle of the adjustment plate with the support as the fulcrum is 8-15°, so as to ensure the inclination angle of the sample to the greatest extent and avoid the sample from tipping over.
[0017] In a preferred embodiment of the present invention, the elastic plate is one of rubber, biocompatible material, silicone, and thermoplastic elastomer, so that it has good physical properties and is more suitable for use in experimental environments.
[0018] In a preferred embodiment of the utility model, fixing bolts for fixing the elastic plate are arranged on both sides of the object carrier, so as to ensure that the elastic plate is always kept in a tight state during use.
[0019] In a preferred embodiment of the utility model, the number of the limiting grooves is equal to that of the limiting teeth, and they correspond one to one, so that the meshing position of the second adjusting rod and the limiting teeth can be adjusted, thereby further expanding the adjustment range and widening the applicability of the device.
[0020] The utility model solves the defects existing in the background technology, and has the following beneficial effects:
[0021] (1) The utility model is provided with an elastic plate, an adjustment plate, a first adjustment rod, and a second adjustment rod. When in use, the elastic plate made of soft material can not only play a good shock-absorbing effect on the sample, but also effectively prevent the sample from being damaged; and the elastic plate made of soft material also has good deformation ability, so that under the clamping action of the first adjustment plate and the second adjustment plate, the horizontal angle of the elastic plate can be finely adjusted, so that the observed surface of the irregular sample placed on the elastic plate can always remain in a horizontal state, which is helpful for scanning observation of the electron microscope. Thereby solving the problem of difficulty in fine-tuning the angle of irregular samples in the prior art.
[0022] (2) In the present invention, since the distance between the second adjustment rod and the pillar is closer than the distance between the first adjustment rod and the pillar, the first adjustment rod and the second adjustment rod are provided at different distances from the pillar. According to the lever principle, since the distance between the second adjustment rod and the pillar is closer, its lever arm is shorter, so the second adjustment rod can generate a larger torque under a smaller force, thereby achieving fine adjustment of the elastic plate; since the distance between the first adjustment rod and the pillar is far, under the same force, the first adjustment rod is displaced a larger distance, thereby achieving rapid adjustment of the elastic plate, which not only improves work efficiency, but also greatly reduces the difficulty of operation, making the adjustment process more convenient and reliable. Thus, the technical problem of complicated operation steps in the prior art is solved.
[0023] (3) The utility model is provided with an elastic plate made of soft material, which can effectively reduce the heat conduction between the stage and the microscope during use, so that it is suitable for experimental conditions with high requirements on ambient temperature. In addition, the stage made of soft material can help operators place and adjust irregular samples due to its own soft properties, and can also reduce the impact of microscope vibration on the placement of irregular samples, thereby helping to improve stability and clarity during observation. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] The utility model is further described below in conjunction with the accompanying drawings and embodiments;
[0025] Figure 1 It is a schematic diagram of the structure of the object carrier of the utility model;
[0026] Figure 2 yes Figure 1 A schematic diagram of the structure enlargement at the center A;
[0027] Figure 3 yes Figure 1 A schematic diagram of the structure enlarged at B in the middle;
[0028] Figure 4 It is a schematic diagram of the structure of the elastic plate after fine-tuning by the adjustment unit.
[0029] In the figure: 1. Loading rack; 2. Elastic plate; 3. Fixing bolt; 4. Electric slide rail; 5. Sliding block; 5.1. Limiting teeth; 6. Adjusting plate; 6.1. First adjusting rod; 6.1.1. Anti-slip rod cover; 6.2. Limiting groove; 7. Second adjusting rod; 7.1. Limiting convex plate; 7.1.1. Spring return member; 7.2. Fill-in light mirror; 8. Support column. DETAILED DESCRIPTION
[0030] The present invention will now be further described in detail in conjunction with the accompanying drawings and embodiments. These drawings are simplified schematic diagrams that only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.
[0031] like Figure 1 As shown, a scanning electron microscope stage suitable for detecting irregular samples includes: a control unit, a carrier 1, an elastic plate 2, and two groups of adjustment units both slidably connected to the carrier 1.
[0032] like Figure 2 , 3 As shown, the adjustment unit includes: a slider 5, an adjustment plate 6, a first adjustment rod 6.1 installed at one end of the adjustment plate 6, and a second adjustment rod 7 abutting against the other end of the adjustment plate 6; a plurality of groups of equally spaced limiting grooves 6.2 are provided at the abutment between the adjustment plate 6 and the second adjustment rod 7, the first adjustment rod 6.1 and the second adjustment rod 7 are respectively located on the upper and lower sides of the elastic plate 2, the adjustment plate 6 and the slider 5 are connected by a support 8, the distance between the support 8 and the first adjustment rod 6.1 is greater than the distance between the support 8 and the second adjustment rod 7, the displacement directions of the first adjustment rod 6.1 and the second adjustment rod 7 under the same time condition are opposite, and the elastic plate 2 is made of a soft material. The elastic plate 2 is one of rubber, biocompatible material, silicone, and thermoplastic elastomer.
[0033] In one embodiment, the elastic plate 2 is preferably made of silicone. Since silicone is a material with good elasticity and flexibility, it can fit the curved surface of irregular samples well. At the same time, silicone also has high heat resistance and stable chemical properties, so it is suitable for observation in various environments.
[0034] Electric slide rails 4 are provided on both sides of the carrier, and a slider 5 can slide in the electric slide rails 4. The control unit is used to control the moving distance of the slider 5 on the slide rails 4. Multiple groups of limit teeth 5.1 are provided on one side of the slider 5, and a limit convex plate 7.1 that can mesh with the limit teeth 5.1 is provided on one side of the second adjustment rod 7. The limit convex plate 7.1 is provided with a spring return member 7.1.1 for changing the meshing condition between the limit teeth 5.1 and the limit convex plate 7.1. The second adjustment rod 7 is provided with multiple groups of fill-in mirrors 7.2 arranged at equal distances, and anti-slip grooves are provided between each two adjacent groups of fill-in mirrors 7.2.
[0035] like Figure 4 As shown, the outer sides of the first adjustment rod 6.1 and the second adjustment rod 7 are sleeved with anti-slip rod sleeves 6.1.1, and the abutting ends of the first adjustment rod 6.1, the second adjustment rod 7 and the elastic plate 2 are all arc-shaped. Both sides of the carrier 1 are provided with fixing bolts 3 for fixing the elastic plate 2. The number of the limiting grooves 6.2 and the limiting teeth 5.1 are equal and correspond one to one.
[0036] In a preferred embodiment, the maximum tilt angle of the adjustment plate 6 with the support 8 as the fulcrum is 8-15°, preferably 10°, so as to avoid the sample tipping over due to excessive angle adjustment while ensuring the angle adjustment of irregular samples.
[0037] When the utility model is used, an irregular sample is placed on the elastic plate 2, and then the control unit is used to adjust the position of the slider 5 on the electric slide rail 4 according to the plane of the sample to be observed, and then the second adjusting rod 7 at one end of the elastic plate 2 is pressed downward, thereby causing one end of the elastic plate 2 to deform downward. When the second adjusting rod 7 descends, due to the lever principle, the first adjusting rod 6.1 starts to move upward, thereby causing one end of the elastic plate 2 to deform upward. However, since the position of the second adjusting rod 7 from the support 8 is smaller than the distance between the first adjusting rod 6.1 and the support 8, the strength of the first adjusting rod 6.1 to cause the elastic plate 2 to deform is much lower than the strength of the second adjusting rod 7 to cause the elastic plate 8 to deform, thereby achieving fine-tuning of the deformation of the elastic plate 2.
[0038] The above is based on the ideal embodiment of the utility model. Through the above description, relevant personnel can make various changes and modifications without deviating from the technical concept of the utility model. The technical scope of this utility model is not limited to the content in the specification, and the technical scope must be determined according to the scope of the claims.
Claims
1. A scanning electron microscope stage suitable for detecting irregular samples, comprising: A control unit, a carrier (1), an elastic plate (2), and two sets of adjustment units both slidably connected to the carrier (1); characterized in that: The adjustment unit comprises: a slider (5), an adjustment plate (6), a first adjustment rod (6.1) mounted on one end of the adjustment plate (6), and a second adjustment rod (7) abutting against the other end of the adjustment plate (6); a plurality of groups of limit grooves (6.2) distributed at equal distances are provided at the abutment between the adjustment plate (6) and the second adjustment rod (7); the first adjustment rod (6.1) and the second adjustment rod (7) are respectively located on the upper and lower sides of the elastic plate (2); the adjustment plate (6) and the slider (5) are connected via a support column (8); the distance between the support column (8) and the first adjustment rod (6.1) is greater than the distance between the support column (8) and the second adjustment rod (7); the displacement directions of the first adjustment rod (6.1) and the second adjustment rod (7) are opposite under the same time condition; and the elastic plate (2) is made of a soft material.
2. A scanning electron microscope stage suitable for irregular sample detection according to claim 1, characterized in that: Electric slide rails (4) are provided on both sides of the object carrier, and the slider (5) can slide in the electric slide rails (4). The control unit is used to control the moving distance of the slider (5) on the slide rails (4).
3. The scanning electron microscope stage suitable for irregular sample detection according to claim 1, characterized in that: One side of the slider (5) is provided with a plurality of groups of limiting teeth (5.1), one side of the second adjusting rod (7) is provided with a limiting convex plate (7.1) capable of engaging with the limiting teeth (5.1), and the limiting convex plate (7.1) is provided with a spring return member (7.1.1) for changing the engagement condition between the limiting teeth (5.1) and the limiting convex plate (7.1).
4. The scanning electron microscope stage suitable for irregular sample detection according to claim 1, characterized in that: The second adjustment rod (7) is provided with a plurality of groups of fill-in mirrors (7.2) arranged at equal distances, and anti-slip grooves are provided between each two adjacent groups of fill-in mirrors (7.2).
5. The scanning electron microscope stage suitable for irregular sample detection according to claim 1, characterized in that: The outer sides of the first adjustment rod (6.1) and the second adjustment rod (7) are both sleeved with anti-slip rod sleeves (6.1.1).
6. The scanning electron microscope stage suitable for irregular sample detection according to claim 1, characterized in that: The abutting ends of the first adjusting rod (6.1), the second adjusting rod (7) and the elastic plate (2) are all arc-shaped.
7. The scanning electron microscope stage suitable for irregular sample detection according to claim 1, characterized in that: The maximum inclination angle of the adjustment plate (6) with the support (8) as a fulcrum is 8 to 15 degrees.
8. The scanning electron microscope stage suitable for irregular sample detection according to claim 1, characterized in that: The elastic plate is one of rubber, biocompatible material, silicone and thermoplastic elastomer.
9. The scanning electron microscope stage suitable for irregular sample detection according to claim 1, characterized in that: Fixing bolts (3) for fixing the elastic plate (2) are arranged on both sides of the object carrier (1).
10. The scanning electron microscope stage suitable for irregular sample detection according to claim 1, characterized in that: The number of the limiting grooves (6.2) and the number of the limiting teeth (5.1) are equal and correspond one to one.
Citation Information
Patent Citations
Sample stage of scanning electron microscope
CN219370963U