Chip ultrapure water terminal precision processing equipment
By designing the chip's ultra-pure water terminal fine treatment equipment, and using mechanical structure to clamp and fix the chip, the problem of the chip flying when rotating at high speed is solved, its stability is improved, and the stability of the ultra-pure water treatment is ensured.
Patent Information
- Application Number
- CN202323260275.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-01
- Publication Date
- 2024-12-24
- Estimated Expiration
- 2033-12-01
AI Technical Summary
During the ultra-pure water treatment of the chip, the chip is easily swung when it rotates at high speed, resulting in poor stability.
A chip ultrapure water terminal fine treatment device is designed, by setting up inner ring, outer ring, bolt, drive device, clamping mechanism, fixing device and support device, using electric push rod, arc rod, driving rod and rubber pad The chip is clamped and fixed by other mechanical structures to improve stability.
It effectively avoids the chip flying when rotating at high speed, improves its stability, and allows the chip to undergo ultra-pure water treatment stably during the processing process.
Smart Images
Figure CN222233612U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chip processing, in particular to a chip ultrapure water terminal fine processing equipment. Background Art
[0002] The demand for ultrapure water used in the manufacture of automotive silicon carbide chips and its requirements will also increase accordingly. Ultrapure water, also known as UP water, refers to water with a resistivity of 18MΩ*cm (25°C). This water contains almost no impurities except water molecules, and no organic matter such as bacteria, viruses, and chlorinated dioxins, and of course no mineral trace elements required by the human body. In other words, it is water from which almost all atoms except oxygen and hydrogen have been removed.
[0003] When the chip is being processed with ultrapure water, the chip is placed on a turntable, which then drives the chip to rotate and add ultrapure water to the chip for processing.
[0004] However, if the chip is placed directly on the turntable, the chip is easily thrown away when the turntable rotates at high speed, and the chip has poor stability. Utility Model Content
[0005] In order to solve the above technical problems, the utility model provides a chip ultrapure water terminal fine processing equipment which can clamp and fix the chip by setting this device, thereby improving its stability and avoiding the chip from being thrown off the machine body due to high-speed rotation.
[0006] The utility model discloses a chip ultrapure water terminal fine processing equipment, comprising a machine body, two groups of bolts, an inner ring, an outer ring, a driving device, a clamping mechanism, a fixing device and a supporting device, the front and rear parts of the inner ring and the outer ring are both connected and provided with threaded holes, the inner ring and the outer ring are respectively sleeved on the outside of the machine body, the two groups of bolts are respectively threadedly connected with the front threaded holes and the rear threaded holes of the inner ring and the outer ring, the driving device is mounted on the machine body, the driving device is connected with the inner ring and the outer ring, the clamping mechanism is mounted on the driving device, the clamping mechanism is cooperatively connected with the machine body, the fixing device is mounted on the clamping mechanism, and the supporting device is mounted on the driving device; the driving device comprises two groups of electric push rods , a collar, four groups of sliders, four groups of constraint shafts, four groups of arc-shaped rods and four groups of driving rods, the two groups of electric push rods are respectively installed on the upper part of the front end and the rear end of the machine body, the collar is installed on the output end of the two groups of electric push rods, the collar is sleeved on the outside of the machine body, the front and rear sides of the bottom end of the collar are provided with slide grooves, the four groups of sliders slide on the two groups of slide grooves at the bottom end of the collar respectively, the four groups of constraint shafts are respectively installed on the lower left and lower right sides of the front end and the rear end of the machine body, the four groups of arc-shaped rods are rotatably installed on the four groups of constraint shafts, the top ends of the four groups of arc-shaped rods are rotatably connected with the bottom ends of the four groups of sliders, the bottom ends of the four groups of arc-shaped rods are rotatably connected with the top ends of the four groups of driving rods, and the inner ends of each group of driving rods are rotatably provided with a first connecting rod , multiple groups of first connecting rods are rotatably connected to the outer ends of the inner ring and the outer ring respectively, the supporting device is installed on the two groups of driving rods, and the clamping mechanism is installed on the collar; the clamping mechanism includes four groups of second connecting rods, two groups of placement plates and four groups of third connecting rods, the four groups of second connecting rods are respectively installed on the left front side, left rear side, right front side and right rear side of the top of the collar, the two groups of placement plates are rotatably installed on the left and right sides of the top of the body respectively, the bottom ends of the four groups of third connecting rods are rotatably connected to the top ends of the four groups of second connecting rods, and the fixing device is installed on the two groups of placement plates; the fixing device includes two groups of rubber pads, two groups of first springs and two groups of top blocks, the two groups of rubber pads are respectively installed on the inner ends of the two groups of top blocks, and the two groups of placement plates are respectively installed on the inner ends of the two groups of Sliding grooves are provided inside the mounting plates, two groups of first springs are installed in the two groups of sliding grooves, the outer ends of the two groups of top blocks are connected to the two groups of first springs, the inner ends of the two groups of sliding grooves are connected and provided with sliding holes, and the two groups of top blocks slide in the sliding holes of the two groups of sliding grooves; the supporting device includes four groups of second springs, four groups of sliding rods and four groups of rollers, the bottom ends of the four groups of driving rods are provided with telescopic grooves, the four groups of sliding rods are respectively slidably connected to the telescopic grooves of the four groups of driving rods, the four groups of second springs are respectively sleeved on the outsides of the four groups of sliding rods, the top ends of the four groups of second springs are connected to the bottom ends of the four groups of driving rods, the bottom ends of the four groups of second springs are connected to the bottoms of the four groups of sliding rods, and the four groups of rollers are respectively rotatably installed at the bottom ends of the four groups of sliding rods.
[0007] Compared with the prior art, the beneficial effects of the utility model are as follows: the inner ring and the outer ring are put on the outside of the machine body, and then the two sets of bolts are threadedly connected with the front threaded holes and the rear threaded holes of the inner ring and the outer ring respectively, so as to fix the inner ring and the outer ring on the machine body, and then the driving device is turned on, and the driving device drives the clamping mechanism and the supporting device to move, the clamping mechanism moves inward, and the chip is placed on the clamping mechanism, the fixing device clamps and fixes the chip, and the supporting device moves downward to support the machine body. By setting this device, the chip can be clamped and fixed, which improves its stability, thereby preventing it from flying off on the machine body due to high-speed rotation. BRIEF DESCRIPTION OF THE DRAWINGS
[0008] Figure 1 It is a structural schematic diagram of the utility model;
[0009] Figure 2 yes Figure 1 A schematic diagram of a top view structure;
[0010] Figure 3 yes Figure 1 A is a schematic diagram of the enlarged structure of the middle part;
[0011] Figure 4 yes Figure 1 Schematic diagram of the enlarged structure of B;
[0012] Markings in the attached drawings: 1. body; 2. bolt; 3. inner ring; 4. outer ring; 5. electric push rod; 6. collar; 7. slider; 8. constraint shaft; 9. arc rod; 10. driving rod; 11. first connecting rod; 12. second connecting rod; 13. placement plate; 14. third connecting rod; 15. rubber pad; 16. sliding groove; 17. first spring; 18. top block; 19. second spring; 20. slide rod; 21. roller. DETAILED DESCRIPTION
[0013] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0014] like Figures 1 to 4As shown, a chip ultrapure water terminal fine processing equipment of the utility model comprises a body 1, two groups of bolts 2, an inner ring 3, an outer ring 4, a driving device, a clamping mechanism, a fixing device and a supporting device. The front and rear parts of the inner ring 3 and the outer ring 4 are connected and provided with threaded holes. The inner ring 3 and the outer ring 4 are respectively sleeved on the outside of the body 1. The two groups of bolts 2 are respectively threadedly connected with the front threaded holes and the rear threaded holes of the inner ring 3 and the outer ring 4. The driving device is installed on the body 1, the driving device is connected to the inner ring 3 and the outer ring 4, the clamping mechanism is installed on the driving device, the clamping mechanism is connected to the body 1, the fixing device is installed on the clamping mechanism, and the supporting device is installed on the driving device; the driving device comprises two groups of electric push rods 5, a collar 6, four groups of slide blocks 7, and four groups of Constraint shaft 8, four groups of arc-shaped rods 9 and four groups of driving rods 10, two groups of electric push rods 5 are respectively installed on the upper part of the front end and the rear end of the body 1, the collar 6 is installed on the output end of the two groups of electric push rods 5, the collar 6 is sleeved on the outside of the body 1, and the front and rear sides of the bottom of the collar 6 are provided with slide grooves, and the four groups of sliders 7 slide on the two groups of slide grooves at the bottom of the collar 6 respectively. The four groups of constraint shafts 8 are respectively installed on the lower left and lower right sides of the front and rear ends of the body 1, and the four groups of arc-shaped rods 9 are rotatably installed on the four groups of constraint shafts 8. The top ends of the four groups of arc-shaped rods 9 are rotatably connected to the bottom ends of the four groups of sliders 7, and the bottom ends of the four groups of arc-shaped rods 9 are rotatably connected to the top ends of the four groups of driving rods 10. The inner ends of each group of driving rods 10 are rotatably provided with a first connecting rod 11, and multiple groups of first connecting rods 11 are respectively connected to the inner ring 3 and the outer ring 3. The outer end of the ring 4 is rotatably connected, the supporting device is installed on the two groups of driving rods 10, and the clamping mechanism is installed on the collar 6; the clamping mechanism includes four groups of second connecting rods 12, two groups of placement plates 13 and four groups of third connecting rods 14, the four groups of second connecting rods 12 are respectively installed on the left front side, left rear side, right front side and right rear side of the top of the collar 6, the two groups of placement plates 13 are rotatably installed on the left and right sides of the top of the body 1, the bottom ends of the four groups of third connecting rods 14 are rotatably connected with the top ends of the four groups of second connecting rods 12, and the fixing device is installed on the two groups of placement plates 13; the fixing device includes two groups of rubber pads 15, two groups of first springs 17 and two groups of top blocks 18, the two groups of rubber pads 15 are respectively installed on the inner ends of the two groups of top blocks 18, and the two groups of placement plates 13 are provided with sliding grooves 1 6. Two groups of first springs 17 are installed in two groups of sliding grooves 16. The outer ends of two groups of top blocks 18 are connected to the two groups of first springs 17. The inner ends of the two groups of sliding grooves 16 are connected to each other and provided with sliding holes. The two groups of top blocks 18 slide in the sliding holes of the two groups of sliding grooves 16. The supporting device includes four groups of second springs 19, four groups of slide bars 20 and four groups of rollers 21. The bottom ends of the four groups of driving rods 10 are provided with telescopic grooves. The four groups of slide bars 20 are respectively slidably connected with the telescopic grooves of the four groups of driving rods 10. The four groups of second springs 19 are respectively sleeved on the outside of the four groups of slide bars 20. The top ends of the four groups of second springs 19 are connected to the bottom ends of the four groups of driving rods 10. The bottom ends of the four groups of second springs 19 are connected to the bottoms of the four groups of slide bars 20. The four groups of rollers 21 are respectively rotatably installed at the bottom ends of the four groups of slide bars 20.
[0015] The inner ring 3 and the outer ring 4 are put on the outside of the body 1, and then the two sets of bolts 2 are threadedly connected with the front threaded holes and the rear threaded holes of the inner ring 3 and the outer ring 4 respectively, so as to fix the inner ring 3 and the outer ring 4 on the body 1, and then the driving device is turned on, and the driving device drives the clamping mechanism and the supporting device to move, and the clamping mechanism moves inward, and the chip is placed on the clamping mechanism, and the fixing device clamps and fixes the chip, and the supporting device moves downward to support the body 1. By setting up this device, the chip can be clamped and fixed, which improves its stability, thereby preventing it from flying off the body 1 due to high-speed rotation.
[0016] By setting the electric push rod 5, the collar 6, the slider 7, the constraint shaft 8, the arc rod 9, the driving rod 10 and the first connecting rod 11, by opening the two groups of electric push rods 5, the two groups of electric push rods 5 drive the collar 6 to move upward, and the collar 6 drives the clamping mechanism to move inward. While the collar 6 moves upward, the four groups of sliders 7 slide on the two groups of slide grooves of the collar 6, and the four groups of sliders 7 make the four groups of arc rods 9 drive the four groups of driving rods 10 to move downward under the constraints of the four groups of constraint shafts 8. The four groups of driving rods 10 enable the supporting device to support and stabilize the body 1 as a whole, so as to provide power to the clamping mechanism and the supporting device.
[0017] By setting the second connecting rod 12, the placement plate 13 and the third connecting rod 14, the ring 6 drives the two groups of placement plates 13 to move inward through four groups of second connecting rods 12 and four groups of third connecting rods 14, and then the chip is placed on the two groups of placement plates 13, and the fixing device clamps and fixes the placement plates 13 to play a role in limiting the chip clamping.
[0018] By arranging the rubber pad 15, the sliding groove 16, the first spring 17 and the top block 18, the chip is placed on the two sets of placement plates 13, and the two sets of top blocks 18 clamp and fix the chip under the thrust of the two sets of first springs 17, thereby playing the role of clamping and fixing the chip.
[0019] By setting the second spring 19, the sliding rod 20 and the roller 21, the four groups of driving rods 10 drive the four groups of rollers 21 to move downward under the constraints of the multiple groups of first connecting rods 11. When the four groups of rollers 21 contact the desktop, the four groups of sliding rods 20 slide in the four groups of driving rods 10, the four groups of second springs 19 are elastically deformed, and the four groups of rollers 21 support the body 1 as a whole, thereby supporting the body 1 as a whole and improving the stability of the body 1.
[0020] The utility model discloses a chip ultrapure water terminal fine processing equipment. When it is working, firstly, the inner ring 3 and the outer ring 4 are sleeved on the outside of the machine body 1, and then the two groups of bolts 2 are respectively threadedly connected with the front threaded holes and the rear threaded holes of the inner ring 3 and the outer ring 4, so as to fix the inner ring 3 and the outer ring 4 on the machine body 1, and then the two groups of electric push rods 5 are opened, and the two groups of electric push rods 5 drive the sleeve ring 6 to move upward, and the sleeve ring 6 drives the two groups of placement plates 13 to move inward through the four groups of second connecting rods 12 and the four groups of third connecting rods 14, and then the chip is placed on the two groups of placement plates 13, and the two groups of top blocks 18 are placed on the two groups of top blocks 18. The chip is clamped and fixed under the thrust of the first spring 17. When the collar 6 moves upward, the four sliders 7 slide on the two slide grooves of the collar 6. The four sliders 7 make the four arc rods 9 drive the four driving rods 10 to move downward under the constraints of the four constraint shafts 8. The four driving rods 10 drive the four rollers 21 to move downward under the constraints of the multiple first connecting rods 11. When the four rollers 21 contact the desktop, the four sliders 20 slide in the four driving rods 10, the four second springs 19 are elastically deformed, and the four rollers 21 support the body 1 as a whole.
[0021] The installation method, connection method or setting method of a chip ultrapure water terminal fine treatment equipment of the utility model are all common mechanical methods, and can be implemented as long as they can achieve their beneficial effects; the electric push rod 5 of the chip ultrapure water terminal fine treatment equipment of the utility model is purchased on the market, and technicians in this industry only need to install and operate it according to the accompanying instruction manual.
[0022] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.
Claims
1. A chip ultrapure water terminal fine processing equipment, characterized in that: The invention comprises a machine body (1), two groups of bolts (2), an inner ring (3), an outer ring (4), a driving device, a clamping mechanism, a fixing device and a supporting device. The front and rear parts of the inner ring (3) and the outer ring (4) are both connected and provided with threaded holes. The inner ring (3) and the outer ring (4) are respectively sleeved on the outside of the machine body (1). The two groups of bolts (2) are respectively threadedly connected to the front threaded holes and the rear threaded holes of the inner ring (3) and the outer ring (4). The driving device is mounted on the machine body (1). The driving device is connected to the inner ring (3) and the outer ring (4). The clamping mechanism is mounted on the driving device. The clamping mechanism is cooperatively connected to the machine body (1). The fixing device is mounted on the clamping mechanism. The supporting device is mounted on the driving device. The driving device comprises two The machine body (1) comprises a plurality of electric push rods (5), a collar (6), four groups of slide blocks (7), four groups of constraint shafts (8), four groups of arc-shaped rods (9) and four groups of driving rods (10). The two groups of electric push rods (5) are respectively mounted on the upper part of the front end and the rear end of the machine body (1). The collar (6) is mounted on the output end of the two groups of electric push rods (5). The collar (6) is sleeved on the outside of the machine body (1). The front side and the rear side of the bottom end of the collar (6) are both provided with slide grooves. The four groups of slide blocks (7) slide on the two groups of slide grooves at the bottom end of the collar (6). The four groups of constraint shafts (8) are respectively mounted on the lower left side and the lower right side of the front end and the rear end of the machine body (1). The four groups of arc-shaped rods (9) are rotatably mounted on the four groups of constraint shafts (8). The top ends of the four groups of arc-shaped rods (9) are connected to the four groups of slide blocks. The bottom end of the block (7) is rotatably connected, the bottom ends of the four groups of arc-shaped rods (9) are rotatably connected to the top ends of the four groups of driving rods (10), the inner ends of each group of driving rods (10) are rotatably provided with a first connecting rod (11), and the multiple groups of first connecting rods (11) are rotatably connected to the outer ends of the inner ring (3) and the outer ring (4), respectively. The supporting device is installed on the two groups of driving rods (10), and the clamping mechanism is installed on the sleeve ring (6); the clamping mechanism includes four groups of second connecting rods (12), two groups of placement plates (13) and four groups of third connecting rods (14), the four groups of second connecting rods (12) are respectively installed on the left front side, the left rear side, the right front side and the right rear side of the top end of the sleeve ring (6), and the two groups of placement plates (13) are respectively rotatably installed on the left side of the top end of the machine body (1). On the side and right side, the bottom ends of the four groups of third connecting rods (14) are rotatably connected to the top ends of the four groups of second connecting rods (12), and the fixing device is installed on the two groups of placement plates (13); the fixing device comprises two groups of rubber pads (15), two groups of first springs (17) and two groups of top blocks (18), the two groups of rubber pads (15) are respectively installed on the inner ends of the two groups of top blocks (18), the two groups of placement plates (13) are both provided with sliding grooves (16), the two groups of first springs (17) are installed in the two groups of sliding grooves (16), the outer ends of the two groups of top blocks (18) are connected to the two groups of first springs (17), the inner ends of the two groups of sliding grooves (16) are both connected and provided with sliding holes, and the two groups of top blocks (18) slide in the sliding holes of the two groups of sliding grooves (16);The supporting device comprises four groups of second springs (19), four groups of slide bars (20) and four groups of rollers (21). The bottom ends of the four groups of driving rods (10) are all provided with telescopic grooves. The four groups of slide bars (20) are respectively slidably connected to the telescopic grooves of the four groups of driving rods (10). The four groups of second springs (19) are respectively sleeved on the outside of the four groups of slide bars (20). The top ends of the four groups of second springs (19) are connected to the bottom ends of the four groups of driving rods (10). The bottom ends of the four groups of second springs (19) are connected to the bottom ends of the four groups of slide bars (20). The four groups of rollers (21) are respectively rotatably mounted on the bottom ends of the four groups of slide bars (20).