Flying dust discharging device

Abstract

The utility model provides a raised dust discharging device. The raised dust discharging device comprises a liquid sealing pipe, a liquid supply unit, an exhaust unit, an air inlet pipe and a liquid discharging valve, the liquid seal pipe comprises an air suction section, a bent section and an exhaust section which are communicated in sequence, the drain valve is communicated with the bent section, and the exhaust unit is communicated with the exhaust section; the liquid supply unit is communicated with the liquid sealing pipe; one end of the air inlet pipe is communicated with the exhaust section, and the other end of the air inlet pipe is a free end. Flying dust in a to-be-cleaned cavity can be pumped out through the exhaust unit, the flying dust can be dissolved in a solvent in the liquid sealing pipe in the pumping-out process, and the liquid supply unit can provide the solvent to clean a pipeline of the device and supply the solvent into the liquid sealing pipe. The air inlet pipe can convey air to the exhaust section of the liquid seal pipe so as to adjust the air pressure difference between the air suction section and the exhaust section of the liquid seal pipe, and unexpected effects are that deposits are not easy to form in the pipeline of the device, and the solvent in the liquid seal pipe can also effectively avoid reverse spraying of raised dust.

Description

Technical Field

[0001] The utility model relates to the technical field of dust control, in particular to a dust discharge device. Background Art

[0002] The photoresist film is formed by spraying the photoresist on the wafer surface through a coating machine and then rotating the wafer at high speed. During the high-speed rotation of the wafer, excess photoresist will be thrown out of the wafer surface and fall into the coating chamber to form particles. The particles are driven by the high-speed rotation of the wafer to form dust. If the dust falls on the wafer surface, it will form film defects.

[0003] In order to remove the dust in the coating chamber, two devices are currently used. The first is a spray device, which eliminates dust by spraying solvents. However, the solvent will change the temperature and humidity in the coating chamber and cannot be used in semiconductor processing that requires high temperature and humidity. The second is an exhaust device, which extracts the dust in the coating chamber through exhaust equipment. However, since the extracted gas contains liquid and solid components, the liquid and solid components gradually adhere to and accumulate in the pipeline of the exhaust device to form deposits. If there are too many deposits, the pipeline will be blocked and turbulence will be formed. In severe cases, dust will be sprayed back, affecting the quality of the wafer. Utility Model Content

[0004] The utility model provides a dust discharging device to solve the technical problem that accumulation is easily formed in the pipeline of the existing exhaust and suction device.

[0005] In order to solve the above technical problems, the utility model provides a dust discharge device, including a liquid sealing pipe, a liquid supply unit, an exhaust unit, an air inlet pipe and a liquid discharge valve;

[0006] The liquid sealing pipe comprises an air suction section, a bending section and an air discharge section which are connected in sequence, the liquid discharge valve is connected to the bending section, and the air discharge unit is connected to the air discharge section;

[0007] The liquid supply unit is in communication with the liquid sealing tube;

[0008] One end of the air inlet pipe is communicated with the exhaust section, and the other end is a free end.

[0009] Optionally, the liquid supply unit includes a liquid supply box, a liquid supply pipe and a liquid supply valve, the liquid supply box, the liquid supply pipe and one end of the liquid supply valve are connected in sequence, and the other end of the liquid supply valve is connected to one end of the air inlet pipe.

[0010] Optionally, the other end of the liquid supply valve is also connected to a side of the curved section close to the air suction section.

[0011] Optionally, a one-way valve is provided between one end of the air inlet pipe and the exhaust section, and a flow direction of the one-way valve is a direction from one end of the air inlet pipe to the exhaust section.

[0012] Optionally, the curved section is a U-shaped tube.

[0013] Optionally, the U-shaped tube is placed vertically, and the drain valve is connected to the bottom of the U-shaped tube.

[0014] Optionally, the device further includes a particle concentration detector and a programmable logic controller, and the particle concentration detector and the programmable logic controller are electrically connected.

[0015] Optionally, the liquid supply unit and the exhaust unit both include electrically controlled valves, the liquid discharge valves are electrically controlled valves, and each of the electrically controlled valves is electrically connected to the programmable logic controller.

[0016] Optionally, an air filter is provided in the air intake pipe.

[0017] Optionally, the device further comprises a purification box, and the drain valve is arranged between the curved section and the purification box.

[0018] The utility model provides a dust discharge device, including a liquid seal pipe, a liquid supply unit, an exhaust unit, an air inlet pipe and a liquid discharge valve. The exhaust unit can be used to extract dust from the cavity to be cleaned. The dust can be dissolved in the solvent in the liquid seal pipe during the extraction process. The liquid supply unit can provide solvent to clean the pipeline of the device and replenish the solvent into the liquid seal pipe. The air inlet pipe can transport air to the exhaust section of the liquid seal pipe to adjust the air pressure difference between the suction section and the exhaust section of the liquid seal pipe. Combined with the deadweight of the liquid column of the solvent, a pressure balance state can be achieved, thereby keeping the solvent in the rear end of the curved section. The unexpected effect is that it is not easy to form deposits in the pipeline of the device, and the solvent in the liquid seal pipe can also effectively avoid dust backspray, so that the dust discharge device and the cavity to be cleaned can operate normally for a longer time. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of a dust discharge device provided in one embodiment of the utility model.

[0020] Figure 2 yes Figure 1 Schematic diagram of the structure when the liquid seal tube in FIG. 1 is filled with solvent.

[0021] Figure 3 The utility model is a schematic structural diagram of a dust exhaust device provided by an embodiment of the utility model during exhaust.

[0022] [Description of reference numerals is as follows]:

[0023] Liquid sealing tube-1, liquid supply unit-2, exhaust unit-3, air inlet pipe-4, drain valve-5, check valve-6, particle concentration detector-7, programmable logic controller-8, solvent-9, gas-10;

[0024] Intake section-11, bending section-12, exhaust section-13;

[0025] Cavities to be cleaned - 20. DETAILED DESCRIPTION

[0026] In order to make the purpose, advantages and features of the utility model clearer, a dust discharge device proposed by the utility model is further described in detail below in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model.

[0027] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0028] like Figure 1 As shown, the utility model provides a dust discharge device, including a liquid seal pipe 1, a liquid supply unit 2, an exhaust unit 3, an air inlet pipe 4 and a liquid discharge valve 5; the liquid seal pipe 1 includes an air intake section 11, a curved section 12 and an exhaust section 13 connected in sequence, the liquid discharge valve 5 is connected to the curved section 12, the exhaust unit 3 is connected to the exhaust section 13; the liquid supply unit 2 is connected to the liquid seal pipe 1; one end of the air inlet pipe 4 is connected to the exhaust section 13, and the other end is a free end. Among them, the exhaust unit 3 can be a device such as an exhaust fan or an exhaust fan.

[0029] like Figure 1-Figure 3 As shown, Figure 3 The arrows in the middle pipeline indicate the flow direction of the gas 10 and the air. The method of use and the working principle of the device are as follows: the suction section 11 of the liquid sealing tube 1 is connected to the cavity 20 to be cleaned. The cavity 20 to be cleaned can be a uniform glue cavity or other cavity with dust; Figure 2 As shown, when the device is in a non-working state, the liquid supply unit 2 injects a certain amount of solvent 9 into the liquid sealing tube 1, and the liquid levels on both sides of the solvent 9 in the liquid sealing tube 1 are flush, which plays a liquid sealing effect. The solvent 9 can be water or a mixed liquid. The solvent 9 is used to dissolve dust, such as dissolving photoresist, to prevent dust from adhering and accumulating in the pipeline of the device to form deposits; Figure 3As shown, when the device is in working state, the liquid supply unit 2 is closed, the exhaust unit 3 is opened, the pressure on one side of the exhaust section 13 is reduced, the pressure difference between the suction section 11 and the exhaust section 13 causes the solvent 9 to move to the exhaust section 13, and the liquid level at the rear end of the curved section 12 gradually rises. The air inlet pipe 4 supplies air to the exhaust section 13 to control the pressure of the exhaust section 13, so as to avoid the pressure difference between the suction section 11 and the exhaust section 13 being too large and causing the solvent 9 to be directly sucked away. The pressure difference between the suction section 11 and the exhaust section 13 is stabilized in a set range, and combined with the deadweight of the liquid column of the solvent 9, the pressure can reach The gas 10 in the cavity 20 to be cleaned passes through the solvent 9 in the liquid sealing tube 1 and is discharged from the exhaust unit 3, and part or all of the dust is dissolved in the solvent 9 in the liquid sealing tube 1; the exhaust unit 3 is closed after running for a period of time, the drain valve 5 is opened to discharge the solvent 9 in the liquid sealing tube 1, and the liquid supply unit 2 is opened, and the dust in the pipeline is cleaned with the solvent 9 output by the liquid supply unit 2; the drain valve 5 is closed to allow a certain amount of solvent 9 to remain in the liquid sealing tube 1, and the liquid supply unit 2 is closed, and the dust discharge process is completed.

[0030] The present embodiment provides a dust discharge device, comprising a liquid seal pipe 1, a liquid supply unit 2, an exhaust unit 3, an air inlet pipe 4 and a liquid discharge valve 5. The exhaust unit 3 can be used to extract dust from the cavity 20 to be cleaned. The dust can be dissolved in the solvent 9 in the liquid seal pipe 1 during the extraction process. The liquid supply unit 2 can provide solvent 9 to clean the pipeline of the device and replenish solvent 9 into the liquid seal pipe 1. The air inlet pipe 4 can transport air to the exhaust section 13 of the liquid seal pipe 1 to adjust the air pressure difference between the suction section 11 and the exhaust section 13 of the liquid seal pipe 1. Combined with the deadweight of the liquid column of the solvent 9, a pressure balance state can be achieved, thereby keeping the solvent 9 in the rear end of the curved section 12. The unexpected effect is that it is not easy to form deposits in the pipeline of the device, and the solvent 9 in the liquid seal pipe 1 can also effectively prevent dust from back-spraying. The dust discharge device and the cavity 20 to be cleaned can operate normally for a longer time.

[0031] Optional, reference Figure 1 and Figure 3 As shown, the liquid supply unit 2 includes a liquid supply box, a liquid supply pipe and a liquid supply valve. The liquid supply box, the liquid supply pipe and one end of the liquid supply valve are connected in sequence, and the other end of the liquid supply valve is connected to one end of the air intake pipe 4. The liquid supply box can store pipelines for cleaning the device and solvent 9 supplied to the liquid seal pipe 1. The other end of the liquid supply valve is connected to one end of the air intake pipe 4, so that the solvent 9 in the liquid supply box can enter the exhaust section 13 of the liquid seal pipe 1 from one end of the air intake pipe 4, and then enter the curved section 12 of the liquid seal pipe 1. In other embodiments, if the solvent 9 is water, the liquid supply box can be omitted, and the liquid supply pipe can be directly connected to the water supply pipeline in the workshop.

[0032] Optional, reference Figure 1 and Figure 3 As shown, the other end of the liquid supply valve is also connected to the side of the curved section 12 close to the air suction section 11. When the solvent 9 in the liquid supply tank flows from the liquid supply valve into the side of the curved section 12 close to the air suction section 11, the inner wall of the curved section 12 close to the air suction section 11 can be cleaned to prevent the formation of deposits on the inner wall of the curved section 12 close to the air suction section 11.

[0033] Optional, such as Figure 1 and Figure 3 As shown, a one-way valve 6 is provided between one end of the air inlet pipe 4 and the exhaust section 13, and the flow direction of the one-way valve 6 is the direction from one end of the air inlet pipe 4 to the exhaust section 13. The one-way valve 6 can prevent the solvent 9 in the liquid sealing tube 1 from entering the exhaust pipe and affecting the ventilation effect of the air inlet pipe 4.

[0034] Optional, such as Figure 1 As shown, the curved section 12 is a U-shaped tube. The U-shaped tube has a liquid storage function and can be used as the curved section 12 of the liquid sealing tube 1. In other embodiments, the curved section 12 can be a W-shaped tube or a pipeline of other shapes.

[0035] Optional, such as Figure 3 As shown, the U-shaped tube is placed vertically, and the drain valve 5 is connected to the bottom of the U-shaped tube. The drain valve 5 is connected to the bottom of the U-shaped tube, so that the solvent 9 in the U-shaped tube can be completely discharged and then the solvent 9 can be replaced. In other embodiments, the drain valve 5 can be connected to a position close to the bottom of the U-shaped tube.

[0036] Optional, such as Figure 3 As shown, the device further includes a particle concentration detector 7 and a programmable logic controller 8, and the particle concentration detector 7 and the programmable logic controller 8 are electrically connected. The particle concentration detector 7 can be installed in the cavity 20 to be cleaned, and when the particle concentration detector 7 detects that the particle concentration in the cavity 20 to be cleaned is greater than a threshold value, a start signal can be sent to the programmable logic controller 8, and the programmable logic controller 8 drives the device to operate according to the start signal.

[0037] Optional, such as Figure 3 As shown, the liquid supply unit 2 and the exhaust unit 3 both include an electrically controlled valve, the liquid discharge valve 5 is an electrically controlled valve, and each of the electrically controlled valves is electrically connected to the programmable logic controller 8. The programmable logic controller 8 can realize the function of automatically cleaning dust by driving each electrically controlled valve to open or close.

[0038] Optional, reference Figure 3 As shown, an air filter is arranged in the air intake pipe 4. The air filter can filter out particulate matter in the air to prevent the air intake pipe 4 from being blocked.

[0039] Optional, reference Figure 1 and Figure 3 As shown, the device further includes a purification box, and the drain valve 5 is arranged between the curved section 12 and the purification box. The purification box can store and purify the solvent 9 discharged from the liquid sealing tube 1 to prevent environmental pollution. In other embodiments, if there is a waste liquid treatment device in the workshop, the drain valve 5 can be connected to the waste liquid treatment device through a pipeline.

[0040] In summary, the utility model provides a dust exhaust device, including a liquid seal pipe 1, a liquid supply unit 2, an exhaust unit 3, an air inlet pipe 4 and a drain valve 5. The dust in the cavity 20 to be cleaned can be extracted through the exhaust unit 3. The dust can be dissolved in the solvent 9 in the liquid seal pipe 1 during the extraction process. The liquid supply unit 2 can provide solvent 9 to clean the pipeline of the device and replenish the solvent 9 into the liquid seal pipe 1. The air inlet pipe 4 can transport air to the exhaust section 13 of the liquid seal pipe 1 to adjust the air pressure difference between the suction section 11 and the exhaust section 13 of the liquid seal pipe 1. Combined with the deadweight of the liquid column of the solvent 9, a pressure balance state can be achieved, thereby keeping the solvent 9 in the rear end of the curved section 12. The unexpected effect is that it is not easy to form deposits in the pipeline of the device, and the solvent 9 in the liquid seal pipe 1 can also effectively avoid dust backspray, and the dust exhaust device and the cavity 20 to be cleaned can operate normally for a longer time.

[0041] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. A dust discharge device, characterized in that: It includes a liquid sealing pipe, a liquid supply unit, an exhaust unit, an air inlet pipe and a liquid discharge valve; The liquid sealing pipe comprises an air suction section, a bending section and an air discharge section which are connected in sequence, the liquid discharge valve is connected to the bending section, and the air discharge unit is connected to the air discharge section; The liquid supply unit is in communication with the liquid sealing tube; One end of the air inlet pipe is communicated with the exhaust section, and the other end is a free end.

2. A dust discharge device according to claim 1, characterized in that: The liquid supply unit comprises a liquid supply box, a liquid supply pipe and a liquid supply valve. The liquid supply box, the liquid supply pipe and one end of the liquid supply valve are connected in sequence, and the other end of the liquid supply valve is connected to one end of the air intake pipe.

3. A dust discharge device according to claim 2, characterized in that: The other end of the liquid supply valve is also communicated with a side of the curved section close to the air suction section.

4. A dust discharge device according to claim 1, characterized in that: A one-way valve is arranged between one end of the air inlet pipe and the exhaust section, and the flow direction of the one-way valve is the direction from one end of the air inlet pipe to the exhaust section.

5. A dust discharge device according to claim 1, characterized in that: The curved section is a U-shaped tube.

6. A dust discharge device according to claim 5, characterized in that: The U-shaped tube is placed vertically, and the drain valve is communicated with the bottom of the U-shaped tube.

7. A dust discharge device according to claim 1, characterized in that: The device also includes a particle concentration detector and a programmable logic controller, and the particle concentration detector and the programmable logic controller are electrically connected.

8. A dust discharge device according to claim 7, characterized in that: The liquid supply unit and the exhaust unit both include an electrically controlled valve, the liquid discharge valve is an electrically controlled valve, and each of the electrically controlled valves is electrically connected to the programmable logic controller.

9. A dust discharge device according to claim 1, characterized in that: An air filter is arranged in the air inlet pipe.

10. The dust discharge device according to claim 1, characterized in that: The device further comprises a purification box, and the drain valve is arranged between the curved section and the purification box.

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