Coating device and coating equipment

Abstract

The embodiment of the utility model provides a film coating device, which comprises a vacuum cavity suitable for accommodating a carrying table for placing a base material; the coupler is used for driving the carrying table to rotate; the rotating device is arranged outside the vacuum cavity and is suitable for driving the coupler to rotate; and the sealing channel is suitable for sealing a channel through which the rotating device transmits rotation to the carrying table, one end of the sealing channel is in sealing connection with the first wall of the vacuum cavity and communicates with the vacuum cavity, and at least one part of the rotating shaft of the carrying table and the coupler are located in the sealing channel. By adopting the film coating device disclosed by the embodiment of the invention, diversified film coating requirements under a vacuum film coating condition can be met.

Description

Technical Field

[0001] The present disclosure relates to the field of film coating technology, and in particular to a film coating device and a film coating equipment. Background Art

[0002] Vacuum coating is a method of coating a substrate under high vacuum conditions, typically using vacuum coating equipment. The position of the substrate within the vacuum chamber can affect the coating quality, such as film uniformity, thickness, and density.

[0003] For a coating device, the volume of the vacuum chamber is generally fixed. To meet different coating requirements, it is usually necessary to change the position of the substrate in the vacuum chamber. Conventional vacuum coating equipment is difficult to accurately move the substrate to the required position to meet the needs of diversified coating, and it is difficult to meet the requirements of a coating device to achieve multiple coatings on the substrate.

[0004] Therefore, a new coating device and coating equipment are needed. Utility Model Content

[0005] An embodiment of the present disclosure provides a coating device, comprising: a vacuum chamber, suitable for accommodating a carrier for placing a substrate, the coating device also comprising: a coupling, used to drive the carrier to rotate; a rotating device, provided outside the vacuum chamber, suitable for driving the coupling to rotate; a sealing channel, suitable for sealing the channel that transmits the rotation of the rotating device to the carrier, one end of which is sealedly connected to the first wall of the vacuum chamber and communicated with the vacuum chamber, and at least a portion of the rotating shaft of the carrier and the coupling are located in the sealing channel.

[0006] In some embodiments, the sealing channel is defined by a telescoping bellows.

[0007] In some embodiments, the coating device also includes: a movable plate, which is arranged outside the vacuum chamber, the rotating device is fixedly connected to the movable plate, and the other end of the sealed channel is sealedly connected to the first side of the movable plate; a rotating transmission assembly, which is connected to the rotating device and the coupling to drive the coupling to rotate.

[0008] In some embodiments, the rotary transmission assembly includes: a sealed transmission device, including a sealed fixed part and a rotating shaft, the fixed part is fixedly arranged on the second side of the movable plate, the rotating shaft is connected to the coupling, and the rotating shaft is suitable for rotating relative to the fixed part; a synchronous transmission device, respectively connected to the rotating device and the sealed transmission device, so that the rotating device transmits the rotation to the sealed transmission device synchronously; an opening is provided on the movable plate, and the rotating shaft of the sealed transmission device passes through the opening and is connected to the coupling, and the sealed transmission device, the sealed channel and the vacuum chamber form a closed space.

[0009] In some embodiments, the bellows includes: a first end and a second end, the first end is sealedly connected to the first wall of the vacuum chamber and communicates with the vacuum chamber, and the second end is sealedly connected to the first side of the movable plate; the bellows is suitable for extending or shortening when the movable plate moves.

[0010] In some embodiments, the coating device further includes: a moving device, disposed outside the vacuum chamber, connected to the moving plate, and suitable for driving the moving plate to move.

[0011] In some embodiments, the moving device includes: a screw elevator, including a servo motor and a plurality of screw sleeves, and the plurality of screw sleeves are fixed on the second side of the moving plate so that when the servo motor is working, the screw sleeves move to drive the moving plate to move.

[0012] In some embodiments, the coating device further includes: a first fixed plate, spaced apart from the second side of the movable plate; and a displacement sensor, disposed on an edge of the first fixed plate, for monitoring the position of the movable plate.

[0013] In some embodiments, the coating device also includes: a second fixed plate, arranged between the first wall of the vacuum chamber and the movable plate; a plurality of guide columns, respectively connected and fixed to the first fixed plate and the second fixed plate; an extreme position switch, fixedly connected to the second fixed plate, including a first switch and a second switch distributed along the moving direction of the movable plate, for limiting the extreme position of the movable plate.

[0014] In some embodiments, the extreme position switch further includes a track extending along the moving direction of the movable plate, and the first switch and the second switch are adapted to move on the track to adjust the extreme position of the movable plate.

[0015] An embodiment of the present disclosure also provides a coating device, comprising: any of the above coating devices; a control system, comprising: a mobile control unit, suitable for controlling the start and stop of the mobile device, so as to control the mobile device to shut down when the displacement sensor monitors that the position of the mobile plate reaches a preset position.

[0016] In some embodiments, the movement control unit is adapted to control the movement device to be closed when the extreme position switch is triggered.

[0017] In some embodiments, the control system further includes: a rotation control unit adapted to control the start and stop of the rotating device and the rotation speed of the carrier.

[0018] Compared with the prior art, the technical solution of the embodiment of the present disclosure has the following beneficial effects:

[0019] The coating device of the embodiment of the present disclosure drives the coupling to rotate through the rotating device and then drives the rotating shaft of the carrier on which the substrate is placed to rotate, so that the substrate rotates in the vacuum chamber and rotates to the required position. The rotation of the substrate can be maintained during coating to make the coating more uniform.

[0020] The rotating device of the embodiment of the present disclosure is arranged outside the vacuum chamber and isolated from the coating space, which prevents the coating material from entering the rotating device and affecting its operation, and at the same time prevents the heat dissipation of the rotating motor from affecting the temperature of the coating space. Compared with the rotating device placed inside the vacuum chamber, shielding or isolation measures need to be taken to eliminate the mutual influence between the coating space and the rotating device. The overall structure of the coating device of the embodiment of the present disclosure is simpler and easier to install.

[0021] The sealing channel of the embodiment of the present disclosure is suitable for sealing the channel that transmits the rotation of the rotating device to the carrier, that is, the sealing transmission device, the sealing channel and the vacuum chamber form a closed space, thereby ensuring the stability of the vacuum degree in the vacuum chamber.

[0022] The coating device of the embodiment of the present disclosure drives the moving plate to move via a moving device, thereby driving the carrier on which the substrate is placed to move within the vacuum chamber, thereby being able to move the substrate to a desired position, such as a position a certain distance from a plasma source or a target material, to meet the coating requirements of different coating processes, different substrates, and different coating film layers. Furthermore, for vacuum coating, since the volume of the vacuum chamber is generally relatively fixed, different coating processes, different numbers and distributions of substrates, and different film layer coatings require the substrate to be in a specific position or require the substrate to be moved to achieve the desired coating effect. The coating device of the present disclosure can meet the requirements of substrate movement to achieve the desired coating effect.

[0023] The mobile device of the embodiment of the present disclosure is arranged outside the vacuum chamber and isolated from the coating space, which prevents the coating material from entering the mobile device and affecting its operation, and at the same time prevents the heat dissipation of the screw elevator of the mobile device from affecting the temperature of the coating space. Compared with the mobile device placed inside the vacuum chamber, shielding or isolation measures need to be taken to eliminate the mutual influence between the coating space and the mobile device. The overall structure of the coating device of the embodiment of the present disclosure is simpler and easier to install.

[0024] The displacement sensor of the embodiment of the present disclosure is used to monitor the position of the movable plate. When the movable plate moves to the set position, it is accurately monitored, thereby accurately moving the substrate to the set position, which is beneficial to the precise control of the coating and can meet specific coating requirements.

[0025] The control system of the coating equipment of the embodiment of the present disclosure controls the start and stop of the mobile device through the mobile control unit, and controls the start and stop of the rotating device and the rotation speed of the carrier through the rotation control unit, thereby changing the position of the substrate through rotation and movement, or making the substrate in motion during coating, which can meet diverse coating needs and form a high-quality and uniform film layer on the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Other features and advantages of the present disclosure will be better understood through the following detailed description of the optional embodiments in conjunction with the accompanying drawings, in which the same reference numerals represent the same or similar components, wherein:

[0027] Figures 1-4 A schematic diagram of the three-dimensional structure of a coating device according to an embodiment of the present disclosure is shown;

[0028] Figure 5 A control schematic diagram of a coating device according to an embodiment of the present disclosure is shown. DETAILED DESCRIPTION

[0029] Embodiments of the present disclosure are described in detail below, with examples of the embodiments illustrated in the accompanying drawings. In the accompanying drawings, the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are illustrative and are intended only to explain the present disclosure and are not to be construed as limiting the present disclosure.

[0030] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meanings understood by persons having ordinary skills in the field to which the present disclosure belongs. In the description of the present disclosure, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like, indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore should not be understood as limiting the present disclosure.

[0031] In order to enable the substrate to move and rotate precisely to meet diverse coating requirements, embodiments of the present disclosure provide a coating device and a coating apparatus, which are described in detail below with reference to the accompanying drawings.

[0032] Figure 1 FIG2 shows a schematic diagram of the three-dimensional structure of the coating device according to an embodiment of the present disclosure. Figure 1 , the coating device of the embodiment of the present disclosure includes:

[0033] A vacuum chamber 1 is suitable for accommodating a substrate for coating. A carrier 2 for placing the substrate is provided in the vacuum chamber 1. The carrier 2 includes a rotating shaft 201. The rotation of the rotating shaft 201 can drive the rotation of the carrier 2.

[0034] A rotating device 3 is provided outside the vacuum chamber 1;

[0035] The coupling (not shown in the figure) is connected to the rotating shaft 201 of the carrier 2 to drive the carrier 2 to rotate; the rotating device 3 is suitable for driving the coupling to rotate, and then the carrier 2 rotates under the drive of the coupling.

[0036] The sealing channel 4 is suitable for sealing the channel through which the rotating device 3 transmits rotation to the carrier 2, one end of which is sealedly connected to the first wall 101 of the vacuum chamber 1 and communicates with the vacuum chamber 1, and at least a portion of the rotating shaft 201 of the carrier 2 and the coupling are located in the sealing channel 4.

[0037] refer to Figure 1 In some embodiments, the coating device further comprises: a movable plate 5, which is disposed outside the vacuum chamber 1, and the rotating device 3 is fixedly connected to the movable plate 5. The movable plate 5 includes a first side 501 and a second side 502 opposite to each other, and the first side 501 is close to the vacuum chamber 1.

[0038] In some embodiments, the rotating device 3 is fixedly connected to the second side 502 of the movable plate 5 via fasteners. In some embodiments, the rotating device 3 includes a rotary motor. In some embodiments, the rotation speed of the carrier 2 can be adjusted by adjusting the power of the rotating device 3 to meet the rotation speed requirements for different coating requirements, thereby facilitating the formation of a uniform film layer. For example, by changing the power of the rotary motor, the rotation speed of the rotating shaft 201 of the carrier 2 can be changed, thereby changing the rotation speed of the substrate placed on the carrier 2.

[0039] In some embodiments, the other end of the sealing channel 4 is sealed and connected to the first side 501 of the moving plate 5 .

[0040] In some embodiments, the coating device further includes: a rotating transmission assembly 6 connected to the rotating device 3 and the coupling to drive the coupling to rotate, thereby driving the carrier 2 to rotate.

[0041] Figure 2-Figure 3 The schematic diagram of the three-dimensional structure of the coating device according to the embodiment of the present disclosure is shown. Figure 1 Reference Figure 1-Figure 3 The rotating transmission assembly 6 includes: a sealed transmission device 61, the sealed transmission device 61 includes a fixed part 612 and a rotating shaft 611, the fixed part 612 is sealedly connected to the rotating shaft 611, the fixed part 612 is fixed on the second side 502 of the movable plate 5, the rotating shaft 611 is connected to the coupling, and the rotating shaft 611 is suitable for rotating relative to the fixed part 612.

[0042] In some embodiments, the fixing portion 612 is fixed to the second side 502 of the moving plate 5 by bonding. In some embodiments, the fixing portion 612 is fixed to the second side 502 of the moving plate 5 by fasteners.

[0043] In the disclosed embodiment, the fixed portion 612 of the sealed transmission device 61 is sealed to the rotating shaft 611, and the fixed portion 612 is sealed to the second side 502 of the movable plate 5. In some embodiments, the sealed transmission device 61, the sealed channel 4, and the vacuum chamber 1 form a sealed space, thereby enabling the vacuum level of the vacuum chamber to be adjusted to meet different coating requirements. The sealed space ensures the stability of the vacuum level.

[0044] In some embodiments, an opening is provided on the movable plate 5 , and the rotating shaft 611 of the sealing transmission device 61 passes through the opening and is connected to the coupling in the sealing channel 4 .

[0045] In some embodiments, the rotating shaft 201 of the carrier 2, the coupling, and the rotating shaft 611 of the sealing transmission device 61 have the same axis, which saves the use of horizontal space.

[0046] In some embodiments, the sealed transmission device 61 is a magnetic fluid sealed transmission device.

[0047] The rotary transmission assembly 6 of the embodiment of the present disclosure, in some embodiments, further comprises: a synchronous transmission device, connected to the rotary device 3 and the sealing transmission device 61 respectively, so that the rotary device 3 transmits the rotation synchronously to the sealing transmission device 61.

[0048] In some embodiments, the synchronous transmission device includes a synchronous wheel and a synchronous belt. Figure 2 The synchronous wheel 62 is fitted on the outer periphery of the rotating shaft 611 of the sealing transmission device 61 so that it can drive the rotating shaft 611 to rotate through its own rotation; the synchronous belt 63 is connected to the rotating device 3 and the synchronous wheel 62 respectively, so that the synchronous belt 63 is driven to rotate by the rotating device 3, thereby driving the synchronous wheel 62 to rotate, and then driving the rotating shaft 611 to rotate, and driving the rotating shaft 201 of the carrier 2 to rotate through the coupling.

[0049] The sealing channel 4 of the embodiments of the present disclosure, in some embodiments, is defined by a retractable bellows, which has retractable properties, so that it can retract and contract when the distance between the movable plate 5 and the first wall 101 of the vacuum chamber 1 changes, while ensuring the sealing performance of the sealing channel 4.

[0050] In some embodiments, the bellows includes a first end and a second end, the first end is sealedly connected to the first wall 101 of the vacuum chamber 1 and communicates with the vacuum chamber 1, and the second end is sealedly connected to the first side 501 of the movable plate 5, and the bellows is suitable for extending or shortening when the movable plate 5 moves.

[0051] In some embodiments, the bellows further includes at least a portion of a bellows section adapted for expansion and contraction, located between the first and second ends, to facilitate extension or contraction of the movable plate 5 when it moves relative to the first wall 101 of the vacuum chamber 1. In some embodiments, the first end of the bellows is bonded to the first wall 101 of the vacuum chamber 1 or sealed with fasteners. In some embodiments, the second end of the bellows is bonded to the first side 501 of the movable plate 5 or sealed with fasteners.

[0052] The coating device of the embodiment of the present disclosure drives the rotating transmission component to rotate through the rotating device 3, thereby driving the coupling to rotate and then driving the rotating shaft 201 of the carrier 2 on which the substrate is placed to rotate, so that the substrate rotates in the vacuum chamber 1, so that the substrate is rotated to the required position, and the rotation of the substrate can be maintained during coating to make the coating more uniform.

[0053] In some embodiments, the carrier 2 has a multi-layer structure, and a substrate can be placed on each layer, so that multiple substrates can be coated at the same time, improving the coating efficiency; during coating, the multi-layer structure carrier 2 rotates in the vacuum chamber, thereby forming a uniform film layer on the substrate.

[0054] The rotating device 3 of the embodiment of the present disclosure is arranged outside the vacuum chamber 1 and isolated from the coating space, which prevents the coating material from entering the rotating device 3 and affecting its operation. At the same time, it prevents the heat dissipation of the rotating device from affecting the temperature of the coating space and thus affecting the coating effect. Compared with the rotating device placed inside the vacuum chamber 1, shielding or isolation measures need to be taken to eliminate the mutual influence between the coating space and the rotating device. The overall structure of the coating device of the embodiment of the present disclosure is simpler and easier to install.

[0055] In some embodiments of the coating device of the embodiments of the present disclosure, the coating device further includes a moving device 7, which is arranged outside the vacuum chamber 1 and connected to the moving plate 5, and is suitable for driving the moving plate 5 to move, and further driving the carrier 2 to move.

[0056] Figure 4 FIG2 shows a schematic diagram of the three-dimensional structure of the coating device according to an embodiment of the present disclosure. Figure 2-Figure 4 In some embodiments, the moving device 7 includes a screw elevator 71, which includes a servo motor 711 and a plurality of screw sleeves 712. The servo motor 711 is used to provide kinetic energy. The plurality of screw sleeves 712 are fixed to the second side 502 of the moving plate 5 so that when the servo motor 711 is working, the screw sleeves 712 move to drive the moving plate 5 to move.

[0057] In some embodiments, the screw elevator 71 also includes a plurality of screws 713, and the screw sleeves 712 are sleeved outside the screws 713 and fixed to each other. When the servo motor 711 is working, the screw 713 rises or falls, driving the screw sleeve 712 to rise or fall, and the screw sleeve 712 drives the movable plate 5 to rise or fall. Since the movable plate 5 is fixedly connected to the sealing transmission device 61 and the rotating device 3, and the sealing transmission device 61 is connected to the coupling and the rotating shaft 201 of the carrier 2, the movement of the movable plate 5 drives the carrier 2 to move in the same direction, thereby realizing the movement of the substrate.

[0058] The number of the screw sleeves 712 is set according to actual conditions, for example, according to the area and shape of the movable plate 5 , and the number and spacing between the screw sleeves 712 are not limited here.

[0059] Continue to refer Figure 1 In some embodiments, the coating device further includes: a first fixed plate 8 , which is spaced apart from the second side 502 of the movable plate 5 .

[0060] In some embodiments, the rotating device 3 , the rotating transmission assembly 6 and the moving device 7 are disposed between the moving plate 5 and the first fixed plate 8 .

[0061] In some embodiments, the rotating device 3 is fixedly connected to the second side 502 of the moving plate 5 , and the moving device 7 is fixedly disposed on the first fixed plate 8 .

[0062] In some embodiments, the coating device also includes: a second fixed plate 9, which is arranged between the first wall 101 of the vacuum chamber 1 and the movable plate 5; a plurality of guide columns 12, which are respectively connected and fixed to the first fixed plate 8 and the second fixed plate 9, and the movable plate 5 is provided with an opening suitable for the guide column 12 to pass through, so that the movable plate 5 is suitable for moving along the extension direction of the guide column 12.

[0063] In some embodiments, the first fixed plate 8, the second fixed plate 9, the movable plate 5 and the first wall 101 of the vacuum chamber 1 are parallel to each other, and the guide column 12 and the first wall 101 of the vacuum chamber 1 are perpendicular to each other, so that the coating device has a more stable structure when the movable plate moves.

[0064] The coating device of the embodiment of the present disclosure drives the moving plate 5 to move via the moving device 7, thereby driving the carrier 2 on which the substrate is placed to move within the vacuum chamber 1, thereby being able to move the substrate to a desired position, for example, to a position a certain distance from the plasma source or the target material, in order to meet the coating requirements of different coating processes, different substrates, and different coating film layers. In addition, for vacuum coating, since the volume of the vacuum chamber is usually relatively fixed, different coating processes, different numbers and distributions of substrates, and different film layer coatings require the substrate to be in a specific position or require the substrate to be moved to achieve the desired coating effect. The coating device of the embodiment of the present disclosure can meet the requirement of substrate movement to achieve the desired coating effect.

[0065] The mobile device 7 of the embodiment of the present disclosure is arranged outside the vacuum chamber 1 and isolated from the coating space, which prevents the coating material from entering the mobile device 7 and affecting its operation. At the same time, it prevents the heat dissipation of the screw elevator 71 of the mobile device 7 from affecting the temperature of the coating space. Compared with the mobile device placed inside the vacuum chamber 1, shielding or isolation measures need to be taken to eliminate the mutual influence between the coating space and the mobile device. The overall structure of the coating device of the embodiment of the present disclosure is simpler and easier to install.

[0066] In order to more precisely control the movement and rotation of the carrier, the coating apparatus of the embodiments of the present disclosure further includes, in some embodiments, a displacement sensor 10 disposed on the edge of the first fixed plate 8 for monitoring the position of the movable plate 5. The provision of the displacement sensor 10 allows for the acquisition of the real-time position of the movable plate 5, such as its position before and after movement, and allows for precise control of the movement distance of the movable plate 5, thereby precisely controlling the movement distance of the substrate. This facilitates precise control of the coating process and can meet specific coating requirements. In particular, under vacuum coating conditions, the volume of the vacuum chamber is typically fixed, and precise movement of the substrate facilitates meeting diverse coating requirements, enabling the coating of different film layers and substrates.

[0067] In some embodiments, the coating device also includes: an extreme position switch 11, which is fixedly connected to the second fixed plate 9, and includes a first switch 111 and a second switch 112 distributed along the moving direction of the movable plate 5, and is used to limit the extreme position of the movable plate 5 to prevent the movement of the movable plate 5 from causing a collision between the movable plate 5 and the carrier 2.

[0068] In some embodiments, the limit positions of the movable plate 5 can be adjusted as needed based on factors such as the distance between the movable plate 5 and the second fixed plate 9, the distance between the carrier 2 and the inner wall of the vacuum chamber 1, and the shape and size of the carrier 2 itself. By adjusting the positions of the first switch 111 and the second switch 112 of the limit position switch 11, the two limit positions of the movable plate 5 in the moving direction can be changed. In some embodiments, the limit position switch 11 further includes a track 113 extending along the moving direction of the movable plate 5. The first switch 111 and the second switch 112 are adapted to move on the track 113 to adjust the limit positions of the movable plate 5.

[0069] The coating device of the embodiment of the present disclosure can be applied to different coating needs, and is particularly suitable for vacuum coating that requires adjustment of the substrate position; it is also suitable for non-vacuum coating that requires adjustment of the substrate position, and only the air pressure in the vacuum chamber needs to be adjusted.

[0070] The coating apparatus of the embodiments of the present disclosure can be applied to target sputtering coating. In some embodiments, the vacuum chamber 1 includes a second wall 102 opposite the first wall 101. The coating apparatus also includes a target disposed near the second wall 102 within the vacuum chamber 1 and opposite the carrier 2 disposed near the first wall 101, so that the target material can be sputter-coated on a substrate carried by the carrier 2. The carrier is rotated or moved by a rotating device and a moving device to change the distance between the substrate and the target to adapt to the requirements of coating different target materials and different substrates.

[0071] The coating apparatus of the disclosed embodiments can be applied to plasma-enhanced chemical deposition. In some embodiments, the vacuum chamber includes a sidewall perpendicular to the first wall. A plasma source gas is introduced into the vacuum chamber through an inlet in the sidewall. Plasma discharge is initiated to generate plasma from the introduced plasma source gas, which can be a coating gas. The stage is rotated or moved by a rotating device and a moving device to adjust the distance between the substrate and the plasma source gas inlet, thereby adapting to the requirements of coating different target materials and substrates.

[0072] Therefore, the coating device of the embodiment of the present disclosure can be used for coating various substrates, various coating processes and various film layers.

[0073] An embodiment of the present disclosure further provides a coating device, comprising: any of the above coating devices and a control system C100.

[0074] Figure 5 FIG. 1 shows a control schematic diagram of a coating device according to an embodiment of the present disclosure. Figure 5 The control system C100 includes a movement control unit C101 for controlling the start and stop of the movement device. The movement device, movement plate, displacement sensor, limit position switch, stage, stage shaft, coupling, rotation transmission assembly, and rotation device are the same as those described in any of the above embodiments and are not further described here.

[0075] In some embodiments, when the movable plate needs to be moved, the preset position after the movable plate moves is first set, the movable device is controlled to turn on by the movable control unit C101, the movable plate moves, the displacement sensor monitors the real-time position of the movable plate, and feeds back a signal to the movable control unit C101 when the movable plate reaches the preset position. The movable control unit C101 controls the movable device to turn off, and the movable plate completes the movement.

[0076] In some embodiments, the operating power of the mobile device is controlled by the mobile control unit C101, thereby controlling the moving speed of the moving plate and further controlling the moving speed of the carrier.

[0077] In some embodiments, when the movable plate moves to the extreme position, the extreme position switch is triggered, and the movement control unit C101 controls the movement device to shut down to stop the movable plate from moving, thereby avoiding collision.

[0078] In some embodiments, the control system C100 further includes a rotation control unit C102 for controlling the start and stop of the rotation device and the rotation speed of the carrier. The rotation control unit C102 activates the rotation device, which drives the rotation assembly, which rotates the carrier's shaft via a coupling, thereby rotating the carrier and the substrate.

[0079] In some embodiments, the operating power of the rotating device is controlled by the rotation control unit C102 to adjust the rotation speed of the carrier, so that the rotation speed of the substrate is maintained in a speed range suitable for coating. The rotation speed of the carrier can be adjusted in real time according to the coating process, and the corresponding speed setting can also be made according to the different coating substrates or film layers to achieve the ideal coating effect.

[0080] In some embodiments, the control system C100 is a fully automatic control system, the mobile control unit C101 automatically controls the start and stop of the mobile device, and the rotation control unit C102 automatically controls the start and stop of the rotating device, thereby improving the coating efficiency of the coating equipment, and responding to emergencies in a timely manner, improving the stability of the coating, and reducing the accident rate.

[0081] In some embodiments of the coating equipment of the embodiments of the present disclosure, the movement control unit C101 controls the start and stop of the movement device, and the rotation control unit C102 controls the start and stop of the rotation device and the rotation speed of the carrier, thereby changing the position of the substrate through rotation and movement, or placing the substrate in motion during coating. This can meet diverse coating requirements and form high-quality and uniform film layers on the substrate. Therefore, the coating equipment of the embodiments of the present disclosure can be used for coating a variety of substrates, a variety of coating processes, and a variety of film layers.

[0082] The above description is merely an exemplary embodiment for illustrating the principles of the present disclosure and is not intended to limit the scope of protection of the present disclosure. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present disclosure, and such modifications and improvements are also within the scope of protection of the present disclosure.

Claims

1. A coating device, comprising: The vacuum chamber is suitable for accommodating a carrier for placing a substrate, and is characterized in that it also includes: A coupling, used to drive the carrier to rotate; A rotating device, disposed outside the vacuum chamber and adapted to drive the coupling to rotate; A sealing channel is suitable for sealing the channel through which the rotating device transmits rotation to the carrier, one end of which is sealedly connected to the first wall of the vacuum chamber and communicated with the vacuum chamber, and at least a portion of the rotating shaft of the carrier and the coupling are located in the sealing channel.

2. The coating device according to claim 1, characterized in that: The sealing channel is defined by a telescopic bellows.

3. The coating device according to claim 2, characterized in that: The coating device also includes: A movable plate is arranged outside the vacuum chamber, the rotating device is fixedly connected to the movable plate, and the other end of the sealing channel is sealedly connected to the first side of the movable plate; The rotary transmission assembly is connected with the rotary device and the coupling so as to drive the coupling to rotate.

4. The coating device according to claim 3, characterized in that: The rotary transmission assembly comprises: A sealed transmission device, comprising a fixed part and a rotating shaft which are sealed and connected, wherein the fixed part is fixedly arranged on the second side of the movable plate, the rotating shaft is connected to the coupling, and the rotating shaft is suitable for rotating relative to the fixed part; a synchronous transmission device, connected to the rotating device and the sealing transmission device respectively, so that the rotating device synchronously transmits the rotation to the sealing transmission device; The movable plate is provided with an opening, and the rotating shaft of the sealing transmission device passes through the opening to be connected with the coupling. The sealing transmission device, the sealing channel and the vacuum chamber form a closed space.

5. The coating device according to claim 3, characterized in that: The bellows comprises: a first end and a second end, the first end being sealedly connected to the first wall of the vacuum chamber and communicating with the vacuum chamber, and the second end being sealedly connected to the first side of the moving plate; The bellows is adapted to extend or contract when the moving plate moves.

6. The coating device according to any one of claims 3 to 5, characterized in that: Also includes: The moving device is arranged outside the vacuum chamber, connected to the moving plate, and is suitable for driving the moving plate to move.

7. The coating device according to claim 6, characterized in that: The mobile device comprises: The screw lift comprises a servo motor and a plurality of screw sleeves, wherein the plurality of screw sleeves are fixedly arranged on the second side of the movable plate, so that when the servo motor is working, the screw sleeves move to drive the movable plate to move.

8. The coating device according to claim 7, characterized in that: Also includes: A first fixed plate is disposed spaced apart from the second side of the movable plate; A displacement sensor is arranged at the edge of the first fixed plate and is used to monitor the position of the movable plate.

9. The coating device according to claim 8, characterized in that: Also includes: A second fixed plate, disposed between the first wall of the vacuum chamber and the movable plate; A plurality of guide posts, respectively connected and fixed to the first fixing plate and the second fixing plate; The limit position switch is fixedly connected to the second fixed plate, and comprises a first switch and a second switch distributed along the moving direction of the movable plate, and is used to limit the limit position of the movable plate.

10. The coating device according to claim 9, characterized in that: The limit position switch device further comprises a track extending along the moving direction of the moving plate, and the first switch and the second switch are adapted to move on the track to adjust the limit position of the moving plate.

11. A coating device, characterized in that: include: The coating device as claimed in any one of claims 6 to 10; Control system, including: The mobile control unit is adapted to control the start and stop of the mobile device, so as to control the mobile device to be closed when the displacement sensor monitors that the position of the mobile plate reaches a preset position.

12. The coating device according to claim 11, characterized in that: The movement control unit is adapted to control the movement device to close when the extreme position switch is triggered.

13. The coating device according to claim 11 or 12, characterized in that: The control system further comprises: a rotation control unit adapted to control the start and stop of the rotation device and the rotation speed of the carrier.

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