Automatic unbinding equipment for circular target material

Abstract

The utility model relates to the technical field of target material preparation, and provides automatic unbinding equipment for a circular target material, which comprises a rotating base, a lifting mechanism and a mounting frame, the lifting mechanism is arranged on the rotating base; the mounting frame is arranged on the lifting mechanism and is driven by the lifting mechanism to vertically move up and down; and a clamping mechanism for grabbing the rotary target material is arranged on the mounting frame. According to the equipment, the rotary target material after unbinding is automatically transferred, manual carrying is not needed, the labor intensity of workers can be reduced, the transferring efficiency and stability are effectively improved, and the situation that the target material is damaged in the manual transferring process is completely eradicated.

Description

Technical Field

[0001] The utility model relates to the technical field of target material preparation, in particular to an automatic unbinding device for round target materials. Background Art

[0002] The rotating targets used in the sputtering coating industry are usually manufactured by indium bonding. When the welding rate between the target and the back tube is low, cracking and nodules are prone to occur during the sputtering process. This requires unqualified cylinders to be untied and processed or replaced with qualified cylinders for re-binding. For easily broken ceramic targets, the target is generally divided into 3-4 small target sections when binding. Each target section weighs about 20 kilograms. The target needs to be untied and disassembled vertically. It is heavy and hot, and it is not easy for personnel to operate.

[0003] CN219430102U discloses a high-temperature operation clamp for rotating target materials, including a clamping plate; one end of the clamping plate has an opening so that the clamping plate is an open-loop structure; the two ends of the clamping plate are respectively connected with a first rod-shaped handle, and the first rod-shaped handle extends radially from the inside to the outside of the clamping plate; the clamping plate is also connected with a second rod-shaped handle, and the second rod-shaped handle and the first rod-shaped handle are arranged oppositely on the opposite sides of the axis of the clamping plate. It can clamp high-temperature target materials to adjust or transfer the target materials, but it still requires manual labor to transfer the target materials, and the labor intensity of the staff is relatively large, especially when it is necessary to transfer heavy targets, such as targets with a single section of 20 kilograms. Obviously, it is not reasonable to use manual transportation.

[0004] Based on this, the technical problem solved in this case is: how to solve the problem that the rotating target material is difficult to transfer due to high temperature and large mass after being untied. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides an automatic unbinding device for circular targets, which can automatically transfer the rotating targets after unbinding without manual handling. It can not only reduce the labor intensity of the staff, but also effectively improve the efficiency and stability of transportation, and prevent the damage to the targets during manual transportation.

[0006] The technical solution of the utility model is:

[0007] A circular target automatic unbinding device comprises a rotating base, a lifting mechanism and a mounting frame; the lifting mechanism is arranged on the rotating base; the mounting frame is arranged on the lifting mechanism and is driven by the lifting mechanism to move vertically up and down; the mounting frame is provided with a clamping mechanism for grabbing the rotating target.

[0008] In the above-mentioned automatic unbinding equipment for circular targets, the clamping mechanism includes a clamping unit and a first lateral driving unit; the clamping unit is composed of two symmetrically arranged semi-cylinders; the semi-cylinders are hollow structures and form a vacuum cavity; the inner wall of the semi-cylinder is provided with a plurality of suction cups connected to the vacuum cavity, and the outer wall of the semi-cylinder is also provided with an exhaust joint for connecting to an external vacuum pump; the first lateral driving unit is used to drive the two semi-cylinders to close or separate.

[0009] In the above-mentioned automatic unbinding device for circular targets, the clamping mechanism further includes a second lateral driving unit;

[0010] The first lateral driving unit comprises a first power output end and a second power output end, and the driving directions of the first power output end and the second power output end are opposite;

[0011] The second lateral driving unit includes a first lateral driving module and a second lateral driving module;

[0012] The first power output end is used to drive the first lateral driving module to move lateraly; the power output end of the first lateral driving module is connected to a semi-cylinder;

[0013] The second power output end is used to drive the second lateral driving module to move horizontally; the power output end of the second lateral driving module is connected to the other semi-cylinder;

[0014] The motion accuracy of the first lateral driving module and the second lateral driving module is higher than the motion accuracy of the first power output end and the second power output end.

[0015] In the above-mentioned automatic unbinding device for circular targets, the clamping mechanism further includes a first front-to-back driving module and a second front-to-back driving module; the driving directions of the first front-to-back driving module and the second front-to-back driving module are perpendicular to the driving direction of the first lateral driving unit;

[0016] The first front and rear drive module is connected to the first power output end, and the power output end of the first front and rear drive module is connected to the first lateral drive module;

[0017] The second front and rear drive module is connected to the second power output end, and the power output end of the second front and rear drive module is connected to the second lateral drive module.

[0018] In the above-mentioned automatic unbinding device for circular targets, the first lateral driving unit is one of a double-headed air cylinder, a double-headed oil cylinder, and a double-headed electric cylinder;

[0019] Alternatively, the first lateral drive unit is composed of two air cylinders, oil cylinders or electric cylinders.

[0020] In the above-mentioned automatic unbinding device for circular targets, the first lateral drive module, the second lateral drive module, the first front-to-back drive module, and the second front-to-back drive module are each independently a pneumatic cylinder, an oil cylinder, or an electric cylinder.

[0021] In the above-mentioned automatic unbinding device for circular targets, the clamping unit further includes two semicircular protective covers; one protective cover corresponds to one semi-cylinder; and the protective cover is arranged on the outside of the semi-cylinder.

[0022] In the above-mentioned automatic unbinding device for circular targets, the relative position between the protective cover and the semi-cylinder is fixed or adjustable.

[0023] In the above-mentioned automatic unbinding equipment for circular targets, the lifting mechanism includes a support frame arranged on a rotating base, a driving shaft and a transmission shaft arranged side by side on the support frame, a transmission chain connecting the driving shaft and the transmission shaft, and a first rotating drive module arranged on the support frame and used to drive the driving shaft to rotate.

[0024] In the above-mentioned automatic unbinding device for circular targets, the rotating base includes a fixed base, a rotating base arranged on the fixed base, and a second rotating driving module for driving the rotating base to rotate; the lifting mechanism is arranged on the rotating base.

[0025] One of the above technical solutions of the utility model has at least one of the following advantages or beneficial effects:

[0026] The utility model realizes automatic clamping of the unbound rotating target material and transfers it to an external storage rack through a multi-axis linkage mechanical structure, without manual intervention. Obviously, the equipment not only reduces the labor intensity of the staff, but also makes the entire rotating target material transfer process faster, more accurate and smoother due to the precise motion control of the mechanical structure, thereby avoiding the problem of secondary damage to the rotating target material during the transfer process. In addition, the equipment can also load rotating targets of large weight and different sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a three-dimensional diagram of embodiment 1 of the utility model;

[0028] Figure 2 For embodiment 1 of the utility model Figure 1 A partial schematic diagram of part A;

[0029] Figure 3 This is a structural diagram of the mounting frame and the clamping mechanism of Example 1 of the utility model;

[0030] Figure 4 It is a top view of embodiment 1 of the utility model.

[0031] In the figure: 1. rotating base; 2. lifting mechanism; 3. mounting frame; 4. clamping mechanism; 41. semi-cylinder; 412. suction cup; 413. suction joint; 414. protective cover; 42. first lateral drive unit; 421. first power output end; 422. second power output end; 43. second lateral drive unit; 431. first lateral drive module; 432. second lateral drive module; 44. first front and rear drive module; 45. second front and rear drive module. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0033] Example 1

[0034] See also Figures 1 to 4 A circular target automatic unbinding device comprises a rotating base 1, a lifting mechanism 2 and a mounting frame 3; the lifting mechanism 2 is arranged on the rotating base 1; the mounting frame 3 is arranged on the lifting mechanism 2 and is driven by the lifting mechanism 2 to move vertically up and down; the mounting frame 3 is provided with a clamping mechanism 4 for grabbing the rotating target.

[0035] In actual application, the device adjusts the mounting frame 3 to the position of the rotating target to be transferred through the lifting mechanism 2, and then the clamping mechanism 4 is actuated to clamp the rotating target, and then the lifting mechanism 2 drives the clamping mechanism 4 to move, so that the rotating target is completely separated from its back tube, and finally the rotating base 1 drives the clamping mechanism 4 to rotate, and transfers the rotating target to the storage rack of the external device. Of course, the lifting mechanism 2 will also adjust the height of the rotating target on the storage rack in actual application. Among them, since the storage rack of the external device of this embodiment is arranged side by side with the device, the rotating base 1 only needs to achieve 180° back and forth rotation.

[0036] Specifically, the clamping mechanism 4 includes a clamping unit and a first lateral driving unit 42; the clamping unit is composed of two symmetrically arranged semi-cylinders 41; the semi-cylinder 41 is a hollow structure and forms a vacuum cavity; a plurality of suction cups 412 connected to the vacuum cavity are provided on the inner wall of the semi-cylinder 41, and an exhaust joint 413 for connecting to an external vacuum pump is also provided on the outer wall of the semi-cylinder 41; the first lateral driving unit 42 is used to drive the two semi-cylinders 41 to close or separate.

[0037] In this embodiment, a transverse guide rail and a slider thereof are provided on the mounting frame 3, and two semi-cylinders 41 are arranged on the sliders respectively. The first transverse driving unit 42 drives the two semi-cylinders 41 to move along the guide rail respectively, thereby improving the stability of the movement.

[0038] The clamping unit of the above design is composed of two symmetrically arranged semi-cylinders 41. After the vacuum design, the semi-cylinder 41 absorbs the rotating target through an external vacuum pump, which enhances the stability of the grasping to a certain extent. In addition, during the transportation process, only the suction cup 412 is in direct contact with the rotating target, which can avoid scratching and pinching the rotating target. It should be noted that since the temperature of the rotating target after unbinding is high, the suction cup 412 uses a high-temperature suction cup 412. In addition, the size of the semi-cylinder 41 should be consistent with the smallest size of the rotating target to meet the needs of rotating targets of various sizes.

[0039] More specifically, the clamping mechanism further includes a second lateral driving unit 43;

[0040] The first lateral driving unit 42 includes a first power output end 421 and a second power output end 422, and the driving directions of the first power output end 421 and the second power output end 422 are opposite;

[0041] The second lateral driving unit 43 includes a first lateral driving module 431 and a second lateral driving module 432;

[0042] The first power output end 421 is used to drive the first lateral driving module 431 to move horizontally; the power output end of the first lateral driving module 431 is connected to a semi-cylinder 41;

[0043] The second power output end 422 is used to drive the second lateral driving module 432 to move lateral; the power output end of the second lateral driving module 432 is connected to another semi-cylinder 41;

[0044] The movement accuracy of the first lateral driving module 431 and the second lateral driving module 432 is higher than the movement accuracy of the first power output end 421 and the second power output end 422 .

[0045] In this embodiment, in order to further increase the clamping force and prevent the rotating target from accidentally falling off, the rotating target is driven by the first transverse driving unit 42, and the two semi-cylinders 41 are first clamped preliminarily. Then, driven by the first transverse driving module 431 and the second transverse driving module 432, the two semi-cylinders 41 apply pressure to the rotating target again to further clamp the rotating target.

[0046] As a preferred embodiment of the present invention, a first front-rear driving module 44 and a second front-rear driving module 45 are further included; the driving directions of the first front-rear driving module 44 and the second front-rear driving module 45 are perpendicular to the driving direction of the first lateral driving unit 42;

[0047] The first front-rear driving module 44 is connected to the first power output end 421 , and the power output end of the first front-rear driving module 44 is connected to the first lateral driving module 431 ;

[0048] The second front-rear driving module 45 is connected to the second power output end 422 , and the power output end of the second front-rear driving module 45 is connected to the second lateral driving module 432 .

[0049] More specifically, this embodiment also provides longitudinal guide rails and sliders on the above-mentioned transverse guide rails and sliders, and the first front and rear drive module 44 and the second front and rear drive module 45 respectively drive the semi-cylinder 41 to move forward and backward along the corresponding longitudinal guide rails and sliders, thereby improving the stability of movement.

[0050] Under the above design, in addition to being clamped in the middle, the semi-cylinder 41 can also be moved forward and backward driven by the first front and rear drive module 44 and the second front and rear drive module 45. In actual work, for rotating targets of different sizes, the semi-cylinder 41 can be adjusted forward and backward to make its axis fit with the axis of the rotating target.

[0051] Of course, in practical applications, if only a rotating target of a single size needs to be transported and there is no need to adjust the axes of the two to fit together, the structures of the first front-rear driving module 44 and the second front-rear driving module 45 can be omitted.

[0052] As a preferred embodiment of this embodiment, the first lateral drive unit 42 is composed of two cylinders, that is, the first power output end 421 and the second power output end 422 are both independent cylinders; the first lateral drive module 431, the second lateral drive module 432, the first front and rear drive module 44, and the second front and rear drive module 45 are cylinders.

[0053] As a further preference of this embodiment, the clamping unit further includes two semicircular protective covers 414 ; one protective cover 414 corresponds to one semi-cylinder 41 ; and the protective cover 414 is arranged on the outside of the semi-cylinder 41 .

[0054] Under the above-mentioned preferred embodiment, the protective cover 414 can prevent the rotating target from accidentally colliding with the external bracket when rotating along with the rotating base 1 .

[0055] In this embodiment, the relative position between the protective cover 414 and the semi-cylinder 41 is adjustable, that is, the protective cover 414 and the semi-cylinder 41 are first driven by the first transverse driving unit 42 to move simultaneously, but the power output end of the first transverse driving module 431 and the power output end of the second transverse driving module 432 are connected to the semi-cylinder 41 through the protective cover 414, thereby independently controlling the semi-cylinder 41 to clamp toward the center, the purpose of which is to increase the clamping force to meet the demand of transferring rotating targets with heavier weight.

[0056] Of course, in some embodiments, the relative position between the protective cover 414 and the semi-cylinder 41 can also be fixed, and it is only necessary to change the connection relationship between the protective cover 414 and the semi-cylinder 41.

[0057] In this embodiment, the lifting mechanism 2 includes a support frame arranged on the rotating base 1, a driving shaft and a transmission shaft arranged side by side on the support frame, a transmission chain connecting the driving shaft and the transmission shaft, and a first rotating drive module arranged on the support frame and used to drive the driving shaft to rotate.

[0058] In this embodiment, the rotating base 1 includes a fixed base, a rotating base arranged on the fixed base, and a second rotating driving module for driving the rotating base to rotate; the lifting mechanism 2 is arranged on the rotating base.

[0059] Preferably, the first rotation driving module and the second rotation driving module are both motors.

[0060] It should be noted that only one mechanical structure for achieving lifting is provided in this embodiment, and those skilled in the art can easily imagine using other mechanical structures to achieve it, such as a transmission structure such as a lifting sliding screw. In addition, the rotating base 1 is also a commonly used technical means by those skilled in the art, so it is not explained too much in this embodiment and the drawings of the specification.

[0061] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A circular target material automatic unbinding device, characterized in that: It comprises a rotating base, a lifting mechanism and a mounting frame; the lifting mechanism is arranged on the rotating base; the mounting frame is arranged on the lifting mechanism and is driven by the lifting mechanism to move vertically up and down; the mounting frame is provided with a clamping mechanism for grabbing the rotating target material.

2. The automatic unbinding device for round targets according to claim 1, characterized in that: The clamping mechanism includes a clamping unit and a first lateral driving unit; the clamping unit is composed of two symmetrically arranged semi-cylinders; the semi-cylinders are hollow structures and form a vacuum chamber; a plurality of suction cups connected to the vacuum chamber are provided on the inner wall of the semi-cylinder, and an exhaust joint for connecting to an external vacuum pump is also provided on the outer wall of the semi-cylinder; the first lateral driving unit is used to drive the two semi-cylinders to close or separate.

3. The automatic unbinding device for round targets according to claim 2, characterized in that: The clamping mechanism further comprises a second lateral driving unit; The first lateral driving unit comprises a first power output end and a second power output end, and the driving directions of the first power output end and the second power output end are opposite; The second lateral driving unit includes a first lateral driving module and a second lateral driving module; The first power output end is used to drive the first lateral driving module to move lateraly; The power output end of the first lateral driving module is connected to a semi-cylinder; The second power output end is used to drive the second lateral driving module to move lateraly; The power output end of the second lateral driving module is connected to another semi-cylinder; The motion accuracy of the first lateral driving module and the second lateral driving module is higher than the motion accuracy of the first power output end and the second power output end.

4. The automatic unbinding device for round targets according to claim 3 is characterized in that: The clamping mechanism further includes a first front-to-back driving module and a second front-to-back driving module; the driving directions of the first front-to-back driving module and the second front-to-back driving module are perpendicular to the driving direction of the first lateral driving unit; The first front and rear drive module is connected to the first power output end, and the power output end of the first front and rear drive module is connected to the first lateral drive module; The second front and rear drive module is connected to the second power output end, and the power output end of the second front and rear drive module is connected to the second lateral drive module.

5. The automatic unbinding device for round targets according to claim 3, characterized in that: The first lateral drive unit is one of a double-headed air cylinder, a double-headed oil cylinder, and a double-headed electric cylinder; Alternatively, the first lateral drive unit is composed of two air cylinders, oil cylinders or electric cylinders.

6. The automatic unbinding device for round targets according to claim 4, characterized in that: The first transverse driving module, the second transverse driving module, the first front-rear driving module, and the second front-rear driving module are each independently a pneumatic cylinder, an oil cylinder, or an electric cylinder.

7. The automatic unbinding device for round targets according to claim 2, characterized in that: The clamping unit also includes two semicircular protective covers; one protective cover corresponds to one semi-cylinder; and the protective cover is arranged on the outside of the semi-cylinder.

8. The automatic unbinding device for round targets according to claim 7, characterized in that: The relative position between the protective cover and the semi-cylinder is fixed or adjustable.

9. The automatic unbinding device for round targets according to claim 1, characterized in that: The lifting mechanism includes a support frame arranged on a rotating base, a driving shaft and a transmission shaft arranged side by side on the support frame, a transmission chain connecting the driving shaft and the transmission shaft, and a first rotating driving module arranged on the support frame and used to drive the driving shaft to rotate.

10. The automatic unbinding device for round targets according to claim 1, characterized in that: The rotating base comprises a fixed base, a rotating base arranged on the fixed base, and a second rotating driving module for driving the rotating base to rotate; the lifting mechanism is arranged on the rotating base.

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