Air inlet pipe

Abstract

The utility model provides an air inlet pipe which comprises an air inlet pipe body, the air inlet pipe body comprises at least three pipe bodies, the pipe bodies are sequentially sleeved in the radial direction, an annular space is formed between every two adjacent pipe bodies, the corresponding ends of the pipe bodies are connected into a whole to achieve sealing of the annular spaces, and heat insulation materials are filled in each annular space. At least two heat insulation layers are formed in the pipe wall of the gas inlet pipe to play a role in heat insulation and ensure that process gas cannot be decomposed and volatilized due to rapid temperature rise in the gas inlet pipe, so that on one hand, the deposition of solid decomposers of the process gas on the inner wall of the gas inlet pipe is reduced, and the problem of blockage of the gas inlet pipe is reduced and even solved; the service life of the intake pipe is prolonged; and on the other hand, the process gas participates in the preparation process of the film due to high-temperature decomposition only after entering the process pipe, and is not consumed in the gas inlet pipe, so that the process quality of the wafer is improved.

Description

Technical Field

[0001] The present application relates to the technical field of chemical vapor deposition, and in particular to an air intake pipe. Background Art

[0002] In the prior art, in the Chemical Vapor Deposition (CVD) technology, the air inlet pipe is usually made of stainless steel. The process gas enters the process pipe through the air inlet pipe and undergoes a chemical reaction on the surface of the wafer to deposit a thin film. As the process gas enters the air inlet pipe and is transported to the inside of the process pipe, the temperature of the process gas in the air inlet pipe also rises. When the temperature in the air inlet pipe exceeds the decomposition temperature of the process gas, the process gas will begin to decompose in the air inlet pipe. If the decomposition product contains solid substances (such as SiH 4 →Si+2H 2 ), it is very easy to crystallize on the inner wall of the intake pipe. After a period of use, the intake pipe will be blocked, resulting in abnormal gas flow, and then abnormal thickness of the deposited film.

[0003] Therefore, how to provide an air intake pipe to reduce or even solve the problem of air intake pipe blockage, extend the service life of the air intake pipe, and improve the process quality of the chip is a technical problem that technical personnel in this field urgently need to solve. Utility Model Content

[0004] The purpose of this application is to provide an air intake pipe, reduce or even solve the problem of air intake pipe blockage, extend the service life of the air intake pipe, and improve the process quality of the chip.

[0005] In order to solve the above technical problems, the present application provides an intake pipe, including an intake pipe body, wherein the intake pipe body includes at least three tube bodies, each of the tube bodies is sequentially arranged in a radial direction, and an annular space is formed between two adjacent tube bodies. The corresponding ends of each of the tube bodies are connected together to realize the closure of the annular space, and each of the annular spaces is filled with heat insulation material.

[0006] The utility model provides an air inlet pipe, wherein the wall of the air inlet pipe has at least two closed annular spaces inside, and each annular space is filled with heat insulating material, that is, at least two heat insulating layers are formed inside the wall of the air inlet pipe, and the heat insulating layers can play a heat insulating role in the process of conveying process gas from the air inlet pipe to the inside of the process pipe, so that even if the process temperature is higher than the decomposition temperature of the process gas, the temperature inside the air inlet pipe is still lower than the decomposition temperature of the process gas, which well ensures that the process gas will not be decomposed and volatilized due to rapid temperature rise during the process of entering the process pipe through the air inlet pipe. On the one hand, the deposition of solid decomposition products of the process gas on the inner wall of the air inlet pipe is reduced, the problem of blockage of the air inlet pipe is reduced or even solved, and the service life of the air inlet pipe is extended; on the other hand, the process gas will not be decomposed due to high temperature and participate in the preparation process of thin film deposition only after entering the process pipe, and will not be consumed in the air inlet pipe, which is more conducive to improving the process quality of the chip.

[0007] Optionally, the thermal insulation material includes any one of ceramics, aerogel and asbestos.

[0008] Optionally, the inner diameter of the tube body at the innermost end along the radial direction is a, and the value range of a is: 10mm≤a≤15mm.

[0009] Optionally, a=12.7mm.

[0010] Optionally, the outer diameter of the tube body at the radially outermost end is b, and the value range of b is: 25mm≤b≤35mm.

[0011] Optionally, b=30mm.

[0012] Optionally, the inner hole of the air intake pipe forms an air intake channel, and the diameter of the air intake channel remains unchanged.

[0013] Optionally, the inner hole of the air inlet pipe forms an air inlet channel, and the air inlet channel includes a constant diameter section and a variable diameter section, the variable diameter section is closer to the air outlet end of the air inlet pipe relative to the constant diameter section, and the diameter of the variable diameter section gradually expands in the direction away from the constant diameter section.

[0014] Optionally, the peripheral wall of the diameter-changing section is a plane or a curved surface.

[0015] Optionally, a VCR joint is further included, wherein the VCR joint is connected to the air inlet end of the air inlet pipe body. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is an axial cross-sectional view of the first specific embodiment of the air intake pipe provided by the utility model at the air outlet end;

[0017] Figure 2 for Figure 1 A transverse cross-sectional view of the air intake pipe;

[0018] Figure 3 This is an axial cross-sectional view of the second specific embodiment of the air intake pipe provided by the utility model at the air outlet end;

[0019] Figure 4 This is an axial cross-sectional view of the third specific embodiment of the air intake pipe provided by the utility model at the air outlet end.

[0020] in, Figure 1-Figure 4 The reference numerals in the figures are as follows:

[0021] 1-tube body;

[0022] A-annular space;

[0023] O-intake channel;

[0024] O1-equal diameter segment;

[0025] O2-reducing section. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the technical solution of the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0027] In the embodiments of the present application, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

[0028] Please refer to Figure 1-Figure 2 , Figure 1 This is an axial cross-sectional view of the first specific embodiment of the air intake pipe provided by the utility model at the air outlet end; Figure 2 for Figure 1 Transverse cross-section of the intake duct.

[0029] The utility model provides an air intake pipe, including an air intake pipe body, which includes at least three pipe bodies 1. The pipe bodies 1 are sequentially mounted along the radial direction, and an annular space A is formed between two adjacent pipe bodies 1. The corresponding ends of the pipe bodies 1 are connected together to realize the closure of the annular space A, and each annular space A is filled with heat insulation material.

[0030] The utility model provides an air inlet pipe, wherein the interior of the pipe wall of the air inlet pipe is provided with at least two closed annular spaces A, and each annular space A is filled with heat insulating material, that is, at least two heat insulating layers are formed inside the pipe wall of the air inlet pipe, and the heat insulating layers can play a heat insulating role in the process of conveying process gas from the air inlet pipe to the interior of the process pipe, so that even if the process temperature is higher than the decomposition temperature of the process gas, the temperature inside the air inlet pipe is still lower than the decomposition temperature of the process gas, which well ensures that the process gas will not be decomposed and volatilized due to rapid temperature rise during the process of entering the process pipe through the air inlet pipe. On the one hand, the deposition of solid decomposition products of the process gas on the inner wall of the air inlet pipe is reduced, the problem of blockage of the air inlet pipe is reduced or even solved, and the service life of the air inlet pipe is extended; on the other hand, the process gas will not be decomposed due to high temperature and participate in the preparation process of thin film deposition only after entering the process pipe, and will not be consumed in the air inlet pipe, which is more conducive to improving the process quality of the wafer.

[0031] The heat insulating material filled in each annular space A includes any one of ceramics, aerogel and asbestos.

[0032] In other words, the heat insulating materials inside each annular space A can be the same or different. Of course, in practice, the heat insulating material is not limited to the above-mentioned ceramics, aerogels and asbestos, and can also be glass fiber, polyurethane foam board, etc.; the heat insulating material is not limited to solid, and can also be gas or liquid, as long as the heat insulating effect can be guaranteed.

[0033] Depend on Figure 1 It can be seen that in the present embodiment, the air intake pipe body includes four tube bodies 1, and three layers of thermal insulation layers are formed inside the tube wall of the air intake pipe. In practice, there is no limit on the number of tube bodies 1 included in the air intake pipe body, and there is no limit on the number of thermal insulation layers formed. The number of tube bodies 1 included in the air intake pipe body is n, n≥3, and the number of thermal insulation layers formed inside the tube wall of the air intake pipe is m, m≥2.

[0034] Please refer to Figure 1 , Figure 3-Figure 4 , Figure 3 This is an axial cross-sectional view of the second specific embodiment of the air intake pipe provided by the utility model at the air outlet end; Figure 4 This is an axial cross-sectional view of the third specific embodiment of the air intake pipe provided by the utility model at the air outlet end.

[0035] In this embodiment, the inner diameter of the tube body 1 at the innermost end in the radial direction is a, and the value range of a is: 10mm≤a≤15mm.

[0036] In practice, the inner hole of the tube body 1 at the innermost end in the radial direction forms at least part of the air inlet passage O. Figure 1In the first embodiment shown, the inner hole of the tube body 1 at the innermost end in the radial direction forms the air inlet passage O, and the inner diameter of the tube body 1 at the innermost end in the radial direction is the diameter of the air inlet passage O; Figure 3 and Figure 4 In the illustrated embodiment, the inner hole of the radially innermost tube body 1 forms part of the air inlet passage O, and the inner diameter of the radially innermost tube body 1 forms the minimum diameter of the air inlet passage O.

[0037] Understandably, regardless of Figure 1 In the embodiment shown, or in Figure 3 and Figure 4 In the illustrated embodiment, the inner diameter of the tube body 1 at the innermost end in the radial direction determines the flow area of ​​the inlet channel O, thereby affecting the flow rate of the process gas. Therefore, in practice, the inner diameter of the tube body 1 at the innermost end in the radial direction can be adaptively designed according to the process requirements. The present application has found through research that when the inner diameter of the tube body 1 at the innermost end in the radial direction is within the above-mentioned value range, the flow rate of the process gas can meet the preparation requirements of the thin film and ensure the process quality of the wafer.

[0038] Preferably, a=12.7 mm.

[0039] After further research, the present applicant found that when the inner diameter of the tube body 1 at the innermost end along the radial direction meets the above-mentioned value requirements, the process quality of the obtained chip is the best.

[0040] Please refer to Figure 1 , Figure 3-Figure 4 The outer diameter of the tube body 1 at the outermost end in the radial direction is b, and the value range of b is: 25mm≤b≤35mm.

[0041] In the process of preparing thin films using CVD technology, the air inlet pipe is actually located inside the process pipe. In order to avoid affecting the process of preparing thin films, the air inlet pipe should minimize the space occupied inside the process pipe; at the same time, when the diameter / minimum diameter of the air inlet channel O is determined, the wall thickness of the air inlet pipe also needs to meet the space requirements of the thermal insulation layer, and thus the outer diameter of the tube body 1 at the radially outermost end is also determined. The present application has found through research that when the outer diameter of the tube body 1 at the radially outermost end is within the above-mentioned value range, the space occupied by the air inlet pipe inside the process pipe can be minimized on the basis of satisfying the flow area and thermal insulation effect of the air inlet channel O.

[0042] Preferably, b=30 mm.

[0043] After further research, the present applicant found that when the outer diameter of the tube body 1 at the radially outermost end meets the above-mentioned value requirements, the air intake pipe can better balance the space occupancy and air intake demand.

[0044] Please continue to refer to Figure 1In this embodiment, the inner hole of the intake pipe forms an intake channel O, and the diameter of the intake channel O remains unchanged.

[0045] Depend on Figure 1 It can be seen that the outlet ends of the tube bodies 1 are in a mutually flush position, and the end wall connecting the outlet ends of the tube bodies 1 is defined as the outlet end wall. In this embodiment, the plane where the outlet end wall is located is perpendicular to the axial direction of the inlet pipe. The advantage of this embodiment is that it is easy to process.

[0046] Please continue to refer to Figure 3 and Figure 4 The inner hole of the intake pipe forms an intake channel O, which includes a constant diameter section O1 and a variable diameter section O2. The variable diameter section O2 is closer to the outlet end of the intake pipe than the constant diameter section O1, and the diameter of the variable diameter section O2 gradually expands in a direction away from the constant diameter section O1.

[0047] Depend on Figure 3 and Figure 4 It can be seen that in these two embodiments, the air outlet end of each tube body 1 is axially retracted from the radial outer end to the radial inner end, and the end wall connecting the air outlet ends of each tube body 1 is defined as the air outlet end wall, and the air outlet end wall extends inwardly from the radial outer end to the radial inner end.

[0048] As configured above, the flow area of ​​the air inlet channel O gradually increases in the direction close to the air outlet. Even if part of the process gas is decomposed and volatilized and may adhere to the inner wall of the variable diameter section O2, blockage and aggregation of the air outlet can still be avoided, thereby ensuring smooth flow of the process gas.

[0049] Further, in Figure 3 In the embodiment, the peripheral wall of the diameter-changing section O2 is a plane; Figure 4 In this embodiment, the peripheral wall of the diameter-changing section O2 is a curved surface.

[0050] In addition, the air intake pipe of the present application further comprises a VCR (Vacuum Coupling Radius Seal) joint, and the VCR joint is connected to the air intake end of the air intake pipe body.

[0051] Among them, the VCR joint is a type of face seal joint, and the sealing element uses a metal gasket. The metal gasket is compressed by the interlocking of the internal and external threads, causing the metal gasket to deform to a certain extent, thereby achieving a sealing effect and realizing a sealed connection between the intake pipe and the process gas source. The VCR joint has a high-purity face seal, so that it can be repeatedly disassembled and assembled in the range of vacuum to positive pressure (the metal gasket needs to be replaced). When the intake end of the intake pipe is blocked, the VCR joint can be disassembled and replaced to extend the service life of the intake pipe.

[0052] The specific structure of the VCR connector is well known to those skilled in the art and will not be described in detail here.

[0053] In practice, there is no limitation on the material of the tube body 1, and it may be stainless steel, for example.

[0054] The above is a detailed introduction to an air intake pipe provided by the present application. The principles and implementation methods of the present application are described in detail using specific examples. The description of the above embodiments is only used to help understand the method and core idea of ​​the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made to the present application without departing from the principles of the present application, and these improvements and modifications also fall within the scope of protection of the claims of the present application.

Claims

1. An air intake pipe, characterized in that: The invention comprises an air intake pipe body, wherein the air intake pipe body comprises at least three pipe bodies (1), each of the pipe bodies (1) is sequentially nested in a radial direction, an annular space (A) is formed between two adjacent pipe bodies (1), corresponding ends of each of the pipe bodies (1) are connected together to realize the closure of the annular space (A), and each of the annular spaces (A) is filled with a heat insulating material.

2. The air intake pipe according to claim 1, characterized in that: The thermal insulation material includes any one of ceramics, aerogel, and asbestos.

3. The air intake pipe according to claim 1, characterized in that: The inner diameter of the tube body (1) at the innermost end in the radial direction is a, and the value range of a is: 10mm≤a≤15mm.

4. The air intake pipe according to claim 3, characterized in that: a=12.7mm.

5. The air intake pipe according to claim 1, characterized in that: The outer diameter of the tube body (1) at the outermost end along the radial direction is b, and the value range of b is: 25mm≤b≤35mm.

6. The air intake pipe according to claim 5, characterized in that: b=30mm.

7. The air intake pipe according to any one of claims 1 to 6, characterized in that: The inner hole of the air intake pipe forms an air intake passage (O), and the diameter of the air intake passage (O) remains unchanged.

8. The air intake pipe according to any one of claims 1 to 6, characterized in that: The inner hole of the air intake pipe forms an air intake channel (O), and the air intake channel (O) comprises a constant diameter section (O1) and a variable diameter section (O2), the variable diameter section (O2) is closer to the air outlet end of the air intake pipe than the constant diameter section (O1), and the diameter of the variable diameter section (O2) gradually expands in a direction away from the constant diameter section (O1).

9. The air intake pipe according to claim 8, characterized in that: The peripheral wall of the diameter-changing section (O2) is a flat surface or a curved surface.

10. The air intake pipe according to any one of claims 1 to 6, characterized in that: It also includes a VCR joint, which is connected to the air inlet end of the air inlet pipe body.

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