Combined high vacuum valve with adjustable bypass

Abstract

The utility model discloses a combined high vacuum valve with an adjustable bypass, which comprises a main pumping valve body and a bypass valve body fixedly mounted on the side of the main pumping valve body. And a bypass air inlet and a bypass air outlet of the bypass valve body are respectively communicated with a main pumping valve air inlet cavity and a main pumping valve air outlet cavity in the main pumping valve body, so that the bypass valve body forms a bypass at the side part of the main pumping valve body. The bypass valve has the beneficial effects that the bypass valve body is additionally arranged at the side part of the main pumping valve body, and meanwhile, the bypass air inlet and the bypass air outlet of the bypass valve body are respectively communicated with the main pumping valve air inlet cavity and the main pumping valve air outlet cavity of the main pumping valve body, so that the bypass valve body can form a bypass at the side part of the main pumping valve body; therefore, the pre-pumping operation of the vacuum equipment can be realized by arranging the bypass, the pipeline layout cost is prevented from being increased, and the integration degree is high.

Description

Technical Field

[0001] The utility model relates to the field of vacuum equipment auxiliary components, in particular to a combined high vacuum valve with an adjustable bypass. Background Art

[0002] In the system of vacuum equipment, in order to achieve the purpose of pre-pumping, a small pre-pumping valve needs to be connected in parallel to the passage of the main pumping valve, and then the pre-pumping operation of the vacuum equipment is performed by opening the pre-pumping valve.

[0003] However, in the current process of setting up the pre-pumping valve, when the main pumping valve and the pre-pumping valve are combined with the exhaust pipeline, both are independently connected to the exhaust pipeline. Therefore, the main pipeline needs to be switched out so that the pre-pumping valve can be smoothly set up by adding pipelines. This not only increases the pipeline laying cost, but also has a low degree of integration. In addition, under different processes, different pre-pumping valve calibers need to be selected to meet the needs, which further increases the maintenance cost and process switching debugging time. Utility Model Content

[0004] The purpose of the utility model is to provide a combined high-vacuum valve with an adjustable bypass in order to solve the above-mentioned problem. A bypass valve body is added to the side of the main pumping valve body. At the same time, the bypass air inlet and the bypass air outlet of the bypass valve body are respectively connected to the main pumping valve air inlet cavity and the main pumping valve air outlet cavity of the main pumping valve body, so that the bypass valve body can form a bypass at the side position of the main pumping valve body, thereby realizing the pre-pumping operation of the vacuum equipment by setting the bypass, as described below for details.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] The utility model provides a combined high vacuum valve with an adjustable bypass, comprising a main pumping valve body and a bypass valve body, wherein the bypass valve body is fixedly mounted on the side of the main pumping valve body, and the bypass air inlet and bypass air outlet of the bypass valve body are respectively connected to the main pumping valve air inlet cavity and the main pumping valve air outlet cavity inside the main pumping valve body, so that the bypass valve body forms a bypass on the side of the main pumping valve body;

[0007] An opening adjustment component for adjusting the opening of the bypass valve body is installed on the inner bottom of the bypass valve body.

[0008] Preferably, a main air inlet is provided on the other side of the main pumping valve body, and the main air inlet is communicated with the main pumping valve air inlet cavity inside the main pumping valve body. A main air outlet is provided at the bottom of the main pumping valve body, and the main air outlet is communicated with the main pumping valve air outlet cavity inside the main pumping valve body.

[0009] Preferably, the opening adjustment component includes a regulating valve core and a valve core opening, the regulating valve core is horizontally inserted into the bottom of the bypass valve body, and the valve core opening is opened on the periphery of the regulating valve core, the valve core opening is located in the passage between the bypass air inlet and the bypass air outlet, and the opening size of the passage between the bypass air inlet and the bypass air outlet can be adjusted by driving the regulating valve core to rotate the valve core opening to adjust the angle.

[0010] Preferably, both ends of the outer periphery of the regulating valve core are sealed with the bypass valve body by installing sealing rings, and the outer end position of the regulating valve core is limited by coaxially installing a retaining ring.

[0011] Preferably, a plurality of limiting grooves evenly distributed in the circumferential direction are provided on the periphery of the end of the regulating valve core, and a ball-shaped set screw is inserted and installed on the front part of the bypass valve body by means of threaded engagement, and the inner end of the ball-shaped set screw is pressed and fitted with one of the limiting grooves.

[0012] Preferably, an outer end surface of the regulating valve core is circumferentially printed with an opening scale indicating the opening size with reference to the ball-shaped set screw.

[0013] Preferably, a hexagonal operating groove is provided in the middle of the outer end surface of the regulating valve core.

[0014] Preferably, the cross-sectional shape of the valve core opening is Y-shaped, trapezoidal or circular.

[0015] Preferably, a cleaning opening is provided at the bottom of the bypass valve body below the valve core opening, and a sealing cover plate for controlling opening and closing is detachably installed coaxially with the cleaning opening.

[0016] Preferably, the cover plate and the cleaning opening are coaxially and detachably connected by means of threaded engagement.

[0017] The above-mentioned combined high-vacuum valve with an adjustable bypass is adopted. Specifically, when in use, the bypass valve body is additionally provided at the side of the main pumping valve body, and the bypass air inlet and the bypass air outlet of the bypass valve body are respectively connected with the main pumping valve air inlet cavity and the main pumping valve air outlet cavity of the main pumping valve body, so that the bypass valve body can form a bypass at the side position of the main pumping valve body, so that the pre-pumping operation of the vacuum equipment can be realized by setting the bypass, which avoids increasing the pipeline laying cost and has a high degree of integration. At the same time, since the opening adjustment component is installed at the inner bottom position of the bypass valve body, the opening adjustment The whole assembly can adjust the size of the opening of the bypass valve body, which is convenient for adaptively adjusting the opening of the bypass valve body according to the change of process. There is no need to choose to replace different pre-pumping valve diameters when the process changes, which reduces maintenance costs and process switching debugging time. Specifically, during operation, the angle of the valve core opening can be rotated and adjusted by rotating the regulating valve core, and then the opening of the bypass valve body can be adjusted by rotating the valve core opening to adjust the angle, thereby realizing the change of the intake volume. The method for adjusting the opening of the bypass valve body is simple and easy to implement. At the same time, in the process of adjusting the opening size, due to the end of the regulating valve core A plurality of limiting grooves are arranged uniformly in the circumferential direction on the periphery, and at the same time, the front part of the bypass valve body is interspersed with the ball-shaped set screw by means of threaded engagement. Then, when the regulating valve core is rotated and adjusted, the adjusted angle of the regulating valve core can be positioned by pressing the inner end of the ball-shaped set screw against the corresponding limiting groove, thereby preventing the regulating valve core from rotating naturally. Moreover, since the opening scale is printed on the outer end surface of the regulating valve core, the opening adjustment of the bypass valve body can be controlled by referring to the opening scale with the ball-shaped set screw as a reference, thereby further facilitating the operator. The opening size of the bypass valve body is adjusted, and specifically with respect to the valve core opening, the cross-sectional shape of the valve core opening of the regulating valve core can be Y-shaped, trapezoidal or circular, which makes it easy to select the regulating valve core with a suitable valve core opening according to different process requirements, thereby enriching the adaptability of the regulating valve core. Specifically with respect to the bottom position of the bypass valve body, the cleaning opening at the bottom of the bypass valve body is coaxially and detachably installed with the covering plate, and then when performing routine maintenance on the bypass valve body, the accumulated powder at the valve core opening can be discharged smoothly through the cleaning opening by removing the covering plate, thereby realizing routine cleaning of the valve core opening.

[0018] The beneficial effects are as follows: 1. The utility model adds a bypass valve body on the side of the main pumping valve body, and the bypass air inlet and bypass air outlet of the bypass valve body are respectively connected with the main pumping valve air inlet cavity and the main pumping valve air outlet cavity of the main pumping valve body, so that the bypass valve body can form a bypass at the side position of the main pumping valve body, so that the pre-pumping operation of the vacuum equipment can be realized by setting the bypass, avoiding the increase of pipeline layout cost and having a high degree of integration;

[0019] 2. An opening adjustment component is installed at the inner bottom of the bypass valve body, so that the opening of the bypass valve body can be adjusted through the opening adjustment component, which is convenient for adaptive adjustment of the opening of the bypass valve body according to the process changes. There is no need to choose to replace different pre-pumping valve calibers when the process changes, which reduces maintenance costs and process switching debugging time;

[0020] 3. The angle of the valve core opening can be adjusted by rotating the valve core, and then the opening of the bypass valve body can be adjusted by rotating the valve core opening to change the intake volume. The opening adjustment method of the bypass valve body is simple and easy to achieve;

[0021] 4. A plurality of limiting grooves are evenly distributed in the circumferential direction on the periphery of the end of the regulating valve core. At the same time, a ball-shaped set screw is inserted and installed in the front part of the bypass valve body by means of threaded engagement. Then, when the regulating valve core is rotated and adjusted, the inner end of the ball-shaped set screw is pressed against the corresponding limiting groove to position the adjusted angle of the regulating valve core, thereby preventing the regulating valve core from rotating naturally.

[0022] 5. The outer end surface of the regulating valve core is printed with an opening scale, and the size of the bypass valve body opening can be controlled by referring to the opening scale with the ball-shaped set screw as the reference, which further facilitates the operator to adjust the size of the bypass valve body opening;

[0023] 6. The cross-sectional shape of the valve core opening of the regulating valve core can be Y-shaped, trapezoidal and circular, which makes it easy to select the regulating valve core with the appropriate valve core opening according to different process requirements, enriching the adaptability of the regulating valve core;

[0024] 7. The cleaning opening at the bottom of the bypass valve body is coaxially detachably installed with a cover plate. When the bypass valve body is routinely maintained, the accumulated powder in the valve core opening can be smoothly discharged through the cleaning opening by removing the cover plate, thereby realizing routine cleaning of the valve core opening. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 This is an overall axonometric diagram of the utility model when the regulating valve core is located at the side position;

[0027] Figure 2 This utility model Figure 1 A front cross-sectional view of

[0028] Figure 3 This utility model Figure 1 Left side sectional view of

[0029] Figure 4 It is an external schematic diagram of a regulating valve core of the utility model in which the valve core opening is Y-shaped;

[0030] Figure 5 It is a cross-sectional schematic diagram of a regulating valve core of the utility model in which the valve core opening is Y-shaped;

[0031] Figure 6 It is an external schematic diagram of a regulating valve core of the utility model, in which the valve core opening is a trapezoid;

[0032] Figure 7 It is a cross-sectional schematic diagram of a valve core opening of the regulating valve core of the utility model being a trapezoid;

[0033] Figure 8 It is a front cross-sectional view when the regulating valve core of the utility model is located at the rear position;

[0034] Fig. 9 It is a rear external view when the regulating valve core of the utility model is located at the rear position.

[0035] The following are the descriptions of the reference numerals:

[0036] 1. Bypass valve body; 101. Bypass air inlet; 102. Bypass air outlet; 2. Opening adjustment assembly; 201. Adjusting valve core; 202. Opening scale; 203. Operating slot; 204. Ball-shaped set screw; 205. Valve core sealing ring; 206. Snap ring; 207. Valve core opening; 208. Cleaning opening; 209. Cover plate; 2010. Limiting groove; 3. Main pumping valve body; 301. Main air inlet; 302. Main air outlet; 303. Main pumping valve air inlet cavity; 304. Main pumping valve air outlet cavity. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the utility model.

[0038] See also Figure 1-Figure 7 As shown, the utility model provides a combined high vacuum valve with an adjustable bypass, including a main pumping valve body 3 and a bypass valve body 1, the bypass valve body 1 is fixedly installed on the side of the main pumping valve body 3, and the bypass air inlet 101 and the bypass air outlet 102 of the bypass valve body 1 are respectively connected to the main pumping valve air inlet cavity 303 and the main pumping valve air outlet cavity 304 inside the main pumping valve body 3, so that the bypass valve body 1 forms a bypass on the side of the main pumping valve body 3. The effect of such a setting is that the bypass valve body 1 can form a bypass at the side position of the main pumping valve body 3, so that the pre-pumping operation of the vacuum equipment can be realized by setting the bypass.

[0039] See also Figure 1-Figure 3 As shown, an opening adjustment component 2 for adjusting the opening of the bypass valve body 1 is installed at the inner bottom of the bypass valve body 1. Specifically, the opening adjustment component 2 includes a regulating valve core 201 and a valve core opening 207. The regulating valve core 201 is horizontally inserted in the bottom of the bypass valve body 1, and a valve core opening 207 is opened on the periphery of the regulating valve core 201. The valve core opening 207 is located in the passage between the bypass air inlet 101 and the bypass air outlet 102, and the passage between the bypass air inlet 101 and the bypass air outlet 102 can be adjusted in size by driving the valve core opening 207 to rotate and adjust the angle by the regulating valve core 201. The purpose of such a setting is that the opening of the bypass valve body 1 can be adjusted in size by the opening adjustment component 2, so as to facilitate the adaptive adjustment of the opening of the bypass valve body 1 according to the change of the process.

[0040] See also Figure 1-Figure 3 As shown, the main pumping valve body 3 is optimized as follows: a main air inlet 301 is provided on the other side of the main pumping valve body 3, and the main air inlet 301 is communicated with the main pumping valve air inlet chamber 303 inside the main pumping valve body 3; a main air outlet 302 is provided at the bottom of the main pumping valve body 3, and the main air outlet 302 is communicated with the main pumping valve air outlet chamber 304 inside the main pumping valve body 3. Such an arrangement facilitates the bypass valve body 1 to form a connected bypass at the side position of the main pumping valve body 3, thereby realizing the pre-pumping operation of the vacuum equipment.

[0041] See also Figure 1-Figure 7As shown, the opening adjustment component 2 is optimized as follows: the outer ends of the regulating valve core 201 are sealed with the bypass valve body 1 by adding sealing rings, and the outer end position of the regulating valve core 201 is limited by coaxially adding a retaining ring 206. With this arrangement, the regulating valve core 201 can be stably sealed by adding a sealing ring, and the regulating valve core 201 can be accurately limited to the installation position by adding a retaining ring 206. At the same time, a plurality of circumferentially evenly distributed limiting grooves 2010 are optionally provided on the outer periphery of the end of the regulating valve core 201, and a ball-shaped set screw 204 is inserted and installed on the front part of the bypass valve body 1 by means of threaded engagement, and the inner end of the ball-shaped set screw 204 is pressed and matched with one of the limiting grooves 2010. The purpose of such a setting is that when the rotation and adjustment of the regulating valve core 201 is completed, the adjusted angle of the regulating valve core 201 can be positioned by pressing the inner end of the ball-shaped set screw 204 against the corresponding limiting groove 2010, thereby avoiding the natural rotation of the regulating valve core 201.

[0042] At the same time, optionally, the outer end surface of the regulating valve core 201 is printed with an opening scale 202 indicating the opening size with reference to the ball-type tightening screw 204. This arrangement makes it easy to control the size of the opening adjustment of the bypass valve body 1 by referring to the opening scale 202 with reference to the ball-type tightening screw 204. Furthermore, an internal hexagonal operating groove 203 is provided in the middle of the outer end surface of the regulating valve core 201, so that the regulating valve core 201 can be smoothly turned to adjust the opening by inserting a tool such as an external hexagonal wrench into the operating groove 203.

[0043] Further optionally, the cross-sectional shape of the valve core opening 207 is Y-shaped, trapezoidal or circular, so that the regulating valve core 201 with a suitable valve core opening 207 can be selected according to different process usage requirements. More preferably, a cleaning opening 208 is opened at the bottom of the bypass valve body 1 below the valve core opening 207, and the cleaning opening 208 is coaxially and detachably installed with a cover plate 209 for controlling opening and closing. With this arrangement, when the bypass valve body 1 is routinely maintained, the accumulated powder in the valve core opening 207 can be smoothly discharged through the cleaning opening 208 by removing the cover plate 209, thereby achieving routine cleaning of the valve core opening 207. Specifically, with respect to the combination of the cover plate 209 and the cleaning opening 208, the cover plate 209 and the cleaning opening 208 can be coaxially and detachably connected to the cleaning opening 208 by threaded cooperation. The advantage of such an arrangement is that the cover plate 209 and the cleaning opening 208 can be quickly fixedly combined and disassembled by twisting.

[0044] Reference Figure 8-Figure 9As shown, when specifically setting the regulating valve core 201 and the ball-shaped set screw 204 of the opening adjustment assembly 2, in addition to selecting the above-mentioned arrangement direction, the regulating valve core 201 can also be installed through the longitudinal insertion from the rear of the bypass valve body 1, and the ball-shaped set screw 204 can be installed through the outer side of the bypass valve body 1 through threaded engagement, so as to achieve a setting mode in which the regulating valve core 201 is located at the rear of the bypass valve body 1, and then the regulating valve core 201 can be operated from the rear of the bypass valve body 1 to adjust the opening.

[0045] With the above structure, when in use, since a bypass valve body 1 is added to the side of the main pumping valve body 3, and the bypass air inlet 101 and the bypass air outlet 102 of the bypass valve body 1 are respectively connected to the main pumping valve air inlet chamber 303 and the main pumping valve air outlet chamber 304 of the main pumping valve body 3, the bypass valve body 1 can form a bypass at the side position of the main pumping valve body 3, so that the pre-pumping operation of the vacuum equipment can be achieved by setting the bypass, avoiding the increase of pipeline laying cost and having a high degree of integration. At the same time, since an opening adjustment component 2 is installed at the inner bottom position of the bypass valve body 1, the opening of the bypass valve body 1 can be adjusted by the opening adjustment component 2. The opening of the bypass valve body 1 can be adjusted adaptively according to the change of the process, and there is no need to choose to replace a different pre-pumping valve caliber when the process changes, which reduces the maintenance cost and process switching debugging time. Specifically, during operation, the angle of the valve core opening 207 can be rotated and adjusted by rotating the adjusting valve core 201, and then the opening of the bypass valve body 1 can be adjusted by rotating the adjusting angle of the valve core opening 207, thereby realizing the change of the intake volume. The opening adjustment method of the bypass valve body 1 is simple and easy to implement. At the same time, in the process of adjusting the opening size, a plurality of limiting grooves uniformly distributed in the circumferential direction are provided on the periphery of the end of the adjusting valve core 201. 2010, and at the same time, a ball-shaped set screw 204 is inserted and installed on the front part of the bypass valve body 1 by means of threaded engagement. Then, when the regulating valve core 201 is rotated and adjusted, the inner end of the ball-shaped set screw 204 is pressed against the corresponding limit groove 2010 to position the adjusted angle of the regulating valve core 201, so as to avoid the natural rotation of the regulating valve core 201. Moreover, since the outer end surface of the regulating valve core 201 is printed with an opening scale 202, the opening adjustment of the bypass valve body 1 can be controlled by referring to the opening scale 202 with the ball-shaped set screw 204 as a reference, which further facilitates the operator to control the opening of the bypass valve body 1. The size can be adjusted, and specifically with respect to the valve core opening 207, the cross-sectional shape of the valve core opening 207 of the regulating valve core 201 can be Y-shaped, trapezoidal or circular, so that it is convenient to select the regulating valve core 201 with a suitable valve core opening 207 according to different process usage requirements, thereby enriching the adaptability of the regulating valve core 201, and specifically with respect to the bottom position of the bypass valve body 1, the cleaning opening 208 at the bottom of the bypass valve body 1 is coaxially and detachably installed with a covering plate 209, and then when the bypass valve body 1 is subjected to routine maintenance, the accumulated powder at the valve core opening 207 can be smoothly discharged through the cleaning opening 208 by removing the covering plate 209, thereby realizing routine cleaning of the valve core opening 207.

[0046] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A combined high vacuum valve with an adjustable bypass, characterized in that: The invention comprises a main pumping valve body (3) and a bypass valve body (1), wherein the bypass valve body (1) is fixedly mounted on the side of the main pumping valve body (3), and the bypass air inlet (101) and the bypass air outlet (102) of the bypass valve body (1) are respectively connected to the main pumping valve air inlet cavity (303) and the main pumping valve air outlet cavity (304) inside the main pumping valve body (3), so that the bypass valve body (1) forms a bypass on the side of the main pumping valve body (3); An opening adjustment component (2) for adjusting the opening of the bypass valve body (1) is installed on the inner bottom of the bypass valve body (1).

2. A combined high vacuum valve with an adjustable bypass according to claim 1, characterized in that: A main air inlet (301) is provided on the other side of the main pumping valve body (3), and the main air inlet (301) is communicated with a main pumping valve air inlet cavity (303) inside the main pumping valve body (3). A main air outlet (302) is provided at the bottom of the main pumping valve body (3), and the main air outlet (302) is communicated with a main pumping valve air outlet cavity (304) inside the main pumping valve body (3).

3. A combined high vacuum valve with an adjustable bypass according to claim 2, characterized in that: The opening adjustment component (2) comprises a regulating valve core (201) and a valve core opening (207); the regulating valve core (201) is horizontally inserted into the bottom of the bypass valve body (1), and the valve core opening (207) is opened on the periphery of the regulating valve core (201); the valve core opening (207) is located in the passage between the bypass air inlet (101) and the bypass air outlet (102); and the passage between the bypass air inlet (101) and the bypass air outlet (102) can be opened by rotating the valve core opening (207) by the regulating valve core (201) to adjust the angle.

4. A combined high vacuum valve with an adjustable bypass according to claim 3, characterized in that: The two ends of the outer periphery of the regulating valve core (201) and the bypass valve body (1) are sealed by installing sealing rings, and the outer end position of the regulating valve core (201) is limited by coaxially installing a clamping ring (206).

5. A combined high vacuum valve with an adjustable bypass according to claim 4, characterized in that: The outer periphery of the end of the regulating valve core (201) is provided with a plurality of limiting grooves (2010) evenly distributed in the circumferential direction, and the front part of the bypass valve body (1) is interspersed with a ball-shaped set screw (204) by means of threaded engagement, and the inner end of the ball-shaped set screw (204) is pressed and fitted with one of the limiting grooves (2010).

6. A combined high vacuum valve with an adjustable bypass according to claim 5, characterized in that: The outer end surface of the regulating valve core (201) is circumferentially printed with an opening scale (202) indicating the opening size with reference to the ball-shaped set screw (204).

7. A combined high vacuum valve with an adjustable bypass according to claim 6, characterized in that: An inner hexagonal operating groove (203) is provided in the middle of the outer end surface of the regulating valve core (201).

8. The combined high vacuum valve with an adjustable bypass according to claim 7, characterized in that: The cross-sectional shape of the valve core opening (207) is Y-shaped, trapezoidal or circular.

9. A combined high vacuum valve with an adjustable bypass according to any one of claims 3 to 8, characterized in that: A cleaning opening (208) is provided at the bottom of the bypass valve body (1) below the valve core opening (207), and a cover plate (209) for controlling opening and closing is detachably installed coaxially with the cleaning opening (208).

10. The combined high vacuum valve with an adjustable bypass according to claim 9, characterized in that: The cover plate (209) and the cleaning opening (208) are coaxially detachably connected by means of threaded engagement.

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