Device for preparing high-purity ruthenium

Abstract

The utility model provides a device for preparing high-purity ruthenium. The device comprises a shell; the driving motor is fixedly installed at the top of the shell, a connecting rod is fixedly installed at the output end of the driving motor, a fixing frame is fixedly installed at the bottom of the connecting rod, and fixing rings are fixedly installed on the two sides of the inner side face of the fixing frame; the bottom of the supporting rod is fixedly installed at the bottom of the inner side face of the shell. According to the device for preparing the high-purity ruthenium, the drying disc, the inserting rod, the driving motor, the connecting rod, a fixing frame, a fixing ring, a supporting rod, a base plate, a heating electric wire, a connecting plate, a sweeping rod and other structures are matched with one another, and when the device is used, high-purity ruthenium powder arranged in the drying disc can be further heated and dried; and waste of the high-purity ruthenium powder caused by flying of the powder in the drying disc due to heating through hot air is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of preparing high-purity ruthenium, in particular to a device for preparing high-purity ruthenium. Background Art

[0002] The high-purity ruthenium used for sputtering targets in the production of semiconductor ultra-large-scale integrated circuits requires a purity of at least 4N5 (99.995%), and at the same time requires that the impurities such as alkali metals, transition metal elements, radioactive elements, and gas elements in the material have very low content. Specifically, it is required that the purity of pure ruthenium in the high-purity ruthenium sputtering target is at least 99.995% excluding gaseous components. At present, the preparation of high-purity ruthenium mostly adopts the wet pyrolysis process, and obtaining a high-purity ruthenium hydrochloric acid solution is a prerequisite for the preparation of high-purity ruthenium.

[0003] In the prior art, when preparing high-purity ruthenium, drying is a very important step. When drying, a drying device is used, such as the patent application with publication number CN 211339644 U in the prior art, which is fixedly connected with a servo motor through the upper side wall of the drying cylinder, the output shaft of the servo motor is sealed to penetrate the upper side wall of the drying cylinder and is fixedly connected with a bracket, both ends of the bracket are fixedly connected with vertical vertical rods, the lower side wall of the vertical rod is slidably connected with the inner wall of the drying cylinder, and a plurality of storage slots are connected between the side walls of the two vertical rods, and the air outlet of the hot air blower is sealed with a guide pipe, the guide pipe is sealed to penetrate the side wall of the drying cylinder and is sealed with a shunt pipe, the side wall of the shunt pipe is connected with the inner wall of the drying cylinder by a shunt pipe, and the side wall of the shunt pipe is sealed with a plurality of air nozzles away from the guide pipe, and the plurality of air nozzles are respectively located above the plurality of storage slots. The utility model can dry materials quickly and efficiently, and it is very convenient to take and put, and there will be no waste caused by material leakage.

[0004] However, when the device is in use, powdered high-purity ruthenium is placed on a drying plate, and the high-purity ruthenium is dried by hot air. This can easily cause the powder on the drying plate to be blown away during use, thereby easily causing a waste of high-purity ruthenium powder.

[0005] Therefore, it is necessary to provide a device for preparing high-purity ruthenium to solve the above technical problems. Utility Model Content

[0006] The utility model provides a device for preparing high-purity ruthenium, which solves the problem that powder arranged on a drying plate is easily blown away, resulting in waste of high-purity ruthenium powder.

[0007] In order to solve the above technical problems, the utility model provides a device for preparing high-purity ruthenium, comprising:

[0008] shell;

[0009] A driving motor, wherein the driving motor is fixedly mounted on the top of the housing, a connecting rod is fixedly mounted on the output end of the driving motor, a fixing frame is fixedly mounted on the bottom of the connecting rod, and fixing rings are fixedly mounted on both sides of the inner side of the fixing frame;

[0010] A support rod, the bottom of the support rod is fixedly mounted on the bottom of the inner side of the shell, a chassis is fixedly mounted on the outer side of the support rod, a heating wire is fixedly mounted inside the chassis, a panel is fixedly mounted on the top of the chassis, a drying tray is arranged on the top of the chassis, plug-in rods are fixedly mounted on both ends of the bottom of the drying tray, and the plug-in rods are arranged inside the fixing ring;

[0011] Insertion grooves are respectively opened on both sides of the support rod, and the inner side of the insertion groove is provided with a connecting plate, and a plurality of sweeping rods are fixedly installed at the bottom of the connecting plate, and the bottom of the sweeping rod is arranged on the top of the drying plate.

[0012] Preferably, a metal plate is fixedly mounted on one side of the inner side of the insertion slot, a magnetic plate is magnetically attracted to one side of the metal plate, and the magnetic plate is fixedly mounted on one end of the connecting plate.

[0013] Preferably, the front side of the shell is rotatably connected to a door body.

[0014] Preferably, an air outlet pipe is fixedly mounted on the top of the shell.

[0015] Preferably, a filter box is fixedly installed on the top of the air outlet pipe.

[0016] Preferably, filter cotton and activated carbon are respectively arranged on the inner side of the filter box.

[0017] Preferably, the filter cotton is arranged at the bottom of the inner side of the filter box, and the activated carbon is arranged on the top of the filter cotton.

[0018] Compared with the related art, the device for preparing high-purity ruthenium provided by the utility model has the following beneficial effects:

[0019] The utility model provides a device for preparing high-purity ruthenium. Through the cooperation of structures such as a drying plate, a plug-in rod, a driving motor, a connecting rod, a fixing frame, a fixing ring, a supporting rod, a chassis, a heating wire, a connecting plate and a sweeping rod, when in use, the high-purity ruthenium powder arranged inside the drying plate can be heated and dried, and the powder inside the drying plate is prevented from flying around due to heating by hot air, thereby causing waste of the high-purity ruthenium powder. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic structural diagram of a first embodiment of a device for preparing high-purity ruthenium provided by the utility model;

[0021] Figure 2 for Figure 1 The schematic diagram of the internal structure of the shell shown;

[0022] Figure 3 for Figure 1 The schematic diagram of the chassis cross-section structure shown;

[0023] Figure 4 for Figure 3 An enlarged schematic diagram of part A is shown;

[0024] Figure 5 This is a schematic structural diagram of a second embodiment of an apparatus for preparing high-purity ruthenium provided by the utility model.

[0025] Numbers in the figure: 1. outer shell, 11. door body, 12. air outlet pipe, 2. driving motor, 21. connecting rod, 22. fixing frame, 23. fixing ring, 3. supporting rod, 31. chassis, 32. heating wire, 33. enclosure, 34. insertion slot, 35. metal plate, 36. magnetic plate, 37. connecting plate, 38. sweeping rod, 4. drying plate, 41. plug-in rod, 5. filter box, 51. filter cotton, 52. activated carbon. DETAILED DESCRIPTION

[0026] The utility model is further described below in conjunction with the accompanying drawings and implementation modes.

[0027] First embodiment

[0028] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 ,in, Figure 1 A schematic structural diagram of a first embodiment of a device for preparing high-purity ruthenium provided by the utility model; Figure 2 for Figure 1 The schematic diagram of the internal structure of the shell shown; Figure 3 for Figure 1 The schematic diagram of the chassis cross-section structure shown; Figure 4 for Figure 3 The enlarged schematic diagram of part A is shown. A device for preparing high-purity ruthenium comprises: a housing 1;

[0029] A driving motor 2, the driving motor 2 is fixedly mounted on the top of the housing 1, a connecting rod 21 is fixedly mounted on the output end of the driving motor 2, a fixing frame 22 is fixedly mounted on the bottom of the connecting rod 21, and fixing rings 23 are fixedly mounted on both sides of the inner side of the fixing frame 22;

[0030] A support rod 3, the bottom of the support rod 3 is fixedly mounted on the bottom of the inner side of the shell 1, a chassis 31 is fixedly mounted on the outer side of the support rod 3, a heating wire 32 is fixedly mounted inside the chassis 31, a panel 33 is fixedly mounted on the top of the chassis 31, a drying tray 4 is arranged on the top of the chassis 31, plug-in rods 41 are fixedly mounted on both ends of the bottom of the drying tray 4, and the plug-in rods 41 are arranged inside the fixing ring 23;

[0031] Insertion grooves 34 are respectively opened on both sides of the support rod 3, and the inner side of the insertion groove 34 is provided with a connecting plate 37, and a plurality of sweeping rods 38 are fixedly installed at the bottom of the connecting plate 37, and the bottom of the sweeping rods 38 is set at the top of the drying plate 4.

[0032] A metal plate 35 is fixedly mounted on one side of the inner side of the insertion slot 34 . A magnetic plate 36 is magnetically attracted to one side of the metal plate 35 . The magnetic plate 36 is fixedly mounted on one end of the connecting plate 37 .

[0033] The front side of the housing 1 is rotatably connected with a door body 11 .

[0034] An air outlet pipe 12 is fixedly mounted on the top of the housing 1 .

[0035] The door body 11 is a sealed door, which can seal the front of the housing 1 when in use;

[0036] When the heating wire 32 is in use, the heating wire 32 can be controlled by a controller to adjust the heating temperature of the heating wire 32;

[0037] By providing a surrounding plate 33 on the top of the chassis 31, when in use, the drying tray 4 is placed on the top of the chassis 31, so that the drying tray 4 can be limited;

[0038] When the bottom plate 31 and the drying plate 4 are in use, a plurality of them are provided, so that more high-purity ruthenium powder can be heated and dried at the same time, thereby increasing the drying efficiency.

[0039] The working principle of the device for preparing high-purity ruthenium provided by the utility model is as follows:

[0040] When in use, the user can put high-purity ruthenium powder into the inner side of the drying tray 4, and then start the driving motor 2, so that the driving motor 2 drives the connecting rod 21 to rotate, so that the connecting rod 21 drives the fixing frame 22 to rotate, and then drives the fixing ring 23 to rotate through the fixing frame 22, thereby driving the drying tray 4 to rotate, and then the sweeping rod 38 is used to flange the high-purity ruthenium powder inside the drying tray 4, and at the same time the heating wire 32 is heated to dry the high-purity ruthenium powder inside the drying tray 4.

[0041] Compared with the related art, the device for preparing high-purity ruthenium provided by the utility model has the following beneficial effects:

[0042] By means of the cooperation of structures such as the drying tray 4, the plug-in rod 41, the driving motor 2, the connecting rod 21, the fixing frame 22, the fixing ring 23, the supporting rod 3, the chassis 31, the heating wire 32, the connecting plate 37 and the sweeping rod 38, the high-purity ruthenium powder arranged inside the drying tray 4 can be heated and dried when in use, thereby avoiding the powder inside the drying tray 4 flying around due to heating by hot air, thereby causing waste of the high-purity ruthenium powder.

[0043] Second embodiment

[0044] Please refer to Figure 5 Based on the device for preparing high-purity ruthenium provided in the first embodiment of the present application, the second embodiment of the present application proposes another device for preparing high-purity ruthenium. The second embodiment is only a preferred method of the first embodiment, and the implementation of the second embodiment will not affect the independent implementation of the first embodiment.

[0045] Specifically, the difference of the device for preparing high-purity ruthenium provided in the second embodiment of the present application is that, in the device for preparing high-purity ruthenium, a filter box 5 is fixedly installed on the top of the outlet pipe 12.

[0046] The inner side surfaces of the filter box 5 are respectively provided with filter cotton 51 and activated carbon 52 .

[0047] The filter cotton 51 is arranged at the bottom of the inner side of the filter box 5 , and the activated carbon 52 is arranged on the top of the filter cotton 51 .

[0048] The working principle of the device for preparing high-purity ruthenium provided by the utility model is as follows:

[0049] When in use, the gas generated inside the shell 1 enters the inner side of the filter box 5 through the outlet pipe 12, and then is filtered by the filter cotton 51 and activated carbon 52 inside the filter box 5, and then discharged through the exhaust port on the top of the filter box 5.

[0050] Compared with the related art, the device for preparing high-purity ruthenium provided by the utility model has the following beneficial effects:

[0051] By cooperating with each other, structures such as the filter box 5, the filter cotton 51 and the activated carbon 52, the exhausted gas can be filtered during use to prevent the gas from being directly discharged into the atmosphere and causing pollution to the production environment.

[0052] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A device for preparing high-purity ruthenium, characterized in that: include: shell; A driving motor, wherein the driving motor is fixedly mounted on the top of the housing, a connecting rod is fixedly mounted on the output end of the driving motor, a fixing frame is fixedly mounted on the bottom of the connecting rod, and fixing rings are fixedly mounted on both sides of the inner side of the fixing frame; A support rod, the bottom of the support rod is fixedly mounted on the bottom of the inner side of the shell, a chassis is fixedly mounted on the outer side of the support rod, a heating wire is fixedly mounted inside the chassis, a panel is fixedly mounted on the top of the chassis, a drying tray is arranged on the top of the chassis, plug-in rods are fixedly mounted on both ends of the bottom of the drying tray, and the plug-in rods are arranged inside the fixing ring; Insertion grooves are respectively opened on both sides of the support rod, and the inner side of the insertion groove is provided with a connecting plate, and a plurality of sweeping rods are fixedly installed at the bottom of the connecting plate, and the bottom of the sweeping rod is arranged on the top of the drying plate.

2. The device for preparing high-purity ruthenium according to claim 1, characterized in that: A metal plate is fixedly mounted on one side of the inner side of the insertion slot, a magnetic plate is magnetically attracted to one side of the metal plate, and the magnetic plate is fixedly mounted on one end of the connecting plate.

3. The device for preparing high-purity ruthenium according to claim 2, characterized in that: The front side of the shell is rotatably connected with a door body.

4. The device for preparing high-purity ruthenium according to claim 3, characterized in that: An air outlet pipe is fixedly installed on the top of the shell.

5. The device for preparing high-purity ruthenium according to claim 4, characterized in that: A filter box is fixedly installed on the top of the air outlet pipe.

6. The device for preparing high-purity ruthenium according to claim 5, characterized in that: The inner side surfaces of the filter box are respectively provided with filter cotton and activated carbon.

7. The device for preparing high-purity ruthenium according to claim 6, characterized in that: The filter cotton is arranged at the bottom of the inner side of the filter box, and the activated carbon is arranged at the top of the filter cotton.

Images