Micromechanical connection structure and inertial sensor

Abstract

The utility model provides a micromechanical connection structure and inertial sensor, including lever member and two structural member, lever member includes rod body, a plurality of connecting portion and anchoring portion, rod body both ends are connected with said structural member respectively, the plurality of connecting portion is connected with rod body and anchoring portion respectively. According to the utility model, the normal work of the inertial sensor can be prevented from being influenced by large stress generated in the anchoring area of the lever member and the fixing member of the inertial sensor.

Description

Technical Field

[0001] The utility model relates to the technical field of inertial sensors, in particular to a micro-mechanical connection structure and an inertial sensor. Background Art

[0002] MEMS inertial sensors are inertial devices that can use the Coriolis effect to measure the angular velocity of an object. They are mainly used in navigation and positioning, attitude perception, state monitoring, platform stability, etc. In order to enhance the output signal, improve the structural robustness and measurement accuracy, most MEMS gyroscopes adopt a multi-motion component differential strategy, that is, the adjacent motion components vibrate in the opposite direction and amplify the signals differentially.

[0003] Ideally, two adjacent moving components of a multi-moving component micro-electromechanical inertial sensor should not interfere with each other. However, in reality, processing errors and circuit noise may cause slight differences in the movement of the two adjacent moving components in the driving mode or detection mode. The reduction in synchronization will increase gyroscope noise and reduce detection accuracy.

[0004] Therefore, it is necessary to set a micromechanical connection structure to enhance the synchronization between adjacent motion components. This micromechanical connection structure usually includes a lever, which is connected to two adjacent motion components through a decoupling member, and the lever is anchored to the fixing parts (cover plate and base plate) of the inertial sensor.

[0005] However, since the lever will rotate during the synchronous movement of the two adjacent moving components, the area where the lever is anchored to the fixed parts (cover and base) of the inertial sensor will produce large stress. However, stress plays a pivotal role in micro-electromechanical systems. The redistribution of the stress field will affect the working parameters such as the gyroscope vibration frequency. The deformation of the free end accompanied by stress may cause adsorption and collision of the micro-mechanical structure. The stress at the constrained end will also reduce the strength of the micro-mechanical structure material.

[0006] Therefore, it is necessary to improve the existing micromechanical connection structure to avoid generating large stress in the region where the lever member and the fixing member of the inertial sensor are anchored, thereby affecting the normal operation of the inertial sensor. Utility Model Content

[0007] The utility model aims to provide a micro-mechanical connection structure and an inertial sensor, so as to solve the problem that a large stress is generated in the anchoring area between a lever member and a fixing member of the inertial sensor, thereby affecting the normal operation of the inertial sensor.

[0008] In order to solve the above technical problems, the utility model provides a micromechanical connection structure, including a lever member and two structural members, the lever member includes a rod body, multiple connecting parts and an anchoring part, the two ends of the rod body are respectively connected to the structural members, and the multiple connecting parts are respectively connected to the rod body and the anchoring parts.

[0009] Optionally, the rod body has a structural hole, the anchoring portion is located in the structural hole, one end of the connecting portion is connected to the anchoring portion, and the other end is connected to the inner wall of the structural hole, and a plurality of connecting portions are arranged at intervals in the structural hole.

[0010] Optionally, the connection parts are evenly distributed in the structural hole.

[0011] Optionally, the number of the connecting parts is 2-5.

[0012] Optionally, a plurality of structural grooves are formed on the anchoring portion, and one end of the connecting portion is connected to the bottom of the structural groove.

[0013] Optionally, a structural through groove is provided on the radial end surface of the anchoring portion, the structural through groove is U-shaped, and one end of the connecting portion extends toward the bottom of the structural through groove.

[0014] Optionally, the structural member is a decoupling member.

[0015] Optionally, the lever member further includes an anchoring block, and the anchoring block is arranged on two end surfaces of the anchoring portion.

[0016] Optionally, it includes a plurality of motion components and a plurality of the above-mentioned micromechanical connection structures, and each of the micromechanical connection structures is connected to two of the motion components.

[0017] Optionally, the micromechanical connection structure is connected to the motion component via a structural member.

[0018] The micromechanical connection structure and inertial sensor provided by the utility model have the following beneficial effects:

[0019] Since it includes a lever member and a structural member, the lever member includes a rod body, a plurality of connecting parts, and an anchoring part for connecting with a fixing member, the two ends of the rod body are respectively connected to the structural member, and the plurality of connecting parts are respectively connected to the rod body and the anchoring part, so the fixing member is connected to the anchoring part and is connected to the rod body through the connecting part. Therefore, the lever member and the structural member constitute a lever structure, and the anchoring part is the fulcrum of the lever structure, and the rod body is a rod that can rotate around the fulcrum of the anchoring part. The structural member applies force to the two ends of the rod body respectively, which can effectively reduce the stiffness of the connection between the lever structure and the fixing member. In this way, the stress at the connection between the lever structure and the fixing member can be reduced, and it can be prevented that a large stress is generated in the area where the lever structure and the fixing member are anchored to affect the normal operation of the inertial sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the connection between the micro-mechanical connection structure and the motion component in the embodiment of the utility model;

[0021] Figure 2 It is a structural schematic diagram of the micro-mechanical connection structure in the embodiment of the utility model.

[0022] Description of reference numerals:

[0023] 100 - moving component; 200 - decoupling member; 300 - lever member; 310 - rod body; 311 - structural hole; 320 - connecting part; 330 - anchoring part; 331 - anchoring block; 332 - structural groove; 333 - structural through groove. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0027] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0028] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0029] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] refer to Figure 1 and Figure 2 , Figure 1 1 is a schematic diagram of the structure of the connection between the micro-mechanical connection structure and the motion component 100 in the embodiment of the utility model. Figure 2 It is a structural schematic diagram of the micromechanical connection structure in an embodiment of the utility model. This embodiment provides a micromechanical connection structure, including a lever member 300 and a structural member 200. The lever member 300 includes a rod body 310, a plurality of connecting parts 320, and an anchoring part 330 for connecting to the fixing member 200. The two ends of the rod body 310 are respectively connected to the structural member 200, and the plurality of connecting parts 320 are respectively connected to the rod body 310 and the anchoring part 330.

[0031] Since it includes a lever member 300 and a structural member 200, the lever member 300 includes a rod body 310, a plurality of connecting parts 320, and an anchoring part 330 for connecting to the fixing member 200, the two ends of the rod body 310 are respectively connected to the structural member 200, and the plurality of connecting parts 320 are respectively connected to the rod body 310 and the anchoring part 330, so the fixing member is connected to the anchoring part 330 and is connected to the rod body 310 through the connecting part 320. Therefore, the lever member 300 and the structural member 200 constitute a lever structure, and the anchoring part 330 is the fulcrum of the lever structure, the rod body 310 is a rod that can rotate around the fulcrum of the anchoring part 330, and the structural member 200 applies force to the two ends of the rod body 310 respectively, which can effectively reduce the stiffness of the connection between the lever structure and the fixing member. In this way, the stress at the connection between the lever structure and the fixing member can be reduced, and it is prevented that a large stress is generated in the area where the lever structure and the fixing member are anchored to affect the normal operation of the inertial sensor.

[0032] The rod body 310 has a structural hole 311, the anchoring portion 330 is located in the structural hole 311, and one end of the connecting portion 320 is connected to the anchoring portion 330, and the other end is connected to the inner wall of the structural hole 311, and a plurality of connecting portions 320 are arranged at intervals in the structural hole 311.

[0033] The fixing member comprises a bottom plate and a cover plate, and the anchoring part is respectively connected to the bottom plate and the cover plate.

[0034] The structural member 200 is a decoupling member.

[0035] The motion component 100 includes a mass block, a driving frame, a detection frame, a detection decoupling beam and a driving decoupling beam. The number of the driving frames is two, and the two driving frames are arranged along the X direction, and the two driving frames are symmetrically arranged about the Y direction. The number of the detection frames is two, and the two detection frames are arranged along the Y direction, and the two detection frames are symmetrically arranged about the X direction. The detection frame is connected to the mass block through the driving decoupling beam, and the driving frame is connected to the mass block through the detection decoupling beam.

[0036] The bottom plate and the cover plate are the cover plate and the bottom plate of an inertial sensor.

[0037] The decoupling component 200 includes a decoupling body, which is in a long direction. A decoupling groove is provided on the decoupling body. The decoupling groove is in a long strip shape, and the length direction of the decoupling groove is perpendicular to the predetermined direction, so that the stiffness of the decoupling component in the predetermined direction is much smaller than the stiffness in the direction perpendicular to the predetermined direction, thereby achieving motion decoupling in the predetermined direction.

[0038] The lever member 300 further includes an anchoring block 331 for connecting with a bottom plate or a cover plate. The anchoring block 331 is disposed on two end surfaces of the anchoring portion 330 .

[0039] Preferably, the projection of the anchor block 331 on the rod body 310 is circular. In other embodiments, the anchor block 331 may also be square.

[0040] Preferably, the connection parts 320 are evenly distributed in the structural holes 311 .

[0041] Preferably, the structural hole 311 is a circular hole, the anchoring portion 330 is cylindrical, and a structural groove 332 is provided on the cylindrical surface corresponding to the anchoring portion 330 and the connecting portion 320 , and one end of the connecting portion 320 is connected to the bottom of the structural groove 332 .

[0042] Preferably, a structural through groove 333 is formed on the radial end surface of the anchoring portion 330, and the structural through groove 333 is located between the center of the anchoring portion 330 and one end of the connecting portion 320. In this way, the flexibility of the connection between the lever member 300 and the bottom plate or the cover plate can be further improved.

[0043] The structural through groove 333 is U-shaped, and one end of the connecting portion 320 extends toward the bottom of the structural through groove 333 .

[0044] In this embodiment, the number of the connecting parts 320 is 2-5, preferably 4.

[0045] The connecting portion 320 extends from a hole wall of the structural hole 311 toward a center of the structural hole 311 .

[0046] The connection portion 320 has a strip shape in a cross section parallel to a radial end surface of the anchoring portion 330 .

[0047] In this embodiment, the rod body 310 is in an elongated strip shape and has a structural hole 311 in the middle.

[0048] This embodiment further provides an inertial sensor, comprising a plurality of motion components and a plurality of the above-mentioned micromechanical connection structures, each of which is connected to two of the motion components. For example, one of the micromechanical connection structures comprises two of the structural members 200, one of the structural members 200 is connected to one of the motion components 100, wherein the motion components 100 are sequentially arranged along the X direction, the motion directions of the motion components 100 are the X direction and the Y direction, and the two structural members 200 of one of the micromechanical connection structures are sequentially arranged along the X direction.

[0049] Since one of the micromechanical connection structures comprises two of the structural members 200, one of the structural members 200 is connected to one of the motion components 100, wherein the motion components 100 are sequentially arranged along the X direction, and the motion directions of the motion components 100 are the X direction and the Y direction, and the two structural members 200 of one of the micromechanical connection structures are sequentially arranged along the X direction, the same sides of the two motion components 100 can be coupled together through the lever member 300; and the lever member 300 can be connected to the base plate and the cover plate, therefore, when the detection of the motion component 100 When the detection frame or the driving frame moves, the stiffness of the lever member 300 in the moving direction of the detection frame or the driving frame of the motion component 100 is greater than the rotational stiffness of the lever member 300. The motion component 100 will drive the lever member 300 to rotate around the point where the lever member 300 is connected to the base plate and the cover plate. This will drive the two coupled motion components 100 to move in opposite directions synchronously. In this way, the two adjacent motion components 100 are forced to move in opposite directions synchronously through the micromechanical connection structure, thereby reducing the probability of the two adjacent motion components 100 being out of sync.

[0050] In this embodiment, Figure 1 As shown, the motion components 100 are arranged side by side along the X direction, the two decoupling members 200 are arranged in sequence along the X direction, and the lever member 300 is located on the same side of the motion component 100, that is, the two decoupling members 200 are respectively connected to the detection frame of the motion component 100, so that the movement of the two motion components 100 in the Y direction can be reversed and synchronized. In another embodiment, the motion components 100 are arranged side by side along the Y direction, the two decoupling members 200 are arranged in sequence along the Y direction, and the lever member 300 is located on the same side of the motion component 100, that is, the two decoupling members 200 are respectively connected to the driving frame of the motion component 100, so that the movement of the two motion components 100 in the X direction can be reversed and synchronized. In yet another embodiment, the number of the motion components 100 is four, and the four motion components 100 are distributed in a square. The four motion components 100 are respectively a first motion component, a second motion component, a third motion component and a fourth motion component. The first motion component and the second motion component are arranged side by side along the X direction, and the first motion component and the fourth motion component are arranged side by side along the Y direction. The number of the micromechanical connection structures is four, and the four micromechanical connection structures are respectively a first micromechanical connection structure, a second micromechanical connection structure, a third micromechanical connection structure and a fourth micromechanical connection structure. The first micromechanical connection structure connects the detection frames of the first motion component and the second motion component, the second micromechanical connection structure connects the driving frames of the second motion component and the third motion component, the third micromechanical connection structure connects the detection frames of the third motion component and the fourth motion component, and the fourth micromechanical connection structure connects the fourth motion component and the driving frame of the first motion component.

[0051] In this embodiment, the micromechanical connection structure is connected to the motion component via a structural member.

[0052] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation on the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A micromechanical connection structure, characterized in that: It comprises a lever member and two structural members, wherein the lever member comprises a rod body, a plurality of connecting parts and an anchoring part, two ends of the rod body are respectively connected to the structural members, and the plurality of connecting parts are respectively connected to the rod body and the anchoring part.

2. The micromechanical connection structure according to claim 1, characterized in that: The rod body has a structural hole, the anchoring part is located in the structural hole, one end of the connecting part is connected to the anchoring part, and the other end is connected to the inner wall of the structural hole, and a plurality of connecting parts are arranged at intervals in the structural hole.

3. The micromechanical connection structure according to claim 2, characterized in that: The connecting parts are evenly distributed in the structural hole.

4. The micromechanical connection structure according to claim 2, characterized in that: The number of the connecting parts is 2-5.

5. The micromechanical connection structure according to claim 2, characterized in that: The anchoring portion is provided with a plurality of structural grooves, and one end of the connecting portion is connected to the bottom of the structural groove.

6. The micromechanical connection structure according to claim 2, characterized in that: A structural through groove is formed on the radial end surface of the anchoring portion. The structural through groove is U-shaped, and one end of the connecting portion extends toward the bottom of the structural through groove.

7. The micromechanical connection structure according to claim 1, characterized in that: The structural member is a decoupling member.

8. The micromechanical connection structure according to claim 1, characterized in that: The lever member further comprises an anchoring block, and the anchoring block is arranged on two end surfaces of the anchoring portion.

9. An inertial sensor, characterized in that: The invention comprises a plurality of motion components and a plurality of micromechanical connection structures according to any one of claims 1 to 8, wherein each of the micromechanical connection structures is connected to two of the motion components.

10. The inertial sensor according to claim 9, characterized in that The micromechanical connection structure is connected to the motion component via a structural member.

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