Excimer lamp device

Abstract

The utility model relates to an excimer lamp device which is characterized in that a long-strip-shaped air inlet bin is arranged in an inner cavity of a lamp box body, and a spoiler used for changing the airflow direction is arranged in the long-strip-shaped air inlet bin; a first flow guide plate and a second flow guide plate arranged below the first flow guide plate are further arranged at the bottom of the strip-shaped air inlet bin; a plurality of evenly-distributed air holes are formed in the first flow guide plate in the length direction of the first flow guide plate, airflow through grooves are formed in the second flow guide plate, and airflow in the long-strip-shaped air inlet bin penetrates through the air holes and is blown out through the airflow through grooves. An excimer lamp is arranged below the second guide plate and located at the bottom of the inner cavity of the lamp box body. According to the embodiment of the invention, the nitrogen inflation channel is arranged, so that nitrogen is uniformly and stably fed into the outer circumferential surface of the excimer lamp; a negative pressure interface is arranged on the outer side of the excimer lamp to guide the flow direction of nitrogen, the nitrogen filling stability is improved, and air under the lamp is further removed; and the lifting adjusting assembly is arranged, operation of products of various thicknesses is compatible, the adjustable range of the applicable thickness of the products is 0-30 mm, and the applicability of the device is improved.

Description

Technical Field

[0001] The present application belongs to the technical field of UV light application equipment, and in particular, relates to an excimer lamp device. Background Art

[0002] UV light is mainly used for curing technology and surface cleaning, with the main wavelength at 365nm or 254nm. The advantages of 172nm excimer lamps are that they reduce the cost of curing coatings and enhance the curing effect. They also have the advantages of low heat and fast response. In terms of curing technology, it completely replaces matting agents, physical matting, and reduces gloss after curing, while increasing the density and surface hardness of the coating. It is widely used in different fields, such as ultra-thin material displays in the automotive field, UV printing, and the production of high-performance optical films. It is also used in surface cleaning. The working environment of 172nm excimer lamps requires an oxygen concentration of less than 100ppm. When the existing excimer lamps are used in open spaces, the oxygen concentration cannot be stably controlled below 100ppm, which affects the use effect of 172nm excimer lamps. Utility Model Content

[0003] The technical problem to be solved by the utility model is: to solve the deficiencies in the prior art, thereby providing an excimer lamp device, aiming to form a stable and reliable gas protection layer on the outer circumference of the excimer lamp to reduce the oxygen concentration.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] An excimer lamp device, comprising:

[0006] A light box body, wherein an elongated air inlet bin is arranged in the inner cavity of the light box body, and a spoiler for changing the airflow direction is arranged in the elongated air inlet bin;

[0007] The bottom of the long strip air inlet bin is also provided with a first guide plate and a second guide plate provided below the first guide plate;

[0008] The first guide plate is provided with a plurality of evenly distributed air holes along its length direction, and the second guide plate is provided with an air flow groove, and the air flow in the long strip air inlet bin passes through the air holes and is blown out through the air flow groove;

[0009] An excimer lamp is arranged below the second guide plate and is located at the bottom of the inner cavity of the lamp box.

[0010] Preferably, in an excimer lamp device of the utility model, the spoiler comprises a first spoiler and a second spoiler, and the first spoiler and the second spoiler separate the long strip air intake chamber into an S-shaped air passage.

[0011] Preferably, in a quasi-molecular lamp device of the utility model, one side of the first spoiler is fixedly connected to the inner wall of the long strip air inlet bin, and the other side is tilted and bent downward; the second spoiler is fixedly connected to the inner wall of the long strip air inlet bin on one side close to the tilted and bent side of the first spoiler, and the other side is tilted and bent upward.

[0012] Preferably, in the excimer lamp device of the present invention, a plurality of air inlet holes opened along the length direction of the elongated air inlet bin are arranged on the top plate of the elongated air inlet bin.

[0013] Preferably, a quasi-molecular lamp device of the utility model further includes a lifting and adjusting component, the lifting and adjusting component includes a gantry, a lifting and floating connecting frame is arranged on the inner side of the gantry, the two lamp boxes are fixedly connected side by side on both sides of the connecting frame, a hand-cranked screw nut is arranged between the gantry and the connecting frame, and the hand-cranked screw nut is used to drive the lifting action of the connecting frame.

[0014] Preferably, in the excimer lamp device of the utility model, a U-shaped lampshade is further provided at the bottom of the lamp box, and a plurality of negative pressure air holes are provided on both sides of the U-shaped lampshade.

[0015] Preferably, in the excimer lamp device of the utility model, a conveyor belt is further provided under the two lamp boxes, and the conveyor belt is used to drive the products to pass under the excimer lamps of the two lamp boxes in sequence.

[0016] Preferably, in the excimer lamp device of the utility model, elastic support members are further provided at the bottoms of both sides of the two lamp boxes for elastically floatingly supporting the lamp boxes.

[0017] The beneficial effects of the utility model are:

[0018] (1) In this embodiment, a nitrogen gas filling channel is provided to allow nitrogen to be uniformly and stably delivered to the outer circumference of the excimer lamp;

[0019] (2) A negative pressure interface is set outside the excimer lamp to guide the nitrogen flow, improve the filling stability of nitrogen, and further remove the air under the lamp;

[0020] (3) A lifting and adjusting component is provided to be compatible with the operation of products of various thicknesses. The applicable thickness of the product can be adjusted in the range of 0-30 mm, thereby improving the applicability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The technical solution of the present application is further described below in conjunction with the accompanying drawings and embodiments.

[0022] Figure 1 is a schematic diagram of the three-dimensional structure of an embodiment of the present application;

[0023] Figure 2is a schematic diagram of the internal structure of a light box according to an embodiment of the present application;

[0024] Figure 3 This is a schematic diagram of the cross-sectional structure of a long strip air intake bin according to an embodiment of the present application;

[0025] Figure 4 This is a schematic diagram of the structure of the lifting and lowering adjustment component of an embodiment of the present application;

[0026] The reference numerals in the figure are:

[0027] Lamp box 10, long strip air inlet bin 11, spoiler 12, first spoiler 121, second spoiler 122, first guide plate 13, second guide plate 14, excimer lamp 15, U-shaped lampshade 16, negative pressure air hole 161, lifting and lowering adjustment component 20, gantry 21, connecting frame 22, hand-cranked screw nut 23, conveyor belt 30. DETAILED DESCRIPTION

[0028] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other.

[0029] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application. In addition, the terms "first", "second", etc. are used only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the invention, unless otherwise specified, "multiple" means two or more.

[0030] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood by specific circumstances.

[0031] The technical solution of the present application will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0032] Example

[0033] This embodiment provides an excimer lamp device, referring to Figure 1-3 , whose structure includes:

[0034] The light box body 10 has a long air inlet bin 11 in its inner cavity. The top plate of the long air inlet bin 11 is provided with a plurality of air inlet holes opened along its length direction. The plurality of air inlet holes are connected to the nitrogen supply device through pipelines to deliver nitrogen into the inner cavity of the light box body 10.

[0035] Preferably, in the excimer lamp device of the present embodiment, a spoiler 12 , a first guide plate 13 , and a second guide plate 14 for changing the direction of airflow are sequentially arranged in the long strip air inlet chamber 11 from top to bottom.

[0036] Preferably, in a quasi-molecular lamp device of the present embodiment, the spoiler 12 includes a first spoiler 121 and a second spoiler 122, and the first spoiler 121 and the second spoiler 122 divide the long strip air inlet bin 11 into an S-shaped air duct. Specifically, one side of the first spoiler 121 is fixedly connected to the inner wall of the long strip air inlet bin 11, and the other side is tilted and bent downward to leave an air flow gap between the inner wall of the long strip air inlet bin 11; the second spoiler 122 is fixedly connected to the inner wall of the long strip air inlet bin 11 on one side close to the tilted bend of the first spoiler 121, and the other side is tilted and bent upward to also leave an air flow gap between the inner wall of the long strip air inlet bin 11. The provision of the first spoiler 121 and the second spoiler 122 serves to change the direction of the airflow and reduce the flow rate of the airflow, so that the nitrogen gas flowing into the cavity between the second spoiler 122 and the first guide plate 13 is more evenly distributed.

[0037] Preferably, in a quasi-molecular lamp device of this embodiment, the first guide plate 13 is provided with a plurality of evenly distributed air holes in the middle along its length direction, and the second guide plate 14 is provided with air flow grooves, and the air flow in the long strip air inlet bin 11 passes through the air holes and is blown out through the air flow grooves.

[0038] Preferably, in a quasi-molecular lamp device of the present embodiment, a U-shaped lampshade 16 is further provided at the bottom of the lamp box 10, an air flow groove passes through the U-shaped lampshade 16, and a plurality of negative pressure air holes 161 are provided on both sides of the U-shaped lampshade 16, and the negative pressure air holes 161 are connected to a vacuum generating device to provide negative pressure adsorption force to guide the flow of nitrogen.

[0039] Preferably, in the excimer lamp device of the present embodiment, an excimer lamp 15 is disposed below a U-shaped lampshade 16 , rubber sleeves are installed at both ends of the excimer lamp 15 , and silicone baffles are disposed on both sides of the U-shaped lampshade 16 to seal the bottom of the lamp box 10 .

[0040] During actual use, the nitrogen supply device delivers nitrogen into the inner cavity of the lamp box 10, which is guided and decelerated by the first spoiler 121 and the second spoiler 122. The nitrogen flow blows from the air flow groove to the outer circumference of the excimer lamp 15. The vacuum generating device generates negative pressure to attract the nitrogen flow through multiple negative pressure holes on both sides of the U-shaped lampshade 16, so that the nitrogen protection layer on the outer circumference of the excimer lamp 15 is more uniform.

[0041] Preferably, the excimer lamp device of this embodiment further includes a lifting and adjusting component 20, referring to Figure 4 The lifting and adjusting component 20 includes a gantry 21, a lifting and floating connecting frame 22 is arranged inside the gantry 21, two light boxes 10 are fixedly connected side by side on both sides of the connecting frame 22, and a hand-cranked screw nut 23 is arranged between the gantry 21 and the connecting frame 22, and the hand-cranked screw nut 23 is used to drive the lifting action of the connecting frame 22.

[0042] Preferably, in the excimer lamp device of the present embodiment, a conveyor belt 30 is further provided under the two lamp boxes 10 , and the conveyor belt 30 is used to drive the products to pass under the excimer lamps 15 of the two lamp boxes 10 in sequence.

[0043] Preferably, in the excimer lamp device of the present embodiment, elastic supporting members are further provided at the bottoms of both sides of the two lamp boxes 10 for elastically floatingly supporting the lamp boxes 10 .

[0044] During operation, on the basis of ensuring the safe operation of the excimer lamp 15, considering the thickness of the product, shake the hand-cranked screw nut 23 to adjust the distance between the excimer lamp 15 and the conveyor belt 30 to the required position. In the actual approach distance, the shortest is 8 mm. Place the product at the starting end of the conveyor belt 30. Driven by the conveyor belt 30, the products pass under the two excimer lamps 15 respectively. The first excimer lamp 15 plays a role of pretreatment (curing or surface cleaning operation), and the second excimer lamp 15 plays a strengthening role, further improving the operation effect.

[0045] Based on the above ideal embodiments of this application, the relevant staff can make various changes and modifications without departing from the technical concept of this application through the above description. The technical scope of this application is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. An excimer lamp device, characterized in that: include: A light box body (10), wherein a long strip air inlet bin (11) is arranged in the inner cavity of the light box body (10), and a spoiler (12) for changing the direction of airflow is arranged in the long strip air inlet bin (11); The bottom of the long strip air inlet bin (11) is also provided with a first guide plate (13) and a second guide plate (14) provided below the first guide plate (13); The first guide plate (13) is provided with a plurality of evenly distributed air holes along its length direction, and the second guide plate (14) is provided with an air flow groove, so that the air flow in the long strip air inlet bin (11) passes through the air holes and is blown out through the air flow groove; An excimer lamp (15) is arranged below the second guide plate (14), and the excimer lamp (15) is located at the bottom of the inner cavity of the lamp box (10).

2. An excimer lamp device according to claim 1, characterized in that: The spoiler (12) comprises a first spoiler (121) and a second spoiler (122), wherein the first spoiler (121) and the second spoiler (122) separate the long strip air intake chamber (11) into an S-shaped air passage.

3. An excimer lamp device according to claim 2, characterized in that: One side of the first spoiler (121) is fixedly connected to the inner wall of the long strip air intake bin (11), and the other side is tilted and bent downward; the second spoiler (122) is fixedly connected to the inner wall of the long strip air intake bin (11) on one side close to the tilted and bent side of the first spoiler (121), and the other side is tilted and bent upward.

4. The excimer lamp device according to claim 3, characterized in that: The top plate of the long strip-shaped air inlet bin (11) is provided with a plurality of air inlet holes opened along its length direction.

5. An excimer lamp device according to any one of claims 1 to 4, characterized in that: The invention also comprises a lifting and adjusting assembly (20), wherein the lifting and adjusting assembly (20) comprises a gantry (21), a lifting and floating connecting frame (22) is arranged inside the gantry (21), two light boxes (10) are fixedly connected side by side on both sides of the connecting frame (22), a hand-cranked screw nut (23) is arranged between the gantry (21) and the connecting frame (22), and the hand-cranked screw nut (23) is used to drive the connecting frame (22) to move up and down.

6. The excimer lamp device according to claim 5, characterized in that: A U-shaped lampshade (16) is also provided at the bottom of the lamp box (10), and a plurality of negative pressure air holes are provided on both sides of the U-shaped lampshade (16).

7. The excimer lamp device according to claim 6, characterized in that: A conveyor belt (30) is also provided below the two light boxes (10), and the conveyor belt (30) is used to drive the products to pass under the excimer lamps (15) of the two light boxes (10) in sequence.

8. The excimer lamp device according to claim 7, characterized in that: Elastic support members are also provided at the bottoms of both sides of the two light boxes (10) for elastically floatingly supporting the light boxes (10).

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