Positioning and calibrating device for substrate processing

Abstract

The utility model discloses a substrate processing, positioning and calibrating device which comprises a base, a circular groove is formed in the top of the base, a rotating seat is arranged in the groove, a T-shaped sliding groove is formed in the top of the rotating seat, and two symmetrical sliding blocks are slidably connected into the T-shaped sliding groove. And a driving assembly for driving the two sliding blocks to move is arranged in the T-shaped sliding groove, and top plates are fixedly connected to the top ends of the two sliding blocks. The base, the rotating seat, the sliding block, the top plate, the driving assembly, the vertical plates, the transverse shaft, the positioning assemblies and the adjusting assemblies are arranged, after the driving assembly drives the two vertical plates to get close to each other, the two positioning assemblies can be used for clamping and positioning a substrate, the positioning assemblies are L-shaped plates, the upper surface of the substrate is prevented from being shielded, and the exposed area of the substrate is guaranteed to the maximum extent; and secondly, the substrate can be turned over through the adjusting assembly, and convenience is further provided for processing of the substrate.

Description

Technical Field

[0001] The utility model relates to the technical field of ceramic substrate processing, in particular to a substrate processing positioning and calibration device. Background Art

[0002] Alumina ceramics are a type of ceramic material with aluminum oxide as the main component. They are used in thick film integrated circuits. Alumina ceramics have good conductivity, mechanical strength and high temperature resistance. Alumina ceramics are a widely used type of ceramics. Due to their superior performance, they are increasingly used in modern society.

[0003] The patent with publication number CN217521970U discloses an alumina ceramic substrate positioning and calibration device, which drives two fixed plates to move by setting an adjustment mechanism. By adjusting the distance between the two fixed plates, different substrates can be positioned, and then the substrate is pressed and fixed from above by a pressing plate. However, when the device is in use, the part of the upper surface of the substrate pressed by the pressing plate is inconvenient to process, and after the substrate is clamped and fixed by the fixing plate, its angle cannot be adjusted. It is relatively rigid and not flexible when used, so further improvement is needed. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and proposes a substrate processing positioning and calibration device.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a substrate processing positioning and calibration device, including a base, a circular groove is provided on the top of the base, and a rotating seat is provided inside the groove, a T-shaped slide groove is provided on the top of the rotating seat, two symmetrical sliders are slidably connected inside the T-shaped slide groove, and a driving component for driving the two sliders to move is provided inside the T-shaped slide groove, the top ends of the two sliders are fixedly connected to a top plate, the upper surface of the top plate is fixedly connected to a vertical plate, the top end of the vertical plate passes through and is rotatably connected to a horizontal axis through a bearing, and the two ends of the horizontal axis are respectively fixedly connected to a positioning component and an adjustment component.

[0006] Furthermore, a vertical shaft is fixedly connected to the middle of the lower surface of the rotating seat, and the bottom end of the vertical shaft is rotatably connected to the inner bottom wall of the base.

[0007] Furthermore, a second locking bolt passes through and is threadedly connected to the side wall of the base.

[0008] Furthermore, the driving assembly includes a bidirectional screw rod located inside the T-shaped slide groove, both ends of the bidirectional screw rod are rotatably connected to the inner wall of the T-shaped slide groove through bearings, one end of the bidirectional screw rod passes through the side wall of the rotating seat and is fixedly connected to a handle, and the bidirectional screw rod passes through two sliders and is threadedly connected to the two sliders.

[0009] Furthermore, a first locking bolt passes through and is threadedly connected to one side of the top plate.

[0010] Furthermore, the positioning assembly includes an L-shaped plate fixedly connected to the transverse axis, and a rubber pad is fixedly connected to the surface of the L-shaped plate.

[0011] Furthermore, the adjustment assembly includes a turntable fixedly connected to the horizontal axis, a positioning bolt passes through the side of the turntable and is threadedly connected, and a positioning hole for screwing in the positioning bolt is opened on the surface of the vertical plate.

[0012] Beneficial effects of the utility model:

[0013] 1. When the utility model is in use, the substrate processing positioning and calibration device is provided with a base, a rotating seat, a slider, a top plate, a driving assembly, a vertical plate, a horizontal axis, a positioning assembly and an adjusting assembly. After the two vertical plates are driven close to each other by the driving assembly, the two positioning assemblies can be used to clamp and position the substrate. The positioning assembly adopts an L-shaped plate to avoid blocking the upper surface of the substrate and maximize the exposed area of ​​the substrate, thereby facilitating processing. Secondly, the substrate can be flipped by the adjusting assembly, which further facilitates the processing of the substrate.

[0014] 2. When the utility model is in use, the substrate processing positioning and calibration device is provided with a vertical axis, and the rotating seat can rotate horizontally inside the base through the vertical axis, so as to adjust the horizontal angle of the substrate after positioning, thereby improving the substrate processing freedom. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solution of the present invention, the drawings required for use in the description of the specific implementation methods will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 : The overall stereogram of the utility model;

[0017] Figure 2 : An overall cross-sectional view of the utility model;

[0018] Figure 3 :The utility model Figure 2 Enlarged view of point A in the middle.

[0019] The reference numerals are as follows:

[0020] 1. Base; 2. Rotating seat; 3. Vertical axis; 4. T-shaped slide; 5. Sliding block; 6. Top plate; 7. First locking bolt; 8. Driving assembly; 81. Bidirectional screw rod; 82. Handle; 9. Vertical plate; 91. Positioning hole; 10. Horizontal axis; 11. Positioning assembly; 111. L-shaped plate; 112. Rubber pad; 12. Adjusting assembly; 121. Turntable; 122. Positioning bolt; 13. Second locking bolt. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] like Figure 1-Figure 3 As shown, it relates to a substrate processing positioning and calibration device, including a base 1, a circular groove is opened on the top of the base 1, and a rotating seat 2 is arranged inside the groove, a T-shaped slide groove 4 is opened on the top of the rotating seat 2, two symmetrical sliders 5 are slidably connected inside the T-shaped slide groove 4, and a driving component 8 for driving the two sliders 5 to move is arranged inside the T-shaped slide groove 4, the top of the two sliders 5 are fixedly connected to a top plate 6, the upper surface of the top plate 6 is fixedly connected to a vertical plate 9, the top of the vertical plate 9 passes through and is rotatably connected to a horizontal axis 10 through a bearing, and the two ends of the horizontal axis 10 are respectively fixedly connected to a positioning component 11 and an adjustment component 12.

[0023] A vertical shaft 3 is fixedly connected to the middle of the lower surface of the rotating seat 2, and the bottom end of the vertical shaft 3 is rotatably connected to the inner bottom wall of the base 1.

[0024] The rotating seat 2 can rotate in the groove on the top of the base 1 through the vertical axis 3 at the bottom, so that the horizontal angle of the substrate fixed on the top of the rotating seat 2 can be adjusted.

[0025] A second locking bolt 13 passes through the side wall of the base 1 and is threadedly connected thereto.

[0026] When the rotating seat 2 rotates to a specified angle, the second locking bolt 13 can be tightened so that the second locking bolt 13 squeezes the rotating seat 2 to fix the rotating seat 2.

[0027] The driving assembly 8 includes a bidirectional screw rod 81 located inside the T-shaped slide groove 4. Both ends of the bidirectional screw rod 81 are rotatably connected to the inner wall of the T-shaped slide groove 4 through bearings. One end of the bidirectional screw rod 81 passes through the side wall of the rotating seat 2 and is fixedly connected to a handle 82. The bidirectional screw rod 81 passes through the two sliders 5 and is threadedly connected to the two sliders 5.

[0028] By rotating the bidirectional screw rod 81 through the handle 82, the bidirectional screw rod 81 will drive the two sliders 5 to move closer to or away from each other along the T-shaped slide groove 4, thereby adjusting the distance between the two positioning components 11 to clamp and position substrates of different sizes.

[0029] A first locking bolt 7 penetrates through one side of the top plate 6 and is threadedly connected thereto.

[0030] After the movement of the slider 5 drives the vertical plate 9 and the positioning assembly 11 to move, the slider 5 and the positioning assembly 11 can be further fixed by tightening the first locking bolt 7 .

[0031] The positioning assembly 11 includes an L-shaped plate 111 fixedly connected to the transverse axis 10 , and a rubber pad 112 is fixedly connected to the surface of the L-shaped plate 111 .

[0032] When the two L-shaped plates 111 are close to each other, the substrate can be squeezed and positioned by the sides of the two L-shaped plates 111, and the bottom of the L-shaped plates 111 can support the substrate, thereby exposing the upper surface of the substrate to facilitate processing. The rubber pad 112 on the surface of the L-shaped plate 111 can protect the substrate.

[0033] The adjustment assembly 12 includes a turntable 121 fixedly connected to the horizontal axis 10 , a positioning bolt 122 passes through the side of the turntable 121 and is threadedly connected, and a positioning hole 91 for screwing the positioning bolt 122 is opened on the surface of the vertical plate 9.

[0034] When the positioning bolt 122 is screwed into the positioning hole 91, the L-shaped plate 111 is in a completely horizontal state (eg Figure 2 ), at this time, the driving assembly 8 can drive the positioning assembly 11 to move to clamp and position the substrate. After the clamping is completed, the positioning bolt 122 can be screwed out from the positioning hole 91, and then the turntable 121 is rotated to flip the substrate, thereby changing the angle of the substrate. After the adjustment is completed, the positioning bolt 122 is screwed tightly against the surface of the vertical plate 9.

[0035] Working principle: First, adjust the two L-shaped plates 111 to be in a completely horizontal state, then place the substrate on the surface of the two L-shaped plates 111, then turn the handle 82 to drive the bidirectional screw 81 to rotate, and use the bidirectional screw 81 to drive the two sliders 5 to approach each other, thereby driving the vertical plate 9 and the two L-shaped plates 111 to approach each other, and use the two L-shaped plates 111 to clamp and position the substrate, and then tighten the first locking bolt 7. During processing, the rotating seat 2 can be rotated to change the horizontal angle of the substrate. After the adjustment is completed, tighten the second locking bolt 13 to fix it. The flip angle of the substrate can also be changed by rotating the turntable 121 to drive the L-shaped plate 111 to flip. The device is more flexible and convenient when positioning and calibrating the substrate.

[0036] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A substrate processing positioning and calibration device, comprising a base (1), characterized in that: A circular groove is provided on the top of the base (1), and a rotating seat (2) is provided inside the groove. A T-shaped groove (4) is provided on the top of the rotating seat (2). Two symmetrical sliders (5) are slidably connected inside the T-shaped groove (4). A driving assembly (8) for driving the two sliders (5) to move is provided inside the T-shaped groove (4). The tops of the two sliders (5) are fixedly connected to a top plate (6). The upper surface of the top plate (6) is fixedly connected to a vertical plate (9). A horizontal axis (10) is passed through the top of the vertical plate (9) and is rotatably connected to the vertical plate (9) through a bearing. The two ends of the horizontal axis (10) are respectively fixedly connected to a positioning assembly (11) and an adjustment assembly (12).

2. A substrate processing positioning and calibration device according to claim 1, characterized in that: A vertical shaft (3) is fixedly connected to the middle of the lower surface of the rotating seat (2), and the bottom end of the vertical shaft (3) is rotatably connected to the inner bottom wall of the base (1).

3. The substrate processing positioning and calibration device according to claim 1, characterized in that: A second locking bolt (13) passes through the side wall of the base (1) and is threadedly connected thereto.

4. The substrate processing positioning and calibration device according to claim 1, characterized in that: The driving assembly (8) comprises a bidirectional screw rod (81) located inside the T-shaped slide groove (4), the two ends of the bidirectional screw rod (81) being rotatably connected to the inner wall of the T-shaped slide groove (4) via bearings, one end of the bidirectional screw rod (81) passing through the side wall of the rotating seat (2) and being fixedly connected to a handle (82), and the bidirectional screw rod (81) passing through the two sliders (5) and being threadedly connected to the two sliders (5).

5. The substrate processing positioning and calibration device according to claim 1, characterized in that: A first locking bolt (7) passes through one side of the top plate (6) and is threadedly connected thereto.

6. The substrate processing positioning and calibration device according to claim 1, characterized in that: The positioning assembly (11) comprises an L-shaped plate (111) fixedly connected to the transverse axis (10), and a rubber pad (112) is fixedly connected to the surface of the L-shaped plate (111).

7. The substrate processing positioning and calibration device according to claim 1, characterized in that: The adjustment assembly (12) comprises a rotating disk (121) fixedly connected to the transverse axis (10), a positioning bolt (122) passing through the side of the rotating disk (121) and threadedly connected thereto, and a positioning hole (91) for screwing in the positioning bolt (122) is provided on the surface of the vertical plate (9).

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