Ejector pin structure capable of being finely adjusted
By designing a fine-tuned thimble structure, the problem of difficult product level in vacuum plasma cleaning is solved, and an efficient and orderly cleaning process is achieved, ensuring the precise processing of the product during processing.
Patent Information
- Application Number
- CN202323406784.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-14
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2033-12-14
AI Technical Summary
In vacuum plasma cleaning technology, it is necessary to achieve multi-surface cleaning of wafer, photovoltaic and display panel products, and the product needs to maintain a horizontal state during processing. The existing technology is difficult to ensure the precision level of the product during lifting and lowering, which affects the Cleaning efficiency.
A fine-tuned thimble structure is designed, including a fine-tuned thimble module, a fine-tuned thimble base, a waist groove and a lifting drive. Through rapid lifting and fine-tuning structure and locking screw holes, the level of the process platform is ensured and the product is achieved. Accurate handling.
By fine-tuning the thimble structure, the horizontal state of the product during the cleaning process is ensured, the efficiency and sequence of vacuum plasma cleaning are improved, and the high-quality treatment of the product is ensured.
Smart Images
Figure CN222261015U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to automated production technology and automated production equipment, in particular to vacuum plasma cleaning, and specifically to a finely adjustable ejector pin structure. Background Art
[0002] In the field of vacuum plasma cleaning technology, for wafers, photovoltaics and display panel products, multiple surfaces need to be cleaned. The products are placed on the process platform, and the processing surfaces cannot be in contact. A robot or other handling structure is used to carry the products by back contact. When the process platform must be flat, a lifting mechanism is required to lift and lower the products for product placement and processing. Ejector pins are a commonly used lifting method. When the ejector pins are raised, space is created between the product and the process platform. The robot or other handling structure picks and places the product in the space created. When the ejector pins are lowered, the product falls on the process platform.
[0003] Due to the precision handling, it is necessary to ensure that the product is in a horizontal state after being lifted up, so a high-precision platform is required.
[0004] Therefore, it is necessary to provide a finely adjustable ejector pin structure to solve the above problems. Utility Model Content
[0005] The utility model aims to provide a finely adjustable ejector pin structure.
[0006] The utility model achieves the above-mentioned purpose through the following technical solutions:
[0007] A fine-adjustable ejector structure comprises an ejector mounting plate, on which a fine-adjustable ejector module is arranged;
[0008] The fine-tuning ejector pin module includes several ejectors that are evenly distributed and can be lifted and lowered on the process platform. The ejectors are connected to the fine-tuning ejector pin base. The fine-tuning ejector pin base is provided with a fine-tuning inner screw hole. The ejector pin is correspondingly provided with a fine-tuning threaded portion to form a fast ejector pin lifting and fine-tuning structure. After several ejectors are fine-tuned, they are combined to form a high-quality leveling process platform.
[0009] Furthermore, the fine-tuning ejector base is also provided with an ejector locking threaded side hole and a positioning fine-tuning locking threaded side hole corresponding to the fine-tuning inner screw hole.
[0010] Furthermore, a plurality of waist-shaped grooves are evenly arranged on the ejector mounting plate, and the plurality of waist-shaped grooves are used as reference parts for ejector setting. The waist-shaped groove in the middle is used as the middle reference, and the ejector is set after 1-2 waist-shaped grooves are spaced apart on both sides.
[0011] Furthermore, the ejector mounting plate is connected to the lifting drive member.
[0012] Furthermore, there are two lifting drive members, which are symmetrically distributed with reference to the longitudinal center plane of the ejector mounting plate.
[0013] Furthermore, the lifting drive member is composed of a cylinder.
[0014] Furthermore, the ejector pin mounting plate is arranged in the process chamber.
[0015] Compared with the prior art, the utility model ensures the horizontality of the platform for receiving products through the ejector pin fine-tuning method, and ensures that the vacuum plasma cleaning operation is carried out efficiently and orderly. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a structural schematic diagram of the utility model.
[0017] Figure 2 It is a structural schematic diagram of the utility model after the process cavity is hidden.
[0018] Figure 3 It is a structural schematic diagram of a fine-tuning ejector module.
[0019] Figure 4 It is a structural schematic diagram of the ejector mounting plate. DETAILED DESCRIPTION Embodiment 1:
[0020] See also Figure 1-4 , this embodiment shows a fine-tunable ejector structure, including an ejector mounting plate 1, on which a fine-tuning ejector module 2 is arranged;
[0021] The fine-tuning ejector module 2 includes a plurality of ejectors 21 evenly distributed and liftable on the process platform 100. The ejector 21 is connected to a fine-tuning ejector base 22. A fine-tuning inner screw hole 221 is provided in the fine-tuning ejector base 22. The ejector 21 is correspondingly provided with a fine-tuning threaded portion to form a fast ejector lifting and fine-tuning structure. After fine-tuning a plurality of ejectors 21, they are combined to form a high-quality leveling process platform.
[0022] The fine-tuning ejector base 22 is further provided with an ejector locking threaded side hole 222 and a positioning fine-tuning locking threaded side hole 223 corresponding to the fine-tuning inner screw hole 221 .
[0023] A plurality of waist-shaped grooves 11 are evenly arranged on the ejector mounting plate 1. The waist-shaped grooves 11 are used as reference parts for ejector setting. The waist-shaped groove 11 in the middle is used as the middle reference, and ejector setting is performed after 1-2 waist-shaped grooves 11 are spaced apart on both sides.
[0024] The ejector mounting plate 1 is connected to the lifting drive member 3 .
[0025] There are two lifting drive members 3 , which are symmetrically distributed with reference to the longitudinal center plane of the ejector mounting plate 1 .
[0026] The lifting drive member 3 is composed of a cylinder.
[0027] The ejector pin mounting plate 1 is disposed in the process chamber 4 .
[0028] Compared with the prior art, the utility model ensures the horizontality of the platform for receiving products through the ejector pin fine-tuning method, and ensures that the vacuum plasma cleaning operation is carried out efficiently and orderly.
[0029] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.
Claims
1. A finely adjustable ejector pin structure, characterized in that: It includes an ejector mounting plate, on which a fine-tuning ejector module is arranged; The fine-tuning ejector pin module includes several ejectors that are evenly distributed and can be lifted and lowered on the process platform. The ejectors are connected to the fine-tuning ejector pin base. The fine-tuning ejector pin base is provided with a fine-tuning inner screw hole. The ejector pin is correspondingly provided with a fine-tuning threaded portion to form a fast ejector pin lifting and fine-tuning structure. After several ejectors are fine-tuned, they are combined to form a high-quality leveling process platform.
2. A finely adjustable ejector pin structure according to claim 1, characterized in that: The fine-tuning ejector base is also provided with an ejector locking thread side hole and a positioning fine-tuning locking thread side hole corresponding to the fine-tuning inner screw hole.
3. A finely adjustable ejector pin structure according to claim 1 or 2, characterized in that: A plurality of waist-shaped grooves are evenly arranged on the ejector mounting plate, and the plurality of waist-shaped grooves are used as reference parts for ejector setting. The waist-shaped groove in the middle is used as the middle reference, and the ejector is set after 1-2 waist-shaped grooves are spaced on both sides.
4. The finely adjustable ejector pin structure according to claim 3, characterized in that: The ejector mounting plate is connected to the lifting drive member.
5. The finely adjustable ejector pin structure according to claim 4, characterized in that: There are two lifting drive members, which are symmetrically distributed with reference to the longitudinal center plane of the ejector mounting plate.
6. The finely adjustable ejector pin structure according to claim 5, characterized in that: The lifting drive is composed of a cylinder.
7. The finely adjustable ejector pin structure according to claim 6, characterized in that: The ejector pin mounting plate is arranged in the process chamber.