Radio frequency energy feed-in system and coating equipment

Abstract

The utility model discloses a radio frequency energy feed-in system and coating equipment, and the system comprises a matcher assembly which comprises a matcher body and a connection assembly connected with the matcher body, and the matcher body is used for being connected with a power supply; the feed-in assembly comprises a conductive column and a connecting piece, one end of the conductive column is used for being connected with the connecting assembly, the other end of the conductive column is provided with a connecting base, the connecting piece is provided with an access part and a contact part, the access part is connected to the connecting base, the connecting piece is provided with the contact part, and one end of the contact part is connected with the access part. The extension distance of the other end of the contact part can be adjusted in the length direction of the connecting piece, and the contact part is used for abutting against the electrode plate. According to the embodiment of the invention, the extension distance of the contact part can be adjusted along the length direction of the connecting piece, and the access position of the contact part and the electrode plate can be changed, so that an access area with a standing wave effect can be adjusted or changed, the influence of the standing wave effect can be reduced, an electric field can be uniformly distributed, and the uniformity of a coating film can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of film coating equipment, and in particular to a radio frequency energy feeding system and a film coating equipment. Background Art

[0002] In the related technology, uneven coating is a common problem of all coating equipment, and the uneven coating is mainly manifested in two aspects: one is the uneven film thickness, and the other is the uneven distribution of plasma. In order to achieve uniform film thickness and uniform plasma distribution, the uniformity of film thickness is usually controlled by a spraying system, and the uniform distribution of plasma is controlled by an electric field system.

[0003] In the prior art, the feeding structure of the coating equipment usually adopts a single component to connect with the upper electrode plate, or adopts multiple feeding connection structures to connect with the upper electrode plate of the electric field system. Among them, when a single component is connected with the upper electrode plate, a single feeding point easily causes a standing wave effect inside the coating cavity, resulting in a poor coating effect after plasma ionization; when multiple feeding connection structures are connected with the electrode plate, after the electric fields of each feeding connection structure are superimposed, there will also be a problem of uneven electric field distribution, which will affect the coating effect. Utility Model Content

[0004] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a radio frequency energy feeding system and a coating device, which effectively improves the uniformity of the coating by improving the uniformity of the feeding current.

[0005] The present application also proposes a coating device having the above-mentioned radio frequency energy feeding system.

[0006] A radio frequency energy feeding system according to an embodiment of the present application includes:

[0007] A matching device assembly, comprising a matching device body and a connecting assembly connected to the matching device body, wherein the matching device body is used to be connected to a power source;

[0008] A feed-in component comprises a conductive column and a connector, wherein one end of the conductive column is used to connect to the connector component, and the other end of the conductive column has a connector seat, and the connector comprises an access portion and a contact portion, wherein the access portion is connected to the connector seat, one end of the contact portion is connected to the access portion, and the other end of the contact portion can be adjusted to extend a distance along the length direction of the connector.

[0009] Furthermore, a connecting portion is provided between the access portion and the contact portion, and the connecting portion is bent so that there is a gap between the contact portion and the access portion in a thickness direction.

[0010] Furthermore, the contact portion is located on a side of the access portion away from the connection socket.

[0011] Furthermore, the connecting member has at least two contact portions, and each of the contact portions is rotatably arranged at intervals around the outer circumference of the conductive column.

[0012] Furthermore, the access parts of several connecting members are stacked.

[0013] Furthermore, the connection seat is provided with a first connection hole, the first connection hole is used to install the connection member, and the access portion of the connection member can be adjusted to access the first connection hole.

[0014] Furthermore, the hole position of the first connection hole is larger than the access portion.

[0015] Furthermore, there are a plurality of the first connection holes, and the plurality of the first connection holes are arranged at the edge of the end surface of the connection seat.

[0016] Furthermore, there are a plurality of the first connection holes, and the plurality of the first connection holes are arranged around the annular surface of the connection seat.

[0017] Furthermore, a cooling water portion is provided inside the conductive column, and the cooling water portion is used to cool the conductive column.

[0018] Furthermore, the contact portion has a plane, and the plane is used to abut against the electrode plate.

[0019] Furthermore, it also includes a supporting assembly, and the supporting assembly is used to support the connecting assembly.

[0020] Furthermore, it also includes an insulating fixing component, which is arranged on the periphery of the conductive column and the connecting component.

[0021] A coating device according to another embodiment of the present application includes a power supply, an electrode plate, and the radio frequency energy feeding system as described above, wherein the electrode plate abuts against the contact portion, and the power supply is connected to the matching device body.

[0022] According to the RF energy feeding system and coating equipment of the embodiment of the present application, there are at least the following beneficial effects: In the embodiment of the present application, the conductive column is electrically connected to the electrode plate through a connector. Among them, the access portion of the connector is connected to the connection seat of the conductive column, and the contact portion of the connector is used to connect to the electrode plate. The connector has a contact portion for connecting to the electrode plate, and the current of the conductive column can be fed into the electrode plate. The contact portion can be adjusted along the length direction of the connector. The access position of the contact portion and the electrode plate can also be changed, so that the access area where the standing wave effect occurs can be adjusted or changed, which helps to reduce the impact of the standing wave effect and facilitates the uniform distribution of the electric field to improve the uniformity of the coating.

[0023] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0025] Figure 1 A schematic diagram of the structure of a radio frequency energy feeding system according to an embodiment of the present application;

[0026] Figure 2 A schematic structural diagram of a radio frequency energy feeding system according to another embodiment of the present application;

[0027] Figure 3 This is a structural schematic diagram of a feeding component in one embodiment of the present application;

[0028] Figure 4 This is a structural schematic diagram of a feeding component in another embodiment of the present application;

[0029] Figure 5 This is a schematic diagram of the structure of two connecting members in one embodiment of the present application;

[0030] Figure 6 This is a schematic diagram of the structure of a connecting member in an embodiment of the present application;

[0031] Figure 7 Schematic diagram of the cross-section structure of a conductive column in an embodiment of the present application.

[0032] Reference numerals:

[0033] 110, matching device body; 111, access terminal; 120, connection assembly;

[0034] 210, conductive column; 211, connection seat; 212, cooling channel; 2111, first connection hole; 220, connection piece; 221, access portion; 2211, second connection hole; 222, contact portion; 2221, plane; 223, connection portion;

[0035] 300. Support assembly. DETAILED DESCRIPTION

[0036] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0037] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0038] In the description of this application, "several" means more than one, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0039] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0040] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0041] In the related technology, the coating equipment is an important equipment for plasma chemical vapor deposition. The coating equipment completes the coating process by means of a vacuum-sealed chamber, a spraying system and an electric field system in a two-way manner.

[0042] Uneven coating is a common problem for all coating equipment. Uneven coating mainly manifests itself in two aspects: one is the uneven thickness of the film layer, and the other is the uneven distribution of plasma. In order to achieve uniform film thickness and uniform plasma distribution, the uniformity of the film thickness is usually controlled by the spraying system, and the uniform distribution of plasma is controlled by the electric field system.

[0043] In the prior art, the feeding structure of the coating equipment usually adopts a single component to connect with the upper electrode plate; or adopts multiple feeding connection structures to connect with the upper electrode plate of the electric field system. Among them, when a single component is connected with the upper electrode plate, a single feeding point easily causes a standing wave effect inside the coating cavity, resulting in a poor coating effect after plasma ionization; when multiple feeding connection structures are connected with the electrode plate, after the electric fields of each feeding connection structure are superimposed, there will also be a problem of uneven electric field distribution, which will affect the coating effect.

[0044] In view of this, the embodiments of the present application provide a radio frequency energy feeding system and a coating device to effectively optimize the coating effect.

[0045] See also Figures 1 to 5 In one aspect, an embodiment of the present application discloses a radio frequency energy feeding system, which includes a matching component and a feeding component.

[0046] like Figure 1 and Figure 2 As shown, the matching component includes a matching body 110 and a connecting component 120 connected to the matching body 110. The matching body 110 is used to connect to a power source. During operation, current flows from the power source through the connecting component 120 and is transmitted to the feeding component.

[0047] In this embodiment, see Figure 1 The matching device body 110 includes an access terminal 111, and the access terminal 111 is used for electrically connecting to a power source.

[0048] like Figures 1 to 4 The feed-in assembly includes a conductive column 210 and a connector 220. One end of the conductive column 210 is used to connect with the connector assembly 120. The other end of the conductive column 210 has a connector seat 211. The connector 220 includes an access portion 221 and a contact portion 222. The access portion 221 is connected to the connector seat 211, one end of the contact portion 222 is connected to the access portion 221, and the other end of the contact portion 222 can be adjusted to extend along the length direction of the connector 220. The contact portion 222 is used to abut against the electrode plate so that the conductive column 210 is electrically connected to the electrode plate.

[0049] During operation, the current flows from the power source through the distributor body, the connecting assembly 120, the conductive column 210 and the connecting member 220 in sequence, and then is transmitted to the electrode plate.

[0050] In the embodiment of the present application, the conductive column 210 is electrically connected to the electrode plate through the connector 220. The access portion 221 of the connector 220 is connected to the connection seat 211 of the conductive column 210, and the contact portion 222 of the connector 220 is used to connect to the electrode plate. The connector 220 has a contact portion 222 for connecting to the electrode plate, which can feed the current of the conductive column 210 into the electrode plate, wherein the contact portion 222 has an adjustable extension distance along the length direction of the connector 220, and the access position of the contact portion 222 and the electrode plate can be changed, so that the access area where the standing wave effect occurs can be adjusted or changed, which helps to reduce the influence of the standing wave effect and facilitates the uniform distribution of the electric field to improve the uniformity of the coating.

[0051] In this embodiment, the contact portion 222 has a plane 2221, and the plane 2221 is used to abut against the electrode plate. The end of the contact portion 222 away from the access portion 221 abuts against the electrode plate through the plane 2221, which can reduce the situation of poor contact or disconnection between the contact portion 222 and the electrode plate, and at the same time increase the contact area between the contact portion 222 and the electrode plate, which helps to stably feed the current into the electrode plate to form a uniform electric field effect, thereby ensuring the coating effect.

[0052] In some embodiments of the present application, see Figures 4 to 6 A connecting portion 223 is provided between the access portion 221 and the contact portion 222, and the connecting portion 223 is bent so that the contact portion 222 and the access portion 221 are spaced apart in the thickness direction. The contact portion 222 is located on the side of the access portion 221 away from the connection seat 211. As can be seen from the figure, with the plane 2221 of the contact portion 222 as a reference, the access portion 221 of the connector 220 protrudes toward the side close to the connection seat 211, so that multiple connectors 220 can be stacked and assembled at the position of the access portion 221, and connected to the connection seat 211 of the same conductive column 210 after assembly, which is conducive to improving the effect of stable shunting of the fed current.

[0053] In some embodiments of the present application, see Figures 4 to 6 The connector 220 has at least two contact portions 222, and each contact portion 222 is evenly spaced around the outer circumference of the conductive column 210. In this way, the current of the conductive column 210 can be evenly shunted to the connected electrode plate through each contact portion 222, which is beneficial to ensure the effect of stable shunting when the current is fed into the electrode plate, and is beneficial to improve the distribution uniformity of the electric field formed on the electrode plate.

[0054] Furthermore, each contact portion 222 has a plane 2221 for abutting against the electrode plate, and the plane 2221 abuts against the electrode plate.

[0055] It is worth understanding that, when the electrode area and the excitation frequency are determined, at least two contact portions 222 are connected to the electrode plate, which can improve the uniformity of the potential difference distribution between the electrodes, thereby improving the uniform distribution of the electric field effect of the electrode plate, which is conducive to weakening the standing wave effect, and further optimizing the coating effect.

[0056] In some embodiments of the present application, the number of the connecting member 220 may be one, and the number of the contact portions 222 of the connecting member 220 may be two or more, which is not limited herein.

[0057] Furthermore, when the number of the contact portions 222 is more than two, after the access portion 221 of the connector 220 is connected to the connector base 211, the contact portions 222 are evenly spaced along the periphery of the conductive column 210. In this way, the uniformity of current shunting can be improved.

[0058] In some embodiments of the present application, the number of connectors 220 is two or more, and the access portion 221 of each connector 220 is connected to the connection seat 211. During assembly, the access portions 221 of different connectors 220 are placed on top of each other, and the connectors 220 after being stacked on each other are connected to the connection seat 211 of the same conductive column 210. In this way, the shunting effect of the current fed into the electrode plate can be effectively improved.

[0059] As one implementation method, see Figure 5 The connecting member 220 has a plurality of access portions 221 of the plurality of connecting members 220 , and the connecting member 220 closest to the connecting seat 211 is connected to the connecting seat 211 .

[0060] It should be noted that in some embodiments, the connecting member 220 may be integrally formed with the connecting seat 211 , or may be installed on the connecting seat 211 via a connecting fixing structure, which is not limited herein.

[0061] In some embodiments of the present application, the connecting seat 211 is provided with at least one first connecting portion, and the connecting member 220 is provided with a second connecting portion at a position corresponding to the first connecting portion, and the second connecting portion is cooperatively connected with the first connecting portion so that the connecting member 220 is fixedly connected to the connecting seat 211.

[0062] It is worth to understand that the first connection portion may be a connection groove or a connection hole provided on the connection seat 211 , or may be a connection fixing structure provided on the periphery of the connection seat 211 , which is not limited here.

[0063] As some embodiments thereof, the connection base 211 is provided with a first connection hole 2111, the first connection hole 2111 is used to install the connection member 220, and the access portion 221 of the connection member 220 can be adjusted to access the first connection hole 2111. In this way, the connection member 220 can be connected to the connection base 211, and the relative angle between the connection member 220 and the connection base 211 can be adjusted, so as to help weaken or even eliminate the standing wave effect.

[0064] Furthermore, the first connection hole 2111 is larger than the access portion 221 . In this way, the access portion 221 can be conveniently at least partially inserted into the first connection hole 2111 to install the connector 220 on the connector base 211 .

[0065] Furthermore, there are a plurality of first connection holes 2111, and the plurality of first connection holes 2111 are disposed at the edge of the end surface of the connection seat 211. In this way, the connection between the connection member 220 and the connection seat 211 can be conveniently connected.

[0066] Furthermore, there are a plurality of first connection holes 2111 , and the plurality of first connection holes 2111 are arranged around the annular surface of the connection seat 211 .

[0067] As some embodiments, the first connection part has a first connection hole 2111, that is, the connection seat 211 is provided with the first connection hole 2111; the second connection part has a second connection hole 2211, that is, the position of the connection member 220 corresponding to the first connection hole 2111 is provided with the second connection hole 2211. The first connection hole 2111 and the second connection hole 2211 are penetrated with fasteners to connect and fix with the connection seat 211. The number of the first connection holes 2111 is multiple, and the multiple first connection holes 2111 are arranged at intervals on the connection seat 211. Further, the connection seat 211 is provided with a plurality of evenly distributed first connection holes 2111, which are used to fix the connection member 220 on the connection seat 211 through the first connection holes 2111. Since there are multiple first connection holes 2111, the installation position and direction of the connection member 220 can be adjusted, thereby changing the connection position and connection direction of the connection member 220, thereby changing the connection position and connection direction of the contact portion 222 and the electrode plate, which is conducive to reducing the generation of the standing wave effect.

[0068] In some embodiments, the fastener may specifically be a bolt.

[0069] Further, see Figure 4 and Figure 5 There are multiple first connection holes 2111, and different first connection holes 2111 are evenly spaced around the outer circumference of the conductive column 210. In this way, each connector 220 can be connected to the first connection holes 2111 at different positions according to assembly requirements to achieve assembly requirements at different angles.

[0070] In some embodiments of the present application, see Figure 4 and Figure 5 As shown, the first connection hole 2111 has an adjustable extension distance along the circumference of the conductive column 210. During assembly, by loosening the fastener, the fastener can be slid in the first connection hole 2111, and the fastener can be moved to different positions of the first connection hole 2111, thereby adjusting the installation angle of the connector 220. The adjustable extension distance of the first connection hole 2111 along the circumference of the conductive column 210 can facilitate the adjustment of the installation angle of the connector 220, that is, it is convenient to adjust the connection position between the contact portion 222 and the electrode plate, that is, the access area where the standing wave effect occurs can be changed and adjusted to invalidate the uneven standing wave point, which can reduce the influence of the standing wave effect on the coating effect, thereby improving the uniformity of the coating.

[0071] In some embodiments of the present application, see Figure 7 As shown, a cooling water portion is provided inside the conductive column 210, and the cooling water portion is used to cool the conductive column 210. The cooling water portion can cool the conductive column 210, which helps to stabilize the resistance of the conductive column 210, reduce the influence of temperature on the conductive performance of the conductive column 210, and facilitate the electrode plate to form a stable electric field effect.

[0072] When the RF energy feeding system is working, each connection structure of the RF energy feeding system with high frequency power will generate heat, thereby affecting the sealing. In this embodiment, by providing a cooling water portion to cool the conductive column 210, it is helpful to maintain the temperature of the conductive column 210 stable, thereby facilitating the stable performance of the conductive column 210.

[0073] As one implementation method, see Figure 7 As shown, the cooling water unit includes a plurality of cooling channels 212, and the cooling channels 212 are used to transport cooling water to the inside of the conductive column 210 to reduce the temperature of the conductive column 210. The inlet and outlet of the cooling channels 212 are respectively connected to the cooling water pipeline.

[0074] As one implementation mode, the cooling water portion includes a cooling pipe formed by connecting a plurality of U-shaped pipes in sequence, and a free end of the cooling pipe is connected to a cooling water interface.

[0075] In some embodiments of the present application, see Figure 1 and Figure 2 As shown, the RF energy feeding system further includes a supporting component 300, and the supporting component 300 is used to support the connecting component 120. In this way, the connection stability of the connecting component 120 can be improved.

[0076] In some embodiments of the present application, the RF energy feeding system further includes an insulating fixing component, which is disposed on the periphery of the conductive column 210 and the connecting component 120. Specifically, the insulating fixing component is used to fit at the connection point between the conductive column 210 and the connecting component 120, and the insulating fixing component is also used to fit the periphery of the connecting component 120 and the conductive column 210 to insulate the conductive column 210 from the outside of the connecting component 120.

[0077] On the other hand, an embodiment of the present application discloses a coating device, including the aforementioned RF energy feeding system, having all the technical effects of the aforementioned RF energy feeding system.

[0078] In the embodiment of the present application, the conductive column 210 is electrically connected to the electrode plate through the connector 220. The access portion 221 of the connector 220 is connected to the connection seat 211 of the conductive column 210, and the contact portion 222 of the connector 220 is used to connect to the electrode plate. The connector 220 has a contact portion 222 for connecting to the electrode plate, which can feed the current of the conductive column 210 into the electrode plate, wherein the contact portion 222 has an adjustable extension distance along the length direction of the connector 220, and the access position of the contact portion 222 and the electrode plate can be changed, so that the access area where the standing wave effect occurs can be adjusted or changed, which helps to form a uniform electric field effect, thereby ensuring the coating effect.

[0079] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A radio frequency energy feeding system, characterized in that: include: A matching device assembly comprises a matching device body (110) and a connecting assembly (120) connected to the matching device body (110), wherein the matching device body (110) is used to be connected to a power source; A feed-in component comprises a conductive column (210) and a connecting member (220), wherein one end of the conductive column (210) is used to be connected to a connecting component (120), the other end of the conductive column (210) has a connecting seat (211), and the connecting member (220) comprises an access portion (221) and a contact portion (222), wherein the access portion (221) is connected to the connecting seat (211), one end of the contact portion (222) is connected to the access portion (221), and the other end of the contact portion (222) can be adjusted to extend a distance along the length direction of the connecting member (220).

2. The radio frequency energy feeding system according to claim 1, characterized in that: A connecting portion (223) is provided between the access portion (221) and the contact portion (222), and the connecting portion (223) is bent so that a gap exists between the contact portion (222) and the access portion (221) in a thickness direction.

3. The radio frequency energy feeding system according to claim 1, characterized in that: The connecting member (220) has at least two contact portions (222), and each of the contact portions (222) is rotatably arranged at intervals around the outer circumference of the conductive column (210).

4. The radio frequency energy feeding system according to any one of claims 1 to 3, characterized in that: The access portions (221) of a plurality of the connecting members (220) are stacked.

5. The radio frequency energy feeding system according to claim 1, characterized in that: The connection seat (211) is provided with a first connection hole (2111), the first connection hole (2111) is used to install the connection member (220), and the access portion (221) of the connection member (220) can be adjusted to access the first connection hole (2111).

6. The radio frequency energy feeding system according to claim 5, characterized in that: The hole position of the first connection hole (2111) is larger than the access portion (221).

7. The radio frequency energy feeding system according to claim 5, characterized in that: There are a plurality of the first connection holes (2111), and the plurality of the first connection holes (2111) are arranged at the edge of the end surface of the connection seat (211).

8. The radio frequency energy feeding system according to claim 5, characterized in that: There are a plurality of the first connection holes (2111), and the plurality of the first connection holes (2111) are arranged around an annular surface of the connection seat (211).

9. The radio frequency energy feeding system according to claim 1, characterized in that: A cooling water portion is provided inside the conductive column (210), and the cooling water portion is used to cool the conductive column (210); the contact portion (222) has a plane (2221), and the plane (2221) is used to abut against the electrode plate; it also includes a support component, and the support component is used to support the connecting component (120); it also includes an insulating fixing component, and the insulating fixing component is provided on the periphery of the conductive column (210) and the connecting component (120).

10. A coating device, characterized in that: It comprises a power supply, an electrode plate and a radio frequency energy feeding system as claimed in any one of claims 1 to 9.

Images