Crystal growing furnace

Abstract

The utility model discloses a crystal growing furnace. The crystal growing furnace comprises a rack, a lifting assembly, an auxiliary furnace chamber, a main furnace chamber, a crucible and a re-feeding assembly, the lifting assembly is arranged on the rack; the auxiliary furnace chamber is located on the lower side of the lifting assembly. The main furnace chamber is located on the lower side of the auxiliary furnace chamber. The crucible is positioned in the main furnace chamber; the re-feeding assembly comprises a stock bin, an inner output shaft, an outer output shaft and a transmission mechanism. The inner output shaft is of a hollow structure and communicates with the stock bin. The outer output shaft is of a hollow structure and sleeves the inner output shaft; the transmission mechanism drives the outer output shaft to move along the axis of the inner output shaft, so that the outer output shaft has a storage position and a re-throwing position; when the outer output shaft is located at the storage position, the outer output shaft is located outside the main furnace chamber, and when the outer output shaft is located at the re-feeding position, at least part of the outer output shaft is located in the main furnace chamber and conveys materials into the crucible. Through the arrangement, the re-feeding effect of the re-feeding assembly can be realized, so that the processing efficiency of the crystal growth furnace is improved.

Description

Technical Field

[0001] The present application relates to crystal processing equipment, in particular to a crystal growth furnace. Background Art

[0002] Crystal growth technology is a technology that uses the physical and chemical properties of matter (liquid, solid, gas) to control the phase change process and obtain crystals with a certain structure, size, shape and performance.

[0003] A crystal growth furnace is a professional device used for crystal growth and cultivation. Its purpose is to provide the necessary conditions for crystal growth and increase the speed of crystal growth through environmental control.

[0004] Existing crystal growth furnaces often use the Czochralski method to prepare single crystal silicon rods. The Czochralski method mainly involves filling raw polycrystalline silicon into a quartz crucible, heating the quartz crucible with a heater to melt the raw polycrystalline silicon in the quartz crucible into silicon melt, immersing the seed crystal (single crystal) in the silicon melt, and using a pulling system to rotate and pull the seed crystal so that the silicon melt grows along the pulling direction, thereby obtaining a crystal rod that meets the diameter and length requirements.

[0005] In the actual operation process of the crystal growth furnace, as the crystal rod grows, the silicon melt in the quartz crucible is gradually consumed, and it is necessary to replenish the raw material polycrystalline silicon into the quartz crucible. Since the quartz crucible is located in the main furnace chamber of the crystal growth furnace, it is necessary to open the main furnace chamber to replenish the raw materials of the quartz crucible. Since opening the main furnace chamber is time-consuming and labor-intensive, it is not conducive to improving the processing efficiency of the crystal growth furnace. Therefore, there is an urgent need for a device that can replenish the raw materials into the quartz crucible without opening the main furnace chamber, so as to improve the processing efficiency of the crystal growth furnace. Utility Model Content

[0006] In order to solve the deficiencies of the prior art, the purpose of the present application is to provide a crystal growth furnace with higher processing efficiency.

[0007] To achieve the above objectives, this application adopts the following technical solutions:

[0008] A crystal growth furnace, comprising a frame, a lifting assembly, an auxiliary furnace chamber, a main furnace chamber, a crucible and a re-injection assembly. The lifting assembly is at least partially arranged on the frame; the auxiliary furnace chamber is supported by the frame and at least partially located at the lower side of the lifting assembly; the main furnace chamber is supported by the frame and at least partially located at the lower side of the auxiliary furnace chamber; the crucible is at least partially located in the main furnace chamber; the re-injection assembly comprises a silo, an inner output shaft, an outer output shaft and a transmission mechanism, and the silo contains materials; the inner output shaft is a hollow structure and connected to the silo; the outer output shaft is a hollow structure and is sleeved on the inner output shaft; the transmission mechanism drives the outer output shaft to move along the axis of the inner output shaft, so that the outer output shaft has a storage position and a re-injection position; when the outer output shaft is in the storage position, the outer output shaft is located outside the main furnace chamber, and when the outer output shaft is in the re-injection position, the outer output shaft is at least partially located in the main furnace chamber and transports the materials to the crucible.

[0009] Furthermore, the transmission mechanism includes a transmission member with a degree of freedom of movement, a driving member driving the transmission member, and a moving block located on the transmission member, the moving block is connected to the external output shaft, and the transmission member and the driving member are in transmission connection.

[0010] Furthermore, the transmission member is a conveyor belt, and the moving block is sleeved on and connected to the conveyor belt.

[0011] Furthermore, the transmission member is a screw rod, a nut is arranged in the moving block, the screw rod passes through the nut and drives the nut to move.

[0012] Furthermore, the re-investment component also includes a shell, one end of the shell is connected to the silo, and the other end of the shell is connected to the main furnace chamber, and the external output shaft and at least part of the transmission mechanism are located in the shell.

[0013] Furthermore, the re-investment component also includes a first valve, which is located at the connection between the outer shell and the main furnace chamber and is connected to the outer shell and the main furnace chamber respectively.

[0014] Furthermore, the re-investment component also includes a first bellows section, which is located between the first valve and the shell and is connected to the first valve and the shell respectively.

[0015] Furthermore, a connecting port is provided on the upper side of the main furnace chamber, and the re-investment component also includes a connecting flange, which is respectively connected to the connecting port and the first valve.

[0016] Furthermore, the re-investment component also includes a second bellows section, which is located between the connecting flange and the first valve and is connected to the connecting flange and the first valve respectively.

[0017] Furthermore, the re-investment component also includes a second valve, which is located between the inner output shaft and the silo, and the second valve is also connected to the outer shell and the silo respectively.

[0018] The above-mentioned crystal growth furnace can enable the outer output shaft to adjust its relative position with the inner output shaft according to actual working requirements, thereby realizing the re-investment effect of the re-investment component to improve the processing efficiency of the crystal growth furnace; and when the re-investment component is in a non-working state, the re-investment component can save space occupancy to improve the structural compactness of the re-investment component. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the structure of the crystal growth furnace of the present application.

[0020] Figure 2 It is a cross-sectional view of the re-investment component of the crystal growth furnace of the present application.

[0021] Figure 3 It is a partial structural schematic diagram of the re-investment component of the crystal growth furnace of the present application.

[0022] Figure 4 It is a structural schematic diagram of the re-investment component of the crystal growth furnace of the present application and a partial enlarged diagram thereof.

[0023] Figure 5 For this application Figure 1 A partial enlarged view of point A in the middle.

[0024] Figure 6 It is a cross-sectional view of the crystal growth furnace of the present application.

[0025] Figure 7 This is a partial structural schematic diagram of the crystal growth furnace of the present application.

[0026] Figure 8 For this application Figure 7 A partial enlarged view of point B in the middle.

[0027] Fig. 9 It is a partial structural schematic diagram of the driving mechanism of the crystal growth furnace of the present application. DETAILED DESCRIPTION

[0028] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation manner of the present application will be clearly and completely described below in conjunction with the drawings in the implementation manner of the present application.

[0029] like Figure 1 As shown, the present application provides a crystal growth furnace 100 for producing crystal rods, wherein the crystal growth furnace 100 comprises a frame 11 , a pulling assembly 12 , an auxiliary furnace chamber 13 , a main furnace chamber 14 , a crucible (not shown) and a rotating lifting assembly 15 .

[0030] In order to clearly illustrate the technical solution of this application, the following is also defined: Figure 1 Front, back, left, right, up and down as shown.

[0031] Specifically, the frame 11 serves as a basic frame of the crystal growth furnace 100 , and is used to support the pulling assembly 12 , the auxiliary furnace chamber 13 , the main furnace chamber 14 and the rotary lifting assembly 15 .

[0032] The auxiliary furnace chamber 13 is located at the lower side of the pulling assembly 12 , and the main furnace chamber 14 is located at the lower side of the auxiliary furnace chamber 13 . The auxiliary furnace chamber 13 is used to place the grown crystal rods, and the main furnace chamber 14 is used to grow the crystal rods.

[0033] The pulling assembly 12 is at least partially disposed on the frame 11. The pulling assembly 12 can be lifted and rotated so that the pulling assembly 12 can be installed in the auxiliary furnace chamber 13 and the main furnace chamber 14 as required. The pulling assembly 12 is used to pull the crystal rod.

[0034] When the crystal growth furnace 100 starts to work, the pulling assembly 12 first passes through the auxiliary furnace chamber 13 and then enters the main furnace chamber 14, so as to realize the pulling growth of the crystal rod.

[0035] The rotating and lifting assembly 15 is located at the lower side of the crucible and supports the crucible. The rotating and lifting assembly 15 is used to drive the crucible to rotate and lift.

[0036] The crucible is located in the main furnace chamber 14, and the crucible is filled with melt. During the growth of the crystal rod, the pulling assembly 12 extends the seed crystal into the crucible so that the seed crystal contacts the melt in the crucible. At this time, the pulling assembly 12 rotates the seed crystal and reverses the crucible by rotating the lifting assembly 15. At the same time, the pulling assembly 12 pulls the seed crystal upward, and then goes through the processes of seeding, enlargement, shoulder rotation, equal diameter growth, etc. to obtain the desired crystal rod. Among them, the seed crystal is a small crystal with the same crystal orientation as the desired crystal rod, which is the seed for growing a single crystal.

[0037] It should be noted that when the crystal rod is a single crystal silicon rod, the melt in the crucible is a silicon melt.

[0038] like Figure 2 As shown, as an implementation method, the crystal growth furnace 100 also includes a re-feeding component 16. During or before the processing of the crystal growth furnace 100, the re-feeding component 16 is used to transport materials to the crucible in the main furnace chamber 14, so that the material can be replenished without opening the main furnace chamber 14, so as to improve the processing efficiency of the crystal growth furnace 100.

[0039] The re-investment component 16 includes a silo 161 , an inner output shaft 162 , an outer output shaft 163 and a transmission mechanism 164 .

[0040] Specifically, the silo 161 contains materials.

[0041] The inner output shaft 162 is hollow and connected to the silo 161 , so that the material in the silo 161 can be transported to the inner output shaft 162 .

[0042] The outer output shaft 163 is also hollow, so that the outer output shaft 163 can be sleeved on the inner output shaft 162. Exemplarily, the inner wall of the outer output shaft 163 contacts the outer wall of the inner output shaft 162, thereby preventing the material from falling into the outside through the gap between the outer output shaft 163 and the inner output shaft 162, thereby reducing the loss of the material.

[0043] The transmission mechanism 164 is used to drive the outer output shaft 163 to move along the axis of the inner output shaft 162 so that the outer output shaft 163 can have a storage position and a re-delivery position.

[0044] When the outer output shaft 163 is in the storage position, the outer output shaft 163 is located outside the main furnace chamber 14. At this time, the inner output shaft 162 is basically inside the outer output shaft 163, that is, the transmission mechanism 164 drives the outer output shaft 163 to move to a position that basically coincides with the inner output shaft 162, so that the length of the re-investment assembly 16 is reduced to a minimum, thereby facilitating the storage of the re-investment assembly 16.

[0045] When the outer output shaft 163 is in the re-feeding position, the outer output shaft 163 is at least partially located in the main furnace chamber 14, and transports the material in the silo 161 to the crucible. At this time, the material in the silo 161 can be transported to the outer output shaft 163 through the inner output shaft 162, and then transported to the crucible in the main furnace chamber 14 through the outer output shaft 163, thereby realizing the replenishment of materials.

[0046] Through the above-mentioned setting, the relative position of the outer output shaft 163 with the inner output shaft 162 can be adjusted according to actual working requirements, so as to realize the re-investment function of the re-investment component 16, and when the re-investment component 16 is in a non-working state, the re-investment component 16 can save space occupancy rate to improve the structural compactness of the re-investment component 16.

[0047] like Figure 2 and Figure 3 As shown, in this embodiment, the transmission mechanism 164 includes a transmission member 1641, a driving member 1642 and a moving block 1643. The transmission member 1641 and the driving member 1642 are connected in a transmission manner, so that the driving member 1642 can be used to drive the transmission member 1641, so that the transmission member 1641 has a degree of freedom of movement. The moving block 1643 is located on the transmission member 1641, and the moving block 1643 is also connected to the outer output shaft 163, so that the movement of the transmission member 1641 drives the movement of the moving block 1643, so that the moving block 1643 drives the outer output shaft 163 to move along the axial direction of the inner output shaft 162.

[0048] It should be noted that the moving direction of the transmission member 1641 is consistent with the moving direction of the external output shaft 163; the moving block 1643 can be connected to the transmission member 1641 by a fixing method such as bolt connection, and the moving block 1643 can also be connected to the external output shaft 163 by a fixing method such as bolt connection, and this application does not impose any restrictions.

[0049] It is understandable that the outer output shaft 163 may also be directly fixedly connected to the transmission member 1641 , so that the transmission member 1641 directly drives the movement of the outer output shaft 163 .

[0050] Exemplarily, in order to make the connection between the moving block 1643 and the outer output shaft 163 more stable, the moving block 1643 can be sleeved on the outer output shaft 163 and fixedly connected to the outer output shaft 163 .

[0051] Exemplarily, the transmission member 1641 is a conveyor belt, and the moving block 1643 is sleeved and connected to the conveyor belt. Specifically, the moving block 1643 can be composed of two plates, the transmission belt 1641a is located between the two plates, and the two plates are fixedly connected by bolts, so that the connection between the moving block 1643 and the transmission belt 1641a is achieved. Among them, at least one plate of the moving block 1643 can be provided with a protruding structure, and the protruding structure contacts the transmission belt 1641a, so as to improve the connection stability between the moving block 1643 and the transmission belt 1641a.

[0052] Exemplarily, the transmission member 1641 is a screw rod, a nut is provided in the moving block 1643, the screw rod is passed through the nut and drives the nut to move. The moving block 1643 may have a mounting hole that penetrates the moving block 1643, the nut is located in the mounting hole and fixed in the moving block 1643; the screw rod may be driven by a rotating motor, which is not limited in this application.

[0053] like Figure 4 As shown, as an implementation method, the re-investment component 16 also includes a shell 165, and the outer output shaft 163 and at least a part of the transmission mechanism 164 are located in the shell 165, so that the shell 165 can be used to protect the inner output shaft 162, the outer output shaft 163 and at least a part of the transmission mechanism 164, thereby improving the service life of the re-investment component 16.

[0054] One end of the shell 165 is connected to the silo 161, and the other end of the shell 165 is connected to the main furnace chamber 14. Specifically, the connection between the shell 165 and the silo 161 and the connection between the shell 165 and the main furnace chamber 14 can be connected by bolts or other fixing methods, which is not limited in this application.

[0055] Furthermore, the re-investment component 16 also includes a first valve 166, which is located at the connection between the shell 165 and the main furnace chamber 14, and is respectively connected to the shell 165 and the main furnace chamber 14. Through the above arrangement, when the re-investment component 16 is working, the shell 165 and the main furnace chamber 14 can be connected through the first valve 166, so that the external output shaft 163 can extend into the main furnace chamber 14, thereby realizing the material re-investment of the re-investment component 16; when the re-investment component 16 is not working, the shell 165 and the main furnace chamber 14 can be closed through the first valve 166, so that the main furnace chamber 14 can be in a sealed state, which is beneficial to the working stability of the main furnace chamber 14, and prevents external air, impurities, etc. from entering the main furnace chamber 14, thereby improving the processing quality of the crystal rod.

[0056] In this embodiment, the re-investment component 16 further includes a first bellows section 167, which is located between the first valve 166 and the housing 165, and is respectively connected to the first valve 166 and the housing 165. Through the above arrangement, the connection between the first valve 166 and the housing 165 can be an adjustable connection, that is, the first valve 166 and the housing 165 can be connected at multiple angles through the first bellows section 167, so that the arrangement positions of the first valve 166 and the housing 165 can be diversified, which is beneficial to improving the space utilization of the crystal growth furnace 100, and avoiding interference between the housing 165 and other components of the crystal growth furnace 100, so as to improve the working stability of the crystal growth furnace 100.

[0057] like Figure 4 and Figure 5 As shown, illustratively, a communication port 141 is opened on the upper side of the main furnace chamber 14 , so that the outer output shaft 163 can extend into the main furnace chamber 14 through the communication port 141 .

[0058] Exemplarily, the re-investment component 16 further includes a connecting flange 168 , which is respectively connected to the communication port 141 and the first valve 166 , so as to facilitate the connection between the first valve 166 and the communication port 141 .

[0059] In this embodiment, the re-injection component 16 further includes a second bellows section 169, which is located between the connecting flange 168 and the first valve 166, and is respectively connected to the connecting flange 168 and the first valve 166. Through the above arrangement, the connection between the first valve 166 and the connecting flange 168 can be an adjustable connection, that is, the first valve 166 and the connecting flange 168 can be connected at multiple angles through the second bellows section 169, so that the arrangement positions of the first valve 166 and the connecting flange 168 can be diversified, which is beneficial to improve the space utilization rate of the crystal growth furnace 100.

[0060] Exemplarily, the re-injection component 16 further includes a second valve 160 , which is located between the inner output shaft 162 and the silo 161 , and the second valve 160 is also connected to the housing 165 and the silo 161 , respectively. Through the above-mentioned arrangement, when the re-investment component 16 is working, the outer shell 165 and the silo 161 can be connected through the second valve 160, so that the material in the silo 161 can be transported to the inner output shaft 162, and transported to the crucible through the inner output shaft 162 and the outer output shaft 163, thereby realizing the material re-investment of the re-investment component 16; when the re-investment component 16 is not working, the outer shell 165 and the silo 161 can be closed through the second valve 160, so that the material cannot enter the inner output shaft 162 when the re-investment component 16 is not working, which is beneficial to prevent the material from melting onto the inner output shaft 162 or the outer output shaft 163, and further avoid the material melted onto the inner output shaft 162 or the outer output shaft 163 from contaminating the material for the next re-investment, which is beneficial to improve the processing quality of the crystal rod.

[0061] like Figure 6 As shown, as an implementation method, the pulling assembly 12 includes a pulling rope 121, and the pulling rope 121 is used to pull the seed crystal upward, and then go through processes such as seeding, enlargement, shoulder rotation, and equal diameter growth to obtain the desired crystal rod. In the actual process of the crystal growth furnace 100, the pulling rope 121 will shake, which is not conducive to the growth of the crystal rod. In order to reduce the shaking of the pulling rope 121, the crystal growth furnace 100 of the present application also includes a clamping assembly 17, which is located in the auxiliary furnace chamber 13 and is used to clamp the pulling rope 121 to reduce the shaking of the pulling rope 121, thereby improving the processing quality of the crystal rod.

[0062] like Figure 7 and Figure 8 As shown, specifically, the clamping assembly 17 includes a stabilizing mechanism 171 and a driving mechanism 172. The stabilizing mechanism 171 is sleeved on the lifting rope 121 to reduce the shaking of the lifting rope 121. The driving mechanism 172 is connected to the stabilizing mechanism 171 to drive the stabilizing mechanism 171 to follow the lifting rope 121 to rise and fall, so that during the lifting and falling process of the lifting rope 121, the stabilizing mechanism 171 can always be located at the place where the lifting rope 121 shakes more, thereby improving the stability of the lifting rope 121.

[0063] It should be noted that a plurality of stabilizing mechanisms 171 may be provided, so that the stabilizing mechanisms 171 may be located at different positions of the pulling rope 121 to further improve the working stability of the pulling rope 121 .

[0064] Exemplarily, when a plurality of stabilizing mechanisms 171 are provided, the plurality of stabilizing mechanisms 171 may be arranged at equal intervals; when a single stabilizing mechanism 171 is provided, the stabilizing mechanism 171 may always be located in the middle of the lifting rope 121, that is, the middle of the lifting rope 121 may be the place where the lifting rope 121 shakes the most, thereby improving the stability of the lifting rope 121.

[0065] In the present application, the driving mechanism 172 includes a screw rod 1721 and a first driving member (not shown), and the first driving member is used to drive the screw rod 1721 to rotate. The first driving member can be a rotating motor, etc. The stabilizing mechanism 171 has a nut 1711 built in, and the screw rod 1721 is inserted into the nut 1711 to drive the stabilizing mechanism 171 to rise and fall.

[0066] It should be noted that the extension direction of the screw rod 1721 of the present application is consistent with the moving direction of the stabilizing mechanism 171 , that is, the moving direction of the stabilizing mechanism 171 is the axial direction of the screw rod 1721 .

[0067] Specifically, two screw rods 1721 are provided, and two nuts 1711 are provided in the stabilizing mechanism 171 , and each screw rod 1721 is passed through a nut 1711 , so that the movement of the stabilizing mechanism 171 along the axial direction of the screw rod 1721 is more stable, thereby improving the working stability of the pulling rope 121 .

[0068] More specifically, the stabilizing mechanism 171 is provided with a through hole 1712 penetrating the stabilizing mechanism 171 , and the nut 1711 is located in the through hole 1712 and fixedly connected to the stabilizing mechanism 171 .

[0069] like Fig. 9 As shown, as another implementation, the driving mechanism 172 includes a transmission belt 1723 and a second driving member 1724, and the second driving member 1724 is used to drive the transmission belt 1723 to move. Among them, the second driving member 1724 can be a rotary motor, etc. The stabilizing mechanism 171 is connected to the transmission belt 1723 to drive the stabilizing mechanism 171 to rise and fall. Specifically, the moving direction of the transmission belt 1723 is consistent with the moving direction of the stabilizing mechanism 171.

[0070] Exemplarily, the stabilizing mechanism 171 may be directly connected to the transmission belt 1723 and fixedly connected to the transmission belt 1723 .

[0071] Exemplarily, the driving mechanism 172 may further include a moving block 1725, the moving block 1725 is located on the transmission belt 1723 and is fixedly connected to the transmission belt 1723, and the moving block 1725 is connected to the stabilizing mechanism 171, so that the stabilizing mechanism 171 is indirectly connected to the transmission belt 1723 through the moving block 1725. It should be noted that the stabilizing mechanism 171 and the moving block 1725 may be fixedly connected by bolts or the like, and this application does not limit this.

[0072] like Figure 8 As shown, as an implementation method, the stabilizing mechanism 171 is provided with a through hole 1713 that penetrates the stabilizing mechanism 171, and the pull rope 121 is passed through the through hole 1713. The diameter of the through hole 1713 can be adjusted according to actual conditions to meet the working requirements of the pull rope 121. It should be noted that the diameter of the through hole 1713 needs to be greater than or equal to the minimum width of the pull rope 121, so that the pull rope 121 can move relative to the stabilizing mechanism 171.

[0073] Exemplarily, the smaller the diameter of the through hole 1713 is, the higher the stability of the pulling rope 121 is.

[0074] In this embodiment, the stabilizing mechanism 171 is further provided with an opening 1714 , which is communicated with the through hole 1713 , so that the opening 1714 can allow the pulling rope 121 to move into the through hole 1713 .

[0075] As another implementation, a clamping opening (not shown) is formed at one end of the stabilizing mechanism 171 away from the driving mechanism 172. Two cantilever structures are formed at one end of the stabilizing mechanism 171 away from the driving mechanism 172, and a clamping opening is formed between the two cantilever structures. Specifically, through the above arrangement, the clamping opening can have a notch connected to the outside, so that the lifting rope 121 can pass through the notch and be arranged in the clamping opening, thereby achieving the coordination between the stabilizing mechanism 171 and the lifting rope 121.

[0076] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to this application.

Claims

1. A crystal growth furnace, comprising: frame; a lifting assembly, at least partially disposed on the frame; an auxiliary furnace chamber supported by the frame and at least partially located on the lower side of the lifting assembly; a main furnace chamber, supported by the frame and at least partially located at the lower side of the auxiliary furnace chamber; a crucible, at least partially located in the main furnace chamber; It is characterized in that The crystal growth furnace also includes: Reinvestment components, including: Silo, which contains materials; An inner output shaft is hollow and connected to the silo; The outer output shaft is hollow and sleeved on the inner output shaft; A transmission mechanism drives the outer output shaft to move along the axis of the inner output shaft so that the outer output shaft has a storage position and a re-investment position; When the outer output shaft is in the receiving position, the outer output shaft is located outside the main furnace chamber, and when the outer output shaft is in the re-injection position, the outer output shaft is at least partially located inside the main furnace chamber and transports the material into the crucible.

2. The crystal growth furnace according to claim 1, characterized in that: The transmission mechanism comprises a transmission member with a degree of freedom of movement, a driving member driving the transmission member, and a moving block located on the transmission member, wherein the moving block is connected to the outer output shaft, and the transmission member and the driving member are in transmission connection.

3. The crystal growth furnace according to claim 2, characterized in that: The transmission member is a conveyor belt, and the moving block is sleeved on and connected to the conveyor belt.

4. The crystal growth furnace according to claim 2, characterized in that: The transmission member is a screw rod, a nut is arranged in the moving block, and the screw rod passes through the nut and drives the nut to move.

5. The crystal growth furnace according to claim 1, characterized in that: The re-investment component also includes a shell, one end of which is connected to the silo, and the other end of which is connected to the main furnace chamber, and the external output shaft and at least part of the transmission mechanism are located in the shell.

6. The crystal growth furnace according to claim 5, characterized in that: The re-investment component also includes a first valve, which is located at the connection between the outer shell and the main furnace chamber and is connected to the outer shell and the main furnace chamber respectively.

7. The crystal growth furnace according to claim 6, characterized in that: The re-investment component also includes a first bellows section, which is located between the first valve and the housing and is connected to the first valve and the housing respectively.

8. The crystal growth furnace according to claim 6, characterized in that: A communication port is provided on the upper side of the main furnace chamber, and the re-investment component further comprises a connecting flange, and the connecting flange is respectively connected to the communication port and the first valve.

9. The crystal growth furnace according to claim 8, characterized in that: The re-investment component also includes a second bellows section, which is located between the connecting flange and the first valve and is connected to the connecting flange and the first valve respectively.

10. The crystal growth furnace according to claim 5, characterized in that: The re-investment component also includes a second valve, which is located between the inner output shaft and the silo, and the second valve is also connected to the housing and the silo respectively.

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