Wafer identification detection equipment

Abstract

The utility model relates to the field of detection equipment, in particular to wafer identification detection equipment. Comprising a mounting disc and a detection frame. Wherein the top end of the mounting disc is constructed as a mounting surface, and a detection groove is formed in the middle of the mounting disc and provides an accommodating space for a detected product; the detection frame is provided with a clamping end corresponding to the detection groove, and the clamping end is used for clamping detection equipment; wherein a plurality of mounting holes surrounding the detection groove are formed in the top end of the mounting disc, and the detection frame is matched with any adjacent mounting hole, so that the detection frame has a plurality of different azimuth angles corresponding to a detected product; the clamping end is connected with the mounting disc through an adjusting part, and the adjusting part drives the clamping end to move along the horizontal plane and conduct pitching motion around the horizontal axis. According to the application, the clamping end provided with the detection equipment is arranged on the adjusting part, so that the detection equipment can move on a horizontal plane and perform pitching motion around a horizontal axis, and thus the detection equipment can identify identifiers at different positions.

Description

Technical Field

[0001] The utility model relates to the field of detection equipment, in particular to a wafer identification detection equipment. Background Art

[0002] Wafer refers to the substrate (also called base) for manufacturing semiconductor transistors or integrated circuits. Because it is a crystalline material and its shape is round, it is called a wafer. In recent years, China has been vigorously developing the semiconductor industry, and the degree of automation of wafer production lines has become an important factor affecting the improvement of wafer production and quality.

[0003] During the wafer processing, it is necessary to print labels on the wafers. During the label printing process, a visual system is needed to detect whether there are any omissions or errors in the label position and size. However, the visual inspection system in the prior art has the problem of large equipment size, fixed detection position, and inability to perform multi-angle inspection. Utility Model Content

[0004] The utility model aims to provide a wafer identification detection device to solve the problem that the visual detection system in the prior art has a fixed detection position and cannot perform multi-angle detection.

[0005] The technical solution of the utility model is: a wafer identification detection device, comprising:

[0006] The mounting plate has a top end configured as a mounting surface and a detection slot in the middle, the detection slot providing a storage space for the product to be detected;

[0007] A detection frame having a clamping end arranged corresponding to the detection slot, wherein the clamping end is used to clamp the detection device;

[0008] The top of the mounting plate has a plurality of mounting holes surrounding the detection slot, and the detection frame cooperates with any adjacent mounting holes so that it has a plurality of different azimuth angles corresponding to the detected product;

[0009] The clamping end is connected to the mounting plate through an adjusting portion, and the adjusting portion drives the clamping end to move along a horizontal plane and to perform a pitching motion around a horizontal axis.

[0010] Preferably, the adjustment part includes a first displacement platform, a bracket is installed in the vertical direction on the first displacement platform, and the bracket moves in the plane where the first displacement platform is located under the action of the first displacement platform; a second displacement platform is installed on the bracket, and the clamping end is arranged on the second displacement platform, and moves along the length direction of the second displacement platform under the drive of the second displacement platform.

[0011] Preferably, the clamping end includes a first part and a second part that are detachably connected; the two ends of the first part are respectively set as the first end and the second end, the first end is arranged on the second displacement platform, the second end extends to the top of the detection groove, and the second end is provided with an arc groove; the second part is arranged corresponding to the second end, and is provided with an arc groove of the same structure, and the two arc grooves cooperate to form a space for clamping the detection equipment.

[0012] Preferably, the first part is configured as an L-shaped structure, the first end is provided with a pin hole, and is hinged to the second displacement platform through a matching pin; the first end is also provided with a locking mechanism, including a locking groove arranged adjacent to the pin hole, the locking groove is configured as an arc structure with the pin hole as the center, and the second displacement platform is provided with a plurality of locking holes corresponding to the locking groove.

[0013] Preferably, the first part and the second part are detachably connected by bolts.

[0014] Preferably, the first displacement platform is connected to the mounting plate via a bottom plate, the bottom plate is provided with a waist-shaped hole, and the bottom plate is connected to the mounting plate via screws penetrating the waist-shaped hole.

[0015] Compared with the prior art, the advantages of the utility model are:

[0016] (1) The present application arranges the clamping end on which the detection device is installed on the adjustment part so that the detection device can move in a horizontal plane and perform a pitch motion around a horizontal axis, thereby enabling the detection device to identify marks at different positions on the wafer.

[0017] (2) The mounting plate is evenly provided with a plurality of mounting holes around the axis, so that the detection device has a plurality of different azimuth angles relative to the product being detected. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0019] Figure 1 This is a structural diagram of a wafer identification detection device described in the utility model;

[0020] Figure 2 This is a structural diagram of a wafer identification detection device described in the utility model;

[0021] Figure 3 This is an exploded diagram of a wafer identification detection device described in the utility model;

[0022] Figure 4 This is the structural diagram of the first part of the utility model;

[0023] Among them: 1. mounting plate, 2. detection groove, 3. mounting hole, 4. detection frame, 5. clamping end, 51. first part, 511. first end, 512. second end, 513. pin hole, 514. locking groove, 52. second part, 6. detection device, 7. adjustment part, 71. first displacement platform, 72. second displacement platform, 73. bracket, 74. bottom plate. DETAILED DESCRIPTION

[0024] The following is a further detailed description of the present invention in conjunction with specific embodiments:

[0025] like Figure 1 As shown, a wafer identification detection device is used to detect the presence and specification of identification on a product. It includes a mounting plate 1, a detection slot 2 is opened in the middle, and the detection slot 2 is set in a circular shape. The wafer to be detected is placed in the center of the detection slot 2.

[0026] The top end of the mounting plate 1 is configured as a mounting surface, on which a plurality of mounting holes 3 are evenly arranged around the detection slot 2 , and the mounting holes 3 are configured as threaded holes.

[0027] like Figure 2 and Figure 3 As shown, the detection frame 4 has a clamping end 5 corresponding to the detection slot 2, and the clamping end 5 clamps the detection device 6. The detection frame 4 is fixed to the mounting surface through the mounting hole 3, and through the cooperation with different adjacent mounting holes 3, the detection device 6 has a plurality of different azimuth angles relative to the detected product. In this embodiment, the detection device 6 adopts a CCD camera.

[0028] The clamping end 5 of the detection frame 4 is connected to the mounting plate 1 through the adjusting portion 7, and the adjusting portion 7 can drive the clamping end 5 to move along the horizontal plane and swing around a horizontal axis. The adjusting portion 7 includes a first displacement platform 71, and a bracket 73 is installed on the first displacement platform 71 in the vertical direction. The bracket 73 moves in the horizontal plane under the action of the first displacement platform 71. A second displacement platform 72 is installed on the bracket 73, and the clamping end 5 is arranged on the second displacement platform 72, and moves along the length direction of the second displacement platform 72 under the drive of the second displacement platform 72. The bottom end of the first displacement platform 71 is connected to a bottom plate 74, and a waist-shaped hole is opened on the bottom plate 74, and the bottom plate 74 is connected to the mounting plate through screws passing through the waist-shaped hole.

[0029] like Figure 4As shown, the clamping end 5 includes a first part 51 and a second part 52 which are detachably connected by bolts. The two ends of the first part 51 are respectively set as a first end 511 and a second end 512. The first end 511 is set on the second displacement platform 72, and the second end 512 extends to the top of the detection slot 2, and the second end 512 is provided with an arc groove. The second part 52 is set corresponding to the second end 512 and is provided with an arc groove of the same structure. The two arc grooves cooperate to form a space for clamping the detection device 6.

[0030] Further, the first part 51 is configured as an L-shaped structure, and a pin hole 513 is provided at the first end 511. A pin shaft is passed through the pin hole 513 and plugged into the second displacement platform 72, so that the first part 51 is hinged with the second displacement platform 72, so that the first part 51 can perform pitching motion around the pin hole 513. In addition, a locking mechanism is also provided at the first end 511, and the locking mechanism includes a locking groove 514 provided adjacent to the pin hole 513. The locking groove 514 is configured as an arc structure with the pin hole 513 as the center of the circle, and three locking holes are provided on the second displacement platform 72 corresponding to the locking groove 514. By passing the pin shaft through the locking groove 514 and plugging it into different locking holes, and under the action of gravity at the second end 512, the pin shaft abuts against the inner wall of the locking groove 514, so that the inclination angle of the first part 51 is locked.

[0031] When working:

[0032] Unscrew the screws, separate the second part 52 from the first part 51 , put the detection device 6 into the arc groove, and then reassemble the first part 51 and the second part 52 to clamp the detection device 6 .

[0033] By adjusting the angles of the first displacement platform 71, the second displacement platform 72 and the clamping end 5, the clamping end 5 is aligned with the center position of the bottom end of the detection groove 2 to detect the incoming material.

[0034] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, so it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.

Claims

1. A wafer identification detection device, characterized in that: include: The mounting plate has a top end configured as a mounting surface and a detection slot in the middle, the detection slot providing a storage space for the product to be detected; A detection frame having a clamping end arranged corresponding to the detection slot, wherein the clamping end is used to clamp the detection device; The top of the mounting plate has a plurality of mounting holes surrounding the detection slot, and the detection frame cooperates with any adjacent mounting holes so that it has a plurality of different azimuth angles corresponding to the detected product; The clamping end is connected to the mounting plate through an adjusting portion, and the adjusting portion drives the clamping end to move along a horizontal plane and to perform a pitching motion around a horizontal axis.

2. A wafer identification detection device according to claim 1, characterized in that: The adjusting part includes a first displacement platform, a bracket is installed in the vertical direction on the first displacement platform, and the bracket moves in the plane where the first displacement platform is located under the action of the first displacement platform; a second displacement platform is installed on the bracket, and the clamping end is arranged on the second displacement platform, and moves along the length direction of the second displacement platform under the drive of the second displacement platform.

3. A wafer identification detection device according to claim 2, characterized in that: The clamping end includes a first part and a second part that are detachably connected; the two ends of the first part are respectively set as the first end and the second end, the first end is arranged on the second displacement platform, the second end extends to the top of the detection groove, and the second end is provided with an arc groove; the second part is arranged corresponding to the second end, and is provided with an arc groove of the same structure, and the two arc grooves cooperate to form a space for clamping the detection equipment.

4. The wafer identification detection device according to claim 3, characterized in that: The first part is configured as an L-shaped structure, a pin hole is provided at the first end, and is hinged to the second displacement platform through a matching pin; a locking mechanism is also provided at the first end, including a locking groove provided adjacent to the pin hole, the locking groove is configured as an arc structure with the pin hole as the center, and a plurality of locking holes are provided on the second displacement platform corresponding to the locking groove.

5. The wafer identification detection device according to claim 4, characterized in that: The first part and the second part are detachably connected by bolts.

6. The wafer identification detection device according to claim 2, characterized in that: The first displacement platform is connected to the mounting plate via a bottom plate, a waist-shaped hole is provided on the bottom plate, and the bottom plate is connected to the mounting plate via screws penetrating the waist-shaped hole.

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