Lens protection device of photoetching machine

Abstract

The utility model relates to the technical field of photoetching machines, in particular to a lens protection device of a photoetching machine. The technical problems that when a photoetching machine works, laser used generates high temperature, the internal temperature of an objective lens changes along with exposure time, meanwhile, when the objective lens is used for a long time, crystal substances are generated on the polluted surface of the objective lens, a traditional lens protection device is inconvenient to reduce the temperature of the lens, and the service life of the lens is influenced are solved. The phenomenon that crystal substances are generated on the surface of the objective lens cannot be well avoided; according to the technical scheme, the lens protection device of the photoetching machine comprises a main body mounting block, a lens assembly, a fixing assembly, a gas transmission assembly, a gas storage assembly, a connecting assembly and a gas injection assembly, by arranging the cooling structure, when the lens is overheated due to long-time work of the photoetching machine and crystal substances are generated on the polluted surface of the objective lens, the lens is cooled by spraying cold air, and the crystal substances are blown away, so that the aims of protecting the lens of the photoetching machine and reducing the damage to the lens of the photoetching machine are fulfilled.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography machines, in particular to a lens protection device of a photolithography machine. Background Art

[0002] The lens protection device of the lithography machine is used to protect the lens of the lithography machine from damage. The lithography machine is a device used to manufacture microchips, flat-panel displays and other microstructures. The lens is one of the key components. During the lithography process, the lens needs to withstand high-intensity light beams, high temperatures and chemicals. Therefore, measures need to be taken to protect the quality and life of the lens. The lens protection device is usually composed of multiple components, including filters, anti-fouling coatings, gas cleaning systems, etc. The filters can filter out unnecessary light during the lithography process to avoid damage to the lens. The anti-fouling coating can prevent dust, chemicals or other impurities from entering the lens surface to keep it clean. The gas cleaning system can be purged or sucked. The main purpose of the lens protection device is to remove particles, volatile substances, etc. generated during the photolithography process, extend the service life of the lens, improve the reliability and yield of the photolithography machine, and reduce the risk of lens damage or contamination, thereby reducing the cost of repairing and replacing the lens, while ensuring the stability and consistency of the production process. However, the laser used in the photolithography machine will generate high temperature. When the laser is exposed for a long time, the internal temperature of the objective lens will change with the exposure time. The change in the internal temperature of the objective lens will cause the focal plane to drift. At the same time, when used for a long time, crystals will appear on the contaminated surface of the objective lens. Traditional lens protection devices are not convenient for lowering the lens temperature and cannot effectively avoid the phenomenon of crystals appearing on the surface of the objective lens. Utility Model Content

[0003] In order to overcome the high temperature generated by the laser used in the lithography machine, long-term laser exposure will cause the internal temperature of the objective lens to change with the exposure time. The change in the internal temperature of the objective lens will cause the focal plane to drift. At the same time, after long-term use, the contaminated surface of the objective lens will produce crystals. The traditional lens protection device is not convenient for reducing the lens temperature and cannot effectively avoid the problem of crystals forming on the surface of the objective lens.

[0004] The technical solution of the utility model is: a lens protection device for a photolithography machine, comprising a main body mounting block, a lens assembly, a fixing assembly, a gas delivery assembly, a gas storage assembly, a connecting assembly and an injection assembly, wherein the lens assembly is arranged on one side of the main body mounting block, the fixing assembly is arranged on one side of the main body mounting block, the gas delivery assembly is arranged on one side of the fixing assembly, the gas storage assembly is arranged on one side of the fixing assembly, the connecting assembly is arranged on one side of the gas storage assembly, and the injection assembly is arranged on one side of the connecting assembly.

[0005] Preferably, the lithography machine is installed through the main mounting block, used for lithography through the lens assembly, accessories are fixed through the fixing assembly, cold air is transported through the air delivery assembly, cold air is stored through the air storage assembly, accessories are connected through the connecting assembly, and cold air is sprayed out through the jet assembly to cool and blow the lens.

[0006] Preferably, the lens assembly includes a conduction tube, a first bolt, a lens mounting block and a photolithography machine lens. A conduction tube is arranged at the bottom of the main mounting block, the bottom of the conduction tube is threadedly connected to the first bolt, the first bolt is threadedly connected to the lens mounting block, and the photolithography machine lens is arranged at the bottom of the lens mounting block. When in use, laser is conducted through the conduction tube, the conduction tube and the lens mounting block are connected through the first bolt, the photolithography machine lens is fixed through the lens mounting block, and laser engraving is performed through the photolithography machine lens.

[0007] Preferably, the fixing assembly includes a mounting plate, a connecting pipe and a first delivery pipe. A mounting plate is provided on one side of the main mounting block, a connecting pipe is provided on one side of the mounting plate, and a first delivery pipe is provided on one side of the connecting pipe. When in use, the connecting pipe is installed through the mounting plate, the first delivery pipe is connected through the connecting pipe, and cold air is delivered through the first delivery pipe.

[0008] Preferably, the gas delivery assembly includes a second delivery pipe, a second bolt and a first threaded tube. The second delivery pipe is arranged on one side of the connecting tube. The surface of the second delivery pipe is sleeved with a second bolt. The interior of the second bolt is sleeved with a first threaded tube. When in use, cold air is delivered through the second delivery pipe. The second delivery pipe and the first threaded tube are connected and fixed by the second bolt, and the refrigeration device is connected through the first threaded tube.

[0009] Preferably, the gas storage assembly includes a third delivery pipe, a gas storage tank and a delivery tank. The third delivery pipe is arranged on one side of the first delivery pipe, the gas storage tank is arranged on one side of the third delivery pipe, and the delivery tank is arranged on one side of the third delivery pipe. When in use, cold air is delivered through the third delivery pipe, the cold air is stored through the gas storage tank, and the cold air is delivered through the delivery tank.

[0010] Preferably, the connecting assembly includes a second threaded tube, a third bolt and a third threaded tube. A second threaded tube is provided on one side of the conveying tank. The second threaded tube is threadedly connected to the third bolt, and the third bolt is threadedly connected to the third threaded tube. When in use, cold air is conveyed through the second threaded tube, and the second threaded tube and the third threaded tube are connected through the third bolt, and cold air is conveyed through the third threaded tube.

[0011] Preferably, the jet assembly includes an air pipe, a connecting thread, a fourth bolt, a fourth threaded tube, an air pipe and an air port. An air pipe is arranged on one side of the third threaded tube, a connecting thread is opened at one end of the air pipe, the connecting thread is threadedly connected to the fourth bolt, the fourth bolt is threadedly connected to the fourth threaded tube, the fourth threaded tube is threadedly connected to the air pipe, and an air port is opened on the surface of the air pipe. When in use, cold air is transported through the air pipe, the fourth bolt is connected through the connecting thread, the fourth threaded tube is connected through the fourth bolt, the air pipe is connected through the fourth threaded tube and cold air is transported, the air port is opened through the air pipe, and the cold air is ejected through the air port.

[0012] Beneficial effects of the utility model:

[0013] 1. Compared with the laser used in traditional photolithography machines, which will generate high temperature when working, the temperature inside the objective lens will change with the exposure time when the laser is exposed for a long time. The change of the temperature inside the objective lens will cause the focal plane to drift. At the same time, after long-term use, crystals will appear on the contaminated surface of the objective lens. The traditional lens protection device is not convenient for reducing the lens temperature and cannot effectively avoid the phenomenon of crystals on the surface of the objective lens. The lens protection device of the photolithography machine is provided with a cooling structure. When the lens is overheated due to the long-term operation of the photolithography machine and crystals are generated on the contaminated surface of the objective lens, the lens protection device of the photolithography machine cools the lens by spraying cold air and blows away the crystals, thereby protecting the lens of the photolithography machine and reducing damage to the lens of the photolithography machine;

[0014] 2. When the lithography machine lens protection device is used, cold air is delivered through the air delivery pipe, the fourth bolt is connected through the connecting thread, the fourth threaded tube is connected through the fourth bolt, the jet pipe is connected through the fourth threaded tube and cold air is delivered, a jet port is opened through the jet pipe, and cold air is ejected through the jet port. The lithography machine lens is quickly cooled down through the above steps to avoid damage to the lithography machine lens due to overheating;

[0015] 3. When using the lithography machine lens protection device, cold air is transported through the third delivery pipe, the cold air is stored through the gas storage tank, the cold air is transported through the delivery tank, the cold air is transported through the second threaded tube, the second threaded tube and the third threaded tube are connected by the third bolt, and the cold air is transported through the third threaded tube. The above steps are used to provide cold air to the protection device, thereby achieving the purpose of timely cooling the lens. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 What is shown is a first three-dimensional structural schematic diagram of a lens protection device of a photolithography machine according to the utility model;

[0017] Figure 2 What is shown is a second three-dimensional structural schematic diagram of a lens protection device of a photolithography machine according to the utility model;

[0018] Figure 3 Shown is a third three-dimensional structural schematic diagram of a lens protection device for a photolithography machine of the utility model;

[0019] Figure 4 What is shown is a partial three-dimensional structure schematic diagram of a lens protection device of a photolithography machine of the utility model;

[0020] Explanation of the reference numerals: 1. main mounting block; 2. lens assembly; 3. fixing assembly; 4. gas delivery assembly; 5. gas storage assembly; 6. connecting assembly; 7. jet assembly; 201. conduction tube; 202. first bolt; 203. lens mounting block; 204. lithography machine lens; 301. mounting plate; 302. connecting tube; 303. first delivery tube; 401. second delivery tube; 402. second bolt; 403. first threaded tube; 501. third delivery tube; 502. gas storage tank; 503. delivery tank; 601. second threaded tube; 602. third bolt; 603. third threaded tube; 701. gas delivery tube; 702. connecting thread; 703. fourth bolt; 704. fourth threaded tube; 705. jet tube; 706. jet port. DETAILED DESCRIPTION

[0021] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0022] See also Figure 1 The utility model provides an embodiment: a lens protection device for a photolithography machine, comprising a main body mounting block 1, a lens assembly 2, a fixing assembly 3, a gas delivery assembly 4, a gas storage assembly 5, a connecting assembly 6 and an injection assembly 7, wherein the lens assembly 2 is arranged on one side of the main body mounting block 1, the fixing assembly 3 is arranged on one side of the main body mounting block 1, the gas delivery assembly 4 is arranged on one side of the fixing assembly 3, the gas storage assembly 5 is arranged on one side of the fixing assembly 3, the connecting assembly 6 is arranged on one side of the gas storage assembly 5, and the injection assembly 7 is arranged on one side of the connecting assembly 6.

[0023] See also Figure 2-4In this embodiment, the lens assembly 2 includes a conductive tube 201, a first bolt 202, a lens mounting block 203 and a photolithography machine lens 204. The conductive tube 201 is arranged at the bottom of the main body mounting block 1. The bottom of the conductive tube 201 is threadedly connected with the first bolt 202. The first bolt 202 is threadedly connected with the lens mounting block 203. The photolithography machine lens 204 is arranged at the bottom of the lens mounting block 203. When in use, the laser is transmitted through the conductive tube 201, the conductive tube 201 and the lens mounting block 203 are connected through the first bolt 202, the photolithography machine lens 204 is fixed through the lens mounting block 203, and laser engraving is performed through the photolithography machine lens 204. The fixing assembly 3 includes a mounting plate 301, a connecting tube 302 and a first conveying tube 303. A mounting plate 30 is arranged on one side of the main body mounting block 1. 1. A connecting pipe 302 is provided on one side of the mounting plate 301, and a first delivery pipe 303 is provided on one side of the connecting pipe 302. When in use, the connecting pipe 302 is installed through the mounting plate 301, the first delivery pipe 303 is connected through the connecting pipe 302, and cold air is delivered through the first delivery pipe 303. The air delivery component 4 includes a second delivery pipe 401, a second bolt 402 and a first threaded pipe 403. A second delivery pipe 401 is provided on one side of the connecting pipe 302, the surface of the second delivery pipe 401 is sleeved with the second bolt 402, and the interior of the second bolt 402 is sleeved with the first threaded pipe 403. When in use, cold air is delivered through the second delivery pipe 401, the second delivery pipe 401 and the first threaded pipe 403 are connected and fixed by the second bolt 402, and the refrigeration device is connected through the first threaded pipe 403.

[0024] The gas storage component 5 includes a third delivery pipe 501, a gas storage tank 502 and a delivery tank 503. The third delivery pipe 501 is arranged on one side of the first delivery pipe 303, the gas storage tank 502 is arranged on one side of the third delivery pipe 501, and the delivery tank 503 is arranged on one side of the third delivery pipe 501. When in use, cold air is transported through the third delivery pipe 501, cold air is stored through the gas storage tank 502, and cold air is transported through the delivery tank 503. The connecting component 6 includes a second threaded pipe 601, a third bolt 602 and a third threaded pipe 603. The second threaded pipe 601 is arranged on one side of the delivery tank 503, and the second threaded pipe 601 is threadedly connected to the third bolt 602. The third bolt 602 is threadedly connected to the third threaded pipe 603. When in use, cold air is transported through the second threaded pipe 601, the second threaded pipe 601 and the third threaded pipe 603 are connected through the third bolt 602, and the third threaded pipe 603 transports cold air, the jet assembly 7 includes an air pipe 701, a connecting thread 702, a fourth bolt 703, a fourth threaded tube 704, an air pipe 705 and an air outlet 706. An air pipe 701 is arranged on one side of the third threaded tube 603, a connecting thread 702 is provided at one end of the air pipe 701, the connecting thread 702 is threadedly connected to the fourth bolt 703, the fourth bolt 703 is threadedly connected to the fourth threaded tube 704, the fourth threaded tube 704 is threadedly connected to the air pipe 705, and an air outlet 706 is provided on the surface of the air pipe 705. When in use, cold air is transported through the air pipe 701, the fourth bolt 703 is connected through the connecting thread 702, the fourth threaded tube 704 is connected through the fourth bolt 703, the air pipe 705 is connected through the fourth threaded tube 704 and cold air is transported, the air outlet 706 is provided through the air pipe 705, and the cold air is ejected through the air outlet 706.

[0025] When working, first, the laser is conducted through the conduction tube 201, the conduction tube 201 is connected to the lens mounting block 203 through the first bolt 202, the photolithography machine lens 204 is fixed through the lens mounting block 203, laser engraving is performed through the photolithography machine lens 204, the connection tube 302 is installed through the mounting plate 301, the first delivery tube 303 is connected through the connection tube 302, cold air is delivered through the first delivery tube 303, cold air is delivered through the second delivery tube 401, the second delivery tube 401 and the first threaded tube 403 are connected and fixed through the second bolt 402, the refrigeration device is connected through the first threaded tube 403, cold air is delivered through the third delivery tube 501, cold air is stored through the gas storage tank 502, and cold air is delivered through the delivery tank 503;

[0026] Then, cold air is transported through the second threaded tube 601, the second threaded tube 601 and the third threaded tube 603 are connected through the third bolt 602, cold air is transported through the third threaded tube 603, cold air is transported through the air pipe 701, the fourth bolt 703 is connected through the connecting thread 702, the fourth threaded tube 704 is connected through the fourth bolt 703, the jet tube 705 is connected through the fourth threaded tube 704 and cold air is transported, a jet port 706 is opened through the jet tube 705, and the cold air is ejected through the jet port 706.

[0027] Through the above steps, the photolithography machine is installed through the main mounting block 1, the photolithography is used through the lens assembly 2, the accessories are fixed through the fixing assembly 3, the cold air is transported through the air delivery assembly 4, the cold air is stored through the air storage assembly 5, the accessories are connected through the connecting assembly 6, and the cold air is sprayed through the jet assembly 7 to cool and blow the lens.

[0028] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the purpose of the present invention.

Claims

1. A lens protection device for a photolithography machine, comprising a main body mounting block (1); characterized in that: The invention also comprises a lens assembly (2), a fixing assembly (3), a gas transmission assembly (4), a gas storage assembly (5), a connecting assembly (6) and an injection assembly (7); the lens assembly (2) is arranged on one side of the main body mounting block (1); the fixing assembly (3) is arranged on one side of the main body mounting block (1); the gas transmission assembly (4) is arranged on one side of the fixing assembly (3); the gas storage assembly (5) is arranged on one side of the fixing assembly (3); the connecting assembly (6) is arranged on one side of the gas storage assembly (5); and the injection assembly (7) is arranged on one side of the connecting assembly (6).

2. The lens protection device of a photolithography machine according to claim 1, characterized in that: The lens assembly (2) comprises a conductive tube (201), a first bolt (202), a lens mounting block (203) and a photolithography machine lens (204); the conductive tube (201) is arranged at the bottom of the main body mounting block (1); the bottom of the conductive tube (201) is threadedly connected to the first bolt (202); the first bolt (202) is threadedly connected to the lens mounting block (203); and the photolithography machine lens (204) is arranged at the bottom of the lens mounting block (203).

3. The lens protection device of a photolithography machine according to claim 1, characterized in that: The fixing assembly (3) comprises a mounting plate (301), a connecting pipe (302) and a first delivery pipe (303); the mounting plate (301) is arranged on one side of the main mounting block (1); the connecting pipe (302) is arranged on one side of the mounting plate (301); and the first delivery pipe (303) is arranged on one side of the connecting pipe (302).

4. The lens protection device of a photolithography machine according to claim 3, characterized in that: The gas delivery assembly (4) comprises a second delivery pipe (401), a second bolt (402) and a first threaded pipe (403); the second delivery pipe (401) is arranged on one side of the connecting pipe (302); the second bolt (402) is sleeved on the surface of the second delivery pipe (401); and the first threaded pipe (403) is sleeved inside the second bolt (402).

5. The lens protection device of a photolithography machine according to claim 3, characterized in that: The gas storage assembly (5) comprises a third delivery pipe (501), a gas storage tank (502) and a delivery tank (503); the third delivery pipe (501) is arranged on one side of the first delivery pipe (303); the gas storage tank (502) is arranged on one side of the third delivery pipe (501); and the delivery tank (503) is arranged on one side of the third delivery pipe (501).

6. The lens protection device of a photolithography machine according to claim 5, characterized in that: The connection assembly (6) comprises a second threaded tube (601), a third bolt (602) and a third threaded tube (603); the second threaded tube (601) is arranged on one side of the delivery tank (503); the second threaded tube (601) is threadedly connected to the third bolt (602); and the third bolt (602) is threadedly connected to the third threaded tube (603).

7. The lens protection device of a photolithography machine according to claim 6, characterized in that: The jet assembly (7) comprises an air delivery pipe (701), a connecting thread (702), a fourth bolt (703), a fourth threaded tube (704), an air delivery pipe (705) and an air jet port (706). The air delivery pipe (701) is arranged on one side of the third threaded tube (603). A connecting thread (702) is provided at one end of the air delivery pipe (701). The connecting thread (702) is threadedly connected to the fourth bolt (703). The fourth bolt (703) is threadedly connected to the fourth threaded tube (704). The fourth threaded tube (704) is threadedly connected to the air delivery pipe (705). The air jet port (706) is provided on the surface of the air delivery pipe (705).

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