Efficient cleaning structure of vacuum coating equipment

Abstract

The utility model discloses an efficient cleaning structure of vacuum coating equipment, which comprises a base, a coating box is arranged on the base, a vacuum machine is arranged on the coating box, an air outlet pipe is arranged on the vacuum machine, a connecting pipe is arranged at the other end of the air outlet pipe, a wiping piece is arranged at an outlet of the coating box, and the wiping piece is arranged on the base. A wiping head is arranged at the bottom of the wiping piece, and the connecting pipe is communicated with the wiping head. According to the efficient cleaning structure of the vacuum coating equipment, provided by the utility model, coating is carried out through the coating box, air in the coating box is evacuated through the vacuum machine, so that the coating is not influenced by the air, the cleaned placing plate is wiped through the wiping piece, and the wiping head is expanded through the air extracted by the vacuum machine to wipe the placing plate; by means of the wiping piece and the wiping head, air pumped out by the vacuum machine is used as power for wiping.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, in particular to a high-efficiency cleaning structure of vacuum coating equipment. Background Art

[0002] Vacuum coating equipment is commonly used in the electronics industry and other fields to produce high-quality thin film materials. These equipment need to maintain extremely high cleanliness during operation, because any tiny contaminants may affect the quality of the film. An efficient cleaning structure is a key component to ensure the normal operation of vacuum coating equipment.

[0003] According to the publication (announcement) number: CN210886189U, the publication (announcement) date: 2020-06-30, a quick-cleaning vacuum coating equipment is disclosed, including a base plate and a machine base, the top of the base plate is fixedly connected to a vacuum coating box, the bottom of the inner cavity of the vacuum coating box is fixedly connected to a workbench, the top of the vacuum coating box is fixedly connected to a cylindrical seat, the bottom end of the cylindrical seat passes through the vacuum coating box and extends to the interior of the vacuum coating box, and a cylindrical groove is opened inside the cylindrical seat.

[0004] It can be known from the above-mentioned special train and the prior art that during the coating process of the vacuum film, if there is dust or other impurities on the placement plate, the quality of the coating will be affected. Therefore, after each coating, the placement plate will be cleaned to ensure that the quality of the coating will not be affected during the next coating. During the cleaning process, it is usually cleaned by water flow, but after cleaning, the contact surface needs to be wiped manually, which is more troublesome. Utility Model Content

[0005] The utility model aims to provide a high-efficiency cleaning structure for vacuum coating equipment, which enables the placement plate to be wiped clean after cleaning.

[0006] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: an efficient cleaning structure of a vacuum coating equipment, comprising a base, on which a coating box is arranged, the coating box is provided with a vacuum machine, the vacuum machine is provided with an air outlet pipe, and the other end of the air outlet pipe is provided with a connecting pipe;

[0007] A wiping piece is arranged at the outlet of the coating box, a wiping head is arranged at the bottom of the wiping piece, and the connecting pipe is communicated with the wiping head.

[0008] Preferably, a fixed plate is provided in the coating box, a rotating shaft is provided at the bottom of the fixed plate, and a sealing plate is provided at the bottom of the rotating shaft.

[0009] Preferably, in a default state, the sealing plate separates the coating box into two sealed cavities.

[0010] Preferably, a placement plate for placing workpieces is provided on one side of the coating box, and a plurality of cleaning parts arranged in an array are provided on the other side.

[0011] Preferably, a water spray head facing outward is provided at the bottom of the cleaning piece.

[0012] Preferably, the wiping head is an airbag block.

[0013] In the above technical scheme, the utility model provides an efficient cleaning structure of a vacuum coating equipment, which has the following beneficial effects: coating is carried out through a coating box, the air in the coating box is evacuated by a vacuum machine so that the coating will not be affected by the air, the placement plate after cleaning is wiped by a wiping piece, and the air extracted by the vacuum machine causes the wiping head to expand and wipe the placement plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0015] Figure 1 The overall structural diagram provided for the embodiment of the utility model;

[0016] Figure 2 This is a schematic diagram of the internal structure of a coating box provided in an embodiment of the utility model.

[0017] Description of reference numerals:

[0018] 1. Base; 11. Coating box; 12. Vacuum machine; 13. Exhaust pipe; 14. Connecting pipe; 15. Cleaning part; 151. Water spray head; 16. Wiping part; 17. Wiping head; 18. Fixed plate; 19. Rotating shaft; 20. Sealing plate; 2. Placement plate. DETAILED DESCRIPTION

[0019] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0020] like Figure 1-2 As shown, a high-efficiency cleaning structure of a vacuum coating device comprises a base 1, on which a coating box 11 is arranged, a vacuum machine 12 is arranged on the coating box 11, an air outlet pipe 13 is arranged on the vacuum machine 12, and a connecting pipe 14 is arranged at the other end of the air outlet pipe 13;

[0021] A wiping piece 16 is provided at the outlet of the coating box 11 , a wiping head 17 is provided at the bottom of the wiping piece 16 , and the connecting pipe 14 is connected to the wiping head 17 .

[0022] Specifically, when in use, first turn on the vacuum machine 12 on the coating box 11. At this time, the placement plate 2 at the outlet of the coating box 11 will stop synchronously with the placement plate 2 at the coating location. When the vacuum machine 12 is vacuumed, the gas will enter the connecting pipe 14 through the outlet pipe 13, and inflate the wiping piece 16 at the outlet of the coating box 11, so that the wiping piece 16 expands and wipes the placement plate 2 after cleaning.

[0023] In the above scheme, coating is carried out through the coating box 11, and the air in the coating box 11 is evacuated through the vacuum machine 12 so that the coating will not be affected by the air, and the cleaned placement plate 2 is wiped by the wiping piece 16. The air extracted by the vacuum machine 12 causes the wiping head 17 to expand and wipe the placement plate 2.

[0024] As an embodiment further provided by the present invention, according to Figure 1 and Figure 2 As shown, a fixing plate 18 is disposed in the coating box 11 , a rotating shaft 19 is disposed at the bottom of the fixing plate 18 , and a sealing plate 20 is disposed at the bottom of the rotating shaft 19 .

[0025] Specifically, the sealing plate 20 is sealed with the bottom of the coating box 11 in a default state. When the coating is completed, the placement plate 2 moves to push the sealing plate 20, thereby deflecting the sealing plate 20 through the rotating shaft 19, and the placement plate 2 moves at this time.

[0026] As an embodiment further provided by the present invention, according to Figure 1 and Figure 2 As shown, in the default state, the sealing plate 20 separates the coating box 11 into two sealed chambers.

[0027] Furthermore, a placement plate 2 for placing workpieces is provided on one side of the coating box 11, and a plurality of cleaning parts 15 arranged in an array are provided on the other side.

[0028] Furthermore, a water spray head 151 facing outward is provided at the bottom of the cleaning member 15 .

[0029] Specifically, coating is performed in one of the cavities, and when coating is completed and the cavity enters another cavity, the cleaning part 15 is started, and the placement plate 2 is moved and rinsed by the water spray head 151 on the cleaning part 15, and is moved to the outlet of the coating box 11 after the rinsing is completed.

[0030] Working principle: When in use, coating is carried out in one of the cavities. When coating is completed and the machine enters another cavity, the cleaning part 15 is started. The placement plate 2 is moved and rinsed through the water spray head 151 on the cleaning part 15. After the rinse, it is moved to the outlet of the coating box 11. At this time, the placement plate 2 at the outlet of the coating box 11 will stop synchronously with the placement plate 2 at the coating location. When the vacuum machine 12 is vacuumed, the gas will enter the connecting pipe 14 through the outlet pipe 13, and inflate the wiping piece 16 at the outlet of the coating box 11, so that the wiping piece 16 expands and wipes the placement plate 2 after cleaning.

[0031] The above only describes some exemplary embodiments of the present invention by way of illustration. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. An efficient cleaning structure for vacuum coating equipment, characterized in that: It comprises a base (1) on which a coating box (11) is arranged, the coating box (11) is provided with a vacuum machine (12), the vacuum machine (12) is provided with an air outlet pipe (13), and the other end of the air outlet pipe (13) is provided with a connecting pipe (14); A wiping piece (16) is provided at the outlet of the coating box (11), a wiping head (17) is provided at the bottom of the wiping piece (16), and the connecting pipe (14) is connected to the wiping head (17).

2. The high-efficiency cleaning structure of vacuum coating equipment according to claim 1, characterized in that: A fixed plate (18) is arranged in the coating box (11), a rotating shaft (19) is arranged at the bottom of the fixed plate (18), and a sealing plate (20) is arranged at the bottom of the rotating shaft (19).

3. The high-efficiency cleaning structure of vacuum coating equipment according to claim 2, characterized in that: In a default state, the sealing plate (20) separates the coating box (11) into two sealed chambers.

4. The high-efficiency cleaning structure of vacuum coating equipment according to claim 1, characterized in that: The coating box (11) is provided with a placement plate (2) for placing workpieces on one side, and a plurality of cleaning parts (15) arranged in an array on the other side.

5. The high-efficiency cleaning structure of vacuum coating equipment according to claim 4, characterized in that: The bottom of the cleaning element (15) is provided with a water spray head (151) facing outwards.

6. The high-efficiency cleaning structure of vacuum coating equipment according to claim 1, characterized in that: The wiping head (17) is an air bag block.

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