Fire extinguishing system of wafer cleaning machine and wafer cleaning machine
By integrating detection, fire extinguishing and capping components in the wafer cleaning machine, the dangerous problems of fire during the degluing cleaning process are solved, and effective fire prevention and control and safety guarantees are achieved.
Patent Information
- Application Number
- CN202420703556.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-03
- Publication Date
- 2025-01-07
- Estimated Expiration
- 2034-04-03
AI Technical Summary
During the wafer degluing cleaning process, the degluing cleaning agent is flammable and has high frequency oscillation to generate heat, which can easily lead to fires, and the prior art is difficult to effectively prevent fires.
Design a fire extinguishing system for wafer cleaning machines, including detection devices, fire extinguishing devices and cover components. The detection device detects the fire through infrared flame detectors and temperature sensors. The fire extinguishing device inputs fire extinguishing gas in time, and covers and feeds the cover components. Opening and exhaust ports to prevent fire-extinguishing gas from overflowing.
It realizes the timely extinguishing of the fire when a fire occurs, ensures the safe operation of the wafer cleaning machine, and avoids the danger of the fire to the equipment and operators.
Smart Images
Figure CN222304665U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of laser processing, in particular to a fire extinguishing system of a wafer cleaning machine and the wafer cleaning machine. Background Art
[0002] In the process of producing thinned silicon wafers, the wafers need to be debonded. However, since the debonding cleaning agent is a flammable liquid, the high-frequency vibration of the cleaning agent during the cleaning process will generate a lot of heat, which can easily lead to fire and is quite dangerous. Utility Model Content
[0003] The embodiment of the utility model provides a fire extinguishing system of a wafer cleaning machine and a wafer cleaning machine, which can timely input fire extinguishing gas into the accommodating cavity to extinguish the fire, and the sealing component can timely seal the feeding opening and / or the exhaust port to achieve a better fire extinguishing effect.
[0004] The fire extinguishing system of the wafer cleaning machine proposed in the utility model comprises: a cleaning shell, wherein the cleaning shell is provided with a containing cavity, a feeding opening and an exhaust port, wherein the feeding opening is connected with the containing cavity, and the exhaust port connects the containing cavity with the outside;
[0005] A detection device, the detection device is used to detect the fire condition in the accommodating cavity;
[0006] A fire extinguishing device, the fire extinguishing device is used to store fire extinguishing gas, and the fire extinguishing device is connected to the accommodating chamber;
[0007] A cover assembly is used to cover the feeding opening and / or the exhaust port.
[0008] Optionally, the sealing assembly includes an exhaust driving member and an exhaust sealing member, and the exhaust driving member drives the exhaust sealing member to seal or open the exhaust port.
[0009] Optionally, the fire extinguishing system of the wafer cleaning machine also includes an exhaust pipe, the exhaust pipe is provided with an exhaust channel, the exhaust pipe is arranged around the exhaust port, the exhaust channel is communicated with the exhaust port, the exhaust covering member is arranged in the exhaust channel, the exhaust covering member is rotatably connected to the exhaust pipe, and the exhaust driving member drives the exhaust covering member to rotate so that the exhaust covering member blocks or opens the exhaust channel.
[0010] Optionally, the exhaust pipe includes a first section, a second section and a connecting section, the first section includes a first tube body and a first flange end, the second section includes a second tube body and a second flange end, the first flange end and the second flange end are respectively connected to two sides of the connecting section, the exhaust covering member is rotatably connected to the connecting section, and the exhaust driving member passes through the connecting section and is transmission-connected to the exhaust covering member.
[0011] Optionally, the covering assembly includes a hatch driving member and a hatch member, and the hatch driving member drives the hatch member to cover or open the loading opening.
[0012] Optionally, the hatch member includes a door panel portion and a connecting portion, the door panel portion is arranged in the accommodating cavity, the hatch drive member is arranged outside the accommodating cavity, and the connecting portion passes through the loading opening and is connected to the hatch drive member.
[0013] Optionally, the fire extinguishing system of the wafer cleaning machine also includes an in-place detection component and a matching component, wherein the matching component is arranged on the connecting portion, and the in-place detection component is arranged on the cleaning shell, and the matching component cooperates with the in-place detection component to detect whether the hatch component is opened and / or closed in place.
[0014] Optionally, the detection device comprises an infrared flame detector, and the infrared flame detector is arranged on the cleaning shell.
[0015] Optionally, the detection device further includes a temperature sensor, and the temperature sensor is arranged on the cleaning shell.
[0016] The utility model also provides a wafer cleaning machine, comprising the fire extinguishing system of the wafer cleaning machine described in any one of the above embodiments.
[0017] The fire extinguishing system of the wafer cleaning machine and the wafer cleaning machine provided by the embodiment of the utility model, the detection device can detect whether a fire occurs in the accommodating chamber. According to the detection result of the detection device, the fire extinguishing device can promptly input the fire extinguishing gas into the accommodating chamber to achieve fire extinguishing; in addition, the sealing assembly can also seal the loading opening and / or the exhaust port provided on the cleaning shell to prevent the fire extinguishing gas from being discharged through the loading opening and / or the exhaust port, so as to achieve a better fire extinguishing effect and ensure the safe use of the wafer cleaning machine. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.
[0019] Figure 1 It is a structural schematic diagram of an embodiment of a fire extinguishing system of a wafer cleaning machine of the utility model;
[0020] Figure 2 It is a structural schematic diagram of an embodiment of the exhaust driving member, the exhaust sealing member and the exhaust pipe of the utility model;
[0021] Figure 3 It is a structural schematic diagram of another embodiment of the exhaust driving member, the exhaust sealing member and the exhaust pipe of the utility model;
[0022] Figure 4 It is a structural schematic diagram of another embodiment of the exhaust driving member, the exhaust sealing member and the exhaust pipe of the utility model;
[0023] Figure 5 for Figure 4 Sectional view at AA in the middle;
[0024] Figure 6 It is a structural schematic diagram of an embodiment of a hatch door driving member and a hatch door member of the utility model;
[0025] Figure 7 It is a structural schematic diagram of another embodiment of the hatch door driving member and the hatch door member of the utility model;
[0026] Description of Figure Numbers:
[0027] Fire extinguishing system 100 for wafer cleaning machine;
[0028] Cleaning shell 10, accommodating chamber 11, loading opening 13, exhaust port 15;
[0029] Detection device 20, infrared flame detector 21, temperature sensor 23;
[0030] Fire extinguishing device 30;
[0031] The cover assembly 40, the exhaust drive member 41, the exhaust cover member 43, the door drive member 45, the door member 47, the door plate portion 471, and the connecting portion 473;
[0032] Exhaust pipe 50, exhaust channel 51, first section 53, first pipe body 531, first flange end 533, second section 55, second pipe body 551, second flange end 553, connecting section 57;
[0033] In-place detection component 61 and matching component 63.
[0034] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION
[0035] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0036] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.
[0037] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0038] It should be understood that the term “and / or” used in the present specification and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.
[0039] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0040] See also Figures 1 to 5 The embodiment of the utility model provides a fire extinguishing system 100 for a wafer cleaning machine, comprising a cleaning shell 10, a detection device 20, a fire extinguishing device 30 and a cover assembly 40. The cleaning shell 10 is provided with a receiving chamber 11, a loading opening 13 and an exhaust port 15, the loading opening 13 is connected with the receiving chamber 11, and the exhaust port 15 connects the receiving chamber 11 with the outside. The detection device 20 is used to detect the fire in the receiving chamber 11. The fire extinguishing device 30 is used to store fire extinguishing gas, and the fire extinguishing device 30 is connected with the receiving chamber 11. The cover assembly 40 is used to cover the loading opening 13 and / or the exhaust port 15.
[0041] In the embodiment of the utility model, the detection device 20 can detect whether a fire occurs in the accommodating chamber 11. According to the detection result of the detection device 20, the fire extinguishing device 30 can promptly input the fire extinguishing gas into the accommodating chamber 11 to achieve fire extinguishing. In addition, the covering assembly 40 can also cover the loading opening 13 and / or the exhaust port 15 provided on the cleaning shell 10 to prevent the fire extinguishing gas from being discharged through the loading opening 13 and / or the exhaust port 15, so as to achieve a better fire extinguishing effect and ensure the safe use of the wafer cleaning machine.
[0042] Specifically, during the process of cleaning the wafer, the wafer is placed in the accommodating chamber 11, and the degumming cleaning agent cleans the wafer in the accommodating chamber 11, so it is easier to cause a fire in the accommodating chamber 11. In order to facilitate the loading and unloading of wafers, the cleaning shell 10 is provided with a loading opening 13. In order to discharge the gas in the accommodating chamber 11, the cleaning shell 10 is also provided with an exhaust port 15. It can be understood that when there is a fire, if the fire extinguishing gas overflows from the loading opening 13 and the exhaust port 15, it will lead to a poor fire extinguishing effect. Therefore, when a fire occurs, the cover assembly 40 will promptly cover the exhaust port 15 and / or the loading opening 13 to ensure the density of the fire extinguishing gas and achieve a better fire extinguishing effect.
[0043] The detection device 20 is used to detect the fire in the accommodating cavity 11. It is understandable that the detection device 20 may include a smoke sensor, an infrared flame detector 21, or a temperature sensor 23. Specifically, the detection device 20 can detect the fire by detecting temperature, infrared characteristics, gas composition, etc. It is understandable that the detection device 20 can detect the fire by detecting temperature, the detection device 20 can detect the fire by detecting infrared characteristics, and the detection device 20 can also detect the fire by detecting temperature and infrared characteristics.
[0044] It can be understood that in order to extinguish the fire in time, the detection device 20 can judge that there is a fire when one feature is met, such as the temperature is higher than a certain temperature or the infrared flame feature is detected, so as to timely control the fire extinguishing device 30 to deliver the fire extinguishing gas; in order to avoid interfering with the normal cleaning of the wafer, the detection device 20 can judge that there is a fire when multiple features are met, such as the temperature is higher than a certain temperature and the infrared flame feature is detected, so as to avoid misjudging the fire and interfering with the normal operation of the wafer cleaning machine.
[0045] The fire extinguishing device 30 is used to store fire extinguishing gas so as to timely pass the fire extinguishing gas into the accommodating chamber 11 for fire extinguishing. It can be understood that the fire extinguishing gas is a gas that can extinguish the flame, and the fire extinguishing gas can be carbon dioxide, heptafluoropropane and other gases, and this application does not make specific restrictions.
[0046] The capping assembly 40 is used to cap the loading opening 13 and / or the exhaust port 15. There are many structures of the capping assembly 40. In a certain embodiment, the capping assembly 40 includes a cylinder and a cover body, the cover body is slidably connected to the cleaning shell 10, and the cylinder drives the cover body to move to cover the loading opening 13 or the exhaust port 15; in a certain embodiment, the capping assembly 40 includes a motor and a cover body, the cover body is rotatably connected to the cleaning shell 10, and the motor drives the cover body to rotate relative to the cleaning shell 10 to cover the loading opening 13 or the exhaust port 15. There are many structures of the capping assembly 40. The capping assembly 40 can cover the loading opening 13 and the exhaust port 15 in the event of a fire, and this application does not make any specific restrictions.
[0047] See also Figure 1 In the embodiment of the utility model, the sealing assembly 40 includes an exhaust driving member 41 and an exhaust sealing member 43 , and the exhaust driving member 41 drives the exhaust sealing member 43 to seal or open the exhaust port 15 .
[0048] In this way, the exhaust driving member 41 can drive the exhaust covering member 43 to cover the exhaust port 15 to prevent the fire extinguishing gas from being discharged from the accommodating chamber 11 through the exhaust port 15 .
[0049] Specifically, the exhaust drive 41 may include a motor, a cylinder, etc. The exhaust cover 43 may be slidably connected to the cleaning housing 10, and the exhaust drive 41 may drive the exhaust cover 43 to move to open or cover the exhaust port 15; the exhaust cover 43 may also be rotatably connected to the cleaning housing 10, and the exhaust drive 41 may drive the exhaust cover 43 to rotate to open or cover the exhaust port 15; it is understandable that the exhaust cover 43 may also be arranged at other positions, and the exhaust cover 43 may cover or open the exhaust port 15, and this application does not make any specific restrictions.
[0050] For further information, see Figures 1 to 5 The fire extinguishing system 100 of the wafer cleaning machine also includes an exhaust pipe 50, the exhaust pipe 50 is provided with an exhaust channel 51, the exhaust pipe 50 is arranged around the exhaust port 15, the exhaust channel 51 is communicated with the exhaust port 15, the exhaust covering member 43 is arranged in the exhaust channel 51, the exhaust covering member 43 is rotatably connected to the exhaust pipe 50, and the exhaust driving member 41 drives the exhaust covering member 43 to rotate so that the exhaust covering member 43 blocks or opens the exhaust channel 51.
[0051] In this way, the exhaust cover member 43 can cover or open the exhaust channel 51 to achieve the covering or opening of the exhaust port 15, and the setting position of the exhaust cover member 43 can be flexibly set. There is no need to set the exhaust cover member 43 near the exhaust port 15, thereby reducing the difficulty and cost of setting the exhaust cover member 43 and avoiding the exhaust cover member 43 being corroded or contaminated by cleaning agents when it is located in the accommodating chamber 11. In addition, the exhaust cover member 43 is set in the exhaust pipe 50, and the exhaust channel 51 can be blocked or opened by rotating the exhaust cover member 43. There is no need to set a separate storage position for the exhaust cover member 43 when the exhaust channel 51 is opened, thereby effectively improving the space utilization rate.
[0052] For details, please refer to Figure 2 , Figure 4 and Figure 5 , the exhaust cover 43 is perpendicular to the axial direction of the exhaust channel 51. At this time, the exhaust cover 43 can block the exhaust channel 51 to prevent the fire extinguishing gas from overflowing and ensure the fire extinguishing effect; please refer to Figure 3, the exhaust cover 43 rotates to the axial direction of the exhaust channel 51, and the gas passes through both sides of the exhaust cover 43. At this time, the exhaust cover 43 opens the exhaust channel 51 to facilitate the exhaust channel 51 to discharge the gas in the accommodating chamber 11. It can be understood that with such a configuration, the exhaust cover 43 can be always located in the exhaust channel 51, and there is no need to set the exhaust cover 43 and the exhaust channel 51 apart to achieve the exhaust cover 43 opening the exhaust channel 51, that is, effectively reducing the installation space of the exhaust cover 43 and reducing the installation cost of the exhaust cover 43.
[0053] It can be understood that the cover assembly 40 can directly cover the loading opening 13 and / or the exhaust port 15, and the cover assembly 40 can also achieve isolation of the loading opening 13 from the outside world or isolation of the exhaust port 15 from the outside world through other structures connected to the loading opening 13 or the exhaust port 15, thereby achieving sealing of the accommodating chamber 11. The cover assembly 40 can prevent the fire extinguishing gas from continuously overflowing from the loading opening 13 and / or the exhaust port 15, and the present application does not make any specific restrictions.
[0054] For further information, see Figure 5 The exhaust pipe 50 includes a first section 53, a second section 55 and a connecting section 57. The first section 53 includes a first tube body 531 and a first flange end 533. The second section 55 includes a second tube body 551 and a second flange end 553. The first flange end 533 and the second flange end 553 are respectively connected to the two sides of the connecting section 57. The exhaust cover member 43 is rotatably connected to the connecting section 57. The exhaust drive member 41 passes through the connecting section 57 and is transmission-connected to the exhaust cover member 43.
[0055] In this way, after the exhaust cover 43 is rotatably connected to the connecting section 57 , the first section 53 , the connecting section 57 and the second section 55 are connected, so as to facilitate the installation of the exhaust cover 43 .
[0056] Specifically, since the exhaust cover 43 is rotatably connected to the connecting section 57, the connecting section 57 only needs to be thicker to support the exhaust cover 43, and the pipe walls of the first section 53 and the second section 55 do not need to be thicker. In this way, the cost of the exhaust pipe 50 can be reduced, and the exhaust cover 43 can be fixed more stably.
[0057] It can be understood that the first flange end 533 and the second flange end 553 are respectively connected to the two sides of the connecting section 57. The connection can be achieved by bolts passing through the first flange end 533, the connecting section 57 and the second flange end 553, or the first flange end 533 and the second flange end 553 are fixed to the two sides of the connecting section 57 by welding, bonding, etc., and the present application does not make specific restrictions.
[0058] See also Figure 1In the embodiment of the utility model, the cover assembly 40 includes a door driving member 45 and a door member 47 , and the door driving member 45 drives the door member 47 to cover or open the loading opening 13 .
[0059] In this way, the door driving member 45 can drive the door member 47 to cover the loading opening 13, thereby preventing the fire extinguishing gas from overflowing from the loading opening 13 and ensuring the fire extinguishing effect.
[0060] Specifically, the door member 47 can be rotatably connected to the cleaning shell 10, and at this time, the door driving member 45 can drive the door member 47 to rotate; the door member 47 can be slidably connected to the cleaning shell 10, and at this time, the door driving member 45 can drive the door member 47 to move.
[0061] The hatch door driving component 45 may include a motor, a cylinder, etc., and this application does not impose any specific limitation.
[0062] For further information, see Figure 1 , Figure 6 and Figure 7 The door member 47 includes a door plate portion 471 and a connecting portion 473 . The door plate portion 471 is disposed in the accommodating cavity 11 , the door driving member 45 is disposed outside the accommodating cavity 11 , and the connecting portion 473 passes through the loading opening 13 and is connected to the door driving member 45 .
[0063] In this way, the hatch drive component 45 is arranged outside the accommodating chamber 11, which not only does not occupy the space of the accommodating chamber 11, but also can prevent the hatch drive component 45 from being affected by factors such as cleaning agents and flames in the accommodating chamber 11, and failing to normally drive the hatch component 47 to cover the loading opening 13.
[0064] For details, please refer to Figure 6 , Figure 6 The schematic diagram shown is that the hatch drive member 45 is retracted and the hatch member 47 is lowered to open the loading opening 13; please refer to Figure 7 , Figure 7 The schematic diagram shown is that the hatch drive 45 extends to drive the hatch member 47 to rise to cover the loading opening 13. It can be understood that the hatch drive 45 can be arranged on the cleaning housing 10, and the hatch member 47 can be connected to the hatch drive 45 to achieve a sliding connection between the hatch member 47 and the cleaning housing 10.
[0065] For further information, see Figure 1 The fire extinguishing system 100 of the wafer cleaning machine also includes an in-place detection member 61 and a matching member 63. The matching member 63 is arranged on the connecting portion 473, and the in-place detection member 61 is arranged on the cleaning shell 10. The matching member 63 cooperates with the in-place detection member 61 to detect whether the hatch member 47 is opened and / or closed in place.
[0066] In this way, it is possible to detect whether the hatch member 47 is fully opened and / or whether the hatch member 47 is fully closed, so as to provide timely reminders when the hatch member 47 is not fully opened and / or fully closed.
[0067] Specifically, the fire extinguishing system 100 of the wafer cleaning machine can be provided with one in-place detection member 61, or multiple in-place detection members 61, and this application does not impose any specific restrictions. The in-place detection member 61 can be used to detect whether the hatch is fully opened, and the in-place detection member 61 can be used to detect whether the hatch is fully closed. It can be understood that the in-place detection member 61 can be a photoelectric sensor, a rangefinder, or other device, and this application does not impose any specific restrictions. Please refer to Figure 1 In a certain embodiment, the fire extinguishing system 100 of the wafer cleaning machine may include two in-place detection components 61 and two matching components 63, one in-place detection component 61 and one matching component 63 are used to detect whether the hatch is in place, and the other in-place detection component 61 and the other matching component 63 are used to detect whether the hatch is in place.
[0068] See also Figure 1 In the embodiment of the utility model, the detection device 20 includes an infrared flame detector 21, and the infrared flame detector 21 is arranged on the cleaning shell 10.
[0069] In this way, the detection device 20 detects whether there is a fire by detecting the infrared characteristics of the flame.
[0070] For further information, see Figure 1 The detection device 20 also includes a temperature sensor 23 , which is disposed on the cleaning housing 10 .
[0071] In this way, the detection device 20 detects whether there is a fire by detecting temperature characteristics.
[0072] It can be understood that the detection device 20 may include an infrared flame detector 21 and a temperature sensor 23. When any one of the infrared characteristics and the temperature characteristics of the flame meets the conditions, a fire alarm is initiated to facilitate the entry of the fire extinguishing gas into the accommodating chamber 11. In this way, the delay of the fire alarm caused by the failure or insensitivity of the infrared flame detector 21 or the temperature sensor 23 can be avoided, and the fault tolerance rate of the detection device 20 is improved.
[0073] An embodiment of the utility model also provides a wafer cleaning machine, which includes a fire extinguishing system 100 for the wafer cleaning machine. The specific structure of the fire extinguishing system 100 for the wafer cleaning machine refers to the above embodiment. Since the wafer cleaning machine adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments.
[0074] In the wafer cleaning machine in the embodiment of the utility model, the detection device 20 can detect whether a fire occurs in the accommodating chamber 11. According to the detection result of the detection device 20, the fire extinguishing device 30 can promptly input the fire extinguishing gas into the accommodating chamber 11 to achieve fire extinguishing; in addition, the covering assembly 40 can also cover the loading opening 13 and / or the exhaust port 15 provided on the cleaning shell 10 to prevent the fire extinguishing gas from being discharged through the loading opening 13 and / or the exhaust port 15, so as to achieve a better fire extinguishing effect and ensure the safe use of the wafer cleaning machine.
[0075] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.
Claims
1. A fire extinguishing system for a wafer cleaning machine, characterized in that: include: A cleaning shell, wherein the cleaning shell is provided with a containing cavity, a feeding opening and an exhaust port, wherein the feeding opening is communicated with the containing cavity, and the exhaust port connects the containing cavity with the outside; A detection device, the detection device is used to detect the fire condition in the accommodating cavity; A fire extinguishing device, the fire extinguishing device is used to store fire extinguishing gas, and the fire extinguishing device is connected to the accommodating chamber; A cover assembly is used to cover the feeding opening and / or the exhaust port.
2. The fire extinguishing system of the wafer cleaning machine as claimed in claim 1, characterized in that: The sealing assembly includes an exhaust driving member and an exhaust sealing member, and the exhaust driving member drives the exhaust sealing member to seal or open the exhaust port.
3. The fire extinguishing system of the wafer cleaning machine as claimed in claim 2, characterized in that: The fire extinguishing system of the wafer cleaning machine also includes an exhaust pipe, the exhaust pipe is provided with an exhaust channel, the exhaust pipe is arranged around the exhaust port, the exhaust channel is communicated with the exhaust port, the exhaust covering member is arranged in the exhaust channel, the exhaust covering member is rotatably connected to the exhaust pipe, and the exhaust driving member drives the exhaust covering member to rotate so that the exhaust covering member blocks or opens the exhaust channel.
4. The fire extinguishing system of the wafer cleaning machine as claimed in claim 3, characterized in that: The exhaust pipe includes a first section, a second section and a connecting section, the first section includes a first tube body and a first flange end, the second section includes a second tube body and a second flange end, the first flange end and the second flange end are respectively connected to two sides of the connecting section, the exhaust sealing cover is rotatably connected to the connecting section, and the exhaust driving member passes through the connecting section and is transmission-connected to the exhaust sealing cover.
5. The fire extinguishing system of the wafer cleaning machine according to claim 1 or 2, characterized in that: The cover assembly includes a hatch driving member and a hatch member, and the hatch driving member drives the hatch member to cover or open the loading opening.
6. The fire extinguishing system for a wafer cleaning machine as claimed in claim 5, characterized in that: The door member includes a door panel portion and a connecting portion, wherein the door panel portion is arranged in the accommodating cavity, the door driving member is arranged outside the accommodating cavity, and the connecting portion passes through the loading opening and is connected with the door driving member.
7. The fire extinguishing system of the wafer cleaning machine as claimed in claim 6, characterized in that: The fire extinguishing system of the wafer cleaning machine also includes an in-place detection component and a matching component, wherein the matching component is arranged on the connecting portion, and the in-place detection component is arranged on the cleaning shell, and the matching component cooperates with the in-place detection component to detect whether the hatch component is opened and / or closed in place.
8. The fire extinguishing system for a wafer cleaning machine as claimed in claim 1, characterized in that: The detection device comprises an infrared flame detector, and the infrared flame detector is arranged on the cleaning shell.
9. The fire extinguishing system of a wafer cleaning machine as claimed in claim 1 or 8, characterized in that: The detection device also includes a temperature sensor, and the temperature sensor is arranged on the cleaning shell.
10. A wafer cleaning machine, characterized in that: A fire extinguishing system comprising a wafer cleaning machine as described in any one of claims 1 to 9.