Circulating filtration system for collecting and treating cutting waste slurry of silicon rod slicer

Abstract

The utility model discloses a circulating filtration system for collecting and treating cutting waste slurry of a silicon rod slicer, which comprises a slicer, a mortar cylinder, a waste liquid collecting pool, a centrifugal machine, a silicon sludge receiving box, a transfer pool, a membrane filter and a clear liquid collecting pool, wherein a waste liquid pump is arranged between the mortar cylinder and the waste liquid collecting pool; a liquid supplementing pump is arranged between the waste liquid collecting pool and the transfer pool, and a clear liquid pump is arranged between the clear liquid collecting pool and the mortar cylinder. According to the circulating filtration system for collecting and treating the cutting waste slurry of the silicon rod slicing machine, collection, treatment and recycling of the waste slurry generated by a single machine in a slicing workshop are realized, and necessary conditions are provided for development of a cooling liquid research and development test; the wastewater discharge treatment of the testing machine is isolated from the wastewater discharge treatment of other machines in a workshop, so that a slurry wastewater treatment system in the workshop is prevented from being interfered and polluted; and flexible configuration of any machine in a workshop is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic slicing, in particular to a circulation filtering system for collecting and treating waste slurry from cutting of a silicon rod slicer. Background Art

[0002] Silicon wafer cutting slurry is a key auxiliary material in the semiconductor industry. It is mainly used in the cutting process of silicon ingots or multi-crystalline silicon wafers. The main function of this cutting slurry is to provide a certain lubrication capacity for the diamond wire grinding and cutting crystal rods during the silicon wafer cutting process, and to help cool and clean the cutting surface. However, as the cutting proceeds, the silicon powder content in the cutting slurry will become higher, and the cutting slurry will gradually lose its effectiveness and become waste to be processed. In order to save energy, reduce emissions and reduce costs and increase efficiency, the slurry after cutting needs to be processed and reused. The existing method for treating waste mortar liquid is mainly that the slicers in the workshop are discharged to the slurry treatment station through the ditch, and then the treatment station uniformly performs filter press treatment. The filtrate obtained after treatment is then transported by the treatment station to the slicers for reuse.

[0003] The existing waste mortar liquid treatment system has the following problems:

[0004] 1. The cutting waste liquid of a single slicer cannot be treated separately. The existing treatment system requires that the coolant composition and performance added to all slicers in the entire workshop must be similar or the same, otherwise it is easy to cause pollution to the entire slurry treatment system and lead to batch abnormalities;

[0005] 2. The system construction cost is high and the flexibility is not strong. For example, when the company is developing and verifying the use of a new coolant, it is extremely unreasonable and uneconomical to build a new slurry processing system station for one or several R&D and verification slicers. Utility Model Content

[0006] In view of the deficiencies in the prior art, the utility model provides a circulating filtration system for collecting and treating waste slurry from silicon rod slicers, which solves the problems of being unable to isolate and treat the waste slurry from a single slicer, high system construction costs, and low flexibility.

[0007] To achieve the above objectives, the utility model is implemented through the following technical solutions: a circulating filtration system for collecting and treating waste slurry cut by a silicon rod slicer, comprising a slicer, a mortar cylinder, a waste liquid collection tank, a centrifuge, a silicon mud receiving box, a transfer tank, a membrane filter, and a clear liquid collection tank. A waste liquid pump is arranged between the mortar cylinder and the waste liquid collection tank, and a replenishment pump is arranged between the waste liquid collection tank and the transfer tank, and a clear liquid pump is arranged between the clear liquid collection tank and the mortar cylinder.

[0008] Preferably, the slicer is located directly above the mortar cylinder.

[0009] Preferably, the mortar cylinder is connected to the waste liquid pump via a pipeline, and the waste liquid pump is connected to the waste liquid collection tank via a pipeline.

[0010] Preferably, the waste liquid collection tank is connected to the fluid replenishment pump via a pipeline, and the fluid replenishment pump is connected to the transfer tank via a pipeline.

[0011] Preferably, the transfer tank is connected to the centrifuge through a pipeline, and the silicon mud receiving box is located at the bottom of the centrifuge, and the centrifuge is connected to the transfer tank through a pipeline.

[0012] Preferably, the transfer tank is connected to the membrane filter via a pipeline, and the membrane filter is connected to the transfer tank via a pipeline.

[0013] Preferably, the membrane filter is connected to the clear liquid collection tank through a pipeline.

[0014] Beneficial Effects

[0015] The utility model provides a circulation filtration system for collecting and treating waste slurry from the cutting of silicon rod slicers. Compared with the prior art, the circulation filtration system for collecting and treating waste slurry from the cutting of silicon rod slicers has the following beneficial effects: a waste liquid pump is arranged between the mortar cylinder and the waste liquid collection pool, a replenishment pump is arranged between the waste liquid collection pool and the transfer pool, and a clear liquid pump is arranged between the clear liquid collection pool and the mortar cylinder, so that the collection, treatment and reuse of waste mortar liquid generated by a single machine in the slicing workshop are realized, providing necessary conditions for the development of coolant research and development tests; the wastewater discharge treatment of the test machine is isolated from the wastewater discharge treatment of the other machines in the workshop, protecting the workshop slurry wastewater treatment system from interference and pollution; and flexible configuration of any machine in the workshop is realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a diagram of the system structure of the utility model;

[0017] Figure 2 This is a diagram of the waste liquid collection and circulation treatment process of the utility model.

[0018] In the figure: 1- slicer, 2- mortar cylinder, 3- waste liquid pump, 4- waste liquid collection tank, 5- replenishing pump, 6- centrifuge, 7- silicon mud receiving box, 8- transfer tank, 9- membrane filter, 10- clear liquid collection tank, 11- clear liquid pump. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] See also Figure 1-2 The utility model provides a technical solution: a circulating filtration system for collecting and treating waste slurry from silicon rod slicers, comprising a slicer 1, a mortar cylinder 2, a waste liquid collection pool 4, a centrifuge 6, a silicon mud receiving box 7, a transfer pool 8, a membrane filter 9, and a clear liquid collection pool 10. The slicer 1 is located directly above the mortar cylinder 2, the mortar cylinder 2 is connected to the waste liquid pump 3 through a pipeline ②, and the waste liquid pump 3 is connected to the waste liquid collection pool 4 through a pipeline ③, and the waste liquid collection pool 4 is connected to the replenishment The liquid pumps 5 are connected by pipeline ④, and the liquid replenishment pump 5 is connected to the transfer tank 8 by pipeline ⑤, the transfer tank 8 is connected to the centrifuge 6 by pipeline ⑥, and the silicon mud receiving box 7 is located at the bottom of the centrifuge 6, the centrifuge 6 is connected to the transfer tank 8 by pipeline ⑦, the transfer tank 8 is connected to the membrane filter 9 by pipeline ⑧, the membrane filter 9 is connected to the transfer tank 8 by pipeline ⑨ and pipeline ⑩, and the membrane filter 9 is connected to the clear liquid collection tank 10 by pipeline The outlet of the clear liquid pump 11 is connected to the pipeline ①, a waste liquid pump 3 is arranged between the mortar cylinder 2 and the waste liquid collecting tank 4, a replenishing pump 5 is arranged between the waste liquid collecting tank 4 and the transfer tank 8, and a clear liquid pump 11 is arranged between the clear liquid collecting tank 10 and the mortar cylinder 2. At the same time, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0021] When in use, after the slicer 1 cuts one knife, a cylinder of waste liquid is generated in the mortar cylinder 2. The waste liquid in the mortar cylinder 2 is pumped into the waste liquid collection tank 4 through the pipeline ② to ③ by the waste liquid pump 3 for collection; part of the waste liquid in the waste liquid collection tank 4 is pumped into the transfer tank 8 from ④ to ⑤ through the pipeline by the liquid replenishment pump 5. There is a liquid level gauge in the transfer tank 8. When the liquid level in the transfer tank 8 reaches a certain height, the liquid replenishment pump 5 stops replenishing the liquid. When the liquid level in the transfer tank 8 is lower than a certain height, the liquid replenishment pump 5 starts replenishing the liquid. In this way, the liquid replenishment is circulated to the transfer tank 8 so that the liquid level in the transfer tank 8 is always maintained at a certain height; the function of the centrifuge 6 is to separate the waste liquid into dry and wet. A silicon mud receiving box 7 is placed at the bottom of the centrifuge 6 for receiving the silicon mud separated by centrifugation. The centrifuge 6 has two pipes connected to the transfer tank 8, and the pipe shown in ⑥ is connected from the middle The transfer tank 8 extracts waste liquid into the centrifuge 6 for centrifugation, and the tube shown in ⑦ is used to discharge the liquid part after centrifugation into the transfer tank 8; the membrane filter 9 has two tubes connected to the transfer tank 8, and the tube in the direction of ⑧ is used to extract dilution liquid from the transfer tank 8 to the membrane filter 9 for filtration. The liquid filtered by the membrane filter 9 is divided into two parts, one part is the complete filtrate liquid that flows into the clear liquid collection tank 10 through the pipeline, and the other part is the incomplete filtrate liquid that flows back to the transfer tank 8 through the pipelines shown in ⑩ and ⑨; before the slicer 1 cuts the next knife, a certain amount of filtrate liquid is first pumped into the mortar cylinder 2 under the slicer 1 through the clear liquid pump 11 for cutting the next knife; after the next knife cutting is completed, the waste liquid is pumped to the waste liquid collection tank 4, and the above process is performed accordingly, thereby realizing the collection, circulation, filtration and treatment of the waste liquid from the mortar cutting by a single machine and realizing the reuse of the waste liquid.

[0022] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0023] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A circulating filtration system for collecting and treating waste slurry from silicon rod slicers, comprising a slicer (1), a mortar cylinder (2), a waste liquid collection tank (4), a centrifuge (6), a silicon mud receiving box (7), a transfer tank (8), a membrane filter (9), and a clear liquid collection tank (10), characterized in that: A waste liquid pump (3) is provided between the mortar cylinder (2) and the waste liquid collection tank (4), a liquid replenishment pump (5) is provided between the waste liquid collection tank (4) and the transfer tank (8), and a clear liquid pump (11) is provided between the clear liquid collection tank (10) and the mortar cylinder (2).

2. The circulating filtration system for collecting and treating waste slurry from silicon rod slicers according to claim 1, characterized in that: The slicer (1) is located directly above the mortar cylinder (2).

3. The circulating filtration system for collecting and treating waste slurry from silicon rod slicers according to claim 1, characterized in that: The mortar cylinder (2) and the waste liquid pump (3) are connected via a pipeline, and the waste liquid pump (3) and the waste liquid collection tank (4) are connected via a pipeline.

4. The circulating filtration system for collecting and treating waste slurry from silicon rod slicers according to claim 1, characterized in that: The waste liquid collection tank (4) is connected to the liquid replenishment pump (5) via a pipeline, and the liquid replenishment pump (5) is connected to the transfer tank (8) via a pipeline.

5. The circulating filtration system for collecting and treating waste slurry from silicon rod slicers according to claim 1, characterized in that: The transfer tank (8) is connected to the centrifuge (6) via a pipeline, and the silicon mud receiving box (7) is located at the bottom of the centrifuge (6). The centrifuge (6) is connected to the transfer tank (8) via a pipeline.

6. The circulating filtration system for collecting and treating waste slurry from silicon rod slicers according to claim 1, characterized in that: The transfer tank (8) is connected to the membrane filter (9) via a pipeline, and the membrane filter (9) is connected to the transfer tank (8) via a pipeline.

7. The circulating filtration system for collecting and treating waste slurry from silicon rod slicers according to claim 1, characterized in that: The membrane filter (9) is connected to the clear liquid collection tank (10) via a pipeline.

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