AF evaporation coating device
By designing the AF evaporation coating device, we ensure that the suction pipe always runs under the AF liquid surface, solving the problem of poor effect caused by the suction pipe leaving the liquid surface during the coating process, and achieving an improvement in the coating effect.
Patent Information
- Application Number
- CN202323492536.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-19
- Publication Date
- 2025-01-07
- Estimated Expiration
- 2033-12-19
AI Technical Summary
During the coating process, the coating effect is poor due to the suction pipe leaving the liquid level of the reservoir pipe.
An AF evaporation coating device is designed, including an evaporation assembly and a deposition chamber assembly. The liquid storage structure is connected to the evaporation structure. It is arranged on the liquid storage tank using a liquid addition part and a suction pipe. The suction pipe will not leave the AF liquid surface. , realize stable liquid transport through liquid pumps and drip pipes to ensure coating effect.
It effectively solves the problem of poor coating effect caused by the inlet of the suction pipe into the air, ensures the consistency of the liquid absorbing amount during the coating process, and improves the coating effect.
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Figure CN222313264U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of glass processing, and in particular to an AF evaporation coating device. Background Art
[0002] In recent years, with the development of the automotive display industry, the surface of display glass is generally required to have AF (Anti-fingerprint) technology, that is, anti-fingerprint technology.
[0003] Anti-fingerprint technology usually uses an electric heating process to make the fluorine-containing material evaporate into a fluorine-containing atmosphere after high temperature, which adheres to the glass surface to form an anti-fingerprint film with an anti-fingerprint effect.
[0004] In the prior art, the evaporation coating machine needs to open the lid of the liquid storage tank when replenishing the liquid. The pipette fixed on the lid of the liquid storage tank leaves the liquid surface of the liquid storage tank as the lid is opened, and air enters the pipette. Therefore, during the liquid suction process, the liquid suction amount cannot be consistent with the set value, affecting the coating effect, such as CN213266675U. Utility Model Content
[0005] A technical problem to be solved by the present application is: during the coating process, the coating effect is poor due to the pipette leaving the liquid surface of the liquid storage tube.
[0006] In order to solve the above technical problems, the present application provides an AF evaporation coating device.
[0007] An AF evaporation coating device provided according to the present application includes: an evaporation component, the evaporation component includes a liquid storage structure and an evaporation structure, the liquid storage structure is connected with the evaporation structure, the liquid storage structure includes a liquid storage tank, a liquid adding part and a liquid suction tube, the liquid adding part and the liquid suction tube are arranged on the liquid storage tank and are connected with the inside of the liquid storage tank; a deposition chamber component, the deposition chamber component is connected with the evaporation component.
[0008] In some embodiments, the liquid storage structure further includes a sealing cover, which is disposed corresponding to the liquid adding portion, and the sealing cover has a sealing state close to the liquid adding portion and a waiting-to-seal state away from the liquid adding portion.
[0009] In some embodiments, the liquid adding portion includes a liquid adding tube, and the length of the liquid suction tube extending into the liquid storage tank is 4 to 9 times the length of the liquid adding tube extending into the liquid storage tank.
[0010] In some embodiments, the liquid adding tube is arranged in close contact with the inner wall of the liquid storage tank.
[0011] In some embodiments, the liquid storage structure further includes a liquid pump, the liquid inlet end of the liquid pump is connected to the second end of the liquid suction tube, the liquid suction tube is passed through the liquid storage tank, and the first end of the liquid suction tube is arranged in the liquid storage tank.
[0012] In some embodiments, the liquid storage structure further includes a dripping tube, a first end of the dripping tube is connected to the liquid outlet end of the liquid pump, and a second end of the dripping tube is disposed in the evaporation structure.
[0013] In some embodiments, the evaporation structure includes a shell and an evaporation portion, the evaporation portion is arranged inside the shell, the dripping tube passes through the shell, and the evaporation portion is arranged corresponding to the second end of the dripping tube.
[0014] In some embodiments, the evaporation portion includes a accommodating cavity, a first connecting portion and a second connecting portion, the first connecting portion and the second connecting portion are connected to the accommodating cavity, the first connecting portion and the second connecting portion both have openings and the directions of the openings are perpendicular to each other, and electrodes are disposed in the openings of the first connecting portion and the openings of the second connecting portion.
[0015] In some embodiments, steel wool is disposed in the receiving cavity.
[0016] In some embodiments, the deposition chamber assembly includes a deposition chamber and a rotating shaft, wherein the rotating shaft is disposed in the deposition chamber, the rotating shaft is rotatably connected to the deposition chamber, and the axis of the rotating shaft is disposed in a vertical direction.
[0017] Through the above technical solution, the AF evaporation coating device provided by the present application fixes the glass to be coated in the deposition chamber assembly, and the evaporation assembly evaporates the AF solution into AF vapor, and the AF vapor adheres to the glass surface to complete the coating. When the AF solution in the liquid storage tank is less, the AF solution is added to the liquid storage tank through the liquid adding part. During this process, the liquid pipette will not leave the AF liquid surface, so the actual liquid absorption amount will not be inconsistent with the set value due to the air entering the liquid pipette, thereby resulting in poor coating effect. The technical solution of the present application effectively solves the problem of poor coating effect caused by the liquid pipette leaving the liquid surface of the liquid storage tube during the coating process in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0019] Figure 1 The front structural schematic diagram of the AF evaporation coating device disclosed in the first embodiment of the present application is shown;
[0020] Figure 2 Shows Figure 1 A schematic diagram of the side structure of the AF evaporation coating device;
[0021] Figure 3 Shows Figure 1A schematic diagram of the front structure of the evaporation component of the AF evaporation coating device;
[0022] Figure 4 Shows Figure 1 A schematic side structural diagram of an evaporation component of an AF evaporation coating device;
[0023] Figure 5 Shows Figure 1 Schematic diagram of the structure of the evaporation part of the AF evaporation coating device.
[0024] Description of reference numerals:
[0025] 10. Evaporation assembly; 11. Liquid storage structure; 111. Liquid storage tank; 112. Liquid adding part; 1121. Liquid adding tube; 113. Liquid suction tube; 114. Sealing cover; 115. Liquid pump; 116. Dropping tube; 12. Evaporation structure; 121. Shell; 122. Evaporation part; 1221. Receiving cavity; 1222. First connecting part; 1223. Second connecting part; 20. Deposition chamber assembly; 21. Deposition chamber; 22. Rotating shaft. DETAILED DESCRIPTION
[0026] The following is a further detailed description of the implementation methods of the present application in conjunction with the accompanying drawings and examples. The detailed descriptions and drawings of the following examples are used to exemplarily illustrate the principles of the present application, but cannot be used to limit the scope of the present application. The present application can be implemented in many different forms and is not limited to the specific embodiments of the present application, but includes all technical solutions that fall within the scope of the claims.
[0027] The present application provides these embodiments to make the present application thorough and complete, and to fully express the scope of the present application to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the parts and steps, the composition of the materials, the numerical expressions and the numerical values set forth in these embodiments should be interpreted as being merely exemplary, and not as limiting.
[0028] It should be noted that, in the description of this application, unless otherwise specified, the meaning of "multiple" is greater than or equal to two; the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating the orientation or positional relationship, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.
[0029] In addition, the words "first", "second" and similar words used in this application do not indicate any order, quantity or importance, but are only used to distinguish different parts. "Vertical" does not mean vertical in the strict sense, but is within the tolerance range. "Parallel" does not mean parallel in the strict sense, but is within the tolerance range. "Include" or "comprising" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of including other elements.
[0030] It should also be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances. When a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.
[0031] All terms used in this application have the same meaning as those understood by those of ordinary skill in the art to which this application belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, such as general dictionaries, should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined herein.
[0032] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.
[0033] like Figures 1 to 5 As shown, the AF evaporation coating device disclosed in the first embodiment of the present application includes an evaporation component 10 and a deposition chamber component 20. The evaporation component 10 includes a liquid storage structure 11 and an evaporation structure 12. The liquid storage structure 11 is connected to the evaporation structure 12. The liquid storage structure 11 includes a liquid storage tank 111, a liquid adding part 112 and a liquid suction tube 113. The liquid adding part 112 and the liquid suction tube 113 are arranged on the liquid storage tank 111 and are connected to the inside of the liquid storage tank 111; the deposition chamber component 20 is connected to the evaporation component 10.
[0034] By applying the technical solution of the first embodiment, the glass to be coated is fixed in the deposition chamber assembly 20, and the evaporation assembly 10 evaporates the AF solution into AF vapor, which adheres to the glass surface, thereby completing the coating. When the AF solution in the liquid storage tank 111 is less, the AF solution is added to the liquid storage tank 111 through the liquid adding part. During this process, the liquid pipette 113 will not leave the AF liquid surface, so the actual liquid absorption amount will not be inconsistent with the set value due to the air entering the liquid pipette 113, thereby resulting in poor coating effect. The technical solution of the first embodiment effectively solves the problem of poor coating effect caused by the liquid pipette leaving the liquid surface of the liquid storage tube during the coating process in the prior art.
[0035] like Figure 4 As shown, in the technical solution of the first embodiment, the liquid storage structure 11 further includes a sealing cover 114, which is arranged corresponding to the liquid adding part 112, and has a sealing state close to the liquid adding part 112 and a waiting state far from the liquid adding part 112. The sealing cover 114 is connected to the liquid inlet of the liquid adding part 112 by a hinge, and during the coating process, the sealing cover 114 is always in a sealed state, which ensures the airtightness of the entire device and prevents the AF solution from being contaminated by external impurities; when the AF solution in the liquid storage tank 111 is insufficient, the sealing cover 114 is opened to add liquid.
[0036] like Figure 3 and Figure 4As shown, in the technical solution of the first embodiment, the liquid adding part 112 includes a liquid adding pipe 1121, and the length of the liquid suction pipe 113 extending into the liquid storage tank 111 is 4 to 9 times the length of the liquid adding pipe 1121 extending into the liquid storage tank 111. The length of the liquid adding pipe 1121 extending into the liquid storage tank 111 is 0.1 to 0.2 times the height of the liquid storage tank 111, and the length of the liquid suction pipe 113 extending into the liquid storage tank 111 is 0.8 to 0.9 times the height of the liquid storage tank 111. During the liquid adding process, due to the atmospheric pressure, the AF liquid level reaches as high as the lower end of the liquid adding tube 1121. Therefore, when the length of the liquid adding tube 1121 extending into the liquid storage tank 111 is greater than 0.2 times the height of the liquid storage tank, the maximum liquid level that the AF solution can reach is lower, the single liquid adding amount is small, the number of liquid adding times is large, and human resources are wasted; when the length of the liquid adding tube 1121 extending into the liquid storage tank 111 is less than 0.1 times the height of the liquid storage tank, the liquid adding tube 1121 is not easy to fix and is prone to shaking. During the pipetting process, in order to prevent air from entering the pipette 113, the AF liquid level cannot be lower than the lower end of the pipette 113. Therefore, when the length of the pipette 113 inserted into the liquid storage tank 111 is less than 0.8 times the height of the liquid storage tank 111, the minimum allowable liquid level of the AF solution is too low, and there is still too much AF solution at the bottom of the liquid storage tank 111 that has not been sucked away by the pipette 113, so liquid needs to be added, and the number of liquid additions is large, which wastes human resources; when the length of the pipette 113 inserted into the liquid storage tank 111 is greater than 0.9 times the height of the liquid storage tank 111, the pipette 113 is close to the bottom of the liquid storage tank 111, and it is more difficult to pipette, which requires more electricity.
[0037] like Figure 4 As shown, in the technical solution of the first embodiment, the liquid adding tube 1121 is arranged in close contact with the inner wall of the liquid storage tank 111. During the liquid adding process, the AF solution flows out from the liquid outlet end of the liquid adding tube 1121 and flows down along the inner wall of the liquid storage tank 111, which avoids the situation that the AF solution flows out of the liquid adding tube 1121 and impacts the AF liquid surface under the action of gravity due to the height difference between the liquid outlet end of the liquid adding tube 1121 and the AF solution surface, making the AF solution surface in the liquid storage tank 111 unstable, and the suction tube 113 leaves the AF solution and enters the air.
[0038] like Figure 3 and Figure 4 As shown, in the technical solution of the first embodiment, the liquid storage structure 11 further includes a liquid pump 115, the liquid inlet end of the liquid pump 115 is connected to the second end of the liquid suction tube 113, the liquid suction tube 113 is passed through the liquid storage tank 111, and the first end of the liquid suction tube 113 is arranged in the liquid storage tank 111. The liquid pump 115 extracts the AF solution in the liquid storage tank 111, and the AF solution flows into the liquid pump along the liquid suction tube 113. The liquid pump 115 adopts the UBA-E series, and adopts a precise micro-motion diaphragm valve to control the input and output of the liquid. The unique top-mounted diaphragm valve design is conducive to the rapid discharge of bubbles and the injection volume is more stable.
[0039] like Figure 3 As shown, in the technical solution of the first embodiment, the liquid storage structure 11 further includes a dripping tube 116, the first end of the dripping tube 116 is connected to the liquid outlet end of the liquid pump 115, and the second end of the dripping tube 116 is arranged in the evaporation structure 12. The AF solution is dripped into the evaporation structure 12 along the dripping tube 116 for evaporation. The inner diameter of the dripping tube 116 is 1-3 mm. When the inner diameter is less than 1 mm, the dripping speed is slow and the coating efficiency is low; when the inner diameter is greater than 3 mm, the diameter of the dripping liquid is too large, it is not easy to evaporate, and the coating efficiency is low.
[0040] like Figures 3 to 5 As shown, in the technical solution of the first embodiment, the evaporation structure 12 includes a shell 121 and an evaporation part 122, the evaporation part 122 is arranged inside the shell 121, the dripping tube 116 is arranged on the shell 121, and the evaporation part 122 is arranged corresponding to the second end of the dripping tube 116. The AF solution flowing out of the dripping tube 116 is evaporated into AF gas after falling into the evaporation part 122. The setting of the shell 121 provides a closed environment for the AF solution to avoid leakage of AF vapor. A visual window is set on the shell 121, which is convenient for the staff to observe the internal situation of the shell 121 and take timely action when a fault occurs.
[0041] like Figures 3 to 5 As shown, in the technical scheme of embodiment one, the evaporation part 122 includes a accommodating cavity 1221, a first connecting part 1222 and a second connecting part 1223, the first connecting part 1222 and the second connecting part 1223 are connected to the accommodating cavity 1221, the first connecting part 1222 and the second connecting part 1223 both have openings and the directions of the openings are perpendicular to each other, and electrodes are arranged in the openings of the first connecting part 1222 and the second connecting part 1223. The first connection part 1222, the second connection part 1223 and the bottom plate of the accommodating cavity 1221 are an integrally formed structure and are made of conductive metal material. The electrodes arranged in the opening of the first connection part 1222 and the opening of the second connection part 1223 are respectively the positive electrode and the negative electrode. When the electrodes are energized, the temperature at the bottom of the accommodating cavity 1221 increases, so that the AF solution falling into the accommodating cavity 1221 is heated and evaporated to become AF steam. Since the first connection part 1222 and the second connection part 1223 both have openings and the directions of the openings are perpendicular to each other, after the electrodes are set, the electrodes limit the evaporation part 122 to prevent the evaporation part 122 from shaking.
[0042] like Figures 3 to 5 As shown, in the technical solution of the first embodiment, steel wool is arranged in the accommodating cavity 1221. The steel wool is arranged in contact with the inner wall of the accommodating cavity 1221, and the arrangement of the steel wool increases the contact area between the AF solution and the evaporation part 122, thereby improving the evaporation efficiency of the AF solution.
[0043] like Figure 1 to Figure 2 As shown, in the technical solution of the first embodiment, the deposition chamber assembly 20 includes a deposition chamber 21 and a rotating shaft 22. The rotating shaft 22 is arranged in the deposition chamber 21. The rotating shaft 22 is rotatably connected to the deposition chamber 21 and the axis of the rotating shaft 22 is arranged in the vertical direction. The first end of the shell 121 is connected to the cylinder, and the second end of the shell 121 is connected to the deposition chamber assembly 20. The cylinder is evacuated, the air pressure in the shell 121 is reduced, and the AF solution in the dropper 116 drips into the evaporation part 122 under the action of the air pressure. When the AF vapor in the shell 121 reaches a certain concentration, the cylinder is pushed forward and the vapor enters the deposition chamber assembly 20. The glass is attached to the outer surface of the rotating shaft 22. During the coating process, the rotating shaft 22 rotates at a uniform speed along the axis, so that the film thickness at various locations on the glass is uniform. The evaporation assembly 10 includes a plurality of evaporation assemblies 10, and the plurality of evaporation assemblies 10 are arranged in sequence along the axis direction of the rotating shaft 22. The steam generated by a single evaporation assembly 10 has a limited coverage area. Multiple evaporation assemblies 10 are arranged according to the height of the rotating shaft 22 to ensure that the glass on the entire rotating shaft 22 is covered by AF steam.
[0044] The difference between the technical solution of Example 2 and that of Example 1 is that in Example 2, the sealing cover 114 and the liquid adding part 112 are threadedly connected. When adding liquid, the sealing cover 114 is opened, the narrower end of the funnel is inserted into the liquid adding part 112, and liquid is added, thereby preventing the AF solution from flowing to the outside of the liquid storage tank 111 during the liquid adding process, causing waste of the AF solution.
[0045] From the above, it can be known that the AF automatic liquid extraction mechanism (evaporation component 10) includes: a liquid storage tank (liquid storage tank 111), a liquid pipette 113, a liquid extraction pump (liquid pump 115), an infusion tube, a drip nozzle (liquid dripping tube 116), a crucible (evaporation structure 12), and a copper electrode heating circuit. When replenishing liquid into the liquid storage bottle (liquid storage tank 111), the liquid pipette 113 will leave the liquid surface of the liquid storage tank 111, and air will enter the inside of the liquid pipette 113. When aspirating liquid, due to the influence of the air in the pipeline, the set amount and the aspirated amount cannot be consistent. For example, when the conventional setting is 1.5ML, the actual amount will be less than 1.5. Once the dripping amount is less than the set amount, the AF liquid evaporation atmosphere is insufficient, which affects the AF film effect, causes abnormal product performance, and leads to product scrapping. The purpose of this application is to solve the problem of air entering the liquid pipette 113 when adding liquid to the liquid storage tank. A liquid adding port (liquid adding part 112) is added to realize separate control of liquid adding and liquid suction. When adding liquid, the liquid suction tube 113 is always below the AF liquid level, which solves the problem of air entering the liquid suction tube 113. The liquid storage tank 111 is a nearly sealed tank. The liquid suction tube 113 passes through the bottle cap of the liquid storage tank 111 and extends below the AF liquid level. The other end of the liquid suction tube 113 is connected to the liquid pump, and the liquid pump is connected to an infusion tube. The other end of the infusion tube is connected to the drip nozzle, and the drip nozzle is screwed on the top of the crucible. The crucible is connected to the copper electrode. The optimized device is: a liquid adding port is added to the lid of the liquid storage tank, a stainless steel tube with an inner diameter of 3-8mm is used, and a sealing cover 114 is installed. When adding liquid, enter 3 from this port. The liquid storage tank is made of glass with a volume of 100ml. It is a ready-made AF liquid bottle. Two holes are drilled on the bottle cap, one for the liquid suction tube and the other for the liquid adding tube 1121. The suction tube and the infusion tube are of the same model, which are PVC hoses with an inner diameter of 1-3mm. The suction pump adopts the UBA-E series, and uses a precise micro-motion diaphragm valve to control the input and output of the liquid. The unique top-mounted diaphragm valve design is conducive to the rapid discharge of bubbles and a more stable injection volume. The standard pump type is made of 316 stainless steel, and all parts of the pump have better corrosion resistance. The drip nozzle is an ordinary 304 material tube with an inner diameter of 1-3mm, which is connected to the infusion tube. The evaporation boat is an ordinary 304 stainless steel structure with a wide-mouth design, a diameter of 25-40mm, and a height of 8-15mm. The evaporation mechanism (evaporation component 10) is: the machine contains 6 crucibles, that is, 6 sets of mechanisms. Each evaporation mechanism is independent, autonomously drips and evaporates. After evaporation, the atmosphere can cover an area of 25cm in length, and 6 boats can cover an area of 150cm. The working process is: the process requirement is that the amount of liquid used for each boat is 1.5ml. The PLC gives the signal to the liquid pump, and the liquid pump executes 1.5ml from the liquid storage tank, and then injects 1.5ml of liquid into the crucible. The crucible is pushed by the cylinder to move the crucible to a position 10cm away from the glass. The power supply starts to work and outputs a large current to heat the crucible, about 330A. The AF liquid begins to evaporate and adheres to the surface of the product to achieve the AF anti-fingerprint process. The original liquid addition process is: the AF safety margin in the liquid storage tank is specified to be 30ml, and AF liquid is added after it falls below the safety mark line.Open the lid of the liquid storage tank, and the pipette will leave the AF liquid surface. After adding at least 70ml of liquid, cover the lid, and there are several bubbles in the pipette. The optimized liquid adding process is: add a liquid adding tube with a diameter of 3-8mm, open the lid of the liquid adding tube, and inject the AF liquid through a syringe, that is, the liquid adding is completed. The pipette does not leave the liquid surface. It eliminates the problem of air entering the pipette during liquid addition, resulting in insufficient liquid absorption, and ultimately causing abnormal product performance; improves the liquid addition efficiency, and injects from the liquid adding port through a syringe, eliminating the previous cumbersome process. This solution has been implemented continuously for more than 2 months without abnormalities, operating normally, and has high feasibility. In order to make the purpose, technical solution and advantages of this application clearer, the present invention is further described in detail in conjunction with the embodiments and drawings. The schematic implementation method of this application and its description are only used to explain the present invention, and are not used as a limitation of the present invention. The product is attached to the internal cylinder (rotating shaft 22) with a diameter of 2550mm. The evaporation mechanism is installed on the coating machine cavity (deposition chamber 21). After evaporation, the AF atmosphere adheres to the glass surface. Optimize the size of the liquid storage bottle mouth and design it into a wide-mouth bottle with a bottle body diameter of about 10 cm and a bottle cap size of 10 cm. The bottle volume can be expanded to more than 200 ml, reducing the frequency of adding liquid. Expand the size of the liquid adding tube to 5 cm, and optimize the liquid adding method from syringe injection to AF bottle pouring. Use AF medicine bottles to directly pour the medicine into the liquid storage tank without the use of syringes, which further simplifies the liquid adding method. The above specific implementation methods further explain the purpose, technical solutions and beneficial effects of the present application in detail. It should be understood that the above are only specific implementation methods of the present application and are not used to limit the scope of protection of the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the application.
[0046] So far, the embodiments of the present application have been described in detail. In order to avoid obscuring the concept of the present application, some details known in the art are not described. Based on the above description, those skilled in the art can fully understand how to implement the technical solution of the present application.
[0047] Although some specific embodiments of the present application have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present application. It should be understood by those skilled in the art that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present application. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict.
Claims
1. An AF evaporation coating device, characterized in that: include: An evaporation component (10), the evaporation component (10) comprising a liquid storage structure (11) and an evaporation structure (12), the liquid storage structure (11) being in communication with the evaporation structure (12), the liquid storage structure (11) comprising a liquid storage tank (111), a liquid adding portion (112) and a liquid suction pipe (113), the liquid adding portion (112) and the liquid suction pipe (113) being arranged on the liquid storage tank (111) and in communication with the interior of the liquid storage tank (111); A deposition chamber assembly (20), the deposition chamber assembly (20) being in communication with the evaporation assembly (10).
2. The AF evaporation coating device according to claim 1, characterized in that: The liquid storage structure (11) further comprises a sealing cover (114), wherein the sealing cover (114) is arranged corresponding to the liquid adding portion (112), and the sealing cover (114) has a sealing state close to the liquid adding portion (112) and a waiting-to-seal state away from the liquid adding portion (112).
3. The AF evaporation coating device according to claim 1, characterized in that: The liquid adding portion (112) comprises a liquid adding tube (1121), and the length of the liquid suction tube (113) extending into the liquid storage tank (111) is 4 to 9 times the length of the liquid adding tube (1121) extending into the liquid storage tank (111).
4. The AF evaporation coating device according to claim 3, characterized in that: The liquid adding pipe (1121) is arranged in close contact with the inner wall of the liquid storage tank (111).
5. The AF evaporation coating device according to claim 1, characterized in that: The liquid storage structure (11) further comprises a liquid pump (115), the liquid inlet end of the liquid pump (115) being connected to the second end of the liquid suction tube (113), the liquid suction tube (113) being passed through the liquid storage tank (111), and the first end of the liquid suction tube (113) being arranged in the liquid storage tank (111).
6. The AF evaporation coating device according to claim 5, characterized in that: The liquid storage structure (11) further comprises a liquid dripping tube (116), a first end of the liquid dripping tube (116) being connected to a liquid outlet end of the liquid pump (115), and a second end of the liquid dripping tube (116) being arranged in the evaporation structure (12).
7. The AF evaporation coating device according to claim 6, characterized in that: The evaporation structure (12) comprises an outer shell (121) and an evaporation portion (122); the evaporation portion (122) is arranged inside the outer shell (121); the dripping tube (116) is passed through the outer shell (121); and the evaporation portion (122) is arranged corresponding to the second end of the dripping tube (116).
8. The AF evaporation coating device according to claim 7, characterized in that: The evaporation portion (122) comprises a accommodating cavity (1221), a first connecting portion (1222) and a second connecting portion (1223); the first connecting portion (1222) and the second connecting portion (1223) are connected to the accommodating cavity (1221); the first connecting portion (1222) and the second connecting portion (1223) both have openings and the directions of the openings are perpendicular to each other; electrodes are arranged in the openings of the first connecting portion (1222) and the openings of the second connecting portion (1223).
9. The AF evaporation coating device according to claim 8, characterized in that: Steel wool is arranged in the accommodating cavity (1221).
10. The AF evaporation coating device according to any one of claims 1 to 9, characterized in that: The deposition chamber assembly (20) comprises a deposition chamber (21) and a rotating shaft (22), wherein the rotating shaft (22) is arranged in the deposition chamber (21), the rotating shaft (22) is rotatably connected to the deposition chamber (21), and the axis of the rotating shaft (22) is arranged in a vertical direction.
Citation Information
Patent Citations
Vacuum coating machine capable of continuously operating
CN213266675U