Sealing door assembly and semiconductor test equipment
By designing automated sealing door components, using drive devices and sliding components to realize automatic sealing and opening of semiconductor test equipment windows, the problem of insufficient window sealing in the prior art is solved, ensuring the sealing of the test environment and the convenient operation of the robot. .
Patent Information
- Application Number
- CN202420037682.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-05
- Publication Date
- 2025-01-07
- Estimated Expiration
- 2034-01-05
AI Technical Summary
The window sealing of existing semiconductor testing equipment in the test cavity is difficult to ensure, resulting in the unsealed test environment, affecting the test results and the safety of the equipment.
A sealed door assembly is designed, including a moving mechanism consisting of a first and a second driving device, the first driving device drives the door body toward the window in the first direction, and the second driving device seals or opens the window in the vertical direction in the second direction, and combines the Sliding components and guide components for automated sealing and opening operations.
It realizes automatic sealing or opening of windows without manual operation, ensuring the sealing of the test environment and improving the operation convenience and sealing of the robot.
Smart Images
Figure CN222314992U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of sealed doors, in particular to a sealed door component and semiconductor testing equipment. Background Art
[0002] In the process of manufacturing semiconductor chips, some chips need to be tested in a specific test environment, such as a nitrogen environment, a low dew point environment, etc. At present, the chamber of the semiconductor test equipment has a test cavity, and the core is tested in the test cavity. In order to ensure that the robot can take and place the chip, a window is left on the side of the test cavity for the robot to pass through. In order to ensure the airtightness of the test environment, it is necessary to consider how to seal the window. Utility Model Content
[0003] The purpose of the utility model is to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a sealing door assembly that can automatically seal or open a window to ensure the airtightness of the test environment.
[0004] The utility model also provides a semiconductor testing device, which has the semiconductor testing device mentioned above.
[0005] According to the first aspect of the present invention, the sealing door assembly includes: a door body; a movement mechanism, including a first drive device and a second drive device, the first drive device is used to drive the door body along a first direction to approach or move away from the window, and the second drive device is used to drive the door body along a second direction to seal or open the window, and the first direction is perpendicular to the second direction.
[0006] The sealing door assembly according to the embodiment of the first aspect of the utility model has at least the following beneficial effects: by driving the door body to move through the motion mechanism, automatic sealing or opening of the window can be achieved without manual operation. Specifically, when the window needs to be sealed, the first drive device first drives the door body along the first direction to approach the window. After the door body and the window are aligned, the second drive device drives the door body along the second direction to seal the window to complete the sealing and ensure the sealing. When the window needs to be opened, the second drive device first drives the door body along the second direction to open the window without the door body contacting the window. Then, the first drive device drives the door body along the first direction away from the window to fully open the window, allowing the robot to reach into the window.
[0007] According to some embodiments of the utility model, the sealing door assembly includes a sliding assembly, the sliding assembly includes a sliding rail, a sliding block and a sliding plate, the sliding rail extends along the first direction, the sliding block is slidably connected to the sliding rail, the sliding plate is fixedly connected to the sliding block, and the first driving device is fixedly connected to the sliding plate.
[0008] According to some embodiments of the utility model, two slide rails are provided, and the two slide rails are respectively located at two ends of the sliding plate.
[0009] According to some embodiments of the utility model, the sealing door assembly includes a guide assembly, the guide assembly includes a linear guide rod and a linear bearing, the linear guide rod is fixedly connected to the door body, the linear guide rod extends along the second direction, the linear bearing is fixedly connected to the sliding plate, and the linear guide rod cooperates with the linear bearing.
[0010] According to some embodiments of the present invention, four guide assemblies are provided.
[0011] According to some embodiments of the present utility model, the first driving device is configured as a cylinder, and the sliding plate is fixedly connected to the output end of the first driving device.
[0012] According to some embodiments of the present utility model, the second driving device is configured as a cylinder, and the door body is fixedly connected to the output end of the second driving device.
[0013] According to some embodiments of the present invention, a sealing member is provided at the edge of the door body, the sealing member extends along the circumference of the door body, and the sealing member is used to seal with the window.
[0014] According to some embodiments of the present invention, the sealing element is made of sponge.
[0015] The semiconductor testing equipment according to the second embodiment of the utility model includes: a bin body provided with a window; and a sealing door assembly according to the first embodiment.
[0016] The semiconductor testing equipment according to the second aspect of the present invention comprises the sealing door assembly according to the first aspect, and thus has at least the above-mentioned beneficial effects, which will not be described in detail here.
[0017] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:
[0019] Figure 1 It is a schematic diagram of the structure of the sealing door assembly of some embodiments of the utility model;
[0020] Figure 2 It is a schematic diagram of the structure of the sealing door assembly of some embodiments of the utility model;
[0021] Figure 3A top view of a sealing door assembly according to some embodiments of the present invention;
[0022] Figure 4 An exploded view of a sealing door assembly according to some embodiments of the present invention;
[0023] Figure 5 Exploded diagram of a sealing door assembly according to some embodiments of the present invention.
[0024] Reference numerals:
[0025] Sealed door assembly 100, door body 110, sealing member 111, first driving device 120, second driving device 130, sliding assembly 140, sliding rail 141, slider 142, sliding plate 143, guide assembly 150, linear guide rod 151, linear bearing 152;
[0026] Warehouse body 200 and window 210. DETAILED DESCRIPTION
[0027] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.
[0028] Reference Figure 1 As shown, the sealing door assembly 100 of the embodiment of the utility model comprises a door body 110 and a motion mechanism, wherein the motion mechanism is used to drive the door body 110 to move so that the door body 110 seals or opens the window 210. Specifically, the motion mechanism comprises a first driving device 120 and a second driving device 130, wherein the first driving device 120 is used to drive the door body 110 to approach or move away from the window 210 along a first direction, wherein the first direction may be an up-down direction or a left-right direction, and the second driving device 130 is used to drive the door body 110 to move along a second direction, wherein the second direction may be a front-back direction, and the second direction is perpendicular to the window 210, and it can also be understood that the second direction is parallel to the axis of the window 210, and the first direction and the second direction are perpendicular to each other. Figure 1 In the embodiment, the sealing door assembly 100 is in a closed state. Figure 2 In the embodiment, the sealing door assembly 100 is in an open state.
[0029] In this embodiment, the movement mechanism drives the door body 110 to move, so that the window 210 can be automatically sealed or opened without manual operation. Specifically, when the window 210 needs to be sealed, the first driving device 120 first drives the door body 110 to approach the window 210 along the first direction. After the door body 110 and the window 210 are aligned, the second driving device 130 drives the door body 110 to seal the window 210 along the second direction to complete the sealing and ensure the sealing. When the window 210 needs to be opened, the second driving device 130 first drives the door body 110 to open the window 210 along the second direction, so that there is a distance between the door body 110 and the window 210, and the door body 110 does not contact the window 210, but the door body 110 still blocks the window 210, and then the first driving device 120 drives the door body 110 to move away from the window 210 along the first direction, and the window 210 is fully opened, so that the robot can reach into the window 210.
[0030] It should be noted that the stroke of the door body 110 driven by the first driving device 120 to move in the first direction is smaller than the stroke of the door body 110 driven by the second driving device 130 to move in the second direction. The movement of the door body 110 in the first direction is mainly to press against the window 210 or release the window 210, and the movement of the door body 110 in the second direction is mainly to align with the window 210 or fully open the window 210, thereby reducing the occupied space and making it easier for the robot to reach into the window 210. There are certain differences in the functions of the first driving device 120 and the second driving device 130.
[0031] Reference Figure 1 and Figure 4 As shown, according to some embodiments of the utility model, the sealed door assembly 100 includes a sliding assembly 140, the sliding assembly 140 includes a slide rail 141, a slider 142 and a slide plate 143, the slide rail 141 extends along a first direction, the slider 142 is slidably connected to the slide rail 141, the slide plate 143 is fixedly connected to the slider 142, and the first drive device 120 is fixedly connected to the slide plate 143. By setting the sliding assembly 140, the first drive device 120 and the door body 110 are restricted from sliding along the first direction, which can play a limiting role, improve the movement accuracy, and improve the sealing performance.
[0032] Reference Figure 4 As shown, according to some embodiments of the utility model, two slide rails 141 are provided, and the two slide rails 141 are respectively located at the two ends of the sliding plate 143, and the two slide rails 141 are parallel to each other. The sliding plate 143 is slidably connected to the two slide rails 141 through a slider 142, which can further improve the movement accuracy of the sliding plate 143.
[0033] Reference Figure 1 and Figure 4As shown, according to some embodiments of the utility model, the sealed door assembly 100 includes a guide assembly 150, the guide assembly 150 includes a linear guide rod 151 and a linear bearing 152, the linear guide rod 151 is fixedly connected to the door body 110, specifically, the linear guide rod 151 and the door body 110 can be connected by bolts, the linear guide rod 151 extends along the second direction, the linear bearing 152 is fixedly connected to the sliding plate 143, and the linear guide rod 151 cooperates with the linear bearing 152. The precision of the movement of the door body 110 along the second direction can be improved, and in addition, the guide assembly 150 also plays a connecting role, connecting the door body 110 and the sliding plate 143, and the connection is relatively firm.
[0034] Reference Figure 1 and Figure 4 As shown, according to some embodiments of the present invention, the door body 110 has a square structure, and four guide assemblies 150 are provided. The four guide assemblies 150 are located at the four corners of the door body 110, which can further improve the movement accuracy of the door body 110 along the second direction.
[0035] Reference Figure 1 As shown, according to some embodiments of the present invention, the first driving device 120 is configured as a cylinder, and the sliding plate 143 is fixedly connected to the output end of the first driving device 120, which is convenient to assemble. The first driving device 120 drives the sliding plate 143 to move along the first direction.
[0036] Reference Figure 4 As shown, according to some embodiments of the present invention, the second driving device 130 is configured as a cylinder, the door body 110 is fixedly connected to the output end of the second driving device 130, and the assembly is relatively convenient. The second driving device 130 drives the door body 110 to move along the second direction.
[0037] It is understandable that the first driving device 120 and the second driving device 130 may also be replaced by hydraulic cylinders or screw motors.
[0038] Reference Figure 5 As shown, according to some embodiments of the present invention, a sealing member 111 is provided at the edge of the door body 110, and the sealing member 111 is annular in structure, and the sealing member 111 extends along the circumference of the door body 110, and the sealing member 111 is used to seal with the window 210. After the door body 110 closes the window 210, the door body 110 presses the sealing member 111, and the sealing member 111 can seal the gap between the door body 110 and the window 210. Furthermore, the sealing member 111 is made of sponge or silica gel, so that the sealing member 111 has a certain elasticity, which can improve the sealing performance and prevent the door body 110 from crushing the sealing member 111.
[0039] It can be understood that the semiconductor testing equipment of the embodiment of the utility model includes a chamber body 200 and a sealing door assembly 100 of the above embodiment. Figure 2 As shown, the warehouse body 200 is provided with a window 210 and a cavity. The cavity can provide a corresponding test environment to test semiconductor chips. The semiconductor chips are placed in the cavity. The window 210 is connected to the cavity. The window 210 is used for a robot arm that grabs the semiconductor chips to pass through. The sealing door assembly 100 is used to seal or open the window 210.
[0040] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, inside, outside, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0041] In the description of the utility model, if there is a description of first or second, it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.
[0042] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.
[0043] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings. Finally, it should be explained that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model is described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.
Claims
1. A sealed door assembly, characterized in that: include: Door body; The motion mechanism includes a first drive device and a second drive device, wherein the first drive device is used to drive the door body to approach or move away from the window along a first direction, and the second drive device is used to drive the door body to seal or open the window along a second direction, and the first direction is perpendicular to the second direction.
2. The sealing door assembly according to claim 1, characterized in that: The sealing door assembly includes a sliding assembly, which includes a sliding rail, a slider and a sliding plate. The sliding rail extends along the first direction, the slider is slidably connected to the sliding rail, the sliding plate is fixedly connected to the slider, and the first driving device is fixedly connected to the sliding plate.
3. The sealing door assembly according to claim 2, characterized in that: The slide rails are provided with two, and the two slide rails are respectively located at two ends of the slide plate.
4. The sealing door assembly according to claim 3, characterized in that: The sealing door assembly includes a guide assembly, which includes a linear guide rod and a linear bearing. The linear guide rod is fixedly connected to the door body and extends along the second direction. The linear bearing is fixedly connected to the sliding plate and cooperates with the linear bearing.
5. The sealing door assembly according to claim 4, characterized in that: The guide components are provided with four.
6. The sealing door assembly according to claim 2, characterized in that: The first driving device is configured as a cylinder, and the sliding plate is fixedly connected to an output end of the first driving device.
7. The sealing door assembly according to claim 2, characterized in that: The second driving device is configured as a cylinder, and the door body is fixedly connected to an output end of the second driving device.
8. The sealing door assembly according to claim 1, characterized in that: A sealing member is provided at the edge of the door body, the sealing member extends along the circumference of the door body, and the sealing member is used for sealing with the window.
9. The sealing door assembly according to claim 8, characterized in that: The sealing element is made of sponge.
10. A semiconductor testing device, characterized in that include: A warehouse body having a window; A sealed door assembly as claimed in any one of claims 1 to 9.