Spectrum detection device

Abstract

The utility model relates to the field of spectrum measurement, and provides a spectrum detection device. The spectrum detection device comprises a pulse laser; the laser line reflecting mirror is arranged on a light emitting path of the pulse laser so as to reflect laser emitted by the pulse laser; the continuous laser is arranged at the downstream of the laser ray reflecting mirror, the continuous laser is used for exciting the Raman spectrum of the laser, and a light beam diameter control system is arranged at the emergent end of the continuous laser; the light path switching system is arranged at the downstream of the continuous laser so as to switch a spectrum collection light path of the pulse laser or the continuous laser; and the focusing and spectrum collecting system is arranged at the downstream of the light path switching system to focus the laser of the pulse laser or the continuous laser and collect the spectrum of the pulse laser or the continuous laser, and the focusing and spectrum collecting system is also used for focusing the laser of the pulse laser or the continuous laser on the sample to be detected. The spectrum detection device can collect spectrum signals to analyze material component structures.

Description

Technical Field

[0001] The utility model relates to the field of spectrum measurement and provides a spectrum detection device. Background Art

[0002] Laser Induced Breakdown Spectroscopy (LIBS) is an atomic emission spectroscopy technique for elemental analysis of materials through laser plasma. LIBS technology uses pulsed focused laser to generate plasma on the sample to be tested, and collects the emission spectrum of atoms and ions in the plasma radiation process through an optical system to achieve qualitative and quantitative analysis and measurement of the elemental composition and content of the test point.

[0003] Plasma is often called the fourth state of matter. It is a complex system formed by a certain number of charged particles, electrons and neutral particles under the interaction of magnetism and other factors. In LIBS technology, plasma is generated by focusing laser on the sample target for ablation. First, part of the material on the sample surface will be stripped off under the action of thermal effect, including sample fragments, atoms, ions and some hot electrons. These stripped materials will quickly absorb laser energy to form plasma. After the laser stops, the plasma continues to expand, and the inside of the plasma continues to evolve over time. In the early stage of plasma formation, the plasma temperature is high and the electron number density is large. The plasma spectrum is mainly continuous. As the plasma evolves, the plasma spectrum is mainly composed of some linear characteristic spectra.

[0004] Laser Raman spectroscopy is a molecular structure characterization technology based on the Raman scattering effect. Its signal comes from the transition between the vibration or rotation energy levels of the molecules of the substance. The chemical composition and molecular structure information of the sample can be obtained from the Raman spectrum. Raman spectroscopy has the advantages of non-destructive, high resolution, high sensitivity, and no sample preparation required. It is widely used in various fields such as chemistry, physics, biomedicine and materials science.

[0005] When laser interacts with matter, a small part of the incident laser is scattered by the sample molecules, and the rest is reflected, absorbed or transmitted by the sample. In the scattered light, most of the photons do not exchange energy with the material molecules, and the photon frequency does not change. The photons only change the direction of movement; a small part of the photons change the direction of movement when interacting with the material molecules, and change the rotation or vibration energy of the photons, causing the frequency of the scattered light to change; Raman spectroscopy determines the vibration and rotation state of the material molecules by measuring the difference in frequency between the scattered light and the incident light, namely the Raman shift, so as to obtain information about the sample molecular structure, symmetry, dynamics, etc., so as to achieve the purpose of fingerprint recognition of the sample to be tested.

[0006] After processing, LIBS spectral data can achieve qualitative and quantitative analysis of the substance to be tested within the atomic range. However, for some substances with the same elemental composition but different molecular structures, LIBS spectroscopy cannot accurately distinguish. Raman spectroscopy is a molecular spectroscopy technology. By analyzing the information of Raman spectroscopy data, the molecular structure of the substance to be tested can be identified and identified. However, due to the weak intensity of the Raman spectrum itself and the strong fluorescence background, Raman spectroscopy technology cannot quickly and accurately identify in many cases.

[0007] Laser induced breakdown spectroscopy and laser Raman spectroscopy have similar technical characteristics and advantages in element detection, such as fast and easy analysis operation, no sample preparation and minimal damage to the sample, and accurate in-situ rapid non-destructive analysis. In the actual device construction, laser induced breakdown spectroscopy and laser Raman spectroscopy are also triggered by lasers, focusing lasers and collecting signals by external optical paths, receiving spectra by spectrometers, and analyzing data by computers. Therefore, whether at the level of elemental data analysis or at the level of structural multiplexing, the combination of laser induced breakdown spectroscopy and laser Raman technology can complement each other's strengths and weaknesses, and has great development prospects in the field of elemental analysis.

[0008] At present, in most usage environments, the combination of laser induced breakdown spectroscopy technology and laser Raman technology is a data combination, but the structural combination is not perfect. It is necessary to transfer the sample to the sample stage of the laser Raman spectroscopy device after measuring the laser induced breakdown spectroscopy data in the LIBS device, and locate the ablation pits left by the laser induced breakdown spectroscopy system through the microscope system. When detecting Raman spectra, due to the ablation pits left by the pulsed laser, it is impossible to perform the same-point joint measurement at the original position. This detection method not only takes up a lot of space to place the laser induced breakdown spectroscopy detection device and the laser Raman detection device, but also takes a lot of time to find the ablation pits and then detect them after transferring the sample. In addition, the inability to perform the same-point joint measurement will also affect the accuracy of the detection results, increasing the time cost, space cost and economic cost of the laser induced breakdown spectroscopy and laser Raman spectroscopy combined technology. Utility Model Content

[0009] The utility model aims to solve at least one of the technical problems existing in the related art. To this end, the utility model proposes a spectrum detection device, which can integrate the traditional laser induced breakdown spectroscopy system and the laser Raman spectroscopy system into a more compact detection system by multiplexing the same main optical path, thereby increasing the space utilization of the combined system and facilitating integration with other devices.

[0010] The first embodiment of the utility model provides a spectrum detection device, comprising:

[0011] Pulsed lasers;

[0012] A laser line reflector is arranged on the light output path of the pulse laser to reflect the laser light emitted by the pulse laser;

[0013] A continuous laser is arranged downstream of the laser line reflector, the continuous laser is used to excite the Raman spectrum of the laser and a beam diameter control system is arranged at the output end of the continuous laser;

[0014] An optical path switching system, disposed downstream of the continuous laser to switch the spectrum collection optical path of the pulse laser or the continuous laser;

[0015] A focusing and spectrum collection system is arranged downstream of the optical path switching system to focus the laser of the pulse laser or the continuous laser and collect the spectrum of the pulse laser or the continuous laser. The focusing and spectrum collection system is also used to focus the laser of the pulse laser or the continuous laser on the sample to be tested.

[0016] According to the spectral detection device provided by the embodiment of the first aspect of the utility model, by integrating a pulse laser, a continuous laser, a medium-step grating spectrometer and a CT spectrometer, and combining an optical path switching system, integrated detection of laser induced breakdown spectroscopy (LIBS) and laser Raman spectroscopy (Raman) is realized. This design enables the device to detect LIBS and Raman spectra simultaneously or separately, thereby improving detection efficiency and flexibility. A beam diameter control system is set at the output end of the continuous laser, which can accurately control the diameter of the laser beam, thereby realizing the layer analysis of ablation pits of different sizes. This control function enhances the accuracy and applicability of detection. Through the optical path switching system, the spectral collection optical path of the pulse laser and the continuous laser can be conveniently switched to realize the rapid switching detection of LIBS and Raman spectra, which not only ensures the continuity and stability of the detection, but also improves the efficiency and accuracy of the detection. The system can not only realize the precise focusing of the laser, ensure that the laser energy effectively acts on the sample to be tested, but also efficiently collect LIBS and Raman spectral signals, and provide high-quality data for subsequent analysis and processing. Therefore, the spectral detection device provided in the embodiment of the utility model realizes efficient and accurate detection of LIBS and Raman spectra through integrated design, beam diameter control, optical path switching, focusing and spectrum collection, etc., and is suitable for composition and structure analysis of various materials and has broad application prospects.

[0017] According to one embodiment of the utility model, it also includes a super depth of field camera, an imaging optical component and a first beam splitter cube, wherein the first beam splitter cube is located on the light output path of the pulse laser and the continuous laser, and the imaging optical component is located between the super depth of field camera and the first beam splitter cube.

[0018] According to an embodiment of the present utility model, a second beam splitter cube is arranged between the beam diameter control system and the light output paths of the pulse laser and the continuous laser.

[0019] According to one embodiment of the utility model, the beam diameter control system includes:

[0020] A shutter, arranged at the output end of the continuous laser;

[0021] a beam expander collimator, disposed downstream of the shutter;

[0022] A variable iris is arranged downstream of the beam expander collimator.

[0023] According to an embodiment of the present invention, a collimated laser is further included, and the collimated laser is located between the continuous laser and the pulse laser.

[0024] According to one embodiment of the present invention, the focusing and spectral collection system comprises:

[0025] A microscope objective lens, arranged downstream of the optical path switching system;

[0026] A focal plane is arranged downstream of the microscope objective lens, and the collimated laser, the continuous laser and the pulsed laser act on the focal plane in a coaxial manner.

[0027] According to one embodiment of the utility model, the optical path switching system includes:

[0028] a movable reflector, disposed downstream of the continuous laser and switchable between a first position and a second position;

[0029] A first focusing convex lens is arranged on one side of the movable reflector;

[0030] A first optical fiber flange is arranged on the same optical axis as the first focusing convex lens and the first optical fiber flange is arranged downstream of the first focusing convex lens;

[0031] A notch filter is arranged on the light output path of the continuous laser;

[0032] A second focusing convex lens is arranged on a side of the notch filter away from the movable reflector;

[0033] A second optical fiber flange is arranged on the same optical axis as the second focusing convex lens and the second optical fiber flange is arranged downstream of the second focusing convex lens;

[0034] In the first position, the light of the continuous laser passes through the movable reflector and enters the first focusing convex lens. In the second position, the light of the continuous laser passes through the movable reflector and enters the second focusing convex lens.

[0035] According to an embodiment of the utility model, the optical path switching system is provided with an echelle grating spectrometer and a CT type spectrometer.

[0036] According to an embodiment of the present utility model, a laser energy attenuator is further arranged between the pulse laser and the laser line reflector.

[0037] According to an embodiment of the present utility model, a dichroic mirror is arranged between the optical path switching system and the focusing and spectrum collection system.

[0038] The above one or more technical solutions in the embodiments of the utility model have at least one of the following technical effects:

[0039] According to the spectral detection device provided by the embodiment of the first aspect of the utility model, by integrating a pulse laser and a continuous laser, and combining an optical path switching system, integrated detection of laser induced breakdown spectroscopy (LIBS) and laser Raman spectroscopy (Raman) is realized. This design enables the device to detect LIBS and Raman spectra simultaneously or separately, thereby improving detection efficiency and flexibility. A beam diameter control system is set at the output end of the continuous laser, which can accurately control the diameter of the laser beam, thereby realizing the layer analysis of ablation pits of different sizes. This control function enhances the accuracy and applicability of detection. Through the optical path switching system, the spectral collection optical path of the pulse laser and the continuous laser can be conveniently switched to realize the rapid switching detection of LIBS and Raman spectra, which not only ensures the continuity and stability of the detection, but also improves the efficiency and accuracy of the detection. The system can not only realize the precise focusing of the laser to ensure that the laser energy effectively acts on the sample to be tested, but also can efficiently collect LIBS and Raman spectral signals to provide high-quality data for subsequent analysis and processing. Therefore, the spectral detection device provided in the embodiment of the utility model realizes efficient and accurate detection of LIBS and Raman spectra through integrated design, beam diameter control, optical path switching, focusing and spectrum collection, etc., and is suitable for composition and structure analysis of various materials and has broad application prospects.

[0040] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0042] Figure 1 is a schematic structural diagram of a spectrum detection device provided by an embodiment of the utility model;

[0043] Figure 2 is a schematic structural diagram of a beam diameter control system provided by an embodiment of the utility model;

[0044] Figure 3 It is a schematic diagram of the action range of the pulse laser, continuous laser and collimated laser provided in the embodiment of the utility model in the focal plane;

[0045] Figure 4 It is a schematic diagram of a state in which a movable reflector in an optical path switching system provided by an embodiment of the utility model is in a first position;

[0046] Figure 5 It is a schematic diagram of a state in which a movable reflector in an optical path switching system provided by an embodiment of the utility model is in a second position;

[0047] Figure 6 It is a simulation diagram of the optical path and the focused spot when the focusing and spectrum collection system provided by the embodiment of the utility model focuses the pulsed laser;

[0048] Figure 7 It is a simulation diagram of the optical path and the focused light spot when the focusing and spectrum collection system provided by the embodiment of the utility model focuses continuous laser.

[0049] Reference numerals:

[0050] 100, pulsed laser; 102, laser line reflector; 104, continuous laser; 106, beam diameter control system; 108, optical path switching system; 110, focusing and spectrum collection system; 112, ultra-depth camera; 114, imaging optical components; 116, first beam splitter cube; 118, second beam splitter cube; 120, shutter; 122, beam expansion collimator; 124, variable aperture; 126, collimation laser; 128, microscope objective; 130, focal plane; 132, moving Reflector; 134, first focusing convex lens; 136, first optical fiber flange; 138, notch filter; 140, second focusing convex lens; 142, second optical fiber flange; 144, medium-step grating spectrometer; 146, CT spectrometer; 148, laser energy attenuator; 150, collimated laser beam; 152, continuous laser beam; 154, pulsed laser beam; 156, collimated light spot; 158, continuous light spot; 160, pulsed light spot; 162, sample to be tested; 164, dichroic mirror. DETAILED DESCRIPTION

[0051] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0052] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0053] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0054] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0055] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0056] like Figures 1 to 7 As shown, the first embodiment of the utility model provides a spectrum detection device, comprising:

[0057] Pulse laser 100;

[0058] A laser line reflector 102 is disposed on the light output path of the pulse laser 100 to reflect the laser light emitted by the pulse laser 100;

[0059] A continuous laser 104 is disposed downstream of the laser line reflector 102. The continuous laser 104 is used to excite the Raman spectrum of the laser and a beam diameter control system 106 is disposed at the output end of the continuous laser 104.

[0060] A focusing and spectrum collection system 110, which is disposed downstream of the optical path switching system 108 to focus the laser light of the pulsed laser 100 or the continuous laser 104 and collect the spectrum of the pulsed laser 100 or the continuous laser. The focusing and spectrum collection system 110 is also used to focus the laser light of the pulsed laser 100 or the continuous laser 104 on the sample 162 to be tested;

[0061] The optical path switching system 108 is disposed downstream of the continuous laser 104 to switch the spectrum collection optical paths of the pulse laser 100 and the continuous laser 104 .

[0062] According to the spectral detection device provided by the embodiment of the first aspect of the utility model, by integrating the pulse laser 100, the continuous laser 104, the medium-step grating spectrometer and the CT spectrometer, and combining the optical path switching system 108, the integrated detection of laser induced breakdown spectroscopy (LIBS) and laser Raman spectroscopy (Raman) is realized. This design enables the device to detect LIBS and Raman spectra simultaneously or separately, thereby improving the detection efficiency and flexibility. A beam diameter control system 106 is provided at the output end of the continuous laser 104, which can accurately control the diameter of the laser beam, thereby realizing the layer analysis of ablation pits of different sizes. This control function enhances the accuracy and applicability of the detection. Through the optical path switching system 108, the spectral collection optical paths of the pulse laser 100 and the continuous laser 104 can be conveniently switched to realize the rapid switching detection of LIBS and Raman spectra, which not only ensures the continuity and stability of the detection, but also improves the efficiency and accuracy of the detection. The system can not only realize precise focusing of the laser to ensure that the laser energy effectively acts on the sample to be tested 162, but also can efficiently collect LIBS and Raman spectrum signals to provide high-quality data for subsequent analysis and processing. Therefore, the spectrum detection device provided by the embodiment of the utility model realizes efficient and accurate detection of LIBS and Raman spectra through integrated design, beam diameter control, optical path switching, focusing and spectrum collection, etc., and is suitable for composition and structure analysis of various materials, and has broad application prospects.

[0063] Please continue to see Figures 1 to 7 The first embodiment of the utility model provides a spectrum detection device, which combines the functions of a pulse laser 100 and a continuous laser 104 to achieve comprehensive spectrum detection of a sample. The spectrum detection device is mainly composed of a pulse laser 100, a laser line reflector 102, a continuous laser 104, a beam diameter control system 106, an optical path switching system 108, and a focusing and spectrum collection system 110.

[0064] The pulse laser 100 is a source for generating pulsed lasers. The pulsed lasers have the characteristics of high peak power and short pulse width, and are suitable for laser induced breakdown spectroscopy (LIBS) analysis. By forming ablation pits on the surface of the sample and exciting a plasma spectrum, the composition of the sample is analyzed.

[0065] A laser line reflector 102 is arranged on the light output path of the pulse laser 100 to reflect the laser light emitted by the pulse laser 100 and ensure that the laser light can be accurately transmitted to subsequent optical components.

[0066] The continuous laser 104 is located downstream of the laser line reflector 102 and is used to generate a continuous laser beam to stimulate the Raman spectrum of the laser. The continuous laser is characterized by stable output and good beam quality, and is suitable for laser Raman spectroscopy analysis, which obtains the molecular vibration and rotation information of the sample by detecting scattered light with a frequency different from that of the incident light.

[0067] A beam diameter control system 106 is also provided at the output end of the continuous laser 104. This is a key component for accurately controlling the spot size of the continuous laser 104. By adjusting the beam diameter, it is possible to adapt to ablation pits of different sizes, ensuring that the laser energy can effectively act on the sample surface, thereby improving the accuracy and reliability of spectral detection.

[0068] The optical path switching system 108 is located downstream of the continuous laser 104, and its main function is to switch the spectrum collection optical path of the pulsed laser 100 and the continuous laser 104. By controlling the optical path switching system 108, the pulsed laser or the continuous laser can be selectively irradiated onto the sample 162 to achieve alternating or simultaneous detection of LIBS and Raman spectra.

[0069] The focusing and spectrum collection system 110 is located downstream of the optical path switching system 108, and is responsible for focusing the laser of the pulsed laser 100 or the continuous laser 104 on the sample to be tested 162, and collecting the generated spectrum signal. The system generally includes components such as a microscope objective 128 and a spectrometer, and can achieve precise focusing of the laser and efficient collection of spectrum signals.

[0070] In summary, the spectrum detection device provided by the utility model realizes the comprehensive detection of LIBS and Raman spectrum by integrating the pulse laser 100 and the continuous laser 104, and combining the optical path switching system 108 and the focusing and spectrum collection system 110. The device has the characteristics of compact structure, comprehensive functions and flexible operation, and is suitable for the composition and structure analysis of various materials.

[0071] According to one embodiment of the present invention, it also includes a super depth of field camera 112, an imaging optical component 114 and a first beam splitter cube 116. The first beam splitter cube 116 is located on the light output path of the pulse laser 100 and the continuous laser 104, and the imaging optical component 114 is located between the super depth of field camera 112 and the first beam splitter cube 116.

[0072] In one embodiment of the present invention, the spectrum detection device further includes a super depth of field camera 112, an imaging optical component 114, and a first beam splitter cube 116. The introduction of these components further enhances the detection capability and ease of use of the device.

[0073] Specifically, the first beam splitter cube 116 is located on the light output path of the pulse laser 100 and the continuous laser 104, and it plays a role in separating the transmitted pulse laser and the reflected continuous laser, so that the pulse laser and the continuous laser can be transmitted through the same optical path. In this way, the lasers generated by the pulse laser 100 and the continuous laser 104 can be transmitted through the same optical path, reducing the complexity and volume of the device.

[0074] The imaging optical assembly 114 is located between the super depth of field camera 112 and the first beam splitter cube 116. The function of the imaging optical assembly 114 is to guide the laser beam reflected by the first beam splitter cube 116 to the super depth of field camera 112, ensuring that the super depth of field camera 112 can clearly observe the surface of the sample to be tested 162. The super depth of field camera 112 provides real-time visual feedback to the operator through the image captured by the imaging optical assembly 114, which facilitates the observation and positioning of a specific area of ​​the sample to be tested 162.

[0075] By combining the ultra-depth camera 112, the imaging optical assembly 114 and the first beam splitter cube 116, the spectrum detection device of the utility model can achieve accurate guidance of the laser beam and visual positioning of the sample. The operator can quickly and accurately determine the position to be measured based on the image provided by the ultra-depth camera 112, and then perform subsequent LIBS or Raman spectrum detection. This design not only improves the efficiency and accuracy of detection, but also reduces the difficulty of operation, making the device easier to use and maintain.

[0076] By introducing the ultra-depth-of-field camera 112 , the imaging optical component 114 and the first beam splitter cube 116 , the spectrum detection device of the present invention further improves the ease of use and the operating efficiency while maintaining high-performance detection capabilities.

[0077] According to an embodiment of the present invention, a second beam splitter cube 118 is disposed between the beam diameter control system 106 and the light output paths of the pulse laser 100 and the continuous laser 104 .

[0078] In one embodiment of the present invention, a second beam splitter cube 118 is provided between the beam diameter control system 106 and the light emission paths of the pulse laser 100 and the continuous laser 104. This design enables the beam diameter control system 106 to flexibly adjust the beam diameter of the continuous laser 104 without affecting the normal light emission of the pulse laser 100.

[0079] Specifically, the second beam splitter cube 118 is located between the beam diameter control system 106 and the light output path of the pulse laser 100 and the continuous laser 104. Its main function is to transmit the laser and reflect the image of the sample surface to the ultra-depth camera 112. On the path of the continuous laser 104, the size of the light spot can be accurately controlled by the beam diameter control system 106 to meet different detection requirements. On the path of the pulse laser 100, the laser beam does not pass through the beam diameter control system 106 and is directly transmitted to the subsequent optical components.

[0080] The advantage of this design is that it realizes independent control of the beam diameter control system 106, the pulse laser 100 and the continuous laser 104. When LIBS detection is required, the laser beam emitted by the pulse laser 100 will not be affected by the beam diameter control system 106, thereby ensuring the stability and accuracy of LIBS detection. When performing Raman spectrum detection, by adjusting the beam diameter control system 106, the spot size of the continuous laser 104 can be accurately controlled, thereby optimizing the effect of Raman spectrum detection.

[0081] The flexibility and accuracy of detection are improved by providing the second beam splitter cube 118. This improvement makes the device more suitable for complex and changeable detection scenarios and improves the overall performance.

[0082] According to one embodiment of the present invention, the beam diameter control system 106 includes:

[0083] A shutter 120 is disposed at the output end of the continuous laser 104;

[0084] A beam expander collimator 122 , disposed downstream of the shutter 120 ;

[0085] The variable aperture 124 is disposed downstream of the beam expander collimator 122 .

[0086] like Figure 2 As shown, in one embodiment of the present invention, the beam diameter control system 106 includes a shutter 120 , a beam expander collimator 122 , and a variable iris 124 , which together achieve precise control of the beam diameter of the continuous laser 104 .

[0087] The shutter 120 is arranged at the output end of the continuous laser 104, and plays the role of controlling the on and off of the laser beam. By controlling the on and off state of the shutter 120, the output time and frequency of the laser beam can be flexibly adjusted to meet different detection requirements.

[0088] The beam expander collimator 122 is located downstream of the shutter 120. Its main function is to expand and collimate the laser beam. The beam expander collimator 122 changes the divergence angle of the laser beam to make it more parallel and uniform, thereby improving the quality and stability of the laser beam. This is crucial for subsequent focusing and spectrum collection.

[0089] The variable iris 124 is arranged downstream of the beam expander collimator 122. It is a device that can adjust the aperture size of the iris. By adjusting the aperture of the variable iris 124, the spot size of the laser beam can be precisely controlled. This function enables the device to adapt to ablation pits of different sizes and realize the layer analysis of different areas of the sample.

[0090] Through the synergistic effect of the shutter 120, the beam expander collimator 122 and the variable aperture 124, the beam diameter control system 106 can achieve precise control of the beam diameter of the continuous laser 104. This design not only improves the accuracy and reliability of spectral detection, but also enhances the flexibility and applicability of the device. By adjusting the beam diameter, the interaction process between the laser and the sample can be optimized, thereby obtaining more accurate and rich spectral information.

[0091] According to an embodiment of the present invention, a collimated laser 126 is further included. The collimated laser 126 is located between the continuous laser 104 and the pulse laser 100 .

[0092] like Figure 1 As shown, in one embodiment of the present invention, the spectrum detection device further includes a collimated laser 126, which is located between the continuous laser 104 and the pulse laser 100. This design further enhances the positioning and calibration functions of the device and improves the accuracy and reliability of detection.

[0093] The collimated laser 126 is mainly used to emit a collimated laser beam as a reference line or positioning line to help the operator determine the position and angle of the sample to be tested 162. By projecting the laser beam of the collimated laser 126 onto the surface of the sample to be tested 162, the operator can clearly see the landing point of the laser beam, thereby accurately locating the area to be detected.

[0094] During the detection process, the operator can adjust the position or angle of the sample 162 to be tested according to the laser beam of the collimated laser 126 to ensure that the laser beam can accurately irradiate the target area. This function is particularly important when accurately detecting the sample 162 to be tested, especially when LIBS or Raman spectroscopy detection is required for a specific position of the sample.

[0095] By integrating the collimated laser 126 into the spectrum detection device, the embodiment of the utility model not only simplifies the operation steps, but also improves the efficiency and accuracy of detection. The operator can quickly and accurately complete the positioning and calibration of the sample 162 to be tested without using additional positioning tools.

[0096] The spectrum detection device of the utility model realizes the precise positioning and calibration function of the sample to be measured 162 by introducing the collimated laser 126, further improving the detection performance and ease of use of the device. This improvement makes the device more suitable for various complex and delicate detection tasks, providing strong technical support for scientific research and industrial production fields.

[0097] According to one embodiment of the present invention, the focusing and spectral collection system 110 includes:

[0098] A microscope objective lens 128 is disposed downstream of the optical path switching system 108;

[0099] The focal plane 130 is disposed downstream of the microscope objective lens 128 , and the collimated laser, the continuous laser, and the pulsed laser act on the focal plane 130 in a coaxial manner.

[0100] like Figure 3 As shown, in one embodiment of the present invention, the focusing and spectrum collection system 110 further refines its components, including a microscope objective 128 and a focal plane 130. This design ensures that collimated laser light, continuous laser light, and pulsed laser light can act on the focal plane 130 in a coaxial manner, thereby improving the accuracy and reliability of spectrum detection.

[0101] The microscope objective lens 128 is arranged downstream of the optical path switching system 108, and its main function is to collect the spectral signal so that it can accurately illuminate a specific area of ​​the sample to be tested 162. Through the high magnification and precise focusing function of the microscope objective lens 128, it is possible to achieve fine detection of a tiny area on the surface of the sample to be tested 162, and obtain more detailed and accurate spectral information.

[0102] The focal plane 130 is located downstream of the microscope objective 128 and is the position where the laser beam finally acts. On the focal plane 130, the collimated laser, the continuous laser, and the pulsed laser can act on the sample 162 to be tested simultaneously or separately in a coaxial manner. This coaxial design ensures the consistency and stability of different laser beams during the detection process, and avoids detection errors caused by optical path deviation or misalignment.

[0103] See also Figure 3The collimated laser beam 150, the continuous laser beam 152 and the pulsed laser beam 154 are focused on the focal plane 130 through the microscope objective 128 in the form of a common optical axis, and the pulsed laser beam 154 spot, the continuous laser spot and the collimated laser spot act on the focal plane 130 coaxially.

[0104] Through the design of the focusing and spectral collection system 110, the spectrum detection device of the utility model can achieve accurate positioning and efficient detection of the sample to be tested 162. The operator can choose to use collimated laser for positioning, or use continuous laser and pulsed laser for LIBS and Raman spectrum detection as needed. At the same time, due to the coaxial effect of the laser beam, the device can obtain more accurate and reliable spectrum data, providing strong support for subsequent analysis and research.

[0105] The utility model improves the accuracy and reliability of spectrum detection by optimizing the design of the focusing and spectrum collection system 110, making the device more suitable for various complex detection tasks. This improvement provides a more effective and convenient solution for spectrum detection in the fields of scientific research and industrial production.

[0106] According to one embodiment of the present invention, the optical path switching system 108 includes:

[0107] A movable reflector 132 is disposed downstream of the continuous laser 104 and the movable reflector 132 can be switched between a first position and a second position;

[0108] A first focusing convex lens 134 is disposed on one side of the movable reflector 132;

[0109] A first fiber optic flange 136 is disposed coaxially with the first focusing convex lens 134 and the first fiber optic flange 136 is disposed downstream of the first focusing convex lens 134;

[0110] A notch filter 138 is disposed on the light output path of the continuous laser 104;

[0111] A second focusing convex lens 140 is disposed on a side of the notch filter 138 away from the movable reflector 132;

[0112] A second fiber optic flange 142 is disposed coaxially with the second focusing convex lens 140 and is disposed downstream of the second focusing convex lens 140;

[0113] In the first position, the light of the continuous laser 104 passes through the movable reflector 132 and enters the first focusing convex lens 134 . In the second position, the light of the continuous laser 104 passes through the movable reflector 132 and enters the second focusing convex lens 140 .

[0114] like Figure 4 and Figure 5 As shown, in one embodiment of the present invention, the optical path switching system 108 is designed as a flexible and efficient component for switching the spectrum collection optical path between the continuous laser 104 and the pulsed laser 100. The system mainly includes a movable reflector 132, a first focusing convex lens 134, a first fiber flange 136, a notch filter 138, a second focusing convex lens 140 and a second fiber flange 142.

[0115] The movable reflector 132 is located downstream of the continuous laser 104 and can be switched between a first position and a second position. This design allows the laser beam to be reflected to different paths as needed. In the first position, the light of the continuous laser 104 is incident on the first focusing convex lens 134 through the movable reflector 132. The first focusing convex lens 134 is arranged coaxially with the first fiber flange 136 to ensure that the laser beam can be efficiently coupled to the first fiber flange 136 after being focused.

[0116] In the second position, the light of the continuous laser 104 is incident on the second focusing convex lens 140 through the movable reflector 132. The second focusing convex lens 140 is coaxially arranged with the second fiber flange 142, and the focusing and fiber coupling of the laser beam are also realized. This design enables the optical path switching system 108 to flexibly select to guide the laser beam to different optical paths, thereby realizing the alternating detection of LIBS and Raman spectroscopy.

[0117] In addition, a notch filter 138 is disposed on the light output path of the continuous laser 104. Its function is to filter out the laser light diffusely reflected from the sample surface to avoid interference with the spectrum detection. When the continuous laser 104 is working, the notch filter 138 can effectively reduce background noise and improve the quality of the spectrum signal.

[0118] The optical path switching system 108 of the utility model realizes the optical path switching between the continuous laser 104 and the pulsed laser 100 through the coordinated action of the mobile reflector 132, the focusing convex lens and the fiber flange. At the same time, the application of the notch filter 138 further improves the accuracy and reliability of the spectrum detection. This design enables the device to flexibly adapt to different detection requirements and improves the detection efficiency and accuracy.

[0119] According to an embodiment of the present invention, the optical path switching system 108 is provided with an echelle grating spectrometer 144 and a CT-type spectrometer 146 .

[0120] like Figure 1As shown, in one embodiment of the present invention, the optical path switching system 108 is provided with an echelle spectrometer 144 and a CT spectrometer 146. This configuration enables the device to perform different types of spectral detection simultaneously or separately, thereby meeting a wider range of research and application requirements.

[0121] The echelle spectrometer 144 has the characteristics of high precision and high resolution, and is suitable for fine analysis and measurement of spectra. It is made by engraving the grating into a step shape, so that light of different wavelengths is separated inside the spectrometer and projected onto the detector. In this way, the echelle spectrometer 144 can accurately record spectral data and provide rich spectral information, which is helpful for analyzing the composition and structure of the sample.

[0122] The CT spectrometer 146 is a spectral analysis instrument based on computer tomography technology. It uses X-rays or other radiation sources to scan samples and collects radiation signals after penetrating the samples through detectors. By processing and reconstructing the signals with a computer, the CT spectrometer 146 can generate a three-dimensional structural image inside the sample, thereby revealing the layer information and spatial distribution of the sample.

[0123] The two spectrometers are simultaneously arranged on the optical path switching system 108, so that the mid-step spectrometer is responsible for collecting LIBS spectrum signals, and the CT spectrometer is responsible for collecting Raman spectrum signals. This comprehensive detection capability enables the device to have a wide range of application prospects in the fields of material science, biomedicine, environmental monitoring, etc.

[0124] In addition, through the flexible switching function of the optical path switching system 108, the operator can choose to use the medium-step grating spectrometer 144 or the CT spectrometer 146 for detection according to actual needs, or use both for collaborative analysis. This design improves the flexibility and versatility of the device, allowing the device to adapt to different detection needs and research objectives.

[0125] The utility model realizes the multifunctionality and comprehensiveness of the spectrum detection device by arranging the echelle spectrometer 144 and the CT spectrometer 146 on the optical path switching system 108. This design not only improves the accuracy and reliability of detection, but also expands the application range of the device, providing strong technical support for scientific research and industrial production fields.

[0126] According to an embodiment of the present invention, a laser energy attenuator 148 is further disposed between the pulse laser 100 and the laser line reflector 102 .

[0127] like Figure 1As shown, in one embodiment of the present invention, a laser energy attenuator 148 is added between the pulse laser 100 and the laser line reflector 102. This improvement is of great significance for improving the applicability of the spectrum detection device and protecting the equipment components.

[0128] The main function of the laser energy attenuator 148 is to adjust the energy of the laser beam. During the LIBS detection process, it is sometimes necessary to adjust the energy of the laser beam to meet the detection requirements of different samples. The laser energy attenuator 148 can effectively reduce the energy of the laser beam by absorbing or reflecting part of the laser energy, thereby avoiding excessive ablation or damage to the sample. This helps to protect the integrity of the sample and also helps to improve the quality of the spectral data.

[0129] In addition, the laser energy attenuator 148 can also protect other components of the spectrum detection device to a certain extent. High-energy laser beams may damage or interfere with the spectrum collection system or the optical path switching system 108. By introducing the laser energy attenuator 148, the energy of the laser beam can be effectively reduced, reducing potential damage to the device components.

[0130] By providing a laser energy attenuator 148 between the pulse laser 100 and the laser line reflector 102, the spectrum detection device of the utility model can better adapt to different detection requirements, while protecting the device components from damage by high-energy laser beams. This improvement improves the reliability and stability of the device, and provides a more reliable and efficient solution for LIBS detection in the fields of scientific research and industrial production.

[0131] According to an embodiment of the present invention, a dichroic mirror 164 is disposed between the optical path switching system 108 and the focusing and spectrum collection system 110 .

[0132] The dichroic mirror 164 is capable of dividing the incident light into different reflection and transmission parts according to the wavelength. By arranging the dichroic mirror 164 between the optical path switching system 108 and the focusing and spectral collection system 110, the dichroic mirror 164 can divide the composite light from the optical path switching system 108 into different parts, each part containing light of a specific wavelength, ensuring that only a specific spectral band is transmitted to the system, thereby improving the accuracy and efficiency of spectral analysis. Compared with traditional filters, the dichroic mirror 164 generally has higher optical efficiency. Therefore, the use of the dichroic mirror 164 can reduce the loss of light in the system and improve the overall optical performance.

[0133] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A spectrum detection device, characterized in that: include: Pulsed laser (100); A laser line reflecting mirror (102) is arranged on the light output path of the pulse laser (100) to reflect the laser light emitted by the pulse laser (100); A continuous laser (104) is arranged downstream of the laser line reflector (102), the continuous laser (104) is used to excite the Raman spectrum of the laser and a beam diameter control system (106) is arranged at the output end of the continuous laser (104); An optical path switching system (108) is disposed downstream of the continuous laser (104) to switch the spectrum collection optical path of the pulse laser (100) or the continuous laser (104); A focusing and spectrum collection system (110) is arranged downstream of the optical path switching system (108) to focus the laser light of the pulse laser (100) or the continuous laser (104) and collect the spectrum of the pulse laser (100) or the continuous laser (104). The focusing and spectrum collection system (110) is also used to focus the laser light of the pulse laser (100) or the continuous laser (104) on a sample to be tested (162).

2. The spectrum detection device according to claim 1, characterized in that: It also includes a super depth of field camera (112), an imaging optical component (114), and a first beam splitter cube (116), wherein the first beam splitter cube (116) is located on the light output paths of the pulse laser (100) and the continuous laser (104), and the imaging optical component (114) is located between the super depth of field camera (112) and the first beam splitter cube (116).

3. The spectrum detection device according to claim 1, characterized in that: A second beam splitting cube (118) is arranged between the beam diameter control system (106) and the light output paths of the pulse laser (100) and the continuous laser (104).

4. The spectrum detection device according to claim 1, characterized in that: The beam diameter control system (106) comprises: A shutter (120) is arranged at the output end of the continuous laser (104); A beam expander collimator (122) disposed downstream of the shutter (120); A variable iris (124) is arranged downstream of the beam expander collimator (122).

5. The spectrum detection device according to claim 1, characterized in that: Also included is a collimated laser (126), which is located between the continuous laser (104) and the pulsed laser (100).

6. The spectrum detection device according to claim 5, characterized in that: The focusing and spectral collection system (110) comprises: A microscope objective lens (128), arranged downstream of the optical path switching system (108); A focal plane (130) is arranged downstream of the microscope objective lens (128), and the collimated laser, the continuous laser and the pulsed laser act on the focal plane (130) in a coaxial manner.

7. The spectrum detection device according to claim 1, characterized in that: The optical path switching system (108) comprises: A movable reflector (132) disposed downstream of the continuous laser (104) and capable of switching between a first position and a second position; A first focusing convex lens (134) is arranged on one side of the movable reflector (132); A first optical fiber flange (136) is arranged coaxially with the first focusing convex lens (134) and the first optical fiber flange (136) is arranged downstream of the first focusing convex lens (134); A notch filter (138) is arranged on the light output path of the continuous laser (104); A second focusing convex lens (140) is disposed on a side of the notch filter (138) facing away from the movable reflector (132); A second optical fiber flange (142) is arranged coaxially with the second focusing convex lens (140), and the second optical fiber flange (142) is arranged downstream of the second focusing convex lens (140); In the first position, the light of the continuous laser (104) passes through the movable reflector (132) and is incident on the first focusing convex lens (134). In the second position, the light of the continuous laser (104) passes through the movable reflector (132) and is incident on the second focusing convex lens (140).

8. The spectrum detection device according to any one of claims 1 to 7, characterized in that: The optical path switching system (108) is provided with an echelle grating spectrometer (144) and a CT type spectrometer (146).

9. The spectrum detection device according to any one of claims 1 to 7, characterized in that: A laser energy attenuator (148) is also provided between the pulse laser (100) and the laser line reflecting mirror (102).

10. The spectrum detection device according to any one of claims 1 to 7, characterized in that: A dichroic mirror (164) is arranged between the optical path switching system (108) and the focusing and spectrum collection system (110).

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