Graphite boat ceramic ring
By designing the outer ring annular groove and the inner ring trapezoidal groove structure on the graphite boat ceramic ring, the gas flow is slowed down, and the problem of degradation of the film layer caused by the boat page conduction when the number of graphite boats is used is increased, and the film layer quality is improved.
Patent Information
- Application Number
- CN202421005448.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-10
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2034-05-10
AI Technical Summary
During the production process of crystalline silicon cell, when the number of times of use of graphite boat ceramic rings increases, the conduction between boat pages leads to a problem of degradation of film layer quality.
A graphite boat ceramic ring is designed, including an outer ring and an inner ring. The outer ring is sleeved on the inner ring, and an inner groove with a trapezoidal structure cross-section is arranged along the circumference of the inner ring. The ring groove is arranged on the outer ring to Reduce gas flow.
Through this structure, the problem of conduction between graphite boat pages is improved and the quality of the deposited film layer is improved.
Smart Images
Figure CN222338245U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of ceramic rings, in particular to a graphite boat ceramic ring. Background Art
[0002] In the production process of crystalline silicon solar cells, the preparation of the film layer is involved. The commonly used methods are PECVD or LPCVD, or ALD in-situ deposition. Generally, PECVD / LPCVD deposition requires the use of a graphite boat as a carrier to load silicon wafers for easy transportation. The graphite boat is composed of graphite accessories such as graphite boat sheets, ceramic rings, ceramic rods, graphite rods, and graphite spacers. Different numbers of graphite boat sheets are fixed on the graphite boat. The graphite boat sheets are sleeved with ceramic rods, and the distance between the graphite boat sheets is controlled by ceramic rings that are also sleeved on the ceramic rods.
[0003] In the TOPCon battery manufacturing process, the preparation of the back oxide layer is the focus of the technology. The gases generally used in the preparation of the back oxide layer include nitrous oxide, silane, phosphine, and hydrogen. During the use of the graphite boat, silicon oxide and phosphorus-doped polysilicon will be plated on the surface of each part. As the number of uses increases, the film layer gradually thickens, and the two boat pages will be conductive, which will affect the quality of the silicon wafer film layer. There are two main types of ceramic rings in existing graphite boats, one is solid and has no threads on the surface, and the other has threads on the surface and serrated grooves inside to facilitate gas circulation, but this structure is still difficult to improve the problem of conductivity between the boat pages as the number of uses of the graphite boat increases. Utility Model Content
[0004] The utility model aims to provide a graphite boat ceramic ring to overcome the above-mentioned defects in the prior art.
[0005] A graphite boat ceramic ring comprises an outer ring and an inner ring, wherein the outer ring is sleeved on the inner ring and connected to the inner ring as a whole, and inner grooves with a trapezoidal cross section are symmetrically arranged along the circumference of the inner ring, and a plurality of annular grooves are evenly distributed on the outer ring.
[0006] Preferably, the angle between the inner edge of the inner groove and the inner ring is 70°.
[0007] Preferably, the length of the inner ring is greater than the length of the outer ring.
[0008] Preferably, the width of each annular ring groove is 0.7 mm.
[0009] Preferably, the distance between two adjacent annular grooves is 0.3 mm.
[0010] The utility model has the following advantages:
[0011] When the utility model is in use, the flow of gas can be slowed down by the annular groove structure on the outer peripheral surface of the outer ring and the trapezoidal inner groove added to the inner ring, thereby improving the problem of decreased quality of the deposited film layer due to conduction between boat pages as the number of uses of the graphite boat increases. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the utility model.
[0013] Figure 2 It is a front view of the utility model.
[0014] Figure 3 for Figure 2 Cross-sectional view along AA direction.
[0015] Figure 4 for Figure 3 A partial enlarged view of point B in the middle.
[0016] Among them: 1. Outer ring; 2. Inner ring; 3. Inner groove; 4. Annular groove. DETAILED DESCRIPTION
[0017] The specific implementation methods of the utility model are further explained in detail below by describing the embodiments with reference to the accompanying drawings, so as to help those skilled in the art to have a more complete, accurate and in-depth understanding of the concept and technical solution of the utility model.
[0018] like Figure 1-4 As shown, the utility model provides a graphite boat ceramic ring, including an outer ring 1 and an inner ring 2, wherein the outer ring 1 is sleeved on the inner ring 2 and connected to the inner ring 2 as a whole, wherein the length of the inner ring 2 is greater than the length of the outer ring 1, and an inner groove 3 with a trapezoidal cross-section is symmetrically arranged along the circumference of the inner ring 2, and a plurality of annular grooves 4 are evenly distributed on the outer ring 1.
[0019] It should be noted that the included angle between the inner edge of the inner groove 3 and the inner ring 2 is 70°.
[0020] The width of each annular groove 4 is 0.7 mm, and the distance between two adjacent annular grooves 4 is 0.3 mm.
[0021] In summary, the utility model can slow down the flow of gas by means of the annular groove 4 structure on the outer peripheral surface of the outer ring 1 and the addition of a trapezoidal inner groove 3 to the inner ring 2, thereby improving the problem of decreased quality of the deposited film due to conduction between the boat pages as the number of uses of the graphite boat increases.
[0022] The utility model is described above by way of example in conjunction with the accompanying drawings. It is obvious that the specific implementation of the utility model is not limited to the above-mentioned method. As long as various non-substantial improvements are made using the concept and technical solution of the utility model, or the concept and technical solution of the utility model are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.
Claims
1. A graphite boat ceramic ring, characterized in that: The invention comprises an outer ring (1) and an inner ring (2), wherein the outer ring (1) is sleeved on the inner ring (2) and connected to the inner ring (2) as a whole, and an inner groove (3) having a trapezoidal cross section is symmetrically arranged along the circumference of the inner ring (2) from top to bottom, and a plurality of annular grooves (4) are evenly distributed on the outer ring (1).
2. The graphite boat ceramic ring according to claim 1, characterized in that: The included angle between the inner edge of the inner groove (3) and the inner ring (2) is 70°.
3. The graphite boat ceramic ring according to claim 1, characterized in that: The length of the inner ring (2) is greater than the length of the outer ring (1).
4. The graphite boat ceramic ring according to claim 1, characterized in that: The width of each annular ring groove (4) is 0.7 mm.
5. The graphite boat ceramic ring according to claim 1, characterized in that: The distance between two adjacent annular grooves (4) is 0.3 mm.