Millimeter wave isolation device based on MEMS switch

Abstract

The utility model provides a millimeter wave isolation device based on an MEMS switch. The millimeter wave isolation device comprises a transmitting end antenna transmission line, a receiving end antenna transmission line and an MEMS switch structure. The MEMS switch structure comprises a signal controller and an MEMS switch which are connected with each other; the MEMS switch comprises an elastic suspension plate; the elastic suspension plate is arranged above the transmitting end antenna transmission line or the receiving end antenna transmission line and is spaced by a preset distance, so that after the elastic suspension plate is deformed under the control of the signal controller, the transmitting end antenna transmission line or the receiving end antenna transmission line below the elastic suspension plate can be partially or completely covered. Therefore, the communication between the transmitting end and the receiving end in the millimeter wave isolation device is controlled. According to the invention, the OOK modulation of the isolator can be realized by replacing an existing complex circuit structure with a physical modulation signal mode, so that the circuit structure of the millimeter wave isolation device is greatly simplified.

Description

Technical Field

[0001] The utility model relates to the technical field of digital isolation devices, in particular to a millimeter wave isolation device based on a MEMS switch. Background Art

[0002] In the field of millimeter wave isolation device technology, antenna coupling can be used in combination with OOK modulation mode to design an isolator. Figure 1 As shown, at the transmitting end TX, the signal is coupled with the carrier at the voltage-controlled oscillator VCO to form a mixed wave MixSignal, and then sent to the receiving end RX on the other side of the isolation object through the millimeter wave antenna; after receiving the mixed wave, the millimeter wave antenna at the receiving end amplifies the received signal through the low noise amplifier LNA, and restores the mixed wave to the transmitted signal in the demodulation module Demodulator.

[0003] Since OOK modulation requires a more complex circuit structure and the overall size design of the millimeter-wave isolator also has requirements, it is necessary to consider how to simplify the circuit structure of the millimeter-wave isolator so that it meets the size requirements. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a millimeter wave isolation device based on a MEMS switch, and to simplify the circuit structure of the millimeter wave isolation device by using a physical modulation signal.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0006] A millimeter wave isolation device based on a MEMS switch comprises a transmitting antenna transmission line, a receiving antenna transmission line and a MEMS switch structure; the MEMS switch structure comprises a signal controller and a MEMS switch connected to each other; the MEMS switch comprises an elastic suspension plate; the elastic suspension plate is arranged above the transmitting antenna transmission line or the receiving antenna transmission line and is spaced at a preset distance, so that after the elastic suspension plate is deformed under the control of the signal controller, it can partially or completely cover the transmitting antenna transmission line or the receiving antenna transmission line located therebelow.

[0007] Optionally, the MEMS switch further comprises a supporting substrate and a pull-down electrode; the pull-down electrode is connected to the signal controller and is disposed below the elastic suspension plate; and the elastic suspension plate is disposed on the supporting substrate.

[0008] Optionally, there are two supporting substrates; and the elastic suspension plate is connected between the two supporting substrates.

[0009] Optionally, it further includes a substrate; the transmitting end antenna transmission circuit, the receiving end antenna transmission circuit, the supporting substrate and the pull-down electrode are all arranged on the substrate.

[0010] Optionally, the MEMS switch further includes a grounding member; and the supporting substrate is connected to the grounding member.

[0011] Optionally, the elastic suspension plate is made of a thin film material.

[0012] Optionally, the MEMS switch structure is arranged at the transmitting end; and the elastic suspension plate is arranged above the transmitting end antenna transmission line.

[0013] Optionally, the transmitting end includes a voltage-controlled oscillator VCO and a transmitting antenna; the output end of the voltage-controlled oscillator VCO is connected to the input end of the transmitting end antenna transmission line; the transmitting antenna is connected to the output end of the transmitting end antenna transmission line.

[0014] Optionally, the MEMS switch structure is arranged at the receiving end; and the elastic suspension plate is arranged above the antenna transmission line of the receiving end.

[0015] Optionally, the receiving end includes an amplifier, a demodulation module and a receiving antenna; the receiving antenna is connected to the input end of the receiving end antenna transmission line; the output end of the receiving end antenna transmission line is connected to the demodulation module via the amplifier.

[0016] The beneficial effect of the utility model is to provide a millimeter wave isolation device based on a MEMS switch, by setting a MEMS switch above the transmitting antenna transmission line or the receiving antenna transmission line, so that the elastic suspension plate in the MEMS switch can partially or completely cover the transmitting antenna transmission line or the receiving antenna transmission line below it after being deformed in a controlled manner, thereby blocking the transmission of millimeter wave signals and controlling the communication between the transmitting end and the receiving end in the millimeter wave isolation device. Therefore, the utility model can replace the existing OOK modulation that requires a complex circuit structure to realize the isolator through a physical modulation signal method, thereby greatly simplifying the circuit structure of the millimeter wave isolation device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the working principle of the millimeter wave isolation device;

[0018] Figure 2 A schematic diagram of a MEMS switch in an open state in a millimeter wave isolation device based on a MEMS switch provided by an embodiment of the utility model;

[0019] Figure 3A schematic diagram of a MEMS switch in an off state in a millimeter wave isolation device based on a MEMS switch provided by an embodiment of the utility model;

[0020] Figure 4 A schematic diagram of a MEMS switch structure provided for a specific embodiment of the utility model;

[0021] Figure 5 A schematic diagram of the structure of a MEMS switch in a millimeter wave isolation device provided in a preferred embodiment of the utility model when it is turned on;

[0022] Figure 6 This is a structural schematic diagram of a MEMS switch in a millimeter wave isolation device provided in a preferred specific embodiment of the utility model when it is turned off.

[0023] Description of labels:

[0024] 1. MEMS switch; 2. Transmitter antenna transmission line; 3. Receiver antenna transmission line; 4. Substrate;

[0025] 11. Elastic suspension plate; 12. Support substrate; 13. Pull-down electrode; 14. Grounding member. DETAILED DESCRIPTION

[0026] In order to explain the technical content, achieved objectives and effects of the present invention in detail, the following is an explanation in conjunction with the implementation modes and the accompanying drawings.

[0027] Please refer to Figures 2 to 4 . Figure 2 A schematic diagram of a MEMS switch in an open state in a millimeter wave isolation device based on a MEMS switch provided by an embodiment of the utility model; Figure 3 A schematic diagram of the off state of a MEMS switch in a millimeter wave isolation device based on a MEMS switch provided in an embodiment of the utility model.

[0028] The present embodiment provides a millimeter wave isolation device based on a MEMS switch, comprising a transmitting end, a receiving end and a MEMS switch structure. The transmitting end comprises a voltage-controlled oscillator VCO, a transmitting end antenna transmission line and a transmitting antenna connected in sequence; the receiving end comprises a receiving antenna, a receiving end antenna transmission line, an amplifier and a demodulation module connected in sequence.

[0029] The MEMS switch structure includes a signal controller and a MEMS switch connected to each other. Figure 2 and Figure 3 As shown, the MEMS switch 1 specifically includes an elastic suspension plate 11; the elastic suspension plate 11 is arranged on the transmitting end antenna transmission line 2 or the receiving end antenna transmission line 3 ( Figure 2 and Figure 3The elastic suspension plate 11 shown is directly above the transmitting-end antenna transmission line 2 (in the case where it is provided) and is spaced apart by a preset distance to form an equivalent capacitance, such that after the elastic suspension plate 11 deforms under the control of the signal controller, it can partially or completely cover the transmitting-end antenna transmission line 2 or the receiving-end antenna transmission line 3 located below it.

[0030] That is to say, in this embodiment, a MEMS switch 1 is provided directly above the transmitting-end antenna transmission line 2 or the receiving-end antenna transmission line 3 to control the on / off state of the transmitting-end antenna transmission line 2 or the receiving-end antenna transmission line 3 through the MEMS switch 1.

[0031] The working principle of the millimeter-wave isolation device based on the MEMS switch in this embodiment is as follows: As Figure 2 shown, after the elastic suspension plate 11 in the MEMS switch 1 deforms under the control of the signal controller, the transmitting-end antenna transmission line 2 or the receiving-end antenna transmission line 3 will be partially or completely covered. Thus, the transmission of millimeter-wave signals in the line will be blocked, and at this time, the modulation signal is 0 (Off); as Figure 3 shown, after the elastic suspension plate 11 in the MEMS switch 1 restores its deformation under the control of the signal controller, the transmitting-end antenna transmission line 2 or the receiving-end antenna transmission line 3 is not covered, and the millimeter-wave signals in the line can be normally transmitted. At this time, the modulation signal is restored to 1 (On). In this way, this embodiment can achieve the on / off control of the communication between the transmitting end and the receiving end in the millimeter-wave isolation device through the MEMS switch, and achieve signal modulation by using a physical control method.

[0032] In some specific implementation manners of this embodiment, please refer to Figure 4 which shows the structural state when the MEMS switch is turned on. As Figure 4 shown, the MEMS switch 1 further includes a support substrate 12 and a pull-down electrode 13; the pull-down electrode 13 is connected to the signal controller (not shown in the figure) and is disposed below the elastic suspension plate 11; the elastic suspension plate 11 is disposed on the support substrate 12.

[0033] Among them, the support substrate 12 is used to support the elastic suspension plate 11 and enable it to be suspended. Preferably, the number of the support substrates 12 is two, and the two support substrates 12 are arranged side by side with a certain distance therebetween, and the elastic suspension plate 11 is bridged between the two support substrates 12 to form a "冂"-shaped structure. It can be understood that the transmitting-end antenna transmission line or the receiving-end antenna transmission line directly below the elastic suspension plate is also located between the two support substrates, that is, passes through the gap between the "冂"-shaped structures, so as to ensure that after the elastic suspension plate deforms and presses down, it can cover the transmitting-end antenna transmission line or the receiving-end antenna transmission line.

[0034] The pull-down electrode 13 is used to generate a voltage change under the control of the signal controller to generate an attractive force that can absorb the elastic suspension plate 11.

[0035] Here, the pull-down electrode in the MEMS switch and the elastic suspension plate are equivalent to a capacitor in the equivalent circuit diagram. Therefore, by controlling the voltage change of the pull-down electrode, this capacitor will generate an attractive force, which can adsorb the elastic suspension plate and deform it; similarly, the attractive force of the capacitor can be eliminated by controlling the pull-down electrode, and the elastic suspension plate can return to its original state.

[0036] Furthermore, if Figure 4 As shown, the millimeter wave isolation device also includes a substrate 4; the transmitting end antenna transmission line 2 or the receiving end antenna transmission line 3 ( Figure 4 The figure shows a situation where the MEMS switch is arranged above the transmitting end antenna transmission line 2 ), and the supporting substrate 12 and the pull-down electrode 13 are both arranged on the substrate 4 .

[0037] In addition, the MEMS switch is located below the supporting substrate on the substrate, and is also provided with a grounding member for connecting the chip ground terminal. It can be understood that for a MEMS switch equipped with two supporting substrates, two grounding members will be provided on the substrate, corresponding to the two supporting substrates respectively. As a specific example, Figure 4 As shown, the grounding member 14 is a plate-like structure, which is laid on the substrate 4. It should be particularly noted that Figure 4 As shown, the antenna transmission line and the pull-down electrode arranged below the elastic suspension plate are not connected to the grounding member.

[0038] In some specific implementations of this embodiment, the elastic suspension plate of the MEMS switch is made of a thin film material, which is more flexible and has a better line coverage effect; at the same time, the deformation resilience is better, which can ensure that the shutdown control effect of the communication line is more reliable.

[0039] In this embodiment, partial coverage of the antenna transmission route means that a section of the route is completely covered; and full coverage means that the entire route is completely covered. "Partial coverage" or "full coverage" can be configured by comprehensively considering the area of ​​the elastic suspension plate, the area of ​​the corresponding surface of the pull-down electrode and the elastic suspension plate, and the distance between the elastic suspension plate and the antenna transmission route. Preferably, if Figure 4 As shown, the pull-down electrode 13 will completely cover the cross section of one section of the antenna transmission line to ensure that the millimeter wave signal in the wireless transmission line can be effectively cut off after the elastic suspension occurs.

[0040] Please refer to Figure 5 and Figure 6 The embodiment of the utility model is further expanded based on the above embodiment, and specifically describes two feasible setting positions of the MEMS switch structure. Below, the two specific implementation methods will be described in detail.

[0041] As a preferred specific implementation of the present utility model, based on the above embodiment, the MEMS switch structure is arranged at the transmitting end, that is, the elastic suspension plate is arranged above the transmission line of the transmitting end antenna.

[0042] like Figure 5 and Figure 6 As shown, the signal controller in the MEMS switch structure can obtain the data signal by connecting a DC power supply or other means; then, the signal controller will control the opening and closing of the MEMS switch according to the data signal, thereby playing the role of opening and closing the millimeter wave signal transmission at the transmitting end.

[0043] As a specific example, Figure 5 As shown, when the signal controller controls the voltage change of the pull-down electrode according to the corresponding low-level data signal (i.e., data=0), so as to cause a short circuit between the pull-down electrode and the grounding member, or the equivalent capacitance between the pull-down electrode and the elastic suspension plate changes, so that the elastic suspension plate is deformed and falls to cover the transmission line of the transmitting antenna located thereunder; the carrier transmitted by the voltage-controlled oscillator VCO of the transmitting end will be cut off and cannot be transmitted to the transmitting antenna through the transmitting antenna transmission line, and the modulation signal at this time is 0 (Off).

[0044] like Figure 6 As shown, when the signal controller is based on the corresponding high-level data signal (i.e., data=1), the signal controller will control the voltage of the pull-down electrode to recover so that there is no short circuit between the pull-down electrode and the grounding member, or the equivalent capacitance between the pull-down electrode and the elastic suspension plate is restored, so that the deformed elastic suspension plate can return to its original normal position and leave the transmitting antenna transmission line; in this way, the carrier transmitted by the voltage-controlled oscillator VCO of the transmitting end can be normally transmitted through the transmitting antenna transmission line to reach the transmitting antenna, and the modulation signal at this time is 1 (On).

[0045] Therefore, by controlling the opening and closing of the MEMS switch structure, the opening and closing of the millimeter-wave signal transmission at the transmitting end can be controlled, thereby realizing the modulation of the OOK signal. Ultimately, the purpose of replacing the complex circuit structure with a physical control method to realize the OOK modulation of the isolator is achieved, thereby simplifying the circuit structure of the millimeter-wave device.

[0046] As another preferred specific embodiment of the utility model, it has the same working principle as the above preferred specific embodiment, the difference is that the MEMS switch structure is changed from being set at the transmitting end to being set at the receiving end, that is, the elastic suspension plate is set above the antenna transmission line at the receiving end.

[0047] Here, the signal controller will control the opening and closing of the MEMS switch according to the data signal, thereby turning on and off the millimeter wave signal transmission at the receiving end.

[0048] When the signal controller controls the voltage change of the pull-down electrode according to the corresponding low-level data signal, so that the elastic suspension plate deforms and descends to cover the receiving antenna transmission line located below it; the amplifier in the receiving end connected to the receiving antenna transmission line will not be able to receive the millimeter wave signal, and the modulation signal at this time is 0 (Off).

[0049] When the signal controller controls the voltage recovery of the pull-down electrode according to the corresponding high-level data signal, the deformed elastic suspension plate can return to its normal position, that is, leave the receiving antenna transmission line; in this way, the amplifier at the receiving end can normally receive the millimeter wave signal transmitted by the transmitting end, and the modulation signal at this time is 1 (On).

[0050] Therefore, by controlling the opening and closing of the MEMS switch structure, the opening and closing of the millimeter-wave signal transmission at the receiving end can be controlled, thereby realizing the modulation of the OOK signal. Ultimately, the purpose of replacing the complex circuit structure with physical control to realize the OOK modulation of the isolator is achieved, thereby simplifying the circuit structure of the millimeter-wave device.

[0051] In summary, the millimeter wave isolation device based on MEMS switch provided by the utility model is provided with a MEMS switch above the transmitting antenna transmission line or the receiving antenna transmission line, so that the elastic suspension plate in the MEMS switch can cut off the transmitting antenna transmission line or the receiving antenna transmission line below it after being deformed in a controlled manner, thereby blocking the transmission of millimeter wave signals and controlling the communication between the transmitting end and the receiving end in the millimeter wave isolation device. In this way, the existing OOK modulation that requires a complex circuit structure to realize the isolator is replaced by a physical modulation signal method, thereby greatly simplifying the circuit structure of the millimeter wave isolation device.

[0052] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent transformations made using the contents of the specification and drawings of the present invention, or directly or indirectly applied in the relevant technical field, are also included in the patent protection scope of the present invention.

Claims

1. A millimeter wave isolation device based on MEMS switch, characterized in that: It comprises a transmitting antenna transmission line, a receiving antenna transmission line and a MEMS switch structure; the MEMS switch structure comprises a signal controller and a MEMS switch connected to each other; the MEMS switch comprises an elastic suspension plate; the elastic suspension plate is arranged above the transmitting antenna transmission line or the receiving antenna transmission line and is spaced at a preset distance, so that after the elastic suspension plate is deformed under the control of the signal controller, it can partially or completely cover the transmitting antenna transmission line or the receiving antenna transmission line located therebelow.

2. A millimeter wave isolation device based on a MEMS switch as claimed in claim 1, characterized in that: The MEMS switch further comprises a supporting substrate and a pull-down electrode; the pull-down electrode is connected to the signal controller and is arranged below the elastic suspension plate; the elastic suspension plate is arranged on the supporting substrate.

3. A millimeter wave isolation device based on a MEMS switch as claimed in claim 2, characterized in that: The number of the supporting substrates is two; the elastic suspension plate is bridged between the two supporting substrates.

4. A millimeter wave isolation device based on a MEMS switch as claimed in claim 2, characterized in that: It also includes a substrate; the transmitting end antenna transmission circuit, the receiving end antenna transmission circuit, the supporting substrate and the pull-down electrode are all arranged on the substrate.

5. A millimeter wave isolation device based on a MEMS switch as claimed in claim 2, characterized in that: The MEMS switch further includes a grounding member; the supporting substrate is connected to the grounding member.

6. A millimeter wave isolation device based on a MEMS switch as claimed in claim 1, characterized in that: The elastic suspension plate is made of a film material.

7. A millimeter wave isolation device based on a MEMS switch as claimed in claim 1, characterized in that: The MEMS switch structure is arranged at the transmitting end; and the elastic suspension plate is arranged above the transmitting end antenna transmission line.

8. A millimeter wave isolation device based on a MEMS switch as claimed in claim 7, characterized in that: The transmitting end includes a voltage-controlled oscillator VCO and a transmitting antenna; the output end of the voltage-controlled oscillator VCO is connected to the input end of the transmitting end antenna transmission line; the transmitting antenna is connected to the output end of the transmitting end antenna transmission line.

9. A millimeter wave isolation device based on a MEMS switch as claimed in claim 1, characterized in that: The MEMS switch structure is arranged at the receiving end; and the elastic suspension plate is arranged above the antenna transmission line of the receiving end.

10. A millimeter wave isolation device based on a MEMS switch as claimed in claim 9, characterized in that: The receiving end includes an amplifier, a demodulation module and a receiving antenna; the receiving antenna is connected to the input end of the receiving end antenna transmission line; the output end of the receiving end antenna transmission line is connected to the demodulation module via the amplifier.

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