Liquid material coating device and liquid material coating equipment

Abstract

The utility model discloses a liquid material coating device and liquid material coating equipment. The liquid material coating device comprises a driving module, wherein a driving mechanism is arranged in a cavity of a cavity; the driving mechanism is provided with a lever and a piezoelectric actuator applying force to the lever; the liquid chamber module is arranged below the driving module; the liquid chamber module is provided with a liquid chamber mechanism and a housing covering the liquid chamber mechanism; the liquid chamber mechanism is provided with a liquid chamber for containing liquid materials and a plunger, one end of the plunger extends into the liquid chamber, and the other end of the plunger is stressed by the lever. The housing is provided with a frame-shaped side shell part which is provided with long and short edges and extends longitudinally, and a bottom shell part which is positioned below the side shell part and extends transversely; a temperature sensor is arranged on the bottom shell part; therefore, the temperature outside the liquid material coating device can be easily sensed.

Description

Technical Field

[0001] The utility model relates to a liquid material coating device and a liquid material coating equipment, in particular to a liquid material coating device and a liquid material coating equipment for coating a liquid material on an object to be coated. Background Art

[0002] Conventional liquid material coating equipment is usually provided with a liquid material coating device that can discharge liquid material from a valve nozzle to an object to be coated and a carrier that can carry the object to be coated, and a preset pattern is coated on the object to be coated by relative displacement of the liquid material coating device and the carrier; in some processes, the liquid material coated on the object to be coated will have a need to flow, such as the underfill process, etc., so the carrier will also have a heating function to keep the liquid material on the object to be coated fluid due to heat.

[0003] However, when performing a liquid material coating operation, in order to make the coating more precise, the valve nozzle of the liquid material coating device usually spits out the liquid material at a position very close to but not in contact with the object to be coated. This also causes the heat on the carrier to be transferred to the liquid material coating device, thereby affecting the fluidity of the liquid material in the liquid material coating device; when the temperature of the liquid material becomes higher, the fluidity of the liquid material also becomes relatively higher, causing an unexpected increase in the amount of liquid material discharged; conversely, when the temperature of the liquid material becomes lower, the fluidity of the liquid material also becomes relatively lower, causing an unexpected decrease in the amount of liquid material discharged; in other words, the external ambient temperature outside the liquid material coating device will also be transmitted to the liquid material coating device and cause the amount of liquid material discharged to fluctuate, so being able to sense the external ambient temperature outside the liquid material coating device has become a research topic in the industry. Utility Model Content

[0004] Therefore, an object of the present invention is to provide a liquid material coating device that can easily sense the temperature outside the liquid material coating device.

[0005] Another object of the present invention is to provide a liquid material coating device using the liquid material coating device.

[0006] The liquid material coating device according to the purpose of the utility model includes: a driving module, in which a driving mechanism is provided in a chamber of a cavity; the driving mechanism is provided with a lever and a piezoelectric actuator applying force to the lever; a liquid chamber module, arranged below the driving module; the liquid chamber module is provided with a liquid chamber mechanism and a cover shell covering the liquid chamber mechanism; the liquid chamber mechanism is provided with a liquid chamber for accommodating liquid material, and a plunger with one end extending into the liquid chamber and the other end being applied by the lever; the cover shell is provided with a side shell portion in the shape of a frame with long and short sides and extending longitudinally, and a bottom shell portion located below the side shell portion and extending laterally; a temperature sensor is provided on the bottom shell portion.

[0007] According to another object of the present invention, the liquid material coating equipment includes: the liquid material coating device as described above; a heating carrier, which has a surface facing the bottom shell and can carry and heat an object to be coated.

[0008] In the liquid material coating device and liquid material coating equipment of the embodiment of the utility model, the temperature sensor disposed on the bottom shell portion of the cover shell can easily sense the external environment temperature outside the liquid material coating device. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a three-dimensional schematic diagram of a liquid material coating device of the utility model;

[0010] Figure 2 It is a three-dimensional schematic diagram of the separation of the driving module and the liquid chamber module of the liquid material coating device of the utility model;

[0011] Figure 3 It is a partial cross-sectional schematic diagram of the liquid material coating device of the utility model;

[0012] Figure 4 It is a three-dimensional bottom view schematic diagram of the temperature sensor of the liquid material coating device of the present invention installed on the outer shell surface of the cover;

[0013] Figure 5 It is a schematic diagram of the controller of the liquid material coating device of the present invention being electrically connected to the piezoelectric actuator and the temperature sensor;

[0014] Figure 6 is a schematic diagram of the liquid material coating device of the utility model being used in a liquid material coating equipment; and

[0015] Figure 7 It is a schematic diagram showing that the temperature sensor of another liquid material coating device of the present invention is arranged on the inner shell surface of the housing.

[0016] Description of reference numerals:

[0017] 10: Liquid material coating equipment

[0018] 1: Liquid material coating device

[0019] 2: Heating stage

[0020] 21: Countertop

[0021] A: Driver module

[0022] A1: Cavity

[0023] A11: Chamber

[0024] A2: Driving mechanism

[0025] A21: Leverage

[0026] A22: Piezoelectric Actuator

[0027] A23: Fulcrum

[0028] A24: First elastic member

[0029] A3: Buckle assembly

[0030] A31: Buckle

[0031] B: Liquid chamber module

[0032] B1: Liquid chamber mechanism

[0033] B11: Liquid chamber

[0034] B12: Plunger

[0035] B13: Plunger seat

[0036] B131: Pivot hole

[0037] B132: Second elastic member

[0038] B14: Liquid chamber seat

[0039] B15: Valve orifice

[0040] B151: Valve face

[0041] B152: Liquid outlet channel

[0042] B16: Mold base

[0043] B2: Cover

[0044] B21: Side shell

[0045] B211: Long side

[0046] B212: Short side

[0047] B22: Bottom shell

[0048] B221: Hollow

[0049] B222: Shell surface

[0050] B223: Mounting slot

[0051] B224: Inner shell

[0052] B3: Temperature sensor

[0053] B3': Temperature sensor

[0054] D: Controller

[0055] W: object to be coated. DETAILED DESCRIPTION

[0056] See also Figure 1 , the embodiments of the present utility model can be as follows Figure 1 The liquid material coating device shown is taken as an example for explanation. The liquid material coating device 1 includes: a driving module A and a liquid chamber module B.

[0057] See also Figure 2 , 3 The driving module A is provided with a driving mechanism A2 in a chamber A11 of a cavity A1; the driving mechanism A2 is provided with a lever A21 and a piezoelectric actuator A22 exerting force on the lever A21;

[0058] The liquid chamber module B is arranged below the driving module A; the liquid chamber module is provided with a liquid chamber mechanism B1 and a cover shell B2 covering the liquid chamber mechanism B1; the liquid chamber mechanism B1 is provided with a liquid chamber B11 for accommodating a liquid supply material, and a plunger B12 with one end extending into the liquid chamber B11 and the other end being exerted by the lever A21; the cover shell B2 is provided with a side shell portion B21 in the shape of a frame with long and short sides and extending longitudinally, and a bottom shell portion B22 located below the side shell portion B21 and extending laterally; a temperature sensor B3 is provided on the bottom shell portion B22.

[0059] See also Figure 2 , 3 The liquid chamber module B can be selectively clamped by two buckles A31 (only one buckle is shown in the figure, and the other buckle is correspondingly arranged on the other side) of a buckle assembly A3 of the driving module A, so as to be combined with or separated from the driving module A; the liquid chamber mechanism B1 can be externally connected to a liquid supply cylinder (not shown) so that the liquid chamber B11 can be filled with liquid material;

[0060] The driving mechanism A2 is provided with a fulcrum A23 and a first elastic member A24; the piezoelectric actuator A22 is provided above the lever A21, and the fulcrum A23 and the first elastic member A24 are provided below the lever A21. The lever A21 can be driven by the piezoelectric actuator A22 to swing downward to accumulate the elastic restoring force of the first elastic member A24; the upper end of the plunger B12 is pressed by one end of the lever A21, and the lower end of the plunger B12 extends into the liquid chamber B11;

[0061] The liquid chamber mechanism B1 is provided with a plunger seat B13, a liquid chamber seat B14, a valve nozzle B15, and a mold seat B16;

[0062] The liquid chamber B11 is arranged between the plunger seat B13, the liquid chamber seat B14 and the valve mouth B15. The plunger B12 is pivotally arranged in the plunger seat B13 and can be driven by the driving mechanism A2 to move up and down, so that the lower end of the plunger B12 selectively contacts a conical valve surface B151 of the valve mouth B15 to close or open a liquid outlet channel B152 of the valve mouth B15. A second elastic member B132 is arranged in a pivot hole B131 of the plunger seat B13 for the plunger B12 to pivot. The second elastic member B132 provides elastic restoring force for the plunger B12 when it moves downward.

[0063] The mold base B16 is made of a heat-conducting material such as metal and is disposed between the housing B2 and the liquid chamber base B14 for the liquid chamber base B14 to be disposed thereon. A heating wire (not shown) may be disposed on the mold base B16 to heat the liquid material in the liquid chamber B11.

[0064] The cover shell B2 is made of a material that is not very heat-conductive, such as plastic. On the one hand, it can prevent people from directly touching the mold base B16 and getting burned, and on the other hand, it can reduce the impact of the external ambient temperature on the liquid material in the liquid chamber B11; the side shell portion B21 of the cover shell B2 is composed of two long sides B211 constituting the long sides and two short sides B212 constituting the short sides, which together form a rectangular frame.

[0065] See also Figure 2 , 3 4. A hollow hole B221 is provided on the bottom shell portion B22 to allow a portion of the valve nozzle B15 to be exposed from the bottom shell portion B22 and the liquid outlet channel B152 passes through the bottom shell portion B22; the temperature sensor B3 is a thermistor and is disposed on an outer shell surface B222 of the bottom shell portion B22, so that the temperature sensor B3 and the valve nozzle B15 can be approximately in the same horizontal plane; the bottom shell portion B22 is provided with a mounting groove B223 on the outer shell surface B222 for mounting the temperature sensor B3, so that after the temperature sensor B3 is installed in the mounting groove B223, it will not protrude too much from the outer shell surface B222, and it is not easy to affect the coating operation of the liquid material coating device 1.

[0066] See also Figure 3 , 5 The liquid material coating device 1 is provided with a controller D which is electrically connected to the temperature sensor B3 and the piezoelectric actuator A22 respectively. The controller D has the following functions, namely, it can control the force applied to the lever A21 by the piezoelectric actuator A22 according to the temperature sensed by the temperature sensor B3; the piezoelectric actuator A22 can be controlled by the controller D to expand or contract to change the force applied to the lever A21, and link the plunger B12 to move up and down to squeeze the liquid material in the liquid chamber B11 out of the valve mouth B15.

[0067] See also Figure 6The liquid material coating device 1 is used in a liquid material coating apparatus 10 as shown in the figure, and can apply liquid material to a to-be-coated object W. The liquid material coating apparatus 10 is provided with:

[0068] A heating platform 2 is provided with a surface 21 facing the bottom shell portion B22 and capable of carrying and heating the object W to be coated.

[0069] See also Figure 6 , the temperature sensor B3 can sense the heat transferred from the table 21 of the heating stage 2 to the liquid chamber module B (indicated by an upward arrow symbol);

[0070] The liquid material coating device can drive the liquid material coating device 1 to move to the coating operation area by a multi-axis driving device such as a gantry rail frame (not shown), and move the liquid material coating device 1 longitudinally or transversely relative to the object to be coated W on the heating carrier 2, so that the liquid material coating device 1 can coat different positions of the object to be coated W;

[0071] The object W to be coated may be, for example, a BGA substrate or a wafer. When the object W to be coated is a BGA substrate, the object W to be coated is transported to the coating operation area by a flow channel not shown in the figure, and the heating carrier 2 is lifted by a lifting drive device not shown in the figure and the object W to be coated is maintained by negative pressure at the same time. When the object W to be coated is a wafer, the heating carrier 2 maintains the object W to be coated by negative pressure, and then the heating carrier 2 is driven by a horizontal drive device not shown in the figure to move to the coating operation area.

[0072] In the implementation of the liquid material coating device and the liquid material coating equipment of the utility model, the object to be coated W is held and heated by the heating stage 2; when the liquid material coating device 1 performs a coating operation on the object to be coated W, the liquid material coating device 1 is driven to move to a position where the valve nozzle B15 and the object to be coated W maintain a preset height;

[0073] The controller D can control the expansion or contraction of the volume of the piezoelectric actuator A22 according to preset parameters and control the conductive manner. When the volume of the piezoelectric actuator A22 expands, the piezoelectric actuator A22 drives the lever A21 to swing downward and press the plunger B12 to move downward, thereby compressing the first elastic member A24 and the second elastic member B132 to accumulate elastic restoring force, so that the lower end of the plunger B12 contacts the valve surface B151 of the valve nozzle B15 to close the liquid outlet channel B152 to prevent the liquid material in the liquid chamber B11 from being discharged; during the process when the plunger B12 moves downward and has not yet contacted the valve surface B151, the liquid The liquid material in the chamber B11 is squeezed by the plunger B12 and is squeezed out through the liquid outlet channel B152; when the volume of the piezoelectric actuator A22 is reduced, the lever A21 is swung upward by the elastic restoring force of the first elastic member A24, and at the same time, the plunger B12 is moved upward by the elastic restoring force of the second elastic member B132 to open the liquid outlet channel B152; the piezoelectric actuator A22 drives the lever A21 to link the plunger B12 to move up and down, so that the liquid material in the liquid chamber B11 can be squeezed out continuously, and the liquid material coating device 1 is displaced to coat different positions of the object W to be coated;

[0074] Because a portion of the valve mouth B15 is exposed from the bottom shell portion B22, it also means that the liquid material to be squeezed out near the valve mouth B15 is most likely to be affected by the heat (external ambient temperature) of the heating platform 2 and change the fluidity of the liquid material. Therefore, the temperature sensor B3 arranged on the bottom shell portion B22 of the cover shell B2 is not only closest to the table surface 21 of the heating platform 2, but also easy to sense the heat transferred from the table surface 21 of the heating platform 2 to the liquid chamber module B; and the temperature sensor B3 is approximately on the same horizontal plane as the valve mouth B15, so the sensed temperature is also approximately the same as the current temperature of the liquid material near the valve mouth B15; the temperature sensed by the temperature sensor B3 will be transmitted to the controller D, and the controller D will then use the built-in algorithm to The sensed temperature is converted into the fluidity of the liquid material near the valve mouth B15, and it is determined whether the fluidity of the liquid material meets the preset value; if it meets the preset value, the controller D continues to control the piezoelectric actuator A22 according to the preset parameters; if it deviates from the preset value (when the temperature becomes higher and the fluidity becomes higher), the controller D controls the piezoelectric actuator A22 to shorten the upward displacement stroke of the plunger B12 (the plunger is lifted lower), so that the plunger B12 applies a smaller impact force to the liquid material when it moves downward; if it deviates from the preset value (when the temperature becomes lower and the fluidity becomes lower), the controller D controls the piezoelectric actuator A22 to lengthen the upward displacement stroke of the plunger B12 (the plunger is lifted higher), so that the plunger B12 applies a larger impact force to the liquid material when it moves downward;

[0075] In addition to adjusting the upward displacement stroke of the plunger B12 to change the impact force applied to the liquid material by the plunger B12 when it moves downward, the embodiment of the utility model can also respond to changes in the fluidity of the liquid material by changing the frequency of the up and down reciprocating movement of the plunger B12; for example, under normal circumstances, the plunger B12 reciprocates and extrude the liquid material at a frequency of 10 times / 1 second; if the temperature becomes higher and the fluidity becomes higher, the plunger B12 changes to reciprocate and extrude the liquid material at a frequency of 7 times / 1 second; if the temperature becomes lower and the fluidity becomes lower, the plunger B12 changes to reciprocate and extrude the liquid material at a frequency of 13 times / 1 second.

[0076] In the liquid material coating device and liquid material coating equipment of the embodiment of the present invention, the temperature sensor B3 disposed on the bottom shell portion B22 of the cover shell B2 can easily sense the external environment temperature outside the liquid material coating device 1 .

[0077] See also Figure 7 The temperature sensor B3' of another embodiment of the present invention is a platinum resistor and is disposed on an inner shell surface B224 opposite to the bottom shell portion B22 and the outer shell surface B222, so that the temperature sensor B3' will not interfere with the coating operation of the liquid material coating device 1.

[0078] However, the above is only a preferred embodiment of the present utility model, and it cannot be used to limit the scope of implementation of the present utility model. That is, all simple equivalent changes and modifications made based on the scope of the patent application of the present utility model and the content of the utility model description are still within the scope covered by the present utility model patent.

Claims

1. A liquid material coating device, characterized in that: include: A driving module is provided with a driving mechanism in a chamber of a cavity; the driving mechanism is provided with a lever and a piezoelectric actuator applying force to the lever; A liquid chamber module is arranged below the driving module; the liquid chamber module is provided with a liquid chamber mechanism and a cover shell covering the liquid chamber mechanism; the liquid chamber mechanism is provided with a liquid chamber for accommodating a liquid supply material, and a plunger with one end extending into the liquid chamber and the other end being exerted by the lever; the cover shell is provided with a side shell portion in a frame shape with long and short sides and extending longitudinally, and a bottom shell portion located below the side shell portion and extending transversely; A temperature sensor is arranged on the bottom shell portion.

2. The liquid material coating device according to claim 1, characterized in that: The temperature sensor is arranged on an outer shell surface of the bottom shell portion.

3. The liquid material coating device according to claim 2, characterized in that: The bottom shell portion is concavely provided with a mounting groove on the outer shell surface for mounting the temperature sensor.

4. The liquid material coating device according to claim 2, characterized in that: The temperature sensor is a thermistor.

5. The liquid material coating device according to claim 1, characterized in that: The temperature sensor is arranged on an inner shell surface of the bottom shell portion.

6. The liquid material coating device according to claim 5, characterized in that: The temperature sensor is a platinum resistor.

7. The liquid material coating device according to claim 1, characterized in that: A controller is electrically connected to the temperature sensor and the piezoelectric actuator respectively. The controller controls the force applied by the piezoelectric actuator to the lever according to the temperature sensed by the temperature sensor.

8. The liquid material coating device according to claim 1, characterized in that: The side shell part of the cover shell is composed of two long side parts constituting the long side and two short side parts constituting the short side, which are jointly constructed to form a rectangular frame.

9. The liquid material coating device according to claim 1, characterized in that: The liquid chamber mechanism is provided with a plunger seat, a liquid chamber seat, and a valve nozzle; the liquid chamber is arranged between the plunger seat, the liquid chamber seat and the valve nozzle; a hollow hole is provided on the bottom shell part for a part of the valve nozzle to expose the bottom shell part.

10. A liquid material coating device, characterized in that: include: The liquid material coating device according to any one of claims 1 to 9; A heating platform is provided with a surface facing the bottom shell portion and capable of carrying and heating an object to be coated.

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