T-shaped vacuum low-temperature pressure reducing valve
By designing a T-type vacuum low-temperature pressure reducing valve, using the vacuum layer and adjustable pressure adjustment screw, the pressure fluctuation problem of filling equipment caused by high pressure in the liquid nitrogen storage tank is solved, and efficient pressure reduction and low-temperature maintenance of liquid nitrogen is achieved. , ensuring the stability of product quality.
Patent Information
- Application Number
- CN202421123272.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-22
- Publication Date
- 2025-01-14
- Estimated Expiration
- 2034-05-22
AI Technical Summary
In semiconductor chip manufacturing and liquid nitrogen filling equipment, the high pressure in the liquid nitrogen storage tank causes large pressure fluctuations in the filling equipment, affecting product quality.
A T-type vacuum low-temperature pressure reducing valve is designed, including the pressure reducing valve body, vacuum joint, vacuum layer, fixed flange, flange cover and locking screws, which form a high vacuum state through the vacuum unit to reduce heat conduction loss. And the adjustable pressure adjustment screw and sealing structure ensure stable output of liquid nitrogen and convenient maintenance.
It realizes efficient pressure reduction and low temperature maintenance of liquid nitrogen, reduces heat conduction losses, ensures stable output of liquid nitrogen, and prevents condensate from frosting and freezing through good sealing, significantly improving product quality.
Smart Images

Figure CN222352085U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of pressure reducing valves, in particular to a T-type vacuum low-temperature pressure reducing valve. Background Art
[0002] In semiconductor chip manufacturing, molecular beam epitaxy (MBE) equipment and liquid nitrogen filling equipment for various beverages and foods are used. Due to the very high pressure in the liquid nitrogen storage tank, the high pressure impacts the filling equipment, causing large fluctuations in the pressure of the liquid nitrogen storage tank inside the filling equipment, and the filling of liquid nitrogen fluctuates, which has a serious impact on product quality. Therefore, a T-type vacuum low-temperature pressure reducing valve is needed to reduce the high-pressure liquid nitrogen in the liquid nitrogen storage tank to the required pressure and then inject it into the liquid and gas filling equipment. Utility Model Content
[0003] The utility model provides a T-type vacuum low-temperature pressure reducing valve, which aims to solve the problem that in the molecular beam epitaxy (MBE) equipment and the liquid nitrogen filling equipment for various beverages and foods proposed in the above background technology, the pressure in the liquid nitrogen storage tank is very high during use, and the high pressure impacts the inside of the filling equipment, resulting in large pressure fluctuations in the liquid nitrogen storage tank inside the filling equipment, and the filling of liquid nitrogen fluctuates, which has a serious impact on product quality.
[0004] To solve the above problems, the utility model is implemented as follows: a T-type vacuum low-temperature pressure reducing valve, comprising: a pressure reducing valve body; a vacuum female joint, the vacuum female joint is arranged on the pressure reducing valve body; a vacuum layer, the vacuum layer is arranged inside the pressure reducing valve body; a fixed flange, the fixed flange is arranged on the pressure reducing valve body; a flange cover, the flange cover is arranged on the fixed flange; a plurality of locking screws, the plurality of locking screws are all arranged on the flange cover, and the plurality of locking screws are all threadedly connected to the fixed flange.
[0005] Preferably, an annular groove is formed on the fixing flange, and an O-ring is provided on the annular groove.
[0006] Preferably, a pressure reducing valve body is arranged on the inner wall of the pressure reducing valve body, a pressure adjusting screw is arranged on the pressure reducing valve body, and a locking nut is arranged on the pressure adjusting screw.
[0007] Preferably, a vacuum male connector is provided on the pressure reducing valve body, a circular opening is provided on the flange cover, and a sealing cover is threadedly mounted on the circular opening.
[0008] Preferably, a metal braided mesh cylinder is fixedly mounted on the bottom of the flange cover, and a granular desiccant is arranged inside the metal braided mesh cylinder.
[0009] Preferably, a vacuum nozzle is provided on the pressure reducing valve body, and one end of the vacuum nozzle extends to the inside of the vacuum layer.
[0010] Preferably, a one-way valve is provided on the vacuum nozzle, and a pagoda-shaped joint is provided at the top of the vacuum nozzle.
[0011] Compared with the related art, the T-type vacuum low-temperature pressure reducing valve provided by the utility model has the following beneficial effects:
[0012] Compared with the prior art, the T-type vacuum low-temperature pressure reducing valve provided by the present invention has a pressure reducing valve body as the main body of the entire device, which is responsible for the pressure reducing work of liquid nitrogen. The vacuum female connector is connected to the pressure reducing valve body for access to the high-pressure liquid nitrogen storage tank. The vacuum layer is arranged inside the pressure reducing valve body, and the air inside is extracted through the vacuum unit connected to the vacuum nozzle to form a high vacuum state, which effectively reduces the loss of low-temperature liquid nitrogen due to heat conduction. The fixed flange is arranged on the pressure reducing valve body for fixing and supporting other components. The flange cover is connected to the fixed flange through a plurality of locking screws to realize the pressure reducing valve. Sealing, the locking screws not only play a fixing role, but also facilitate the removal of the flange cover when needed. When high-pressure liquid nitrogen flows from the storage tank into the vacuum female joint, it is reduced in pressure by the pressure reducing valve body and flows to the vacuum male joint, and then connected to the required liquid nitrogen filling equipment. When adjusting the pressure, the flange cover can be removed by unscrewing the locking screws on the flange cover, and then the pressure regulating screw can be adjusted. After the adjustment is completed, tighten the locking nut, insert the O-ring, cover the flange cover and tighten the locking screws to ensure the sealing of the pressure reducing valve and prevent air from entering to produce condensation, frost and ice and other adverse phenomena;
[0013] In summary, the T-type vacuum cryogenic pressure reducing valve achieves efficient pressure reduction and low temperature maintenance of liquid nitrogen through its unique design and structure. The setting of the vacuum layer reduces heat conduction loss, and the adjustable pressure regulating screw ensures the stable output of liquid nitrogen. At the same time, the use of flange cover and locking screws can achieve convenient maintenance and good sealing of the pressure reducing valve. These characteristics make the T-type vacuum cryogenic pressure reducing valve have significant advantages and effects in applications such as liquid nitrogen filling. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 This is a schematic diagram of the main structure of a T-type vacuum low-temperature pressure reducing valve provided by the utility model;
[0015] Figure 2 for Figure 1 A schematic diagram of a three-dimensional assembly structure of a flange cover, a metal braided mesh cylinder and a sealing cover;
[0016] Figure 3 for Figure 1 Schematic diagram of the enlarged structure of part A shown in FIG.
[0017] Figure numerals: 1. valve body; 2. vacuum female connector; 3. vacuum layer; 4. locking screw; 5. flange cover; 6. O-ring; 7. fixing flange; 8. pressure regulating screw; 9. locking nut; 10. pressure reducing valve body; 11. vacuum male connector; 12. circular opening; 13. metal braided mesh tube; 14. granular desiccant; 15. sealing cover; 16. vacuum nozzle; 17. one-way valve; 18. pagoda-shaped connector. DETAILED DESCRIPTION
[0018] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field of the present application; the terms used in the specification of the application herein are only for the purpose of describing specific embodiments and are not intended to limit the present application; the terms "including" and "having" in the specification and claims of the present application and the above-mentioned figure descriptions and any variations thereof are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of the present application or the above-mentioned figures are used to distinguish different objects, rather than to describe a specific order; the terms "inside", "outside", "left", and "right" indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.
[0019] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.
[0020] The utility model embodiment provides a T-type vacuum low temperature pressure reducing valve, such as Figure 1-3 As shown, the T-type vacuum low-temperature pressure reducing valve includes: a pressure reducing valve body 1; a vacuum female connector 2, which is arranged on the pressure reducing valve body 1; a vacuum layer 3, which is arranged inside the pressure reducing valve body 1; a fixed flange 7, which is arranged on the pressure reducing valve body 1; a flange cover 5, which is arranged on the fixed flange 7; and a plurality of locking screws 4, which are all arranged on the flange cover 5 and are all threadedly connected to the fixed flange 7.
[0021] In this embodiment, the vacuum unit is connected to the vacuum nozzle 2, and the vacuum unit extracts the air and other molecular gases in the vacuum layer 3 through the vacuum nozzle 2, so that the vacuum layer 3 forms a high vacuum state to reduce the loss of low-temperature liquid nitrogen due to heat conduction. When the high-pressure liquid nitrogen storage tank flows into the vacuum female joint 1 and enters the pressure reducing valve body 10, the locking screw 4 on the flange cover 5 is unscrewed, the flange cover 5 is removed, the locking nut 9 is loosened with a sleeve plate hand, and the pressure regulating screw 8 is adjusted with a hexagonal plate hand. After the liquid nitrogen is reduced in pressure by the pressure reducing valve body 10, it flows to the vacuum male joint 11 and is then connected to the required liquid nitrogen filling equipment; when the pressure regulating screw 8 is adjusted, the loose locking nut 9 is tightened, the O-ring 6 is placed in the annular groove on the fixed flange 7, the flange cover 5 is covered, and the locking screw 4 is tightened to prevent air from entering the cavity of the pressure reducing valve body 1 to produce condensed water, frost, and ice, and other undesirable phenomena;
[0022] The structure of the T-type vacuum low-temperature pressure reducing valve includes a pressure reducing valve body 1, a vacuum female connector 2, a vacuum layer 3, a fixed flange 7, a flange cover 5, a plurality of locking screws 4 and other components. The pressure reducing valve body 1 is the main body of the whole device and is responsible for the decompression of liquid nitrogen. The vacuum female connector 2 is connected to the pressure reducing valve body 1 and is used for the access of the high-pressure liquid nitrogen storage tank. The vacuum layer 3 is arranged inside the pressure reducing valve body 1, and the air inside is extracted through the vacuum unit connected to the vacuum nozzle 2 to form a high vacuum state, which effectively reduces the loss of low-temperature liquid nitrogen by heat conduction. The fixed flange 7 is arranged on the pressure reducing valve body 1 and is used to fix and support other components. The flange cover 5 is connected to the pressure reducing valve body 1 and is connected to the pressure reducing valve body 1 and is used for the access of the high-pressure liquid nitrogen storage tank. The vacuum layer 3 is arranged inside the pressure reducing valve body 1 and is connected to the vacuum nozzle 2 through the vacuum unit to extract the air inside, so as to form a high vacuum state, and effectively reduce the loss of low-temperature liquid nitrogen by heat conduction. The fixed flange 7 is arranged on the pressure reducing valve body 1 and is used to fix and support other components. The flange cover 5 is connected to the pressure reducing valve body 1 and is connected to the pressure reducing valve body 1 and is connected to the pressure reducing valve body 1 and is used for the access of the high-pressure liquid nitrogen storage tank. It is connected with the fixed flange 7 to realize the sealing of the pressure reducing valve. The locking screw 4 not only plays a fixing role, but also can facilitate the removal of the flange cover 5 when needed. When the high-pressure liquid nitrogen flows from the storage tank into the vacuum female connector 2, it is reduced in pressure by the pressure reducing valve body 10 and flows to the vacuum male connector 11, and then connected to the required liquid nitrogen filling equipment. When adjusting the pressure, the flange cover 5 can be removed by unscrewing the locking screw 4 on the flange cover 5, and then the pressure regulating screw 8 is adjusted. After the adjustment is completed, the locking nut 9 is tightened, the O-ring 6 is inserted, the flange cover 5 is covered and the locking screw 4 is tightened to ensure the sealing of the pressure reducing valve and prevent air from entering to produce condensation water, frost, ice and other undesirable phenomena;
[0023] In summary, the T-type vacuum cryogenic pressure reducing valve achieves efficient pressure reduction and low temperature maintenance of liquid nitrogen through its unique design and structure. The setting of the vacuum layer reduces heat conduction loss, and the adjustable pressure regulating screw ensures the stable output of liquid nitrogen. At the same time, the use of flange cover and locking screws can achieve convenient maintenance and good sealing of the pressure reducing valve. These characteristics make the T-type vacuum cryogenic pressure reducing valve have significant advantages and effects in applications such as liquid nitrogen filling.
[0024] In a further preferred embodiment of the present invention, an annular groove is formed on the fixing flange 7 , and an O-ring 6 is disposed on the annular groove.
[0025] In this embodiment, an O-ring 6 can be installed through the annular groove, and the flange cover 5 and the fixed flange 7 can be sealed through the O-ring 6, thereby preventing the outside air from entering the cavity of the pressure reducing valve body 1 along the gap between the flange cover 5 and the fixed flange 7 to generate condensation water, frost, ice and other adverse phenomena.
[0026] In a further preferred embodiment of the present invention, a pressure reducing valve body 10 is provided on the inner wall of the pressure reducing valve body 1 , a pressure regulating screw 8 is provided on the pressure reducing valve body 10 , and a locking nut 9 is provided on the pressure regulating screw 8 .
[0027] In this embodiment, when the high-pressure liquid nitrogen storage tank flows into the vacuum female connector 1 and enters the pressure reducing valve body 10, unscrew the locking screw 4 on the flange cover 5, remove the flange cover 5, loosen the locking nut 9 with a sleeve wrench, and then adjust the pressure regulating screw 8 with a hexagonal wrench. After the liquid nitrogen is reduced in pressure through the pressure reducing valve body 10, it flows to the vacuum male connector 11 and is then connected to the required liquid nitrogen filling equipment.
[0028] In a further preferred embodiment of the present invention, a vacuum male connector 11 is provided on the pressure reducing valve body 1 , a circular opening 12 is provided on the flange sealing cover 5 , and a sealing cover 15 is threadedly mounted on the circular opening 12 .
[0029] In this embodiment, a liquid nitrogen filling device can be connected via the vacuum male connector 11 .
[0030] In a further preferred embodiment of the present invention, a metal braided mesh tube 13 is fixedly installed at the bottom of the flange cover 5 , and a granular desiccant 14 is arranged inside the metal braided mesh tube 13 .
[0031] In this embodiment, the granular desiccant 14 in the metal woven mesh tube 13 can be used to dry the air in the inner cavity of the pressure reducing valve body 1, thereby further preventing the generation of adverse phenomena such as condensation, frost and ice in the cavity of the pressure reducing valve body 1. When the granular desiccant 14 of the metal woven mesh tube 13 needs to be replaced, the flange cover 5 is removed, the sealing cover 1515 is unscrewed, and the granular desiccant 14 in the metal woven mesh tube 13 is replaced through the circular opening 12.
[0032] In a further preferred embodiment of the present invention, a vacuum nozzle 16 is provided on the pressure reducing valve body 1 , and one end of the vacuum nozzle 16 extends to the inside of the vacuum layer 3 .
[0033] In this embodiment, the vacuum unit extracts molecular gases such as air in the vacuum layer 3 through the vacuum nozzle 2, so that the vacuum layer 3 forms a high vacuum state to reduce the loss of low-temperature liquid nitrogen due to heat conduction.
[0034] In a further preferred embodiment of the present invention, a one-way valve 17 is provided on the vacuum nozzle 16 , and a pagoda-shaped joint 18 is provided at the top of the vacuum nozzle 16 .
[0035] In this embodiment, the one-way valve 17 can be used to form a one-way airflow channel through the vacuum nozzle 16, thereby preventing external air from entering the interior of the pressure reducing valve body 1, and the pagoda-shaped joint 18 is used to facilitate the connection of the pipeline of the vacuum unit.
[0036] In summary, compared with the related art, the present device extracts molecular gases such as air in the vacuum layer 3, thereby forming a high vacuum state in the vacuum layer 3 to reduce the loss of low-temperature liquid nitrogen due to heat conduction, and at the same time facilitates the decompression and filling of the low-temperature liquid nitrogen, and can prevent the occurrence of adverse phenomena such as condensation of water, frost and ice on the inner wall of the cavity of the pressure reducing valve body 1.
[0037] In the several embodiments provided in this application, it should be understood that the disclosed device can be implemented in other ways.
[0038] The above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit the protection scope of the utility model. Obviously, the described embodiments are only some embodiments of the utility model, rather than all embodiments. Based on these embodiments, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Although the utility model has been described in detail with reference to the above embodiments, ordinary technicians in this field can still combine, add, delete or make other adjustments to the features in the various embodiments of the utility model according to the circumstances without conflict, without making creative work, so as to obtain different other technical solutions that do not deviate from the concept of the utility model in essence, and these technical solutions also belong to the scope of protection of the utility model.
Claims
1. A T-type vacuum low-temperature pressure reducing valve, characterized in that: include: Pressure reducing valve body; A vacuum female connector, wherein the vacuum female connector is arranged on the pressure reducing valve body; A vacuum layer, the vacuum layer being arranged inside the pressure reducing valve body; A fixed flange, wherein the fixed flange is arranged on the pressure reducing valve body; A flange cover, the flange cover is arranged on the fixed flange; A plurality of locking screws are provided on the flange cover, and the plurality of locking screws are threadedly connected to the fixing flange.
2. The T-type vacuum low-temperature pressure reducing valve according to claim 1, characterized in that: An annular groove is formed on the fixing flange, and an O-type sealing ring is arranged on the annular groove.
3. The T-type vacuum low-temperature pressure reducing valve according to claim 1, characterized in that: A pressure reducing valve body is arranged on the inner wall of the pressure reducing valve body, a pressure regulating screw is arranged on the pressure reducing valve body, and a locking nut is arranged on the pressure regulating screw.
4. The T-type vacuum low-temperature pressure reducing valve according to claim 1, characterized in that: The pressure reducing valve body is provided with a vacuum male joint, the flange sealing cover is provided with a circular opening, and a sealing cover is threadedly installed on the circular opening.
5. The T-type vacuum low-temperature pressure reducing valve according to claim 1, characterized in that: A metal braided mesh cylinder is fixedly installed on the bottom of the flange cover, and a granular desiccant is arranged inside the metal braided mesh cylinder.
6. The T-type vacuum low-temperature pressure reducing valve according to claim 1, characterized in that: The pressure reducing valve body is provided with a vacuum nozzle, and one end of the vacuum nozzle extends to the inside of the vacuum layer.
7. The T-type vacuum low-temperature pressure reducing valve according to claim 6, characterized in that: A one-way valve is arranged on the vacuum nozzle, and a pagoda-shaped joint is arranged on the top of the vacuum nozzle.