Intelligent induction type sound alarm device of wafer spin-drying equipment

Abstract

The utility model relates to the technical field of wafer production, in particular to an intelligent induction type sound alarm device of wafer spin-drying equipment. According to the utility model, the alarm lamp, the buzzer and the control circuit are arranged, the control circuit acquires signals of the spin-drying equipment to judge whether the spin-drying equipment completes spin-drying or not in a visual and sound dual reminding mode, and after the wafer spin-drying equipment completes spin-drying, the control circuit controls the alarm lamp to turn from green to red, so that the alarm lamp gives an alarm. And meanwhile, the buzzer sounds to remind a worker of timely closing, so that the attention of the operator to the production progress is effectively improved, the possibility of production delay is reduced, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer production, in particular to an intelligent induction type sound alarm device for wafer drying equipment. Background Art

[0002] Wafer drying equipment is widely used in semiconductor industry production to remove and dry the residual moisture on the surface of the wafer after process cleaning. During the production process, operators need to pay close attention to the production progress so that they can perform subsequent operations in a timely manner after the production is completed. However, existing wafer drying equipment often lacks intuitive and effective prompt devices after the production is completed. Since operators need to operate multiple devices at the same time, the continuity and automation of the equipment operation are high, operators may not be able to know the progress of the wafer drying equipment in time, affecting production efficiency.

[0003] Therefore, an intelligent inductive sound alarm device for wafer drying equipment is designed to solve the above technical problems. Utility Model Content

[0004] The technical problem to be solved by the utility model is that the existing wafer drying equipment often lacks an intuitive and effective prompt device after the production is completed. Since the operator needs to operate multiple devices at the same time and the continuity and automation of the equipment operation are high, the operator may not be able to know the progress of the wafer drying equipment in time, affecting production efficiency.

[0005] The utility model provides the following technical solutions: an intelligent induction sound alarm device for wafer drying equipment, comprising an alarm light, a buzzer and a control circuit, wherein the alarm light is arranged on the right side of the wafer drying equipment, and the alarm light is used to light up after receiving a signal from the control circuit, thereby reminding the staff to complete the drying work; the buzzer is connected to the control circuit, and the buzzer is used to trigger the buzzer to emit an alarm sound when the control circuit receives a signal of production completion, thereby cooperating with the alarm light to remind the staff; the control circuit is installed inside the wafer drying equipment, and the control circuit is used to detect whether the wafer is completely dried, and control the alarm light to flash and sound the buzzer at the same time.

[0006] Preferably, the control circuit includes a power switch, an optical coupling relay driving module, a diaphragm type adjustable voltage switch controller and a self-locking relay module. The power switch is installed inside the wafer drying device. The optical coupling relay driving module, the diaphragm type adjustable voltage switch controller and the self-locking relay module are arranged on the right side of the power switch.

[0007] Preferably, a self-locking relay module reset button is installed on the wafer drying device.

[0008] Preferably, the warning light adopts a high-brightness LED lamp bead, and the warning light is divided into a red light area and a green light area.

[0009] Preferably, a signal transmission module is installed on one side of the alarm light, and the signal transmission module is used to send the signal of the wafer drying equipment to the mobile terminal.

[0010] The beneficial effects of the utility model are as follows:

[0011] 1. The utility model sets an alarm light, a buzzer and a control circuit, and uses visual and sound dual reminder methods. The control circuit collects the signal of the drying equipment to determine whether the drying equipment is completed. After the wafer drying equipment is completed, the control circuit controls the alarm light to change from green to red, and the buzzer sounds to remind the staff to turn it off in time, which effectively improves the operator's attention to the production progress, reduces the possibility of production delays, and improves production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0013] Figure 1 It is an overall schematic diagram of the utility model;

[0014] Figure 2 A circuit diagram of the utility model;

[0015] Figure 3 It is a schematic diagram of signal transmission of the utility model.

[0016] In the figure: 1. Alarm light; 2. Buzzer; 3. Control circuit; 31. Power switch; 32. Optocoupler relay drive module; 33. Diaphragm type adjustable voltage switch controller; 34. Self-locking relay module; 35. Reset button; 36. Signal transmission module; 4. Mobile terminal. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Therefore, the following detailed description of the embodiments of the utility model is not intended to limit the scope of the utility model for which protection is sought, but merely represents some embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0018] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0019] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "back" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the invention product is usually placed when in use. Such terms are only used to facilitate the description of the present invention and simplify the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present invention.

[0020] It should also be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] The disclosed embodiments are intended to solve the problem that existing wafer drying equipment often lacks intuitive and effective prompt devices after production is completed. Since operators need to operate multiple devices at the same time and the equipment operation is continuous and automated at a high level, operators may not be able to promptly learn about the progress of the wafer drying equipment, affecting production efficiency. In view of this, the disclosed embodiments propose an intelligent sensing sound alarm device for wafer drying equipment, which is provided with an alarm light, a buzzer and a control circuit. Through visual and sound dual reminders, the control circuit collects the signal of the drying equipment to determine whether the drying equipment is completed. After the wafer drying equipment is completed, the control circuit controls the alarm light to change from green to red, and at the same time the buzzer sounds to remind the staff to turn it off in time, effectively increasing the operator's attention to the production progress, reducing the possibility of production delays, and improving production efficiency.

[0022] like Figures 1 to 3 As shown, an intelligent induction sound alarm device for wafer drying equipment includes an alarm light 1, a buzzer 2 and a control circuit 3. The alarm light 1 is arranged on the right side of the wafer drying equipment. The alarm light 1 is used to light up after receiving the signal of the control circuit 3, thereby reminding the staff to complete the drying work; the buzzer 2 is connected to the control circuit 3, and the buzzer 2 is used to trigger the buzzer 2 to emit an alarm sound when the control circuit 3 receives the signal of production completion, thereby cooperating with the alarm light 1 to remind the staff; the control circuit 3 is installed inside the wafer drying equipment, and the control circuit 3 is used to detect whether the wafer is completely dried, and control the alarm light 1 to flash and sound the buzzer 2 at the same time.

[0023] When the existing wafer drying equipment is working, it is usually necessary to manage a large number of equipment. Due to the high degree of automation of the existing equipment, the staff cannot promptly discover when the wafer drying equipment has completed the drying work, which will greatly waste work efficiency. The above-mentioned alarm device can collect the signal of the drying equipment through the control circuit 3 to determine whether the drying equipment is completed. After the wafer drying equipment completes the drying, the control circuit 3 controls the alarm light 1 to change from green to red, and the buzzer 2 sounds to remind the staff to shut down in time. This method greatly improves the work efficiency of the staff.

[0024] like Figure 2As shown, the control circuit 3 includes a power switch 31, an optical coupling relay driving module 32, a diaphragm type adjustable voltage switch controller 33 and a self-locking relay module 34. The power switch 31 is installed inside the wafer drying equipment. The power switch 31 is used to convert AC voltage into DC voltage to power the optical coupling relay driving module 32, the self-locking, and sound alarm lamp 1; the optical coupling relay driving module 32, the diaphragm type adjustable voltage switch controller 33 and the self-locking relay module 34 are arranged on the right side of the power switch 31; the optical coupling relay driving module 32 is used to receive input signals and output signals; the diaphragm type adjustable voltage switch is used to control the switch state of the circuit 3, so that the circuit can be short-circuited or open-circuited, and can also realize fast and reliable opening and closing operations; the self-locking relay module 34 is used to realize that the relay remains closed when a pulse signal is given;

[0025] The connection mode of the control circuit 3 is:

[0026] Power switch 31: input L is connected to live wire N is connected to neutral wire, output + is connected to self-locking relay module 34 and optocoupler relay driver module 32DC+, output - is connected to self-locking relay module 34 and optocoupler relay driver module 32DC-

[0027] Optocoupler relay driver module 32: short the jumper to high, connect DC+ to COM, connect NC to the red wire of alarm light 1, and NO to the green wire of alarm light 1.

[0028] Self-locking relay module 34: DC+ is connected to COM, NI is connected to the NC interface of the optocoupler relay driver module 32, and NO is connected to the black wire of the alarm light 1.

[0029] Diaphragm type adjustable pressure switch controller 33: one end of the wiring is connected to the optocoupler relay driver module 32DC+, the other end is connected to NI, and the air intake end is connected to the solenoid valve of the equipment.

[0030] During operation, the power switch 31 is responsible for supplying power to components, and the diaphragm-type adjustable voltage switch controller 33 triggers the start and stop signals of the wafer drying equipment. When the wafer drying equipment stops, the optocoupler relay driving module 32 that receives the signal controls the alarm light 1 to change from green to red. When the self-locking relay module 34 receives the optocoupler relay signal, the buzzer 2 sounds. At this time, the staff manually presses the reset button 35 and the alarm sound disappears, thereby achieving a reminder effect for the staff.

[0031] like Figure 1As shown, a self-locking relay module 34 reset button 35 is installed on the wafer drying device; the self-locking relay reset button 35 is used to press a pulse signal to the self-locking relay module 34, and the self-locking relay module 34 remains disconnected; press the self-locking relay module 34 again to disconnect; the reset button 35 can reset the self-locking relay when the staff realizes that the wafer drying equipment has completed drying, thereby turning off the buzzer 2 and the alarm light 1.

[0032] like Figure 2 As shown, the alarm light 1 uses a high-brightness LED lamp bead, and the alarm light 1 is divided into a red light area and a green light area. The use of high-brightness LED lamp beads is used to enable the staff to find the wafer drying equipment that has completed the work more quickly. At the same time, the alarm light 1 is divided into a red light area and a green light area to quickly distinguish the working status of the wafer drying equipment.

[0033] like Figure 3 As shown, a signal transmission module 36 is installed on one side of the alarm light 1, and the signal transmission module 36 is used to send the signal of the wafer spin-drying equipment to the mobile terminal 4; the remote signal transmission by the signal transmission module 36 allows the staff to be away from the wafer spin-drying equipment and only receive the completion information of the wafer spin-drying equipment through the mobile terminal 4, such as a mobile phone, and quickly locate the position of the wafer spin-drying equipment that has completed the work through the alarm light 1 and the buzzer 2, which greatly increases the freedom of the staff and improves work efficiency.

[0034] The working principle of the utility model is as follows: when working, the power switch 31 is responsible for the power supply of components, the diaphragm type adjustable voltage switch controller 33 triggers the start and stop signals of the wafer drying equipment, and when the wafer drying equipment stops, the optocoupler relay driving module 32 that receives the signal controls the alarm light 1 to change from green to red, and the self-locking relay module 34 receives the signal from the optocoupler relay driving module 32 and the buzzer 2 sounds at the same time, and the staff manually presses the reset button 35 at this time and the alarm sound disappears, thereby realizing the effect of reminding the staff.

[0035] Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the description are only for explaining the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which are within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. An intelligent inductive sound alarm device for wafer drying equipment, characterized in that: The device comprises an alarm light (1), a buzzer (2) and a control circuit (3), wherein the alarm light (1) is arranged on the right side of the wafer drying device, and the alarm light (1) is used to light up after receiving a signal from the control circuit (3), thereby reminding the staff to complete the drying work; the buzzer (2) is connected to the control circuit (3), and the buzzer (2) is used to trigger the buzzer (2) to emit an alarm sound when the control circuit (3) receives a signal indicating that the production is completed, thereby cooperating with the alarm light (1) to remind the staff; the control circuit (3) is installed inside the wafer drying device, and the control circuit (3) is used to detect whether the wafer is completely dried, and control the alarm light (1) to flash and the buzzer (2) to sound at the same time.

2. The intelligent inductive sound alarm device for wafer drying equipment according to claim 1, characterized in that: The control circuit (3) comprises a power switch (31), an optical coupling relay driving module (32), a diaphragm type adjustable voltage switch controller (33) and a self-locking relay module (34); the power switch (31) is installed inside the wafer drying device; the optical coupling relay driving module (32), the diaphragm type adjustable voltage switch controller (33) and the self-locking relay module (34) are arranged on the right side of the power switch (31); the optical coupling relay driving module (32) is used to change the color of the alarm light (1) after receiving a signal from the diaphragm type adjustable voltage switch controller (33), and at the same time send a signal to the self-locking relay module (34) so ​​that the self-locking relay module (34) turns on the buzzer (2) to alarm.

3. The intelligent inductive sound alarm device for wafer drying equipment according to claim 2, characterized in that: The wafer drying device is provided with a reset button (35).

4. The intelligent inductive sound alarm device for wafer drying equipment according to claim 3, characterized in that: The warning light (1) uses a high-brightness LED lamp bead, and the warning light (1) is divided into a red light area and a green light area.

5. The intelligent inductive sound alarm device for wafer drying equipment according to claim 4, characterized in that: A signal transmission module (36) is installed on one side of the alarm light (1), and the signal transmission module (36) is used to send a signal from the wafer drying device to the mobile terminal (4).

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