Cleaning device

Abstract

The utility model relates to a cleaning device. The cleaning device comprises a first liquid storage part, a second liquid storage part and a plurality of cleaning parts. The first liquid storage part is provided with a first liquid storage cavity, an opening communicated with the first liquid storage cavity and a plurality of charging holes; the second liquid storage part and the first liquid storage part are arranged in a spaced mode, and the second liquid storage part is provided with a second liquid storage cavity, a liquid drainage hole and a plurality of communicating holes, the two ends of each cleaning part are connected with the first liquid storage part and the second liquid storage part correspondingly, each cleaning part is provided with a cleaning cavity, and each cleaning cavity communicates with the corresponding charging hole and the corresponding communicating hole; the aperture of the charging hole is greater than that of the communicating hole. By the adoption of the cleaning device, due to the fact that the to-be-cleaned parts are placed in the cleaning cavities to be cleaned respectively, compared with the mode that the to-be-cleaned parts are stacked together for cleaning, the acid cleaning liquid and the deionized water can make more sufficient contact with the to-be-cleaned parts, and therefore the cleaning effect is improved. And meanwhile, the to-be-cleaned parts are independently placed, so that damage caused by mutual collision of the to-be-cleaned parts can be avoided.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor equipment cleaning, and specifically relates to a cleaning device. Background Art

[0002] Quartz is a low expansion, low volatility, high temperature resistant material, these characteristics make quartz material widely used in semiconductor material growth and heat treatment process. In most processes, quartz tubes and matching quartz tube plugs are usually used, and quartz tube plugs are usually reused, so the quartz tube plugs need to be cleaned before each use. At present, the cleaning of quartz tube plugs is usually to pile up multiple quartz tube plugs in a cleaning tank for cleaning, and the cleaning effect is poor. Utility Model Content

[0003] The technical problem to be solved by the present application is that the existing quartz tube plugs have poor cleaning effect, and a cleaning device with good cleaning effect on the quartz tube plugs is provided.

[0004] The technical solution proposed in this application is:

[0005] A cleaning device, comprising:

[0006] A first liquid storage member, comprising a first liquid storage cavity, an opening communicating with the first liquid storage cavity, and a plurality of charging holes;

[0007] A second liquid storage member is arranged at a distance from the first liquid storage member, and the second liquid storage member has a second liquid storage cavity and a liquid discharge hole and a plurality of communication holes communicated with the second liquid storage cavity;

[0008] A plurality of cleaning members, each of which has two ends connected to the first liquid storage member and the second liquid storage member, and each of which has a cleaning cavity, and each of which is connected to the corresponding charging hole and the communicating hole;

[0009] Wherein, the diameter of the charging hole is larger than the diameter of the connecting hole.

[0010] Furthermore, the cleaning device comprises a control valve, and the control valve is communicated with the drainage hole.

[0011] Furthermore, the cleaning device further comprises a containing box, and the first liquid storage component and the second liquid storage component are both arranged in the containing box.

[0012] Furthermore, the containing box has a containing cavity and a box port connected to the containing cavity, the first liquid storage component and the second liquid storage component are both arranged in the containing cavity, the opening is connected to the containing cavity and corresponds to the box port, so that the part to be cleaned enters the cleaning cavity through the opening, the first liquid storage cavity and the loading hole in sequence.

[0013] Furthermore, the cleaning device also includes a sealing cover, which is detachably connected to the containing box to open and close the box opening.

[0014] Furthermore, a handle is provided on a side of the sealing cover facing away from the containing box.

[0015] Furthermore, the sealing cover is also provided with a vent hole, and the vent hole can be connected to the exhaust mechanism;

[0016] When the sealing cover is connected to the containing box, the vent hole is communicated with the containing cavity.

[0017] Furthermore, a gripping portion is provided on a side of the accommodating box.

[0018] Furthermore, the gripping portion is a groove.

[0019] Furthermore, the cleaning component is arranged obliquely relative to the arrangement direction of the first liquid storage component and the second liquid storage component.

[0020] Using the above-mentioned cleaning device, multiple parts to be cleaned are respectively loaded into the corresponding cleaning chambers through multiple loading holes, and the drainage holes are closed at the same time. Then, an acidic cleaning liquid is added to the first liquid storage chamber until the acidic cleaning liquid immerses the parts to be cleaned in the cleaning chamber. After soaking for a period of time, the drainage holes are opened and the acidic cleaning liquid is discharged through the drainage holes. Next, deionized water is added to the first liquid storage chamber, and the deionized water can perform a second cleaning on the parts to be cleaned in the cleaning chamber to wash away the acidic cleaning liquid remaining on the surface of the parts to be cleaned. Since multiple parts to be cleaned are placed in multiple cleaning chambers for cleaning, the acidic cleaning liquid and deionized water can more fully contact the parts to be cleaned compared to cleaning them together, thereby improving the cleaning effect. At the same time, the parts to be cleaned are placed separately to avoid damage caused by collision between multiple parts to be cleaned. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings are used to provide further understanding of the present application and constitute a part of the specification. They are used to explain the present application together with the embodiments of the present application and do not constitute a limitation of the present application.

[0022] Figure 1 A schematic diagram of the structure of a cleaning device provided in one embodiment of the present application;

[0023] Figure 2 for Figure 1 The internal structure diagram of the cleaning device shown;

[0024] Figure 3 for Figure 1 The schematic diagram of the structure of the cleaning device shown is after removing the sealing cover.

[0025] Description of labels:

[0026] 100, cleaning device; 110, first liquid storage member; 120, second liquid storage member; 130, cleaning member; 111, first liquid storage chamber; 112, loading hole; 121, second liquid storage chamber; 122, drain hole; 123, connecting hole; 131, cleaning chamber; 140, accommodating box; 141, accommodating chamber; 142, box opening; 143, grabbing part; 150, sealing cover; 151, handle; 152, vent hole; 160, control valve. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0028] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0029] In order to facilitate understanding of the technical solution of the present application, the cleaning of the existing quartz tube plugs is described here: the existing quartz tube plugs are usually piled up in an acid tank for pickling. Since multiple quartz tube plugs are piled up together, the acid cleaning liquid cannot fully contact each quartz tube plug, resulting in poor cleaning effect. In addition, multiple quartz tube plugs piled up together are also prone to collision with each other, resulting in damage to the quartz tube plugs.

[0030] like Figures 1 to 3 As shown, a cleaning device 100 provided in one embodiment of the present application includes a first liquid storage component 110 , a second liquid storage component 120 and a plurality of cleaning components 130 .

[0031] The first liquid storage member 110 and the second liquid storage member 120 are arranged at intervals, and the first liquid storage member 110 has a first liquid storage cavity 111, an opening communicating with the first liquid storage cavity 111, and a plurality of charging holes 112, and the second liquid storage member 120 has a second liquid storage cavity 121, a liquid discharge hole 122 communicating with the second liquid storage cavity 121, and a plurality of connecting holes 123. The diameter of the charging hole 112 is larger than the diameter of the connecting hole 123.

[0032] Both ends of each cleaning member 130 are connected to the first liquid storage member 110 and the second liquid storage member 120 respectively, and each cleaning member 130 has a cleaning cavity 131 , and each cleaning cavity 131 is connected to the corresponding loading hole 112 and the communication hole 123 .

[0033] In this embodiment, the cleaning device is used to clean the quartz tube plug, the diameter of the loading hole 112 is larger than the size of the quartz tube plug, and the diameter of the connecting hole 123 is smaller than the size of the quartz tube plug, so that the quartz tube plug can be loaded into the cleaning chamber 131 through the loading hole 112, while preventing the quartz tube plug from entering the second liquid storage chamber 121. In other embodiments, the quartz tube plug can also be other parts to be cleaned.

[0034] By using the above-mentioned cleaning device, multiple quartz tube plugs are respectively loaded into the corresponding cleaning chamber 131 through multiple loading holes 112, and the drainage hole 122 is closed at the same time, and then an acidic cleaning liquid is added to the first liquid storage chamber 111 until the acidic cleaning liquid immerses the quartz tube plugs in the cleaning chamber 131. After soaking for a period of time, the drainage hole 122 is opened, and the acidic cleaning liquid is discharged through the drainage hole 122. Next, deionized water is added to the first liquid storage chamber 111, and the deionized water can perform a second cleaning of the quartz tube plug in the cleaning chamber 131 to wash away the acidic cleaning liquid remaining on the surface of the quartz tube plug. Since multiple quartz tube plugs are placed in multiple cleaning chambers 131 for cleaning, the acidic cleaning liquid and deionized water can contact the quartz tube plug more fully than when they are stacked together for cleaning, thereby improving the cleaning effect. At the same time, the quartz tube plugs are placed separately to avoid multiple quartz tube plugs from colliding with each other and causing damage.

[0035] It should be noted that in other embodiments, the cleaning device can also clean other products. The diameter of the corresponding loading hole 112 is larger than the size of the product, and the diameter of the connecting hole 123 is smaller than the size of the product to ensure that the product can enter and be placed in the cleaning chamber 131.

[0036] In one embodiment, the cleaning device further includes a containing box 140 , and the first liquid storage member 110 and the second liquid storage member 120 are both disposed in the containing box 140 .

[0037] Furthermore, the containing box 140 has a containing chamber 141 and a box opening 142 communicating with the containing chamber 141, the first liquid storage member 110 and the second liquid storage member 120 are both disposed in the containing chamber 141, the opening of the first liquid storage member 110 communicates with the containing chamber 141 and corresponds to the box opening 142, so that the parts to be cleaned sequentially pass through the opening, the first liquid storage chamber 111 and the loading hole 112 to enter the cleaning chamber 131. In this way, the staff can put the quartz tube plug into the cleaning chamber 131 through the box opening 142 and the opening and add the acid cleaning solution and deionized water into the cleaning chamber 131.

[0038] Specific to Figure 2 In the illustrated embodiment, the first liquid storage member 110 and the second liquid storage member 120 are respectively disposed at the bottom and the top of the accommodating chamber 141, and the cleaning member 130 is disposed between the first liquid storage member 110 and the second liquid storage member 120. Meanwhile, the opening of the first liquid storage member 110 is located at the top thereof and is flush with the height of the box opening 142, the multiple charging holes 112 of the first liquid storage member 110 are located at the bottom thereof, the multiple communication holes 123 of the second liquid storage member 120 are located at the top thereof, and the drainage holes 122 of the second liquid storage member 120 are located at the side thereof.

[0039] In other embodiments, the first liquid storage component 110 and the second liquid storage component 120 may also be integrally arranged with the accommodating box 140, that is, a partition plate and other structures are arranged in the accommodating cavity 141 to form the above-mentioned first liquid storage cavity 111 and the second liquid storage cavity 121, and the accommodating box 140 is provided with the above-mentioned drainage hole 122, the box port 142 coincides with the opening, and the partition plate is provided with corresponding loading holes 112 and connecting holes 123.

[0040] In one embodiment, a gripping portion 143 is provided on the side of the container 140 for the staff to grip the container 140. Further, the two opposite sides of the container 140 are both provided with a gripping portion 143. Specifically, the gripping portion 143 is a groove. Of course, in other embodiments, the gripping portion 143 may also be a protrusion, which is not limited here.

[0041] In one embodiment, the cleaning device further comprises a sealing cover 150, which is detachably connected to the containing box 140 to open and close the box opening 142, thereby closing the box opening 142 during the process of soaking the quartz tube plug in the acid cleaning solution, thereby improving the safety of cleaning.

[0042] Furthermore, a handle 151 is provided on the side of the sealing cover 150 facing away from the containing box 140 to facilitate the staff to grasp it.

[0043] In one embodiment, the sealing cover 150 is also provided with a vent hole 152, which can be connected to the exhaust mechanism. When the sealing cover 150 is connected to the receiving box 140, the vent hole 152 is connected to the receiving chamber 141. In this way, during the acid cleaning process of the quartz tube plug, the acid vapor in the receiving chamber 141 can be discharged to the position where the acid vapor is treated through the vent hole 152, thereby improving the safety of cleaning. Figure 1 In the illustrated embodiment, there are a plurality of vent holes 152 .

[0044] In one embodiment, the cleaning member 130 is tilted relative to the arrangement direction of the first liquid storage member 110 and the second liquid storage member 120, that is, tilted relative to the vertical direction, so as to place longer quartz tube plugs at the same height, or to lower the height of the cleaning device when placing quartz tube plugs of the same size, thereby saving space in the height direction. In addition, the tilted setting also facilitates the quartz tube plug to be slowly placed into the cleaning chamber 131 to avoid damage to the quartz tube plug.

[0045] In one embodiment, the cleaning device further includes a control valve 160, which is connected to the drain hole 122 and is used to open or close the drain hole 122, so that the drain hole 122 is closed during pickling, so as to achieve immersion cleaning of the quartz tube plug in the cleaning chamber 131. Figure 1 In the embodiment shown, the control valve 160 is connected to the container 140, extends into the container chamber 141 and communicates with the drainage hole 122. When the drainage hole 122 is located on the container 140, the control valve 160 can also be directly connected to the drainage hole 122 of the container 140.

[0046] exist Figure 2 In the embodiment shown, the container 140 is a rectangular box, and the cleaning member 130 is an inclined cylindrical structure. In addition, the container 140, the sealing cover 150, the first liquid storage member 110, the cleaning member 130, the second liquid storage member 120 and the control valve 160 are made of polytetrafluoroethylene or other acid- and alkali-resistant materials.

[0047] In order to facilitate understanding of the technical solution of this application, Figures 1 to 3 The cleaning process of the cleaning device in the above embodiment is described as follows:

[0048] First, remove the sealing cover 150 from the receiving box 140, then place multiple quartz tube plugs in the cleaning chambers 131 of multiple cleaning parts 130, and then close the control valve 160. Add acidic cleaning liquid into the first liquid storage chamber 111 until the acidic cleaning liquid is immersed in the first liquid storage chamber 111. At this time, the second liquid storage chamber 121 and the cleaning chamber 131 at the bottom are filled with acidic cleaning liquid, so as to ensure that the acidic cleaning liquid immerses the quartz tube plugs in the cleaning chamber 131. Use the sealing cover 150 to close the box port 142, and then discharge the acidic vapor in the receiving chamber 141 through the exhaust mechanism. After the pickling is completed, open the control valve 160 to discharge the acidic cleaning liquid. At the same time, it is necessary to stop the operation of the exhaust mechanism to avoid the formation of negative pressure in the receiving chamber 141 to hinder the discharge of the acidic cleaning liquid. Next, remove the sealing cover 150 and add deionized water into the first liquid storage chamber 111. The deionized water passes through the cleaning chamber 131 and the second liquid storage chamber 121 in turn, and then is discharged through the drain hole 122 and the control valve 160. After the deionized water cleans the acidic cleaning liquid, take out the quartz tube plug in the cleaning chamber 131.

[0049] Although the embodiments of the present application have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A cleaning device, characterized in that: include: A first liquid storage member, comprising a first liquid storage cavity, an opening communicating with the first liquid storage cavity, and a plurality of charging holes; A second liquid storage member is arranged at a distance from the first liquid storage member, and the second liquid storage member has a second liquid storage cavity and a liquid discharge hole and a plurality of communication holes communicated with the second liquid storage cavity; A plurality of cleaning members, each of which has two ends connected to the first liquid storage member and the second liquid storage member, and each of which has a cleaning cavity, and each of which is connected to the corresponding charging hole and the communicating hole; Wherein, the diameter of the charging hole is larger than the diameter of the connecting hole.

2. The cleaning device according to claim 1, characterized in that: The cleaning device comprises a control valve, and the control valve is communicated with the drainage hole.

3. The cleaning device according to claim 1, characterized in that: The cleaning device further comprises a containing box, and the first liquid storage component and the second liquid storage component are both arranged in the containing box.

4. The cleaning device according to claim 3, characterized in that: The containing box has a containing cavity and a box opening connected with the containing cavity. The first liquid storage member and the second liquid storage member are both arranged in the containing cavity. The opening is connected with the containing cavity and corresponds to the box opening, so that the parts to be cleaned can enter the cleaning cavity through the opening, the first liquid storage cavity and the loading hole in sequence.

5. The cleaning device according to claim 4, characterized in that: The cleaning device further comprises a sealing cover which is detachably connected to the containing box to open and close the box opening.

6. The cleaning device according to claim 5, characterized in that: A handle is provided on a side of the sealing cover facing away from the containing box.

7. The cleaning device according to claim 5, characterized in that: The sealing cover is also provided with a vent hole, which can be connected to the exhaust mechanism; When the sealing cover is connected to the containing box, the vent hole is communicated with the containing cavity.

8. The cleaning device according to claim 3, characterized in that: A grabbing portion is provided on the side of the accommodating box.

9. The cleaning device according to claim 8, characterized in that: The gripping portion is a groove.

10. The cleaning device according to claim 1, characterized in that: The cleaning component is arranged obliquely relative to the arrangement direction of the first liquid storage component and the second liquid storage component.

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