Round AVG uniform glue developing jig

By designing a circular AVG leveling and developing fixture that includes an AVG and a leveling suction cup, and using the methods of vacuum adsorption and rotation to spin glue, the existing technology problems of residual glue contamination and developer entry during AVG leveling development are solved. problem, achieving the close cooperation between AVG and the glue-spreading suction cup and the pollution-free rotating glue rejection and solvent evaporation effects.

CN222379995UActive Publication Date: 2025-01-21杭州邦齐州科技有限公司
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Patent Information

Application Number
CN202421266530.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-06-04
Publication Date
2025-01-21
Estimated Expiration
2034-06-04

AI Technical Summary

Technical Problem

In the prior art, when developing uniformly on circular anti-halo glass (AVG), the residual glue of the edge product is prone to contaminate the suction cup, and the developer and water are prone to enter the contaminated/developed suction cup from the opening.

Method used

A circular AVG leveling and developing fixture is designed, including an AVG and a leveling suction cup. The bottom disk of the AVG is vacuum-adsorbed on the top of the leveling suction cup. The leveling suction cup is connected to and rotates the cylindrical connection part. The vacuum suction hole and the vacuum equipment Connected to provide a vacuum environment, the AVG is vacuum-adsorbed, positioned and rotated by the adhesive suction cup, and the centrifugal force shakes off or evaporates excess glue and solvent.

Benefits of technology

AVG can work closely with the glue leveling suction cup. During the process of rotating glue and solvent evaporation, the glue and solvent will not be contaminated on the top suction cup to avoid contamination.

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Abstract

The utility model discloses a circular AVG uniform glue developing jig which comprises an AVG and a uniform glue sucking disc, the AVG comprises a bottom disc and a circular working piece arranged on the surface of the bottom disc; the glue uniformizing suction cup comprises a top suction cup body and a cylindrical connecting part arranged at the bottom of the top suction cup body, vacuum suction holes and a plurality of downwards-sunken grooves are formed in the surface of the top suction cup body, the vacuum suction holes are communicated with the grooves, and the vacuum suction holes are communicated with a vacuum equipment pipeline; the bottom of the bottom disc is connected with the top suction cup in a vacuum adsorption mode. According to the utility model, the AVG can be tightly matched with the glue uniformizing sucking disc, and a glue solution solvent cannot be contaminated on the top sucking disc to cause pollution in the rotary glue spinning and solvent volatilization processes.
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Description

Technical Field

[0001] The utility model relates to the technical field of optical glass processing equipment, in particular to a circular AVG glue leveling and developing fixture. Background Art

[0002] Micro-nano gratings are currently made by working on periodic micro-nano structures on optical glass, and then homogeneously bonding them with anti-halation glass (AVG) to combine them into a whole. The current glue coating and development jig directly on the circular anti-halation glass (AVG) is suitable for 4 and 6-inch wafer jigs, which have the following disadvantages: the residual glue on the edge of the product during glue coating can easily contaminate the suction cup, and the developer and water can easily enter from the opening during development to contaminate the glue coating / development suction cup. Utility Model Content

[0003] The utility model aims to provide a circular AVG glue spreading and developing fixture which can closely match the AVG and glue spreading sucker and is easy to use.

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] A circular AVG coating and developing jig, comprising an AVG and a coating sucker;

[0006] The AVG comprises a bottom disc and a circular working sheet arranged on the surface of the bottom disc;

[0007] The glue-distributing suction cup comprises a top suction cup and a cylindrical connecting portion arranged at the bottom of the top suction cup. The surface of the top suction cup is provided with a vacuum suction hole and a plurality of grooves sunken downwards. The vacuum suction hole is connected with the groove, and the vacuum suction hole is connected with a vacuum equipment pipeline.

[0008] The bottom of the bottom disc is connected to the top suction cup by vacuum adsorption.

[0009] AVG is the abbreviation of anti-halo glass. This scheme directly operates periodic micro-nano structures on AVG, which can save three major steps, namely rolling edge, bonding, and cutting, and saves consumables (grinding head, bonding fixture, photoresist, etc.) at 3 sites. The bottom disk of AVG is vacuum adsorbed on the top of the glue-spreading suction cup, and the glue-spreading suction cup is connected to the cylindrical connecting part and rotates with the cylindrical connecting part. During vacuum adsorption, a vacuum suction hole is set to connect with the vacuum equipment to provide a vacuum environment. AVG is vacuum adsorbed and positioned by the glue-spreading suction cup and rotates under the drive of the glue-spreading suction cup, so that the excess glue, solvent, etc. on AVG can be thrown off or accelerated to evaporate under the action of centrifugal force.

[0010] As a preferred solution of the utility model, the vacuum suction hole is set at the center of the top suction cup, and the groove includes two circular grooves with the same center as the vacuum suction hole, and two linear grooves connected to the circular groove and passing through the vacuum suction hole. The circular groove of this solution is connected to the vacuum suction hole through two linear grooves that cross in a cross shape. Compared with grooves of other shapes, the groove shape of this solution can evenly distribute the vacuum suction force, so that the top suction cup and the bottom disc of the AVG can be tightly adsorbed and fixed in all directions.

[0011] As a preferred solution of the utility model, the diameter of the bottom disc is larger than the outer diameter of the top suction cup, and when the bottom of the bottom disc is connected to the top suction cup by vacuum adsorption, a hollow gap is provided between the edge of the bottom disc and the top suction cup. The effective area of ​​the actual contact between the AVG bottom disc and the top suction cup of this solution is smaller than the area of ​​the AVG bottom disc, so that the hollow gap between the edge of the AVG bottom disc and the top suction cup is not in contact, thereby avoiding contamination of the top suction cup when the glue flows down from the edge of the AVG bottom disc during the rotating glue spinning process.

[0012] As a preferred solution of the utility model, the cylindrical connecting part is connected to a rotating device. The AVG of this solution is adsorbed on the top suction cup to throw out excess glue and accelerate the volatilization of solvent through rapid rotation, and the rotating device is an existing device.

[0013] As a preferred solution of the utility model, a glue dripping port is provided above the glue-spreading suction cup. In this solution, after the AVG is adsorbed on the top suction cup, the glue liquid can be dripped onto the AVG through the glue dripping port, which can prevent the glue liquid from being lost during the transfer process.

[0014] Compared with the prior art, the utility model has the beneficial effects that the AVG and the glue-spreading suction cup can be closely matched, and the glue solvent will not be contaminated on the top suction cup to cause pollution during the process of rotating glue and solvent volatilization. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the utility model.

[0016] Figure 2 The utility model is a structural schematic diagram of the glue-distributing suction cup.

[0017] Figure 3 It is a structural schematic diagram of the AVG of the utility model.

[0018] Figure 4 It is a schematic diagram of the rotary glue throwing and solvent volatilization of the utility model.

[0019] In the figure: 1. AVG 2. Glue-distributing suction cup 3. Top suction cup 4. Cylindrical connection part

[0020] 5. Vacuum suction hole 6. Groove 7. Bottom disc 8. Glue dripping port. DETAILED DESCRIPTION

[0021] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings, and several embodiments of the present invention are given. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0022] It should be noted that when an element is referred to as being "fixed on" another element, it may be directly on the other element or there may also be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this article are for illustrative purposes only.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used in this article includes any and all combinations of one or more related listed items.

[0024] See also Figure 1-Figure 4 , the utility model provides a technical solution:

[0025] A circular AVG glue spreading and developing jig comprises an AVG1 and a glue spreading suction cup 2; the AVG1 comprises a bottom disc 7 and a circular working sheet arranged on the surface of the bottom disc; the glue spreading suction cup 2 comprises a top suction cup 3 and a cylindrical connecting portion 4 arranged at the bottom of the top suction cup 3; the surface of the top suction cup 3 is provided with a vacuum suction hole 5 and a plurality of downwardly concave grooves 6; the vacuum suction hole 5 is connected with the groove 6, and the vacuum suction hole 5 is connected with a vacuum equipment pipeline; the bottom of the bottom disc 7 is connected to the top suction cup 3 by vacuum adsorption.

[0026] The vacuum suction hole 5 is arranged at the center of the top suction cup 3 , and the groove 6 includes two circular grooves cocentric with the vacuum suction hole 5 and two linear grooves communicating with the circular groove and passing through the vacuum suction hole 5 .

[0027] The diameter of the bottom disk 7 is larger than the outer diameter of the top suction cup 3 . When the bottom of the bottom disk 7 is connected to the top suction cup 3 by vacuum adsorption, a hollow gap is provided between the edge of the bottom disk 7 and the top suction cup 3 .

[0028] The cylindrical connecting part 4 is connected to the rotating device.

[0029] A glue dripping port 8 is provided above the glue dispensing suction cup 2 .

[0030] The working process of the utility model is as follows: the bottom disk 7 of AVG1 is vacuum-adsorbed on the top of the glue-spreading suction cup 2, the top suction cup 3 is connected to the cylindrical connecting part 4 and rotates with the cylindrical connecting part 4, AVG1 is vacuum-adsorbed and positioned by the glue-spreading suction cup 2 and rotates driven by the glue-spreading suction cup 2, so that the excess glue, solvent, etc. on AVG1 can be thrown off or evaporated faster under the action of centrifugal force, and the excess glue and solvent will not be contaminated on the top suction cup 3 during the rotation process.

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A circular AVG coating and developing jig, characterized in that: Including AVG, glue dispensing suction cup; The AVG comprises a bottom disc and a circular working sheet arranged on the surface of the bottom disc; The glue-distributing suction cup comprises a top suction cup and a cylindrical connecting portion arranged at the bottom of the top suction cup. The surface of the top suction cup is provided with a vacuum suction hole and a plurality of grooves sunken downwards. The vacuum suction hole is connected with the groove, and the vacuum suction hole is connected with a vacuum equipment pipeline. The bottom of the bottom disc is connected to the top suction cup by vacuum adsorption.

2. A circular AVG coating and developing jig according to claim 1, characterized in that: The vacuum suction hole is arranged at the center of the top suction cup, and the groove comprises two circular grooves cocentric with the vacuum suction hole and two linear grooves connected with the circular groove and passing through the vacuum suction hole.

3. The circular AVG coating and developing jig according to claim 1, characterized in that: The diameter of the bottom disc is larger than the outer diameter of the top suction cup. When the bottom of the bottom disc is connected to the top suction cup by vacuum adsorption, a hollow gap is provided between the edge of the bottom disc and the top suction cup.

4. The circular AVG coating and developing jig according to claim 1, characterized in that: The cylindrical connecting part is connected to the rotating device.

5. The circular AVG coating and developing jig according to claim 1, characterized in that: A glue dripping port is arranged above the glue-distributing sucker.