Photomask plate transportation box capable of achieving unidirectional ventilation

By designing a one-way ventilation air valve unit in the mask plate transport box, the problem of gas pollution caused by the existing two-way ventilation holes is solved, and the high cleanliness in the box is maintained and the mask plate is safely transported.

CN222388658UActive Publication Date: 2025-01-24ZHEJIANG SAIJIN SEMICON TECH CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202421066926.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-15
Publication Date
2025-01-24
Estimated Expiration
2034-05-15

AI Technical Summary

Technical Problem

The vents of the existing photocoat plate transport box are bidirectional, which can easily cause gas pollution and affect the maintenance of high cleanliness in the box.

Method used

Design a one-way ventilation mask plate transport box, which contains an air valve unit fixedly installed at the bottom of the box, including an air inlet valve and an air outlet valve. The air inlet valve only opens when inflating, and remains sealed the rest of the time; the air outlet valve only opens to exhaust when the air pressure in the box is higher than the external air pressure, and automatically seals when it is balanced.

Benefits of technology

The one-way ventilation design avoids gas pollution, maintains high cleanliness in the transport box, and ensures the safety of the photomask during transportation.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN222388658U_ABST
    Figure CN222388658U_ABST
Patent Text Reader

Abstract

A photomask plate transportation box capable of achieving one-way ventilation comprises a box body and an air valve unit. The air valve unit comprises an air inlet valve and an air outlet valve. Each air inlet valve comprises an air inlet valve mounting hole, a first air ring connecting nut, an air inlet valve element assembly, an air inlet filter screen and an air inlet valve cover. Each air outlet valve comprises an air outlet valve mounting hole, a second air ring connecting nut, an air outlet valve element assembly, an air outlet filter screen and an air outlet valve cover. And the air inlet valve element and the air outlet valve element are arranged in opposite directions, so that the air flow directions of the air inlet valve and the air outlet valve are opposite. And the air inlet valve only pushes the air inlet valve element to move backwards for air inlet through an external air source from the outside during air inflation, and the air inlet valve element is automatically kept in a sealed state at other moments. The air outlet valve is opened to exhaust air only when the air pressure inside the box body is higher than the air pressure outside the box body, and can automatically keep a sealing state when the air pressure inside and outside the box body is balanced.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model relates to the manufacturing field of a mask plate transport box, in particular to a mask plate transport box with unidirectional ventilation. Background Art

[0002] The mask plate transport box is used to transport and store the mask plate during the processing of the mask plate, to provide safety protection for the mask plate, and to isolate the pollutants in the air from polluting the mask plate, so as to maintain the high cleanliness of the mask plate during the processing of the mask plate. In order to further meet the cleanliness requirements of the mask plate, in addition to ensuring the sealing of the mask plate transport box when it is closed, it is also necessary to fill the box with a highly clean inert gas (generally nitrogen). The air vents provided in the existing mask plate transport box are usually bidirectional, that is, the air intake and outlet are completed by the same air hole. Therefore, gas pollution is easily caused during the ventilation process, which is not conducive to maintaining the high cleanliness inside the mask plate transport box. Summary of the invention

[0003] In view of this, the utility model provides a mask plate transport box capable of unidirectional ventilation.

[0004] A light mask plate transport box with one-way ventilation includes a box body and an air valve unit fixedly arranged at the bottom of the box body. The air valve unit includes at least one air inlet valve arranged at the bottom of the box body, and at least one air outlet valve arranged at the bottom of the box body. Each of the air inlet valves includes an air inlet valve mounting hole, a first air ring connecting nut fixedly engaged with the air inlet valve mounting hole, an air inlet valve core assembly accommodated in the first air ring connecting nut, an air inlet filter arranged at one end of the air inlet valve core assembly, and an air inlet valve cover arranged at one end of the air inlet filter. Each of the air outlet valves includes an air outlet valve mounting hole, a second air ring connecting nut fixedly engaged with the air outlet valve mounting hole, an air outlet valve core assembly accommodated in the second air ring connecting nut, an air outlet filter arranged at one end of the air outlet valve core assembly, and an air outlet valve cover fixedly arranged on one side of the air outlet filter. The air inlet valve core and the air outlet valve core are arranged in opposite directions to each other, so that the air flow directions of the air inlet valve and the air outlet valve are opposite.

[0005] Furthermore, the first air ring connecting nut includes a nut body, a limit ring fixedly arranged on the outer wall of the nut body, a plurality of positioning clips fixedly arranged on one side of the limit ring, and a nut through hole arranged on the inner side of the nut body, and the diameter of the limit ring is larger than the diameter of the intake valve mounting hole.

[0006] Furthermore, the intake valve core assembly includes a first gas ring arranged at one end of the nut through hole, a first gas rod bracket accommodated in the nut through hole, a first spring accommodated in the first gas rod bracket, and a first gas rod inserted in the first spring.

[0007] Furthermore, the structure of the exhaust valve core assembly is the same as that of the exhaust valve core assembly, and the exhaust valve core assembly includes a second air ring accommodated in the second air ring connecting nut, a second air rod bracket accommodated in the second air ring connecting nut, a second spring accommodated in the second air rod bracket, and a second air rod inserted in the second spring.

[0008] Furthermore, the intake valve mounting hole includes a mounting hole body, a plurality of positioning slots fixedly arranged at equal intervals on the inner side wall of the mounting hole body, and each of the positioning slots is arranged in a Z shape.

[0009] Further, the first spring is accommodated in the first gas rod bracket, and one end of the first spring is abutted against the first gas rod bracket, and the other end of the first spring is abutted against the first gas rod; the second spring is accommodated in the second gas rod bracket, and one end of the second spring is abutted against the second gas rod bracket, and the other end of the second spring is abutted against the second gas rod.

[0010] Furthermore, the first gas rod is arranged between the first gas ring and the first gas rod bracket, and is slidably clamped in the first gas rod bracket, and one end of the first gas rod is inserted in the first spring. When the intake valve is closed, the end of the first gas rod facing away from the first gas rod bracket abuts against the first gas ring.

[0011] Furthermore, the second gas rod is arranged between the second gas ring and the second gas rod bracket, and is slidably clamped in the second gas rod bracket, and one end of the second gas rod is inserted in the second spring. When the air outlet valve is closed, the end of the second gas rod facing away from the second gas rod bracket abuts against the second gas ring.

[0012] Compared with the prior art, the utility model provides a unidirectional ventilation light mask plate transport box including a box body and a valve unit fixedly arranged at the bottom of the box body. The valve unit includes at least one air inlet valve arranged at the bottom of the box body and at least one air outlet valve arranged at the bottom of the box body. Each of the air inlet valves includes an air inlet valve mounting hole, a first air ring connecting nut fixedly engaged with the air inlet valve mounting hole, an air inlet valve core assembly accommodated in the first air ring connecting nut, an air inlet filter arranged at one end of the air inlet filter, and an air inlet valve cover arranged at one end of the air inlet filter. Each of the air outlet valves includes an air outlet valve mounting hole, a second air ring connecting nut fixedly engaged with the air outlet valve mounting hole, an air outlet valve core assembly accommodated in the second air ring connecting nut, an air outlet filter arranged at one end of the air outlet valve core assembly, and an air outlet valve cover fixedly arranged on one side of the air outlet filter. The inlet valve core and the outlet valve core are arranged in opposite directions to each other, so that the airflow directions of the inlet valve and the outlet valve are opposite. The inlet valve is pushed backward by an external air source to inhale air only when the inlet valve is inflated, and it automatically maintains a sealed state at other times. The outlet valve is opened to exhaust only when the air pressure inside the box body is higher than the external air pressure, and it can automatically maintain a sealed state when the air pressure inside and outside the box body is balanced. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 The utility model is a schematic structural diagram of a mask plate transport box with one-way ventilation.

[0014] Figure 2 for Figure 1 Schematic diagram of the structure of the air intake valve of the mask plate transport box with one-way ventilation.

[0015] Figure 3 for Figure 1 Schematic diagram of the exploded structure of the air inlet valve of the photomask transport box with one-way ventilation.

[0016] Figure 4 for Figure 1 Schematic diagram of the structure of the air outlet valve of the mask plate transport box with one-way ventilation.

[0017] Figure 5 for Figure 1 Schematic diagram of the structure of the air inlet valve mounting hole of the mask plate transport box with one-way ventilation. DETAILED DESCRIPTION

[0018] The following is a further detailed description of the specific embodiments of the present invention. It should be understood that the description of the present invention herein is not intended to limit the protection scope of the present invention.

[0019] like Figures 1 to 5 As shown, it is a schematic diagram of the structure of a mask plate transport box with one-way ventilation provided by the utility model. The mask plate transport box with one-way ventilation includes a box body 1 and a gas valve unit 10 fixedly arranged on the box body 1. It is conceivable that the mask plate transport box with one-way ventilation should also include some other functional components, such as installation components, connection components, fixing components, etc., which are all prior arts known to those skilled in the art and will not be elaborated here.

[0020] The box body 1 includes a bottom plate 2. The box body 1 is used to transport and store the mask plate during the processing of the mask plate, to provide safety protection for the mask plate, and to isolate pollutants in the air from contaminating the mask plate, thereby maintaining a high cleanliness level of the mask plate during the process. The box body 1 itself is a prior art and will not be described in detail here.

[0021] The air valve unit 10 includes at least one air inlet valve 11 disposed on the bottom plate 2, and at least one air outlet valve 12 disposed on the bottom plate 2. When the mask plate transport box is in a closed state, the air inlet valve 11 is used to transport highly clean inert gas into the mask plate transport box to maintain the cleanliness of the air in the box. The air outlet valve 12 is used to exhaust air to the outside when the air pressure in the box is higher than the rated pressure, thereby maintaining the balance between the internal air pressure and the external air pressure to avoid damage to the mask plate in the box due to air pressure imbalance.

[0022] Each of the intake valves 11 includes an intake valve mounting hole 111 arranged on the base plate 2, a first air ring connecting nut 112 fixedly connected to the intake valve mounting hole 111, an intake valve core assembly 113 accommodated in the first air ring connecting nut 112, an intake filter 114 arranged at one end of the intake valve core assembly 113, and an intake valve cover 115 arranged at one end of the intake filter 114.

[0023] The air intake valve mounting hole 111 includes a mounting hole body 1111 and a plurality of positioning slots 1112 fixedly arranged on the inner side wall of the mounting hole body 1111. The mounting hole body 1111 is a through hole opened in the bottom plate 2. A plurality of positioning slots 1112 are arranged at equal intervals inside the mounting hole body 1111, and each positioning slot 1112 is arranged in a Z-shape, so that the positioning slots 1112 can form the same positioning slot 1112 structure on both sides along the radial direction of the mounting hole body 1111, so that the mounting hole 111 can achieve the same effect when installed from different directions. The positioning slots 1112 are used to match the corresponding structure of the first gas ring connecting nut 112, so that the first gas ring connecting nut 112 is fixedly connected to the bottom of the box body 1.

[0024] The first air ring connecting nut 112 includes a nut body 1121, a limiting ring 1122 fixedly arranged on the outer wall of the nut body 1121, a plurality of positioning clamps 1123 fixedly arranged on one side of the limiting ring 1122, and a nut through hole 1124 arranged on the inner side of the nut body 1121. The diameter of the limiting ring 1122 is larger than the diameter of the intake valve mounting hole 111, so as to limit the position of the first air ring connecting nut 112 installed on the intake valve mounting hole 111. A plurality of positioning clamps 1123 are arranged at equal intervals on the outer wall of the nut body 1121. The positioning clamps 1123 are arranged corresponding to the positioning slots 1112, and the width of the positioning clamps 1123 is equal to the interval between the two positioning slots 1112. When the first gas ring connecting nut 112 is connected to the first intake valve mounting hole 111, each of the positioning clamps 1123 is aligned with the interval between any two adjacent positioning hole grooves 1112, so that one end of the nut body 1121 is inserted into the mounting hole body 1111, and the nut body 1121 is rotated so that the plurality of positioning clamps 1123 are respectively clamped in the positioning clamping grooves 1112, thereby fixing the first gas ring connecting nut 112 to the bottom of the box body 1. The nut through hole 1124 is used to accommodate the intake valve core assembly 113. Preferably, a sealing ring is provided between the first gas ring connecting nut 112 and the intake valve mounting hole 111, so that a sealing structure is formed between the first gas ring connecting nut 112 and the intake valve mounting hole 111.

[0025] The intake valve core assembly 113 includes a first air ring 1131 arranged at one end of the nut through hole 1124, a first gas rod bracket 1132 accommodated in the nut through hole 1124, a first spring 1133 accommodated in the first gas rod bracket 1132, and a first gas rod 1134 inserted in the first spring 1133.

[0026] The first gas ring 1131 is accommodated in the nut through hole 1124, and the first gas ring 1131 is arranged at one end of the nut body 1121 facing away from the inside of the box body 1. A sealing structure is formed between one end of the first gas ring 1131 and the first gas ring nut 112. When the air intake valve 11 is in a closed state, the other end of the first gas ring 1131 and the first gas rod 1134 also form a sealing structure, thereby sealing the nut through hole 1124 of the first gas ring connecting nut 112. Preferably, a sealing structure such as a sealing ring is arranged between the first gas ring 1131 and the first gas ring connecting nut 112 to further ensure its sealing performance.

[0027] The first gas rod support 1132 is accommodated in the first gas ring connecting nut 112 to support the first gas rod 1134 so that the first gas rod 1134 is arranged along the axial direction of the first gas ring connecting nut 112. During the assembly process, the first gas rod support 1132 limits the position of one end of the first gas rod 1134, and the other end of the first gas rod 1134 is accommodated in the first gas ring connecting nut 112 to keep the first gas rod 1134 arranged along the axial direction of the first gas ring connecting nut 112.

[0028] The first spring 1133 is accommodated in the first gas rod bracket 1132, and one end of the first spring 1133 is abutted against the first gas rod bracket 1132, and the other end of the first spring 1133 is abutted against the first gas rod 1134, so that the first gas rod 1134 forms a self-rebounding structure. In an environment without external force, the sealing end of the first gas rod 1134 maintains a fit with the first gas ring 1131 to form a seal.

[0029] The first gas rod 1134 is disposed between the first gas ring 1131 and the first gas rod bracket 1132, and is slidably clamped in the first gas rod bracket 1132. One end of the first gas rod 1134 is inserted into the first spring 1133 to guide the first spring 1133, and the other end of the first gas rod 1134 abuts against the first gas ring 1131. Preferably, a sealing ring is disposed between the first gas rod 1134 and the first gas ring 1131 to ensure the sealing of the intake valve 11 when the intake valve 11 is in a closed state.

[0030] When it is necessary to inflate the box body 1, the external air source is connected to the first air ring connection nut 112 and the air source switch is turned on. When the air pressure generated by the external airflow is higher than the elastic force of the first spring 1133, the first air rod 1134 compresses the first spring 1133, so that the first air rod 1134 slides along the airflow direction and separates from the first air ring 1131 to generate a gap, and the gas flows into the box body 1. When the inflation is completed, the external air source is turned off, the first air rod 1134 loses thrust, and the first spring 1133 rebounds and resets, so that the air inlet valve 11 returns to the sealed state again.

[0031] The air inlet filter 114 is disposed at one end of the first gas rod support 1132 close to the interior of the box body 1. The air inlet filter 114 is used to filter the gas entering the box body 1, so as to prevent the gas from carrying impurities and thus contaminating the mask plate in the box body 1.

[0032] The intake valve cover 115 is fixedly clamped on one end of the first air ring connecting nut 112 close to the interior of the box body 1, and the intake valve fixing part 115 is used to limit the position of the intake valve core 113 so as to fix the intake valve core 113 in the nut through hole 1124, and a through hole is provided on the intake valve cover 115 so that the nut through hole 1124 and the through hole can be connected or closed by the control of the intake valve core 113. The intake valve cover 115 is a prior art and will not be described in detail here.

[0033] Each of the outlet valves 12 includes an outlet valve mounting hole 121 arranged on the base plate 2, a second air ring connecting nut 122 fixedly connected to the outlet valve mounting hole 121, an outlet valve core assembly 123 accommodated in the second air ring connecting nut 122, and an outlet filter 124 arranged at one end of the outlet valve core assembly 123, and an outlet valve cover 115 fixedly arranged on one side of the outlet filter 124.

[0034] The structure of the outlet valve mounting hole 121 is consistent with that of the inlet valve mounting hole 111, which will not be described in detail. That is, the outlet valve mounting hole 121 also includes a mounting hole body and a plurality of positioning slots arranged on the mounting hole body.

[0035] The structure of the second air ring connecting nut 122 and the connection relationship between the second air ring connecting nut 122 and the outlet valve mounting hole 121 are consistent with the structure of the first air ring connecting nut 112 and the connection relationship between the first air ring connecting nut 112 and the inlet valve mounting hole 111. That is, the second air ring connecting nut 122 includes the same nut body, a limit ring fixedly set on the outer side wall of the nut body, a plurality of positioning clips fixedly set on one side of the limit ring, and a nut through hole set on the inner side of the nut body. Similarly, a sealing ring is provided between the second air ring connecting nut 122 and the outlet valve mounting hole 121, so that a sealing structure is formed between the second air ring connecting nut 122 and the outlet valve mounting hole 121.

[0036] The structure of the outlet valve core assembly 123 is the same as that of the inlet valve core assembly 113, that is, the outlet valve core assembly 123 includes a second air ring 1231 accommodated in the second air ring connecting nut 122, a second air rod bracket 1232 accommodated in the second air ring connecting nut 122, a second spring 1233 accommodated in the second air rod bracket 1232, and a second air rod 1234 inserted in the second spring 1233. The outlet valve core 123 and the inlet valve core 113 are installed in opposite directions to each other, so that the airflow direction of the outlet valve core 123 is opposite to that of the inlet valve core 113, so as to achieve an exhaust effect.

[0037] Specifically, the second air ring 1231 is arranged on a side of the second connecting nut close to the inside of the box body 1. When the air outlet valve 11 is in a closed state, one end of the second air ring 1231 forms a sealing structure with the second air ring nut 122, and the other end of the second air ring 1231 forms a sealing structure with the second air rod 1234. Preferably, a sealing structure such as a sealing ring is provided between the second air ring 1231 and the second air ring connecting nut 122, and between the second air ring 1231 and the second air rod 1234 to further ensure the sealing performance.

[0038] The second gas rod support 1232 is accommodated in the second gas ring connection nut 122, and is used to set the second gas rod 1234. The second gas rod support 1232 and the first gas rod support 1132 are set opposite to each other, so that the second gas rod 1234 and the first gas rod 1134 move in opposite directions. That is, the moving direction of the first gas rod 1134 is the inflation direction, from the outside to the inside of the box body 1; the moving direction of the second gas rod 1234 is the exhaust direction, from the inside to the outside of the box body 1.

[0039] The second spring 1233 is accommodated in the second gas rod bracket 126 , and one end of the second spring 1233 abuts against the second gas rod bracket 1232 , and the other end of the second spring 1233 abuts against the second gas rod 1234 , so that the second gas rod 1234 forms a self-rebounding structure.

[0040] The second gas rod 1234 is arranged between the second gas ring 1231 and the second gas rod support 1232, and is slidably clamped in the second gas rod support 1232. One end of the second gas rod 1234 is inserted into the second spring 1233 to guide the second spring 1233. When the outlet valve 12 is closed, the other end of the second gas rod 1234 abuts against the second gas ring 1231 to form a sealing structure. When the internal pressure of the box body 1 exceeds the elastic force of the second spring 1233, the air pressure pushes the second gas rod 1234 to compress the second spring 1233, and the second gas rod 1234 moves from the side of the second gas rod support 1232 close to the second gas ring 1321 to the side of the second gas rod support 1232 away from the second gas ring 1321. Thereby, the second gas rod 1234 is separated from the second gas ring 1231, and the gas flows out to complete the exhaust process. When the internal air pressure of the box body 1 is balanced with the external air pressure, the second spring 1233 loses its thrust and rebounds, and the second air rod 1234 is restored to form a sealing structure with the second air ring 1231 .

[0041] The air outlet filter 124 is disposed at one end of the second air ring 1321 close to the interior of the box body 1. The air outlet filter 124 is used to prevent external impurities from entering the box body 1 during exhaust, thereby contaminating the mask plate in the box body 1.

[0042] The air outlet valve cover 125 is fixedly clamped on one end of the second air ring connecting nut 122 close to the interior of the box body 1. The air outlet valve cover 125 is used to limit the position of the air outlet valve core 123 so as to fix the air outlet valve core 123 in the second air ring connecting nut 122. A through hole is provided on the air outlet valve cover 125 so that the nut through hole of the second air ring connecting nut and the through hole can be connected or closed through the control of the air outlet valve core 123. The air outlet valve cover 125 is a prior art and will not be described herein.

[0043] Compared with the prior art, the utility model provides a unidirectional ventilation light mask plate transport box including a box body 1 and an air valve unit 10 fixedly arranged at the bottom of the box body. The air valve unit 10 includes at least one air inlet valve 11 arranged at the bottom of the box body 1, and at least one air outlet valve 12 arranged at the bottom of the box body 1. Each of the air inlet valves 11 includes an air inlet valve mounting hole 111, a first air ring connecting nut 112 fixedly engaged with the air inlet valve mounting hole 111, an air inlet valve core assembly 113 accommodated in the first air ring connecting nut 112, an air inlet filter 114 arranged at one end of the air inlet valve core assembly 113, and an air inlet valve cover 115 arranged at one end of the air inlet filter 114. Each of the outlet valves 12 includes an outlet valve mounting hole 121, a second air ring connecting nut 122 fixedly connected to the outlet valve mounting hole 121, an outlet valve core assembly 123 accommodated in the second air ring connecting nut 122, and an outlet filter 124 arranged at one end of the outlet valve core assembly 123, and an outlet valve cover 125 fixedly arranged at one side of the outlet filter 124. The inlet valve core 113 and the outlet valve core 123 are arranged in opposite directions to each other, so that the air flow directions of the inlet valve 11 and the outlet valve 12 are opposite. And the inlet valve 11 only pushes the inlet valve core 113 backward to inhale air through an external air source when inflating, and automatically maintains a sealed state at other times. The outlet valve 12 opens to exhaust only when the air pressure inside the box body is higher than the external air pressure, and can automatically maintain a sealed state when the air pressure inside and outside the box body is balanced.

[0044] The above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modification, equivalent replacement or improvement within the spirit of the present invention are included in the scope of the claims of the present invention.

Claims

1. A mask plate transport box with unidirectional ventilation, comprising a box body, characterized in that: The unidirectional ventilation light mask plate transport box also includes a valve unit fixedly arranged at the bottom of the box body, the valve unit includes at least one air inlet valve arranged at the bottom of the box body, and at least one air outlet valve arranged at the bottom of the box body, each of the air inlet valves includes an air inlet valve mounting hole, a first air ring connecting nut fixedly engaged with the air inlet valve mounting hole, an air inlet valve core assembly accommodated in the first air ring connecting nut, an air inlet filter arranged at one end of the air inlet filter, and an air inlet valve cover arranged at one end of the air inlet filter, each of the air outlet valves includes an air outlet valve mounting hole, a second air ring connecting nut fixedly engaged with the air outlet valve mounting hole, an air outlet valve core assembly accommodated in the second air ring connecting nut, an air outlet filter arranged at one end of the air outlet valve core assembly, and an air outlet valve cover fixedly arranged on one side of the air outlet filter, the air inlet valve core and the air outlet valve core are arranged in opposite directions to each other, so that the air flow directions of the air inlet valve and the air outlet valve are opposite.

2. The mask plate transport box with one-way ventilation as claimed in claim 1, characterized in that: The first air ring connecting nut includes a nut body, a limit ring fixedly arranged on the outer wall of the nut body, a plurality of positioning clips fixedly arranged on one side of the limit ring, and a nut through hole arranged on the inner side of the nut body, and the diameter of the limit ring is larger than the diameter of the intake valve mounting hole.

3. The one-way ventilation mask plate transport box according to claim 2, characterized in that: The intake valve core assembly includes a first gas ring arranged at one end of the nut through hole, a first gas rod bracket accommodated in the nut through hole, a first spring accommodated in the first gas rod bracket, and a first gas rod inserted in the first spring.

4. The mask plate transport box with one-way ventilation as claimed in claim 3, characterized in that: The structure of the exhaust valve core assembly is the same as that of the exhaust valve core assembly, and the exhaust valve core assembly includes a second air ring accommodated in the second air ring connecting nut, a second air rod bracket accommodated in the second air ring connecting nut, a second spring accommodated in the second air rod bracket, and a second air rod inserted in the second spring.

5. The one-way ventilation mask plate transport box according to claim 1, characterized in that: The intake valve mounting hole comprises a mounting hole body, a plurality of positioning slots fixedly arranged at equal intervals on the inner side wall of the mounting hole body, and each of the positioning slots is arranged in a Z shape.

6. The mask plate transport box with one-way ventilation as claimed in claim 4, characterized in that: The first spring is accommodated in the first gas rod bracket, and one end of the first spring is abutted against the first gas rod bracket, and the other end of the first spring is abutted against the first gas rod. The second spring is accommodated in the second gas rod bracket, and one end of the second spring is abutted against the second gas rod bracket, and the other end of the second spring is abutted against the second gas rod.

7. The mask plate transport box with one-way ventilation as claimed in claim 3, characterized in that: The first gas rod is arranged between the first gas ring and the first gas rod bracket, and is slidably clamped in the first gas rod bracket, and one end of the first gas rod is inserted in the first spring. When the intake valve is closed, the end of the first gas rod facing away from the first gas rod bracket abuts against the first gas ring.

8. The mask plate transport box with one-way ventilation as claimed in claim 4, characterized in that: The second gas rod is arranged between the second gas ring and the second gas rod bracket, and is slidably clamped in the second gas rod bracket, and one end of the second gas rod is inserted in the second spring. When the air outlet valve is closed, the end of the second gas rod facing away from the second gas rod bracket abuts against the second gas ring.