Self-induction inner wall grinding device

Abstract

The utility model relates to the technical field of semiconductor material polishing equipment, and particularly discloses a self-induction inner wall polishing device which comprises an installation table, a container fixing assembly, an X-axis linear module, a Z-axis linear module, a torque induction assembly and a polishing main shaft. The container fixing assembly is used for clamping and fixing a to-be-polished container in the first direction. The X-axis linear module is mounted on the mounting table in the first direction; the Z-axis linear module is installed on the X-axis linear module in the third direction, and the Z-axis linear module is controlled by the X-axis linear module so as to move in the first direction; the torque sensing assembly is mounted on the Z-axis linear module, and the torque sensing assembly is controlled by the Z-axis linear module so as to move in the third direction; the grinding spindle is mounted on the torque sensing assembly, and a grinding head is arranged at the end, facing the container fixing assembly, of the grinding spindle. The problems that in the prior art, grinding is not accurate, and efficiency is low are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor material grinding equipment, in particular to a self-inductive inner wall grinding device. Background Art

[0002] At present, most of the grinders used in the market for repairing local positions of the inner wall of containers are manual grinders, but due to the limitations of manual grinders, they are not suitable for mass production.

[0003] In the field of semiconductor materials, some high-value containers, such as boron nitride containers, often need to be used twice or multiple times, so the inner wall of the container needs to be repaired. If a manual grinder is used, it is easy to cause inaccurate grinding or even damage to the container because the amount of repair cannot be accurately controlled by manual grinding, and manual grinding has the problem of low efficiency. Utility Model Content

[0004] The technical problem to be solved by the utility model is: how to solve the problems of inaccurate grinding and low efficiency existing in the prior art.

[0005] In order to solve the above technical problems, the utility model provides a self-inductive inner wall grinding device, comprising:

[0006] a mounting platform extending along a first direction, a second direction, and a third direction;

[0007] A container fixing assembly, the container fixing assembly is fixedly mounted on the mounting platform, and the container fixing assembly is used to clamp and fix the container to be polished in the first direction;

[0008] An X-axis linear module, the X-axis linear module is mounted on the mounting platform along the first direction;

[0009] A Z-axis linear module, the Z-axis linear module is installed on the X-axis linear module along the third direction, and the Z-axis linear module is controlled by the X-axis linear module to be able to move along the first direction;

[0010] a torque sensing component, the torque sensing component being mounted on the Z-axis linear module, the torque sensing component being controlled by the Z-axis linear module so as to be able to move along the third direction; and

[0011] A grinding spindle is installed on the torque sensing component, and a grinding head is provided at one end of the grinding spindle facing the container fixing component.

[0012] Further preferably, the container fixing assembly comprises:

[0013] A support frame, the support frame is mounted on the mounting platform;

[0014] A clamping rotating main shaft, wherein the clamping rotating main shaft is mounted on the supporting frame along the first direction; and

[0015] A clamping chuck is arranged at one end of the clamping rotating spindle close to the grinding head, and the clamping chuck is used to clamp the container to be ground.

[0016] Further preferably, the torque sensing component comprises:

[0017] A base frame, the base frame is fixed to the Z-axis linear module;

[0018] a top plate mounted to the bottom frame; and

[0019] A torque sensor is disposed between the base frame and the top plate, and is used to detect the torque applied to the top plate.

[0020] Further preferably, the torque sensing component also includes a mounting seat, the mounting seat is arranged on the top plate, and the grinding spindle is installed on the mounting seat.

[0021] Further preferably, a first position sensor is provided at the side end of the X-axis linear module, and a first sensing sheet capable of triggering the first position sensor is provided at the bottom of the Z-axis linear module.

[0022] Further preferably, a second position sensor is provided at the side end of the Z-axis linear module, and a second sensing sheet capable of triggering the second position sensor is provided at the bottom of the torque sensing component.

[0023] Further preferably, the first position sensor is configured to limit the travel of the Z-axis linear module in a first direction; and the second position sensor is configured to limit the travel of the torque sensing component in a third direction.

[0024] More preferably, it further comprises a grinding head repairer, and the grinding head repairer is mounted on the mounting table along the second direction.

[0025] Further preferably, the height of the grinding head repairer in the second direction is consistent with the height of the grinding head.

[0026] Further preferably, a plurality of rubber foot pads are provided at the bottom of the mounting platform.

[0027] Compared with the prior art, the self-inductive inner wall grinding device provided by the utility model has the following beneficial effects:

[0028] The utility model fixes the container to be polished by setting a container fixing component, and can drive the container to be polished to rotate, and the X-axis linear module and the Z-axis linear module can drive the polishing head to move in the plane where the first direction and the third direction are located, so that the polishing head can move along the numerical value set by a given program to realize the polishing of the inner wall of the container to be polished, and if there is a protruding point on the inner wall of the container to be polished, a reaction force can be applied to the polishing head, thereby triggering the torque sensing component, so that the polishing head stays at the position for a certain time to polish the protruding point until the position meets the numerical value set by the given program, and the remaining inner walls without protrusions cannot trigger the torque sensing component, so the polishing head will not polish them, and will not cause damage to them, thereby improving the polishing accuracy, and the self-sensing inner wall polishing device replaces manual polishing, improves the polishing efficiency, and solves the problems of inaccurate polishing and low efficiency in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a stereoscopic diagram of a self-inductive inner wall grinding device described in the utility model.

[0030] Figure 2 It is a front view of a self-inductive inner wall grinding device described in the utility model.

[0031] Figure 3 It is a top view of a self-inductive inner wall grinding device described in the utility model.

[0032] Figure 4 It is a side view of a self-inductive inner wall grinding device described in the utility model.

[0033] In the figure:

[0034] 100. Self-induction inner wall grinding device;

[0035] 110. Installation platform;

[0036] 120, container fixing assembly; 121, support frame; 122, clamping rotating spindle; 123, clamping chuck;

[0037] 130. X-axis linear module; 131. first position sensor;

[0038] 140. Z-axis linear module; 141. second position sensor;

[0039] 150, torque sensing assembly; 151, base frame; 152, top plate; 153, torque sensor; 154, mounting base;

[0040] 160. Grinding spindle; 161. Grinding head;

[0041] 170. Grinding head repairer;

[0042] 180, rubber foot pads;

[0043] 200. Container to be polished;

[0044] X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0045] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0046] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like used in the present invention to indicate the orientation or position relationship is based on the orientation or position relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0047] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0048] In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0050] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0051] like Figure 1-Figure 4 As shown, this embodiment provides a self-sensing inner wall grinding device, which includes a mounting table 110 extending along a first direction X, a second direction Y and a third direction Z, and a container fixing component 120, an X-axis linear module 130, a Z-axis linear module 140, a torque sensing component 150 and a grinding spindle 160 are respectively provided on the mounting table 110, wherein the grinding spindle 160 is installed on the torque sensing component 150, and a grinding head 161 is provided at one end of the grinding spindle 160 facing the container fixing component 120.

[0052] It should be noted that the first direction X, the second direction Y and the third direction Z are perpendicular to each other.

[0053] In some embodiments, the container fixing assembly 120 is fixed to the mounting table 110, and the container fixing assembly 120 is used to clamp and fix the container 200 to be polished in the first direction X; specifically, the container fixing assembly 120 includes a support frame 121, a clamping rotating spindle 122 and a clamping chuck 123, the support frame 121 is installed on the mounting table 110, the clamping rotating spindle 122 is installed on the support frame 121 along the first direction X, and the clamping chuck 123 is provided at one end of the clamping rotating spindle 122 close to the polishing head 161, and is used to clamp the container 200 to be polished. During polishing, the container 200 to be polished is fixed to the clamping chuck 123, and the clamping rotating spindle 122 is driven to rotate by an external power source.

[0054] In the above-mentioned embodiment, the transmission mode between the external power source and the clamping rotating main shaft 122 can be a coupling connection transmission, a transmission belt connection transmission, or a gear transmission.

[0055] In some embodiments, in order to satisfy that the grinding head 161 can move in the plane where the first direction X and the third direction Z are located so as to be able to grind the inner wall of the container 200 to be polished, an X-axis linear module 130 and a Z-axis linear module 140 are provided, the X-axis linear module 130 is installed on the mounting table 110 along the first direction X, the Z-axis linear module 140 is installed on the X-axis linear module 130 along the third direction Z, the Z-axis linear module 140 is controlled by the X-axis linear module 130 so as to be able to move along the first direction X, and the torque sensing component 150 is installed on the Z-axis linear module The torque sensing component 150 is controlled by the Z-axis linear module 140 so as to be able to move along the third direction Z. The grinding spindle 160 is installed on the torque sensing component 150. Thus, the grinding head 161 runs along the set program under the action of the X-axis linear module 130 and the Z-axis linear module 140. When there is a protruding point on the inner wall of the container 200 to be polished, a reaction force can be applied to the grinding head 161, thereby triggering the torque sensing component 150, so that the grinding head 161 stays at this position for a certain period of time to fully polish the protruding point, thereby achieving a polishing effect.

[0056] In some embodiments, the torque sensing assembly 150 includes a base frame 151, a top plate 152 and a torque sensor 153. The base frame 151 is fixed to the Z-axis linear module 140, the top plate 152 is installed on the base frame 151, and the torque sensor 153 is arranged between the base frame 151 and the top plate 152. The torque sensor 153 is used to detect the torque applied to the top plate 152. When the grinding head 161 runs along the set program, when there is a protruding point on the inner wall of the container 200 to be polished, a reaction force is applied to the grinding head 161, so that the top plate 152 rotates relative to the base frame 151 to generate torque, thereby triggering the torque sensor 153, and then controlling the grinding head 161 to stay at this position for a certain period of time to grind the protruding point, thereby achieving a grinding effect.

[0057] In some embodiments, in order to facilitate the assembly of the grinding spindle 160 and the top plate 152, the torque sensing assembly 150 also includes a mounting seat 154, which is disposed on the top plate 152, and the grinding spindle 160 is mounted on the mounting seat 154 to facilitate the installation, replacement and maintenance of the grinding spindle 160.

[0058] In some embodiments, a first position sensor 131 is provided at the side end of the X-axis linear module 130, and a first sensing sheet capable of triggering the first position sensor 131 is provided at the bottom of the Z-axis linear module 140. The first position sensor 131 is configured to limit the stroke of the Z-axis linear module 140 in the first direction X, thereby limiting the stroke of the grinding head 161 in the first direction X to avoid excessive stroke of the grinding head 161 and damage to the container 200 to be polished.

[0059] In some embodiments, a second position sensor 141 is provided at the side end of the Z-axis linear module 140, and a second sensing sheet capable of triggering the second position sensor 141 is provided at the bottom of the torque sensing component 150. The second position sensor 141 is configured to limit the stroke of the torque sensing component 150 in the third direction Z, thereby limiting the stroke of the grinding head 161 in the third direction Z to avoid excessive stroke of the grinding head 161 and damage to the container 200 to be polished.

[0060] In some embodiments, a grinding head repairer 170 is further included. The grinding head repairer 170 is installed on the mounting table 110 along the second direction Y. The height of the grinding head repairer 170 in the second direction Y is consistent with the height of the grinding head 161. Therefore, by setting the grinding head repairer 170, it can be used to repair the damaged grinding head 161 after grinding to ensure subsequent normal advancement and grinding accuracy.

[0061] In some embodiments, a plurality of rubber pads 180 are provided at the bottom of the mounting platform 110 . The rubber pads 180 play a role of shock absorption and can ensure the stability of the self-sensing inner wall grinding device during operation.

[0062] In some embodiments, the self-inductive inner wall grinding device is assembled with aluminum alloy material, which can ensure the overall strength of the self-inductive inner wall grinding device.

[0063] The working process of the utility model is as follows: before the container 200 to be polished is polished, a standard program setting for the standard container to move along the inner wall is required. When the container 200 to be polished is polished subsequently, the set program is run. After the program setting, the standard container is removed, and the container 200 to be polished is fixed on the clamping chuck 123. The clamping rotating spindle 122 is driven to rotate by an external power source. At this time, the polishing head 161 moves along the set program under the action of the X-axis linear module 130 and the Z-axis linear module 140. When there is a protruding point on the inner wall of the container 200 to be polished, a reaction force can be applied to the polishing head 161, thereby triggering the torque sensor 153. At this time, the polishing head 161 will stay at this position for a certain period of time to polish the protruding point that triggers the torque sensor 153, thereby achieving a polishing effect; and the position where there is no protruding point on the inner wall will not trigger the torque sensor 153, and the polishing head 161 will continue to operate according to the set program, and will not polish this position, thereby not causing damage to the container 200 to be polished.

[0064] In summary, the embodiment of the utility model provides a self-sensing inner wall grinding device, which fixes the container 200 to be polished by setting a container fixing assembly 120, and can drive the container 200 to be polished to rotate, and the X-axis linear module 130 and the Z-axis linear module 140 can drive the grinding head 161 to move in the plane where the first direction X and the third direction Z are located, so that the grinding head 161 can move along the numerical value set by a given program to achieve the grinding of the inner wall of the container 200 to be polished. If there is a protruding point on the inner wall of the container 200 to be polished, it can be The grinding head 161 applies a reaction force, thereby triggering the torque sensor 153, so that the grinding head 161 stays at the position for a certain period of time to grind the protruding point until the position meets the value set by the given program, and the remaining inner walls without protrusions cannot trigger the torque sensing component 150, so the grinding head 161 will not grind it, and will not cause damage to it, thereby improving the grinding accuracy, and the self-sensing inner wall grinding device replaces manual grinding, improves the grinding efficiency, and solves the problems of inaccurate grinding and low efficiency in the prior art.

[0065] The above is only a preferred embodiment of the utility model. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the utility model, and these improvements and substitutions should also be regarded as the protection scope of the utility model. The above shows and describes the basic principles, main features and advantages of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above preferred embodiments. The embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is defined by the attached claims rather than the above description, so it is intended to include all changes that fall within the meaning and scope of the equivalent elements of the claims in the utility model.

[0066] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A self-induction inner wall grinding device, characterized in that: include: a mounting platform extending along a first direction, a second direction, and a third direction; A container fixing assembly, the container fixing assembly is fixedly mounted on the mounting platform, and the container fixing assembly is used to clamp and fix the container to be polished in the first direction; An X-axis linear module, the X-axis linear module is mounted on the mounting platform along the first direction; A Z-axis linear module, the Z-axis linear module is installed on the X-axis linear module along the third direction, and the Z-axis linear module is controlled by the X-axis linear module to be able to move along the first direction; a torque sensing component, the torque sensing component being mounted on the Z-axis linear module, the torque sensing component being controlled by the Z-axis linear module so as to be able to move along the third direction; and A grinding spindle is installed on the torque sensing component, and a grinding head is provided at one end of the grinding spindle facing the container fixing component.

2. A self-induction inner wall grinding device according to claim 1, characterized in that: The container fixing assembly comprises: A support frame, the support frame is mounted on the mounting platform; A clamping rotating main shaft, wherein the clamping rotating main shaft is mounted on the supporting frame along the first direction; and A clamping chuck is arranged at one end of the clamping rotating spindle close to the grinding head, and the clamping chuck is used to clamp the container to be ground.

3. A self-induction inner wall grinding device according to claim 1, characterized in that: The torque sensing assembly comprises: A base frame, the base frame is fixed to the Z-axis linear module; a top plate mounted to the bottom frame; and A torque sensor is disposed between the base frame and the top plate, and is used to detect the torque applied to the top plate.

4. A self-induction inner wall grinding device according to claim 3, characterized in that: The torque sensing component also includes a mounting seat, which is arranged on the top plate, and the grinding spindle is installed on the mounting seat.

5. The self-induction inner wall grinding device according to claim 1, characterized in that: A first position sensor is disposed at the side end of the X-axis linear module, and a first sensing sheet capable of triggering the first position sensor is disposed at the bottom of the Z-axis linear module.

6. A self-induction inner wall grinding device according to claim 5, characterized in that: A second position sensor is disposed at the side end of the Z-axis linear module, and a second sensing sheet capable of triggering the second position sensor is disposed at the bottom of the torque sensing component.

7. A self-induction inner wall grinding device according to claim 6, characterized in that: The first position sensor is configured to limit the travel of the Z-axis linear module in a first direction; the second position sensor is configured to limit the travel of the torque sensing component in a third direction.

8. The self-induction inner wall grinding device according to claim 1, characterized in that: A grinding head repairer is also included, and the grinding head repairer is installed on the mounting table along the second direction.

9. A self-induction inner wall grinding device according to claim 8, characterized in that: The height of the grinding head repairer in the second direction is consistent with the height of the grinding head.

10. The self-induction inner wall grinding device according to claim 1, characterized in that: A plurality of rubber pads are arranged at the bottom of the mounting platform.

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