Transport vehicle for furnace tubes of high-temperature diffusion furnace

Abstract

The utility model discloses a transport vehicle for furnace tubes of a high-temperature diffusion furnace. The transport vehicle solves various problems caused by the fact that only a fixing mechanism is arranged at the bottom of a furnace tube of a furnace tube carrying device in the prior art. The high-temperature diffusion furnace tube transport vehicle comprises a vehicle body frame and idler wheels installed at the bottom of the vehicle body frame, the vehicle body frame comprises a bottom plate and a top plate, a first containing cavity for containing a furnace tube is formed between the bottom plate and the top plate, a receding groove for receding the furnace tube is formed in the top plate, and the furnace tube is arranged in the receding groove. A furnace tube fixing device for fixing the furnace tube is arranged on the bottom plate, an arc-shaped piece and a positioning piece are arranged on the top plate, one end of the arc-shaped piece is fixed on one side of the top plate, and the other end of the arc-shaped piece is fixed on the other side of the top plate through the positioning piece. And a limiting space for limiting the furnace tube is formed between the arc-shaped piece and the clearance groove. According to the transport vehicle for the furnace tubes of the high-temperature diffusion furnace, the arc-shaped pieces and the positioning pieces of the top plate are used for assisting in fixing the furnace tubes.

Description

Technical Field

[0001] The utility model relates to the field of a high-temperature diffusion furnace tube transport device, in particular to a high-temperature diffusion furnace tube transport vehicle. Background Art

[0002] In order to control the diffusion process of semiconductors, a high-temperature diffusion furnace is often used. The furnace tube of the diffusion furnace is usually made of quartz or silicon carbide. The furnace tube maintains a high temperature and high vacuum environment or is filled with inactive gas (such as inert gas or nitrogen).

[0003] The furnace tubes of the diffusion furnace need to be cleaned periodically during use. The operator needs to remove the furnace tubes from the diffusion furnace and transport the furnace tubes to the cleaning equipment for cleaning through a handling device and then transport them to the drying equipment for drying after cleaning.

[0004] In the prior art, a furnace tube fixing mechanism is usually provided on the bottom plate of the furnace tube handling device, but other protective mechanisms are lacking for double or auxiliary fixing of the furnace tube. On the one hand, the design of the furnace tube fixing mechanism needs to consider bearing a larger load, so thicker and stronger materials are used, which increases the weight and material cost of the furnace tube handling device; on the other hand, due to the lack of double and auxiliary fixing, when the furnace tube fixing structure fails, it will cause serious accidents such as the furnace tube falling and the furnace tube handling device tipping over. Utility Model Content

[0005] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and propose a high-temperature diffusion furnace tube transport vehicle to solve various problems caused by the fact that the furnace tube transport device in the prior art has only a fixing mechanism on the bottom of the furnace tube.

[0006] In order to achieve the above technical objectives, the high-temperature diffusion furnace tube transport vehicle proposed in the utility model includes a vehicle body frame and rollers installed at the bottom of the vehicle body frame, the vehicle body frame includes a bottom plate and a top plate, a first storage cavity for accommodating the furnace tube is formed between the bottom plate and the top plate, the top plate is provided with a void groove for making way for the furnace tube, the bottom plate is provided with a furnace tube fixing device for fixing the furnace tube, the top plate is provided with an arc-shaped member and a positioning member, one end of the arc-shaped member is fixed to one side of the top plate, and the other end is fixed to the other side of the top plate through the positioning member, and a limiting space for limiting the furnace tube is formed between the arc-shaped member and the void groove.

[0007] Preferably, the positioning member is fixed to the end of the arc-shaped member, the positioning member includes a latch portion, a socket is provided on the top plate, and the latch portion is confined in the socket.

[0008] Preferably, the arc-shaped member is a soft pipe.

[0009] Preferably, the positioning member comprises a positioning seat, a rotating shaft, a torsion spring and a limiting column, wherein the positioning seat is fixed on the top plate, the rotating shaft is rotatably connected to the positioning seat, the limiting column is fixed to the positioning seat, the torsion spring is sleeved on the rotating shaft, a pressure plate portion is provided on the rotating shaft, and the rotating shaft rotates to make the pressure plate portion approach or move away from the limiting column.

[0010] The pressing plate portion is away from the limiting column so that a passage slot is formed therebetween for the arc-shaped member to pass through;

[0011] A plurality of protruding teeth are arranged on one side of the arc-shaped member facing the pressure plate portion, and the torsion spring pushes the rotating shaft to return to its original position so that the pressure plate portion is clamped between two adjacent protruding teeth to position the arc-shaped member.

[0012] Preferably, the pressing plate portion is close to a side of the limiting column facing away from the arc-shaped member, and the arc-shaped member pushes the pressing plate portion to form the passing groove between the pressing plate portion and the limiting column.

[0013] Preferably, a pivot plate is provided on the positioning seat, the rotating shaft is rotatably mounted on the pivot plate, and the rotating shaft also includes an operating portion, which is provided on the outer side of the pivot plate.

[0014] Preferably, a guiding portion is further provided on the positioning seat, and a guiding groove for guiding the movement of the arc-shaped member is formed between the guiding portion and the positioning seat.

[0015] Preferably, the vehicle body frame further comprises side panels and partitions, the side panels, the bottom panel and the top panel enclose a storage space with open sides, and the partitions divide the storage space to form a plurality of the first storage cavities.

[0016] Preferably, the partition divides the storage space and forms a second storage cavity, and the second storage cavity is used to store the wafer boat.

[0017] Preferably, a thermocouple positioning piece is also provided on the side plate.

[0018] After adopting the above technical solution, the utility model has the following beneficial effects.

[0019] 1. The high-temperature diffusion furnace tube transport vehicle proposed by the utility model comprises a vehicle body frame and rollers installed at the bottom of the vehicle body frame, the vehicle body frame comprises a bottom plate and a top plate, a first storage cavity for accommodating the furnace tube is formed between the bottom plate and the top plate, the top plate is provided with an air avoidance groove for giving way to the furnace tube, the bottom plate is provided with a fixing device for fixing the furnace tube, and the utility model is characterized in that an arc-shaped member and a positioning member are provided on the top plate, one end of the arc-shaped member is fixed to one side of the top plate, and the other end is fixed to the other side of the top plate through the positioning member, a limiting space for limiting the furnace tube is formed between the arc-shaped member and the air avoidance groove, and in this way, a limiting mechanism is provided at the top plate position of the furnace tube transport vehicle, so that the bottom plate and the upper part of the furnace tube are fixed and limited. , so that the furnace tube can be more firmly fixed on the furnace tube transport vehicle; the limiting mechanism plays an auxiliary fixing role, which can reduce the shaking of the furnace tube during transportation, thereby reducing the shaking amplitude of the bottom of the furnace tube, and then the force on the fixing device at the bottom of the furnace tube is smaller, on the one hand, the service life of the fixing device can be improved, and on the other hand, the design load of the fixing device can be appropriately reduced; secondly, since the limiting mechanism is arranged on the top plate, the limiting position is closer to the center of gravity of the furnace tube relative to the fixing device at the bottom of the furnace tube, so the limiting mechanism can more easily avoid the center of gravity shift of the furnace tube. When there is a problem with the fixing device at the bottom of the furnace tube, the limiting mechanism can still easily fix the furnace tube, avoiding the shift of the center of gravity of the furnace tube and causing major accidents such as the furnace tube falling and the furnace tube handling device overturning.

[0020] 2. The positioning member is fixed to the end of the arc-shaped member, and the positioning member includes a latch portion. A socket is provided on the top plate, and the latch portion is limited in the socket. With this arrangement, the limiting mechanism has a relatively simple structure and a low production cost while realizing the limiting function.

[0021] 3. The arc-shaped member is made of soft pipe. This arrangement can avoid one end of the arc-shaped member from being rotatably connected to the top plate, further simplifying the structure of the limiting mechanism and further reducing production costs.

[0022] 4. The positioning member includes a positioning seat, a rotating shaft, a torsion spring and a limiting column. The positioning seat is fixed on the top plate, the rotating shaft is rotatably connected to the positioning seat, the limiting column is fixed to the positioning seat, the torsion spring is sleeved on the rotating shaft, and a pressure plate portion is provided on the rotating shaft. The rotating shaft rotates to make the pressure plate portion approach or move away from the limiting column, and the pressure plate portion moves away from the limiting column so that a groove for the arc-shaped member to pass through is formed therebetween; a plurality of convex teeth are provided on one side of the arc-shaped member facing the pressure plate portion, and the torsion spring pushes the rotating shaft to reset so that the pressure plate portion is clamped between two adjacent convex teeth to position the arc-shaped member. With this arrangement, the pressure plate portion is clamped at different positions between the plurality of convex teeth so that the limiting space formed between the arc-shaped member and the avoidance groove can be adjusted in size, so that the limiting mechanism can better adapt to different furnace tubes, thereby further improving the fixing stability of the furnace tube by the limiting mechanism. At the same time, the arc-shaped member is automatically positioned on the positioning member, and no secondary fixing is required by the operator.

[0023] 5. The pressure plate portion is close to the side of the limiting column away from the arc-shaped member, and the arc-shaped member pushes the pressure plate portion to form a through groove between the pressure plate portion and the limiting column. With this arrangement, the operator can push the arc-shaped member to clamp the pressure plate portion between two adjacent convex teeth, and the operator can push the arc-shaped member to further reduce the limiting space so that the arc-shaped member and the air avoidance groove can clamp and fix the furnace tube, making it easier for the operator to operate.

[0024] 6. A pivot plate is provided on the positioning seat, and the rotating shaft is rotatably installed on the pivot plate. The rotating shaft also includes an operating part, and the operating part is arranged on the outer side of the pivot plate. With such an arrangement, the operator can disengage the pressure plate part from the convex teeth by pulling the operating part, and pull the arc-shaped member to disengage it from the positioning member, which makes the operation of the operator simpler; at the same time, the arc-shaped member can also usually be provided with an elastic component or have elasticity itself, so that it automatically pops out from the positioning member after the operating part is pulled, thereby further optimizing the operation.

[0025] 7. A guiding part is also provided on the positioning seat, and a guiding groove for guiding the movement of the arc-shaped member is formed between the guiding part and the positioning seat. With such a configuration, after the operator inserts one end of the arc-shaped member into the guiding groove, the operator only needs to continue pushing the arc-shaped member to achieve the connection between the arc-shaped member and the positioning member, which makes the operation of the operator simpler.

[0026] 8. The vehicle body frame also includes side panels and partitions. The side panels, bottom panels and top panels enclose a storage space with open sides. The partitions divide the storage space to form a plurality of first storage cavities. With such an arrangement, the furnace tube transport vehicle can transport a plurality of furnace tubes at a time, thereby improving the transport efficiency of the furnace tube transport vehicle and reducing the labor cost of operators in carrying the furnace tubes.

[0027] 9. The partition separates the storage space and also forms a second storage cavity, which is used to store the wafer boat. By arranging the second storage cavity for storing the wafer boat on the furnace tube transport vehicle, the furnace tube transport vehicle can transport the wafer boat together with the furnace tube, thereby further improving the transportation efficiency of the furnace tube transport vehicle and reducing the labor cost of the operator in moving the furnace tube.

[0028] 10. The side plate is also provided with a thermocouple positioning piece. By arranging the thermocouple fixing piece on the furnace tube transport vehicle, the furnace tube transport vehicle can transport the thermocouple together with the furnace tube, thereby further improving the transportation efficiency of the furnace tube transport vehicle and reducing the labor cost of the operator for carrying the furnace tube.

[0029] These features and advantages of the present invention will be disclosed in detail in the following specific implementation manners and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a schematic diagram of a furnace tube transport vehicle in an embodiment of the utility model;

[0031] Figure 2 A schematic diagram of another furnace tube transport vehicle in an embodiment of the utility model;

[0032] Figure 3 for Figure 2 The enlarged view of point A in the middle;

[0033] Reference numerals:

[0034] 100, vehicle body frame, 110, bottom plate, 120, top plate, 121, air avoidance groove, 130, side plate, 140, partition plate, 150, first storage cavity, 160, second storage cavity, 170, thermocouple fixing part;

[0035] 200, limiting mechanism, 210, arc-shaped member, 211, convex teeth, 220, positioning member, 221, latch portion, 222, positioning seat, 223, rotating shaft, 2231, pressing plate portion, 2232, operating portion, 224, limiting column, 225, guiding portion;

[0036] 300. Fixing device. DETAILED DESCRIPTION

[0037] The following is an explanation and description of the technical scheme of the embodiment of the utility model in conjunction with the drawings of the embodiment of the utility model, but the following embodiment is only a preferred embodiment of the utility model, not all. Based on the embodiment in the implementation mode, other embodiments obtained by those skilled in the art without creative work are all within the protection scope of the utility model.

[0038] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0039] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" and "several" mean two or more, unless otherwise clearly defined.

[0040] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] Embodiment 1:

[0042] like Figure 1 As shown, the high-temperature diffusion furnace tube transport vehicle proposed in the embodiment of the utility model includes a vehicle frame 100 and rollers installed at the bottom of the vehicle frame 100, the vehicle frame 100 includes a bottom plate 110 and a top plate 120, a first storage cavity 150 for accommodating the furnace tubes is formed between the bottom plate 110 and the top plate 120, a space-avoiding groove 121 for giving way to the furnace tubes is provided on the top plate 120, and a fixing device for fixing the furnace tubes is provided on the bottom plate 110.

[0043] The vehicle body frame 100 further includes a side panel 130 , and a storage space with open sides is formed between the bottom panel 110 , the side panel 130 and the top panel 120 , and the first storage cavity 150 is disposed in the storage space.

[0044] In some other embodiments, the vehicle body frame 100 includes side support pillars, and a storage space is enclosed between the bottom plate 110, the top plate 120 and the side support pillars.

[0045] The top plate 120 is provided with a limiting mechanism 200, which includes an arc-shaped member 210 and a positioning rib 220. One end of the arc-shaped member 210 is fixed to one side of the top plate 120, and the other end of the arc-shaped member 210 is fixed to the other side of the top plate 120 through the positioning rib 220, and a limiting space for limiting the furnace tube is formed between the arc-shaped member 210 and the air-avoiding groove 121.

[0046] In this way, a limiting mechanism 200 is arranged at the top plate 120 of the furnace tube transport vehicle, so that the bottom plate 110 and the upper part of the furnace tube are fixed and limited, so that the furnace tube can be more firmly fixed on the furnace tube transport vehicle; the limiting mechanism 200 plays an auxiliary fixing role, which can reduce the shaking of the furnace tube during transportation, thereby reducing the shaking amplitude of the bottom of the furnace tube, and then the force on the fixing device at the bottom of the furnace tube is smaller, on the one hand, the service life of the fixing device can be improved, and on the other hand, the design load of the fixing device can be appropriately reduced; secondly, since the limiting mechanism 200 is arranged on the top plate 120, the limiting position is closer to the center of gravity of the furnace tube relative to the fixing device at the bottom of the furnace tube, so the limiting mechanism 200 can more easily avoid the center of gravity shift of the furnace tube, when the fixing device at the bottom of the furnace tube has problems, the limiting mechanism 200 can still fix the furnace tube more easily, avoiding the center of gravity shift of the furnace tube causing major accidents such as the furnace tube falling and the furnace tube handling device overturning.

[0047] The positioning rib 220 is fixed to the end of the arc-shaped member 210, and the positioning rib 220 includes a latch portion 221. A plug hole is provided on the top plate 120, and the latch portion 221 is limited in the plug hole to form a limiting space between the arc-shaped member 210 and the air-avoiding groove 121. In this way, the limiting mechanism 200 has a simple structure and a low production cost while realizing the limiting function.

[0048] The other end of the arc-shaped member 210 may be rotatably connected to the top plate 120 , or may be fixed to the top plate 120 and rely on the elasticity of the arc-shaped member 210 itself to allow the latch portion 221 to be inserted into or out of the insertion hole.

[0049] Preferably, the arc-shaped member 210 is a soft pipe. This arrangement can prevent one end of the arc-shaped member 210 from being rotatably connected to the top plate 120, further simplifying the structure of the limiting mechanism 200 and further reducing the production cost.

[0050] Embodiment 2:

[0051] Different from the first embodiment, Figure 2 , Figure 3As shown, in this embodiment, the positioning rib 220 includes a positioning seat 222, a rotating shaft 223, a torsion spring and a limiting column 224. The positioning seat 222 is fixed on the top plate 120, the rotating shaft 223 is rotatably connected to the positioning seat 222, the limiting column 224 is fixed on the positioning seat 222, the torsion spring is sleeved on the rotating shaft 223, and a pressing plate portion 2231 is provided on the rotating shaft 223. The rotating shaft 223 rotates to make the pressing plate portion 2231 approach or move away from the limiting column 224. The pressing plate portion 2231 moves away from the limiting column 224 so that a passing groove is formed between the two for the arc-shaped member 210 to pass through. A plurality of convex teeth 211 are provided on the side of the arc-shaped member 210 facing the pressing plate portion 2231. The torsion spring pushes the rotating shaft 223 to reset so that the pressing plate portion 2231 is clamped between two adjacent convex teeth 211 to position the arc-shaped member 210, so that the arc-shaped member 210 limits the furnace tube in the limiting space.

[0052] In this arrangement, the pressure plate portion 2231 is clamped at different positions between the multiple protruding teeth 211 so that the limiting space formed between the arc-shaped member 210 and the air avoidance groove 121 can be adjusted in size, so that the limiting mechanism 200 can better adapt to different furnace tubes, thereby further improving the fixing stability of the limiting mechanism 200 for fixing the furnace tube. At the same time, the arc-shaped member 210 is automatically positioned on the positioning rib 220, and there is no need for the operator to perform secondary fixing.

[0053] The end of the arc-shaped member 210 away from the positioning rib 220 may be rotatably connected to the top plate 120, or may be fixedly connected to the top plate 120 and rely on the elasticity of the arc-shaped member 210 itself so that the end of the arc-shaped member 210 close to the positioning rib 220 can cooperate with the positioning rib 220. The arc-shaped member 210 is preferably made of a flexible insulating material.

[0054] Preferably, in this embodiment, the pressure plate portion 2231 is close to the side of the limiting column 224 away from the arc-shaped member 210, and the arc-shaped member 210 can push the pressure plate portion 2231 to move, so that a passing groove for the arc-shaped member 210 to pass through is formed between the pressure plate portion 2231 and the limiting column 224.

[0055] With such arrangement, the operator can push the arc-shaped member 210 to clamp the pressure plate portion 2231 between two adjacent protruding teeth 211, and the operator can push the arc-shaped member 210 to further reduce the limiting space so that the arc-shaped member 210 and the air avoidance groove 121 clamp and fix the furnace tube, which makes the operation easier for the operator. At the same time, the arc-shaped member 210 is automatically positioned on the positioning rib 220, and the operator does not need to perform secondary fixation.

[0056] In another preferred embodiment, a pivot plate is disposed on the positioning seat 222 , and the rotating shaft 223 is rotatably mounted on the pivot plate. The rotating shaft 223 further includes an operating portion 2232 , and the operating portion 2232 is disposed on the outer side of the pivot plate.

[0057] With such arrangement, the operator can disengage the pressure plate portion 2231 from the convex tooth 211 by pulling the operating portion 2232, and pull the arc-shaped member 210 to disengage it from the positioning rib 220, which makes the operation of the operator simpler. At the same time, the arc-shaped member 210 can also usually be provided with an elastic component or have elasticity itself, so that it can automatically pop out from the positioning rib 220 after the operating portion 2232 is pulled, thereby further optimizing the operation.

[0058] The operating portion 2232 may be a knob or a dial button.

[0059] In another preferred embodiment, a guide portion 225 is further provided on the positioning seat 222 , and a guide groove for guiding the movement of the arc-shaped member 210 is formed between the guide portion 225 and the positioning seat 222 .

[0060] With such arrangement, after the operator inserts one end of the arc-shaped member 210 into the guide groove, the operator only needs to continue pushing the arc-shaped member 210 to achieve the snap connection between the arc-shaped member 210 and the positioning rib 220 , which makes the operation of the operator easier.

[0061] Embodiment three:

[0062] Based on the first and second embodiments, Figures 1 to 3 As shown, in this embodiment, the vehicle body frame 100 includes a partition 140 , and the partition 140 divides the storage space to form a plurality of first storage chambers 150 .

[0063] With such arrangement, the furnace tube transport vehicle can transport multiple furnace tubes at a time, thereby improving the transport efficiency of the furnace tube transport vehicle and reducing the labor cost of operators in carrying the furnace tubes.

[0064] In this embodiment, the partition 140 divides the storage space and forms a second storage cavity 160, and the second storage cavity 160 is used to store the wafer boat.

[0065] The wafers are placed in the furnace tubes via wafer boats, which also need to be cleaned and dried. By providing a second storage chamber 160 for storing the wafer boats on the furnace tube transport vehicle, the furnace tube transport vehicle can transport the wafer boats while transporting the furnace tubes, thereby further improving the transport efficiency of the furnace tube transport vehicle and reducing the labor cost of operators moving the furnace tubes.

[0066] In another preferred embodiment, a thermocouple fixing member 170 is further provided on the side plate 130 , and a positioning hole is provided on the thermocouple fixing member 170 .

[0067] In this arrangement, the thermocouple plays a heating role in the furnace tube, and the thermocouple also needs to be cleaned and dried. By arranging the thermocouple fixing part 170 on the furnace tube transport vehicle, the furnace tube transport vehicle can transport the thermocouple together with the furnace tube, thereby further improving the transportation efficiency of the furnace tube transport vehicle and reducing the labor cost of the operator for carrying the furnace tube.

[0068] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Those skilled in the art should understand that the utility model includes but is not limited to the contents described in the drawings and the above specific implementation. Any modification that does not deviate from the functional and structural principles of the utility model will be included in the scope of the claims.

Claims

1. A high-temperature diffusion furnace tube transport vehicle, comprising a vehicle frame and rollers installed at the bottom of the vehicle frame, wherein the vehicle frame comprises a bottom plate and a top plate, a first storage cavity for accommodating the furnace tube is formed between the bottom plate and the top plate, a cavitation groove for giving way to the furnace tube is provided on the top plate, and a fixing device for fixing the furnace tube is provided on the bottom plate, characterized in that: An arc-shaped member and a positioning member are provided on the top plate, one end of the arc-shaped member is fixed to one side of the top plate, and the other end is fixed to the other side of the top plate through the positioning member, and a limiting space for limiting the furnace tube is formed between the arc-shaped member and the air avoidance groove.

2. The high temperature diffusion furnace tube transport vehicle according to claim 1, characterized in that: The positioning member is fixed to the end of the arc-shaped member, and the positioning member includes a latch portion. The top plate is provided with an insertion hole, and the latch portion is confined in the insertion hole.

3. The high temperature diffusion furnace tube transport vehicle according to claim 2, characterized in that: The arc-shaped member is a soft pipe.

4. The high temperature diffusion furnace tube transport vehicle according to claim 1, characterized in that: The positioning member includes a positioning seat, a rotating shaft, a torsion spring and a limiting column. The positioning seat is fixed on the top plate, the rotating shaft is rotatably connected to the positioning seat, the limiting column is fixed to the positioning seat, the torsion spring is sleeved on the rotating shaft, and a pressure plate portion is provided on the rotating shaft. The rotating shaft rotates to make the pressure plate portion approach or move away from the limiting column. The pressing plate portion is away from the limiting column so that a passage slot is formed therebetween for the arc-shaped member to pass through; A plurality of convex teeth are arranged on one side of the arc-shaped member facing the pressure plate portion, and the torsion spring pushes the rotating shaft to return to its original position so that the pressure plate portion is clamped between two adjacent convex teeth to position the arc-shaped member.

5. The high temperature diffusion furnace tube transport vehicle according to claim 4, characterized in that: The pressing plate portion is close to a side of the limiting column away from the arc-shaped member, and the arc-shaped member pushes the pressing plate portion to form the passing groove between the pressing plate portion and the limiting column.

6. The high temperature diffusion furnace tube transport vehicle according to claim 4, characterized in that: The positioning seat is provided with a pivot plate, the rotating shaft is rotatably mounted on the pivot plate, and the rotating shaft also includes an operating portion, which is arranged on the outer side of the pivot plate.

7. The high temperature diffusion furnace tube transport vehicle according to claim 4, characterized in that: A guiding portion is also provided on the positioning seat, and a guiding groove for guiding the movement of the arc-shaped member is formed between the guiding portion and the positioning seat.

8. The high temperature diffusion furnace tube transport vehicle according to claim 1, characterized in that: The vehicle body frame further includes side panels and partitions. The side panels, the bottom panel and the top panel enclose a storage space with open sides. The partitions divide the storage space to form a plurality of the first storage chambers.

9. The high temperature diffusion furnace tube transport vehicle according to claim 8, characterized in that: The partition separates the storage space and forms a second storage cavity, and the second storage cavity is used to store the wafer boat.

10. The high temperature diffusion furnace tube transport vehicle according to claim 8, characterized in that: The side plate is also provided with a thermocouple positioning piece.

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