Transport vehicle for furnace tubes of high-temperature diffusion furnace

Abstract

The utility model discloses a transport vehicle for furnace tubes of a high-temperature diffusion furnace, and aims to solve the problem that the furnace tubes are easy to shake in the transport process in the prior art. The high-temperature diffusion furnace tube transport vehicle comprises a vehicle body frame and idler wheels installed at the bottom of the vehicle body frame, the vehicle body frame is provided with a first containing cavity for containing a furnace tube, a furnace tube fixing device is installed on the vehicle body frame, the furnace tube fixing device comprises a fixing base, a gear ring and a plurality of clamping pieces, and the clamping pieces are arranged on the fixing base. The gear ring is rotatably arranged on the fixed seat, a clamping area for clamping a furnace tube is formed among the multiple clamping pieces, and the gear ring rotates to drive the multiple clamping pieces to synchronously move so as to adjust the size of the clamping area. According to the furnace tube transport vehicle for the high-temperature diffusion furnace, the plurality of linked clamping pieces are arranged to clamp and fix the furnace tube, so that the stability of the fixed furnace tube in the transport process is improved.

Description

Technical Field

[0001] The utility model relates to the field of a high-temperature diffusion furnace tube transport device, in particular to a high-temperature diffusion furnace tube transport vehicle. Background Art

[0002] In order to control the diffusion process of semiconductors, a high-temperature diffusion furnace is often used. The furnace tube of the diffusion furnace is usually made of quartz or silicon carbide. The furnace tube maintains a high temperature and high vacuum environment or is filled with inactive gas (such as inert gas or nitrogen).

[0003] The furnace tubes of the diffusion furnace need to be cleaned periodically during use. The operator needs to remove the furnace tubes from the diffusion furnace and transport them to the cleaning equipment through the handling device for cleaning, and then transport them to the drying equipment for drying. However, due to the heavy weight of the furnace tubes, the bumps during transportation can easily cause the furnace tubes to shake, causing safety hazards; and due to the high hardness of quartz and silicon carbide, they are brittle to a certain extent, and the shaking of the furnace tubes can easily collide with the transportation device, which can also easily cause the furnace tubes to be damaged or even cracked. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and propose a high-temperature diffusion furnace tube transport vehicle to solve the problem that the furnace tubes of the prior art are prone to shaking during transportation.

[0005] In order to achieve the above technical objectives, the utility model proposes a high-temperature diffusion furnace tube transport vehicle, comprising a vehicle body frame and rollers installed at the bottom of the vehicle body frame, the vehicle body frame having a first storage cavity for accommodating furnace tubes, a furnace tube fixing device installed on the vehicle body frame, the furnace tube fixing device comprising a fixing seat, a gear ring and a plurality of clamping members, the gear ring being rotatably arranged on the fixing seat, a clamping area for clamping the furnace tube is formed between the plurality of clamping members, and the rotation of the gear ring drives the plurality of clamping members to move synchronously to adjust the size of the clamping area.

[0006] Preferably, the furnace tube fixing device also includes an idle gear arranged corresponding to the clamping member, the inner side of the gear ring is circumferentially provided with an internal tooth portion, the clamping member includes an engaging portion, and the idle gear is engaged between the internal tooth portion and the engaging portion so that the rotation of the gear ring drives the clamping member to move.

[0007] Preferably, the meshing portion is a rack or a worm.

[0008] Preferably, the clamping member also includes a connecting rod, which is connected between the clamping head and the meshing portion. The furnace tube fixing device also includes a positioning portion, which is provided with a positioning hole for positioning the connecting rod. The connecting rod is also sleeved with a spring, which is pre-stressed between the positioning portion and the meshing portion or the clamping head.

[0009] Preferably, the clamping member comprises a clamping head, and the left and right sides of the end surface of the clamping head close to the furnace tube are gradually concave toward the center to form an arc shape.

[0010] Preferably, the gear ring is provided with a plurality of transmission teeth circumferentially arranged thereon, and the fixed seat is provided with a transmission member, the transmission member includes an engaging transmission part and an operating part, and the operating part is rotated to drive the engaging transmission part to rotate and engage the transmission teeth, thereby driving the gear ring to rotate.

[0011] Preferably, the transmission teeth are arranged on the lower end surface of the gear ring.

[0012] Preferably, the vehicle body frame comprises a bottom plate, side plates and partition plates, the bottom plate and the side plates enclose a storage space with an open upper end and sides, and the partition plates divide the storage space to form a plurality of the first storage cavities.

[0013] Preferably, a tray is mounted on the bottom plate, and the tray is connected to the bottom plate via a slide rail so that the tray can slide laterally relative to the bottom plate, and the furnace tube fixing device is mounted on the tray.

[0014] Preferably, the partition divides the storage space to form a second storage cavity, and the second storage cavity is used to store the wafer boat. A thermocouple fixing part is also provided on the partition, and a limiting hole for limiting the thermocouple is provided on the thermocouple fixing part.

[0015] After adopting the above technical solution, the utility model has the following beneficial effects.

[0016] 1. The utility model proposes a furnace tube transport vehicle for a high-temperature diffusion furnace, comprising a vehicle body frame and rollers installed at the bottom of the vehicle body frame, the vehicle body frame having a first storage cavity for accommodating furnace tubes, a furnace tube fixing device installed on the vehicle body frame, the furnace tube fixing device comprising a fixing seat, a gear ring and a plurality of clamping members, the gear ring being rotatably arranged on the fixing seat, a clamping area for clamping the furnace tube being formed between the plurality of clamping members, the rotation of the gear ring drives the plurality of clamping members to move synchronously to adjust the size of the clamping area, and with such an arrangement, the clamping members can adjustably clamp the furnace tubes so that the furnace tube transport vehicle for the high-temperature diffusion furnace can better fix the furnace tubes placed thereon, and even if the transport vehicle is bumpy during transportation, the furnace tubes can be well fixed; at the same time, the adjustability of the clamping members can better adapt to the furnace tubes, and furnace tubes of different diameters can be stably fixed on the transport vehicle.

[0017] 2. The furnace tube fixing device also includes an idle gear arranged corresponding to the clamping member, the inner side of the gear ring is circumferentially provided with an internal tooth portion, the clamping member includes an engaging portion, the idle gear is meshed between the internal tooth portion and the engaging portion so that the rotation of the gear ring drives the clamping member to move, and the transmission between the gear ring and the clamping member is achieved by arranging the idle gear and providing the engaging portion on the clamping member, so that the transmission structure between the gear ring and the clamping member is relatively simple, thereby reducing the production cost of the furnace tube fixing device; at the same time, the plurality of idle gears are distributed circumferentially, so that the plurality of idle gears play a role of circumferential stability on the inner side of the gear ring, thereby improving the stability of the gear ring when rotating.

[0018] 3. The clamping member includes a clamping head, which is made of flexible insulating material. The left and right sides of the end surface of the clamping head close to the furnace tube are gradually concave toward the center to form an arc. This arrangement can increase the contact area between the clamping head and the furnace tube when clamping the furnace tube, so that the clamping member can clamp the furnace tube more firmly, thereby improving the stability of the furnace tube fixed on the high-temperature diffusion furnace furnace tube transport vehicle.

[0019] 4. The clamping member also includes a connecting rod, which is connected between the clamping head and the meshing portion. The furnace tube fixing device also includes a positioning portion, which is provided with a positioning hole for positioning the connecting rod. The connecting rod is also sleeved with a spring, which is pre-stressed between the positioning portion and the meshing portion or the clamping head. The positioning portion is provided to position the clamping member, thereby guiding the movement direction of the clamping member. At the same time, a pre-stressed spring is sleeved on the connecting rod of the clamping member. The elastic force of the spring acts between the meshing portion and the positioning portion of the clamping member to keep the clamping member roughly horizontal, thereby preventing the clamping member from tilting due to the movement of its center of gravity not being near the positioning hole.

[0020] 5. The gear ring is provided with a plurality of transmission teeth circumferentially, and a transmission member is provided on the fixed seat. The transmission member includes a meshing transmission part and an operating part. The operating part is rotated to drive the meshing transmission part to rotate the meshing transmission teeth, thereby driving the gear ring to rotate. Such an arrangement avoids close contact between the operator and the furnace tube, thereby effectively reducing or avoiding the contamination of movable metal ions of the furnace tube, and avoiding a reduction in the yield rate of high-temperature diffusion furnace products.

[0021] 6. The transmission teeth are arranged on the lower end surface of the gear ring. In this arrangement, the transmission member is also correspondingly arranged below the gear ring. The transmission member can also play a role in supporting the gear ring, eliminating the need for additional gear ring support components, thereby reducing the production cost of the furnace tube transport vehicle; at the same time, the rotation axis of the transmission member is nearly parallel to the ground, and the operating surface of the operating part faces the side of the furnace tube fixing device, which is more conducive to the operation of the operator.

[0022] 7. The vehicle body frame includes a bottom plate, side plates and partitions. The bottom plate and the side plates enclose a storage space that is open at the top and sides. The partitions divide the storage space to form a plurality of first storage cavities. With such an arrangement, the furnace tube transport vehicle can transport a plurality of furnace tubes at a time, thereby improving the transport efficiency of the furnace tube transport vehicle and reducing the labor cost of operators in carrying the furnace tubes.

[0023] 8. A pallet is installed on the bottom plate, and the pallet is connected to the bottom plate through a slide rail so that the pallet can slide laterally relative to the bottom plate. The furnace tube fixing device is installed on the pallet. By installing the furnace tube fixing device on the slidable pallet, the pallet can be slid out from the side of the furnace tube transport vehicle during the furnace tube loading and unloading process to avoid collision between the furnace tube and the top plate, thereby avoiding bumps between the furnace tube during loading and unloading.

[0024] 9. The partition separates the storage space and forms a second storage cavity, which is used to store the wafer boat. A thermocouple fixing is also provided on the partition, and a limiting hole for limiting the thermocouple is provided on the thermocouple fixing. By arranging the second storage cavity for storing the wafer boat and the thermocouple fixing on the furnace tube transport vehicle, the furnace tube transport vehicle can transport the wafer boat and the thermocouple together with the furnace tube, thereby further improving the transportation efficiency of the furnace tube transport vehicle and reducing the labor cost of the operator in moving the furnace tube.

[0025] These features and advantages of the present invention will be disclosed in detail in the following specific implementation manners and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a schematic diagram of a furnace tube transport vehicle in an embodiment of the utility model;

[0027] Figure 2 This is a schematic diagram of a furnace tube fixing device in an embodiment of the utility model;

[0028] Figure 3 It is a schematic diagram of another furnace tube fixing device in an embodiment of the utility model;

[0029] Reference numerals:

[0030] 100, vehicle body frame, 110, bottom plate, 111, tray, 112, slide rail, 120, side plate, 130, partition, 140, first storage cavity, 150, second storage cavity, 160, thermocouple fixing part;

[0031] 200. furnace tube fixing device, 210. gear ring, 211. inner gear portion, 212. transmission tooth, 213. bevel gear portion, 220. clamping member, 221. meshing portion, 222. clamping head, 223. connecting rod, 224. spring, 225. nut portion, 230. idler gear, 240. transmission member, 241. meshing transmission portion, 242. operating portion, 250. bevel gear, 251. screw rod portion, 260. positioning portion, 270. fixing seat. DETAILED DESCRIPTION

[0032] The following is an explanation and description of the technical scheme of the embodiment of the utility model in conjunction with the drawings of the embodiment of the utility model, but the following embodiment is only a preferred embodiment of the utility model, not all. Based on the embodiment in the implementation mode, other embodiments obtained by those skilled in the art without creative work are all within the protection scope of the utility model.

[0033] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0034] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" and "several" mean two or more, unless otherwise clearly defined.

[0035] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] Embodiment 1:

[0037] like Figure 1 to Figure 2As shown, a high-temperature diffusion furnace tube transport vehicle proposed in an embodiment of the utility model comprises a vehicle frame 100 and a roller installed at the bottom of the vehicle frame 100, and the vehicle frame 100 has a first storage cavity 140 for accommodating the furnace tube. A furnace tube fixing device 200 is installed on the vehicle frame 100, and the furnace tube fixing device 200 comprises a fixing seat 270, a gear ring 210 and a plurality of circumferentially distributed clamping members 220, the gear ring 210 is rotatably arranged on the fixing seat 270, and a clamping area for clamping the furnace tube is formed between the plurality of clamping members 220, and the rotation of the gear ring 210 drives the clamping members 220 to move to adjust the size of the clamping area. The furnace tube is placed in the clamping area, and the movement of the clamping members 220 reduces the size of the clamping area so that the plurality of clamping members 220 clamp the furnace tube; the clamping area is expanded so that the plurality of clamping members 220 loosen the furnace tube.

[0038] With such arrangement, the clamping member 220 can adjustably clamp the furnace tube so that the high-temperature diffusion furnace furnace tube transport vehicle can better fix the furnace tube placed thereon, and even if the transport vehicle is bumpy during transportation, the furnace tube can be well fixed; at the same time, multiple clamping members 220 are distributed circumferentially, so that the furnace tube can be better clamped, and the stability of the furnace tube fixing device 200 in fixing the furnace tube is further improved; secondly, the operator can clamp the furnace tube by rotating the ring gear 210, which simplifies the operation of the furnace tube fixing device 200 clamping the furnace tube; furthermore, the adjustability of the clamping member 220 can better adapt to the furnace tube, and furnace tubes of different diameters can be stably fixed on the transport vehicle.

[0039] The vehicle body frame 100 includes a bottom plate 110 , and the furnace pipe fixing device 200 is installed on the bottom plate 110 .

[0040] In this embodiment, the clamping member 220 includes a clamping head 222, and the clamping head 222 is made of a flexible insulating material (such as rubber or wrapped with soft Teflon). This arrangement can prevent the movable metal ions from being contaminated when the clamping member 220 clamps the furnace tube.

[0041] Furthermore, the left and right sides of the end face of the clamping head 222 facing one side of the furnace tube are gradually concave toward the center to form an arc. Such a configuration can increase the contact area between the clamping head 222 and the furnace tube when clamping the furnace tube, so that the clamping member 220 can clamp the furnace tube more firmly, thereby improving the stability of the furnace tube fixed on the high-temperature diffusion furnace furnace tube transport vehicle.

[0042] In this embodiment, the ring gear 210 drives the clamping member 220 to move via a transmission member.

[0043] In a preferred embodiment, the transmission member is a plurality of idle gears 230 corresponding to the plurality of clamping members 220. The gear ring 210 is an inner gear ring 210, and an inner tooth portion 211 is circumferentially provided on the inner side thereof. The clamping member 220 includes a meshing portion 221, and the idle gear 230 meshes between the inner tooth portion 211 and the meshing portion 221. The rotation of the gear ring 210 drives the idle gear 230 to rotate, and the rotation of the idle gear 230 drives the meshing portion 221 to move, and the meshing portion 221 moves to move the clamping member 220, thereby changing the size of the clamping area.

[0044] The idle gear 230 is rotatably mounted on the rotating shaft, and the rotating shaft is fixed on the fixing seat 270. A bearing may be connected between the idle gear 230 and the rotating shaft to reduce friction when the idle gear 230 rotates.

[0045] In some other embodiments, a bearing may be connected between the rotating shaft and the fixing seat 270 , and the idler gear 230 may be fixedly connected to the rotating shaft.

[0046] By providing an idle gear 230 and a meshing portion 221 on the clamping member 220, transmission between the ring gear 210 and the clamping member 220 is achieved, so that the transmission structure between the ring gear 210 and the clamping member 220 is relatively simple, thereby reducing the production cost of the furnace tube fixing device 200; at the same time, multiple idle gears 230 are distributed circumferentially, so that the multiple idle gears 230 play a circumferential stabilizing role on the inner side of the ring gear 210, thereby improving the stability of the ring gear 210 when rotating.

[0047] The meshing portion 221 is a rack in a bar shape, and the tooth shape of the inner tooth portion 211 is a straight tooth shape. The idler gear 230 rotates to mesh with the meshing portion 221, so that the meshing portion 221 moves along the axial direction.

[0048] In some other embodiments, the meshing portion 221 is a worm, which is in the shape of a rod and has helical teeth thereon, and the idler gear 230 is correspondingly provided with helical teeth. The tooth shape of the inner tooth portion 211 is correspondingly set to a helical tooth shape.

[0049] More preferably, the clamping member 220 further includes a connecting rod 223, which is connected between the clamping head 222 and the meshing portion 221, and the furnace tube fixing device 200 further includes a positioning portion 260, which is provided with a positioning hole for positioning the connecting rod 223, and the connecting rod 223 is further sleeved with a spring 224, which is pre-stressed between the positioning portion 260 and the meshing portion 221.

[0050] The positioning portion 260 is provided to position the clamping member 220, thereby guiding the movement direction of the clamping member 220. At the same time, a pre-stressed spring 224 is sleeved on the connecting rod 223 of the clamping member 220. The elastic force of the spring 224 acts between the meshing portion 221 of the clamping member 220 and the positioning portion 260 to keep the clamping member 220 roughly horizontal, thereby preventing the clamping member 220 from tilting due to the movement of the clamping member 220 causing its center of gravity to be not near the positioning hole.

[0051] It is understandable that in some other embodiments, the spring 224 may also be pre-loaded on the clamping head 222 and the positioning portion 260 .

[0052] In some other embodiments, such as Figure 3 As shown, the transmission member is a plurality of bevel gears 250 corresponding to the plurality of clamping members 220, a coaxial screw rod portion 251 is provided on the bevel gear 250, and a bevel gear portion 213 is circumferentially provided on the upper end surface of the gear ring 210, and the bevel gear portion 213 is meshed with the bevel gear 250 for transmission so that the rotation of the gear ring 210 drives the screw rod portion 251 to rotate. The clamping member 220 includes a nut portion 225, which is threadedly connected to the screw rod portion 251, and the rotation of the screw rod portion 251 drives the nut portion 225 to move forward and backward along the setting direction of the screw rod portion 251, so that the clamping member 220 moves to change the size of the clamping area.

[0053] Embodiment 2:

[0054] Based on the first embodiment, Figure 1 to Figure 2 As shown, in this embodiment, a plurality of transmission teeth 212 are circumferentially provided on the ring gear 210, and a rotatable transmission member 240 is provided on the fixed seat 270. The transmission member 240 includes an engaging transmission part 241 and an operating part 242. The operating part 242 is rotated to drive the engaging transmission part 241 to rotate the engaging transmission teeth 212, thereby driving the ring gear 210 to rotate.

[0055] The operator can rotate the operating part 242 using a tool to realize the rotation of the ring gear 210, so that the clamping member 220 clamps or releases the furnace tube.

[0056] Such an arrangement avoids close contact between the operator and the furnace tube, thereby effectively reducing or avoiding the contamination of movable metal ions of the furnace tube and avoiding a reduction in the yield rate of high-temperature diffusion furnace products.

[0057] The operating portion 242 is cylindrical, and a hexagonal nut groove is provided at the center thereof. The operator uses a tool with a hexagonal end to operate it.

[0058] Preferably, in this embodiment, the transmission teeth 212 are arranged on the lower end surface of the ring gear 210. With this arrangement, the transmission member 241 is also correspondingly arranged below the ring gear 210. The transmission member 241 can also play a role in supporting the ring gear 210, eliminating the need for additional support components for the ring gear 210, thereby reducing the production cost of the furnace tube transport vehicle; at the same time, the rotation axis of the transmission member 241 is nearly parallel to the ground, and the operating surface of the operating part 242 faces the side of the furnace tube fixing device, which is more conducive to the operation of the operator.

[0059] Embodiment three:

[0060] Based on the first and second embodiments, Figure 1 to Figure 2 As shown, in this embodiment, the vehicle body frame 100 further includes side panels 120 and partitions 130 . The bottom plate 110 and the side panels 120 enclose a storage space with an open top and sides. The partitions 130 divide the storage space to form a plurality of first storage chambers 140 .

[0061] With such arrangement, the furnace tube transport vehicle can transport multiple furnace tubes at a time, thereby improving the transport efficiency of the furnace tube transport vehicle and reducing the labor cost of operators in carrying the furnace tubes.

[0062] In a preferred embodiment, a tray 111 is installed on the bottom plate 110 , and the tray 111 and the base are connected via a slide rail 112 so that the tray 111 can slide laterally relative to the bottom plate 110 , and the furnace tube fixing device 200 is installed on the tray 111 .

[0063] The vehicle body frame 100 is also provided with a top plate, on which a clearance groove is formed to give way to the furnace pipes. However, during the loading and unloading of the furnace pipes, the top plate may interfere with the furnace pipes, thereby causing the furnace pipes to collide with the top plate during the loading and unloading process. By installing the furnace pipe fixing device 200 on the slidable tray 111, the tray 111 can be slid out from the side of the furnace pipe transport vehicle during the loading and unloading process of the furnace pipes, thereby avoiding collision between the furnace pipes and the top plate, thereby avoiding collision between the furnace pipes during the loading and unloading process.

[0064] The tray 111 is also provided with an operable handle, and the tray 111 can be pulled to slide laterally by the handle.

[0065] In another preferred embodiment, the partition 130 divides the storage space and further forms a second storage cavity 150, and the second storage cavity 150 is used to store the wafer boat.

[0066] The wafers are placed in the furnace tubes via wafer boats, which also need to be cleaned and dried. By providing a second storage chamber 150 for storing the wafer boats on the furnace tube transport vehicle, the furnace tube transport vehicle can transport the wafer boats while transporting the furnace tubes, thereby further improving the transport efficiency of the furnace tube transport vehicle and reducing the labor cost of operators moving the furnace tubes.

[0067] In another preferred embodiment, the partition 130 further includes a thermocouple fixture 160, and a limiting hole for limiting the thermocouple is provided on the thermocouple fixture 160. The thermocouple plays a role of heating in the furnace tube, and the thermocouple also needs to be cleaned and dried. By arranging the thermocouple fixture 160 on the furnace tube transport vehicle, the furnace tube transport vehicle can transport the thermocouple together with the furnace tube, thereby further improving the transportation efficiency of the furnace tube transport vehicle and reducing the labor cost of the operator for carrying the furnace tube.

[0068] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Those skilled in the art should understand that the utility model includes but is not limited to the contents described in the drawings and the above specific implementation. Any modification that does not deviate from the functional and structural principles of the utility model will be included in the scope of the claims.

Claims

1. A high-temperature diffusion furnace tube transport vehicle, comprising a vehicle frame and rollers mounted at the bottom of the vehicle frame, wherein the vehicle frame has a first storage cavity for accommodating the furnace tube, and is characterized in that: A furnace tube fixing device is installed on the vehicle body frame, and the furnace tube fixing device includes a fixing seat, a gear ring and a plurality of circumferentially arranged clamping members. The gear ring is rotatably arranged on the fixing seat, and a clamping area for clamping the furnace tube is formed between the plurality of clamping members. The rotation of the gear ring drives the plurality of clamping members to move synchronously to adjust the size of the clamping area.

2. A high temperature diffusion furnace tube transport vehicle as claimed in claim 1, characterized in that: The furnace tube fixing device also includes an idle gear arranged corresponding to the clamping member, the inner side of the gear ring is circumferentially provided with an internal tooth portion, the clamping member includes an engaging portion, and the idle gear is engaged between the internal tooth portion and the engaging portion so that the rotation of the gear ring drives the clamping member to move.

3. A high temperature diffusion furnace tube transport vehicle as claimed in claim 2, characterized in that: The meshing portion is a rack or a worm.

4. A high temperature diffusion furnace tube transport vehicle as claimed in claim 2, characterized in that: The clamping member also includes a clamping head and a connecting rod, wherein the connecting rod is connected between the clamping head and the meshing portion. The furnace tube fixing device also includes a positioning portion, wherein the positioning portion is provided with a positioning hole for positioning the connecting rod. A spring is also sleeved on the connecting rod, and the spring is pre-stressed between the positioning portion and the meshing portion or the clamping head.

5. The high temperature diffusion furnace tube transport vehicle according to claim 1, characterized in that: The clamping member comprises a clamping head, and the left and right sides of the end surface of the clamping head close to one side of the furnace tube are gradually concave toward the center to form an arc shape.

6. A high temperature diffusion furnace tube transport vehicle according to any one of claims 1 to 5, characterized in that: The gear ring is provided with a plurality of transmission teeth circumferentially arranged thereon, and the fixed seat is provided with a transmission member, the transmission member includes an engaging transmission part and an operating part, and the operating part is rotated to drive the engaging transmission part to rotate and engage the transmission teeth, thereby driving the gear ring to rotate.

7. A high temperature diffusion furnace tube transport vehicle as claimed in claim 6, characterized in that: The transmission teeth are arranged on the lower end surface of the gear ring.

8. The high temperature diffusion furnace tube transport vehicle according to claim 1, characterized in that: The vehicle body frame includes a bottom plate, side plates and a partition plate. The bottom plate and the side plates enclose a storage space with an open upper end and side surfaces. The partition plate divides the storage space to form a plurality of the first storage chambers.

9. A high temperature diffusion furnace tube transport vehicle as claimed in claim 8, characterized in that: A tray is installed on the bottom plate, and the tray is connected to the bottom plate through a slide rail, so that the tray can slide laterally relative to the bottom plate, and the furnace tube fixing device is installed on the tray.

10. A high temperature diffusion furnace tube transport vehicle as claimed in claim 8, characterized in that: The partition separates the storage space to form a second storage cavity, and the second storage cavity is used to store the wafer boat. A thermocouple fixing piece is also provided on the partition, and a limiting hole for limiting the thermocouple is provided on the thermocouple fixing piece.

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