Non-horizontal-position material taking device

Abstract

The utility model relates to a non-horizontal-position material taking device which comprises a base. The rotary transmission mechanism comprises a rotary driving mechanism and a linkage transmission combined arm, and the non-horizontal-position material taking assembly is connected with the linkage transmission combined arm; the non-horizontal-position material taking assembly comprises a material pressing frame, an inclined supporting seat, a material taking fork and a fork lifting driving mechanism, the inclined supporting seat is arranged on the rotary transmission mechanism, the material pressing frame is fixedly arranged at the top of the inclined supporting seat, and the material taking fork is arranged on the inclined supporting seat in a sliding mode and connected with the fork lifting driving mechanism arranged on the inclined supporting seat. According to the non-horizontal-position material taking assembly, the material taking forks are in the inclined state, the forks are discharged in the inclined direction of the material position during material taking, the situation that the material box limiting device collides with the material box during material taking and placing can be avoided, contact is smoother during material taking and placing, and vibration of the material taking forks in the material taking process is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a non-horizontal material taking device. Background Art

[0002] In the field of semiconductor processing equipment, it is well known that different structural forms of material picking and placing mechanisms are used to realize material picking and placing during the material loading and unloading process. In the process of researching and realizing material picking and placing, it is found that the material picking and placing mechanisms in the prior art have at least the following problems: in some cases, the material box has an opening on one side. At this time, in order to prevent the material in the material box from slipping out, the material box needs to be tilted at a certain angle when placed. When traditionally picking and placing materials, the material box limit device collides with the material box and generates vibrations. Therefore, it is necessary to provide a non-horizontal material picking device, and the action of picking and placing materials needs to be optimized. Utility Model Content

[0003] To this end, the technical problem to be solved by the utility model is to overcome the shortcomings of the prior art and provide a non-horizontal material picking device, which can reduce the impact between the material box limiting device and the material box when picking up and placing materials, making the contact smoother when picking up and placing materials, and reducing the vibration of the picking fork during the material picking process.

[0004] In order to solve the above technical problems, the utility model provides a non-horizontal material taking device, comprising:

[0005] Base;

[0006] The rotary transmission mechanism comprises a rotary drive mechanism and a linkage transmission assembly arm, wherein the rotary drive mechanism is arranged on the base, the linkage transmission assembly arm is connected to the rotary drive mechanism, and the rotary drive mechanism is used to control the linkage transmission assembly arm to rotate around the center of the base; the linkage transmission assembly arm itself can swing and telescope;

[0007] A non-horizontal material picking component is connected to the linkage transmission combination arm, and the rotation drive mechanism and the linkage transmission combination arm cooperate to drive the non-horizontal material picking component to achieve position adjustment; the non-horizontal material picking component includes a material pressing frame, an inclined support seat, a material picking fork and a fork lifting drive mechanism, the inclined support seat is arranged on the rotation transmission mechanism, the material pressing frame is fixedly arranged on the top of the inclined support seat, the material picking fork is slidably arranged on the inclined support seat, and is connected to the fork lifting drive mechanism arranged on the inclined support seat.

[0008] In one embodiment of the utility model, the fork lifting drive mechanism includes a servo motor, a screw rod and a slider, the output end of the servo motor is connected to one end of the screw rod, the other end of the screw rod is connected to the slider, and the slider is connected to the material picking fork.

[0009] In one embodiment of the utility model, a protective shell is provided on the outer side of the fork lifting drive mechanism.

[0010] In one embodiment of the utility model, the inclined support seat includes a base plate, an inclined support plate and a reinforcing rib plate, the inclined support plate is inclinedly arranged on the base plate, and the angle between the inclined support plate and the base plate is greater than 90°, and the reinforcing rib plate is arranged between the base plate and the inclined support plate.

[0011] In one embodiment of the utility model, a group of linear slide rails are provided on the oblique support plate, and a slide seat matching the linear slide rails is provided on the material picking fork.

[0012] In one embodiment of the utility model, an elastic pad is provided on the side of the material pressing frame facing the material picking fork.

[0013] In one embodiment of the utility model, the linked transmission combination arm includes a first transmission arm, a second transmission arm, a servo motor, a first rotation drive assembly and a second rotation drive assembly, the servo motor is arranged in the base, one end of the first transmission arm is rotatably arranged on the upper surface of the base, the first rotation drive assembly is arranged in the first transmission arm and is connected to the output shaft of the servo motor, one end of the second transmission arm is rotatably connected to the other end of the first transmission arm, the second rotation drive assembly is arranged in the second transmission arm, and the second rotation drive assembly and the first rotation drive assembly are connected by a rotating connecting member.

[0014] In one embodiment of the present invention, the first rotary drive assembly and the second rotary drive assembly each include a driving pulley, a driven pulley and a conveyor belt, and the driving pulley and the driven pulley are driven by the conveyor belt.

[0015] In one embodiment of the present invention, a support sleeve is provided between the rotary drive mechanism and the linkage transmission assembly arm, and the support sleeve wraps the servo motor.

[0016] In one embodiment of the utility model, the material picking fork is provided with positioning PIN pins, and the number of the positioning PIN pins is 3 and they are arranged in a triangle.

[0017] The above technical solution of the utility model has the following advantages compared with the prior art:

[0018] The utility model discloses a non-horizontal material picking device, in which the picking fork of the non-horizontal material picking component is in an inclined state, and when picking materials, the fork is extended along the inclined direction of the material level, so that the contact will be smoother when picking and placing materials, and the vibration of the picking fork will be greatly reduced, which effectively avoids the situation in which the material box limiting device collides with the material box to a large extent and generates vibration when picking and placing materials in the traditional way. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to make the content of the utility model easier to understand, the utility model is further described in detail according to the specific embodiments of the utility model in combination with the accompanying drawings, wherein

[0020] Figure 1 It is a side view of the non-horizontal material taking device in the preferred embodiment of the utility model;

[0021] Figure 2 yes Figure 1 A side view of a non-horizontal reclaiming device is shown;

[0022] Figure 3 yes Figure 1 The structural schematic diagram of the non-horizontal material taking component of the non-horizontal material taking device shown;

[0023] Explanation of the reference numerals in the drawings in the specification: 1. Base; 2. Rotary drive mechanism; 3. Linked transmission combination arm; 31. First transmission arm; 32. Second transmission arm; 4. Horizontal material picking assembly; 41. Material pressing frame; 42. Oblique support seat; 421. Bottom plate; 422. Oblique support plate; 423. Reinforcing rib plate; 424. Linear slide rail; 43. Material picking fork; 431. Positioning PIN needle; 432. Slide seat; 44. Fork lifting drive mechanism; 441. Servo motor; 442. Screw rod; 443. Slider; 5. Support sleeve. DETAILED DESCRIPTION

[0024] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0025] Reference Figure 1 and 2As shown, the non-horizontal material taking device described in the utility model comprises: a base 1; A rotary transmission mechanism, which includes a rotary drive mechanism 2 and a linkage transmission assembly arm 3, wherein the rotary drive mechanism 2 is arranged on the base 1, the linkage transmission assembly arm 3 is connected to the rotary drive mechanism 2 and is controlled by the rotary drive mechanism 2 to rotate around the center of the base 1; the rotary drive mechanism 2 is used to control the linkage transmission assembly arm 3 to rotate around the center of the base 1; the linkage transmission assembly arm 3 itself can swing and telescope; a non-horizontal material picking component 4, which is connected to the linkage transmission assembly arm 3, and the rotary drive mechanism 2 and the linkage transmission assembly arm 3 work together to drive the non-horizontal material picking component 4 to achieve position adjustment; the non-horizontal material picking component 4 includes a material pressing frame 41, an inclined support seat 42, a material picking fork 43 and a fork lifting drive mechanism 44, the inclined support seat 42 is arranged on the rotary transmission mechanism 2, the material pressing frame 41 is fixedly arranged on the top of the inclined support seat 42, the material picking fork 43 is slidably arranged on the inclined support seat 42, and is connected to the fork lifting drive mechanism 44 arranged on the inclined support seat 42. Among them, the material picking fork 43 is provided with a positioning PIN needle 431, and the number of the positioning PIN needles 431 is 3 and they are arranged in a triangle.

[0026] The non-horizontal material picking device based on the above structure can meet the bilateral material picking and placing requirements. When picking up materials, the rotating drive mechanism 2 can control the linkage transmission combination arm 3 to rotate, so as to realize the steering adjustment of the non-horizontal material picking component 4. At the same time, the linkage transmission combination arm 3 itself can swing, and the material picking fork 43 can be extended or retracted while adjusting the position of the material picking fork 43. Since the material picking fork 43 is in an inclined state, it can be forked along the inclined direction of the material level when picking up materials. The contact will be smoother and the vibration will be reduced when picking up and placing materials, which can avoid the situation in which the material box limit device collides with the material box to cause vibration during traditional material picking and placing.

[0027] like Figure 2 As shown, the fork lifting drive mechanism 44 includes a servo motor 441, a screw rod 442 and a slider 443. The output end of the servo motor 441 is connected to one end of the screw rod 442, and the other end of the screw rod 442 is connected to the slider 443. The slider 443 is connected to the material picking fork 43. The servo motor 441 starts to control the screw rod 442 to rotate, and the material picking fork 43 rises as a whole through the slider 443, and contacts and clamps the carrier with the material pressing frame 41 to prevent the carrier from shaking during movement.

[0028] Furthermore, a protective shell is provided on the outer side of the fork lifting drive mechanism 44. The protective shell encloses the servo motor 441, the screw rod 442 and the slider 443, which not only plays a role of safety protection, but also has a dustproof effect.

[0029] In this embodiment, the inclined support seat 42 includes a bottom plate 421, an inclined support plate 422 and a reinforcing rib plate 423. The inclined support plate 422 is inclinedly arranged on the bottom plate 421, and the angle between the inclined support plate 422 and the bottom plate 421 is greater than 90°. The reinforcing rib plate 423 is arranged between the bottom plate 421 and the inclined support plate 422. A set of linear slide rails 424 are arranged on the inclined support plate 422, and a slide seat 432 matching the linear slide rails 424 is arranged on the picking fork 43.

[0030] In addition, an elastic pad 411 is provided on the side of the material pressing frame 41 facing the material picking fork 43. The elastic pad 411 is designed to prevent the material pressing frame 41 and the material picking fork 43 from causing crushing to the top of the carrier when clamping the carrier.

[0031] like Figure 3 As shown, the linkage transmission combination arm 3 includes a first transmission arm 31, a second transmission arm 32, a servo motor, a first rotation drive assembly and a second rotation drive assembly, the servo motor is arranged in the base 1, one end of the first transmission arm 31 is rotatably arranged on the upper surface of the base 1, the first rotation drive assembly is arranged in the first transmission arm 31 and is connected to the output shaft of the servo motor, one end of the second transmission arm 32 is rotatably connected to the other end of the first transmission arm 31, the second rotation drive assembly is arranged in the second transmission arm 32, and the second rotation drive assembly and the first rotation drive assembly are connected by a rotating connecting piece. After the servo motor is started, the first rotary drive component controls the first transmission arm 31 to swing, and the second rotary drive component controls the second transmission arm 32 to swing in a linkage manner. The combination of the two realizes the extension and retraction action of the linkage transmission combination arm 3; when the linkage transmission combination arm 3 is extended, the material picking fork 43 is controlled to swing to the corresponding position for picking up materials, and then the rotary drive mechanism 2 controls the linkage transmission combination arm 3 to turn and place the materials in the corresponding storage place. Finally, the linkage transmission combination arm 3 retracts, the material picking fork 43 is separated from the materials, and the rotary drive mechanism 2 controls the transmission combination arm 3 to turn and return to its original position.

[0032] Preferably, the first rotating drive assembly 34 and the second rotating drive assembly 35 are both pulley transmission assemblies, and the pulley transmission assembly includes a driving pulley, a driven pulley and a conveyor belt, and the driving pulley and the driven pulley are driven by the conveyor belt.

[0033] Furthermore, a support sleeve 5 is provided between the rotary drive mechanism 2 and the linkage transmission assembly arm 3, and the support sleeve 5 wraps the servo motor therein.

[0034] In this embodiment, the rotary drive mechanism 2 includes a driving source, a pulley transmission assembly and a rotating disk. The rotating disk is connected to the driving source via the pulley transmission assembly. The servo motor is installed on the rotating disk. The support sleeve 5 is arranged on the rotating disk and is located on the outside of the servo motor 33.

[0035] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the invention of the utility model.

Claims

1. A non-horizontal material taking device, characterized in that: include: Base; A rotary transmission mechanism, comprising a rotary drive mechanism and a linkage transmission assembly arm, wherein the rotary drive mechanism is arranged on the base, and the linkage transmission assembly arm is connected to the rotary drive mechanism; A non-horizontal material picking component is connected to the linkage transmission combination arm, and the rotation drive mechanism and the linkage transmission combination arm cooperate to drive the non-horizontal material picking component to achieve position adjustment; the non-horizontal material picking component includes a material pressing frame, an inclined support seat, a material picking fork and a fork lifting drive mechanism, the inclined support seat is arranged on the rotation transmission mechanism, the material pressing frame is fixedly arranged on the top of the inclined support seat, the material picking fork is slidably arranged on the inclined support seat, and is connected to the fork lifting drive mechanism arranged on the inclined support seat.

2. A non-horizontal material taking device according to claim 1, characterized in that: The fork lifting drive mechanism includes a servo motor, a screw rod and a slider. The output end of the servo motor is connected to one end of the screw rod, the other end of the screw rod is connected to the slider, and the slider is connected to the material picking fork.

3. A non-horizontal material taking device according to claim 1, characterized in that: A protective shell is provided on the outer side of the fork lifting drive mechanism.

4. A non-horizontal material taking device according to claim 1, characterized in that: The inclined support seat includes a base plate, an inclined support plate and a reinforcing rib plate; the inclined support plate is inclinedly arranged on the base plate, and the angle between the inclined support plate and the base plate is greater than 90°, and the reinforcing rib plate is arranged between the base plate and the inclined support plate.

5. A non-horizontal material taking device according to claim 4, characterized in that: The oblique support plate is provided with a set of linear slide rails, and the material-retrieving fork is provided with a slide seat matching the linear slide rails.

6. The non-horizontal material taking device according to claim 1, characterized in that: An elastic pad is arranged on the side of the material pressing frame facing the material taking fork.

7. The non-horizontal material taking device according to claim 1, characterized in that: The linked transmission combination arm includes a first transmission arm, a second transmission arm, a servo motor, a first rotation drive assembly and a second rotation drive assembly, the servo motor is arranged in the base, one end of the first transmission arm is rotatably arranged on the upper surface of the base, the first rotation drive assembly is arranged in the first transmission arm and is connected to the output shaft of the servo motor, one end of the second transmission arm is rotatably connected to the other end of the first transmission arm, the second rotation drive assembly is arranged in the second transmission arm, and the second rotation drive assembly and the first rotation drive assembly are connected by a rotating connecting piece.

8. A non-horizontal material taking device according to claim 7, characterized in that: The first rotating drive assembly and the second rotating drive assembly are both pulley transmission assemblies, and the pulley transmission assembly includes a driving pulley, a driven pulley and a conveyor belt, and the driving pulley and the driven pulley are driven by the conveyor belt.

9. A non-horizontal material taking device according to claim 8, characterized in that: A support sleeve is provided between the rotary drive mechanism and the linkage transmission assembly arm, and the support sleeve wraps the servo motor.

10. The non-horizontal material taking device according to claim 1, characterized in that: The material picking fork is provided with positioning PIN pins, and the number of the positioning PIN pins is 3 and they are arranged in a triangle.

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