High-temperature-resistant roller
By designing a high -temperature -resistant roller composed of plastic hard pipes and metal pipes, the problem of wearing existing roller wheels under high temperature environment is solved, extending the service life and ensuring the stability of the silicon wafer transmission.
Patent Information
- Application Number
- CN202421002660.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-10
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2034-05-10
AI Technical Summary
Existing rollers are prone to wear when used in high temperature environments, resulting in a shortened life and cannot meet the need to increase the transmission speed of silicon wafers in wet etching equipment.
A high -temperature -resistant roller is designed. The main body is composed of plastic hard pipes and metal pipes. Plastic hard pipes are nested outside the metal pipe. The ends of the metal tube are fixed with PP blockage. The outer wall of the axis is fixed with straight gears and cone gears, respectively.
The high -temperature roller wheel has extended the service life in high temperature environments, reduced the speed of equipment level transmission, ensured the stability of the line speed, ensured the stability of the transmission of the silicon wafer, and avoided the damage of the silicon wafer.
Smart Images
Figure CN222410303U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of transmission rollers, and in particular relates to a high temperature resistant roller. Background Art
[0002] In the photovoltaic industry, wet etching is an important process in the production of solar cells. Roller transmission is commonly used on wet etching cleaning equipment to transport silicon wafers. The transmission speed is generally around 1.5m / min. Since the roller is immersed in the liquid medicine, there are certain restrictions on the installation method of the roller. At present, the installation of the roller generally adopts the method of directly rotating with the mounting seat. This structure has low cost and is easy to install. However, the speed of the roller cannot be too high. Once it exceeds the use requirements, it will cause abnormal wear of the roller and the mounting seat, greatly reducing the life span and affecting the overall life of the equipment.
[0003] As users' demands for increasing production capacity in each process section of wet etching are increasing, the transmission speed requirement for silicon wafers has gradually increased from the original 1.5m / min to 3.5m / min, and there is a demand for further improvement in the future. At the same time, the rollers used for horizontal transmission of chain alkali polishing equipment are room temperature processes, and the temperature of the process tank requires the solution to be above 80 degrees, which places high requirements on the roller life. Utility Model Content
[0004] The purpose of the utility model is to provide a high temperature resistant roller to solve the problems raised in the above background technology.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a high temperature resistant roller, comprising a roller body for silicon wafer transmission and mounting blocks arranged on both sides of the roller body, the roller body comprising a plastic hard tube and a metal tube, the plastic hard tube is nested on the outside of the metal tube, PP plugs are fixed at both ends of the metal tube, a PEEK axis is fixed in the PP plug, and a spur gear and a bevel gear are respectively fixed on the outer wall of the PEEK axis.
[0006] In a further embodiment, the plastic hard tube is made of PP material, and the wall thickness of the plastic hard tube is 5 mm on one side.
[0007] In a further embodiment, the metal tube is made of stainless steel, and the wall thickness of the metal tube is 2 mm.
[0008] In a further embodiment, a thread groove is formed on the outer wall of the plastic hard tube, and the depth of the thread groove on the outer wall of the plastic hard tube is 0.15 mm.
[0009] In a further embodiment, a through hole is provided on the mounting block for the PEEK axis to rotate, and the outer diameter of the roller body is 40 mm.
[0010] Technical effects and advantages of the utility model:
[0011] The high temperature resistant roller can make the roller body have high temperature resistance by setting the plastic hard tube and the metal tube, so as to avoid damage to the roller body during long-term high temperature use, thereby extending the service life of the roller body;
[0012] By increasing the diameter of the roller body, the belt speed of the horizontal transmission of the equipment is effectively reduced while ensuring the stability of the line speed. The high-temperature resistant roller not only has the function of high temperature resistance, which increases the service life of the roller, but also effectively reduces the belt speed of the horizontal transmission of the equipment while ensuring the stability of the line speed, making the silicon wafer transmission more stable and avoiding damage to the silicon wafer during the transmission process. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0014] Figure 1 It is a schematic diagram of the structure of the utility model;
[0015] Figure 2 It is a partial cross-sectional view of the utility model;
[0016] Figure 3 For the utility model Figure 2 Enlarged view of point A in the middle.
[0017] In the figure: 1. Roller body; 2. Mounting block; 3. Plastic hard pipe; 4. Metal pipe; 5. PP plug; 6. PEEK axis; 7. Spur gear; 8. Bevel gear. DETAILED DESCRIPTION
[0018] In the following description, a large number of specific details are given to provide a more thorough understanding of the utility model. However, it is obvious to those skilled in the art that the utility model can be implemented without one or more of these details. In other examples, in order to avoid confusion with the utility model, some technical features known in the art are not described.
[0019] Unless otherwise defined, the directions of up, down, left, right, front, back, inside and outside involved in this document are based on the directions of up, down, left, right, front, back, inside and outside in the figures shown in the present utility model, and are explained here together.
[0020] In order to make the roller resistant to high temperatures and ensure more stable silicon wafer transmission, Figure 1 , Figure 2 and Figure 3 As shown, mounting blocks 2 are rotatably connected on both sides of the roller body 1. The roller body 1 can be mounted at a suitable position through the mounting blocks 2. The roller body 1 includes a plastic hard tube 3 and a metal tube 4. The plastic hard tube 3 is nested outside the metal tube 4. The plastic hard tube 3 is made of PP material, and the wall thickness of the plastic hard tube 3 is 5mm on one side. A thread groove is provided on the outer wall of the plastic hard tube 3, and the thread groove depth of the outer wall of the plastic hard tube 3 is 0.15mm. The metal tube 4 is made of stainless steel, and the wall thickness of the metal tube 4 is 2mm. Through the arrangement of the plastic hard tube 3 and the metal tube 4, the roller body 1 can have high temperature resistance, avoiding damage to the roller body 1 during long-term high temperature use, thereby extending the service life of the roller body 1.
[0021] Both ends of the metal tube 4 are sealed and welded with PP plugs 5, and a PEEK axis 6 is fixed in the PP plug 5. The outer wall of the PEEK axis 6 is respectively fixed with a spur gear 7 and a bevel gear 8. A through hole for the PEEK axis 6 to rotate is opened on the mounting block 2. The spur gear 7 and the bevel gear 8 can be better connected with different external transmission equipment, thereby driving the roller body 1 to rotate. The outer diameter of the roller body 1 is 40 mm. By increasing the diameter of the roller body 1, the belt speed of the horizontal transmission of the equipment is effectively reduced, while ensuring the stability of the linear speed, making the silicon wafer transmission more stable and avoiding damage to the silicon wafer during the transmission process.
[0022] The standard parts used in the utility model can be purchased from the market, and special-shaped parts can be customized according to the description in the specification and the drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the prior art. Machinery, parts and equipment all adopt conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here. The control method of the utility model is controlled by a controller, and the control circuit of the controller can be realized by simple programming by technicians in this field. The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.
[0023] In the description of the present invention, it is necessary to understand that the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0024] Working principle:
[0025] When the high temperature resistant roller is in use, the roller body 1 is installed at a suitable position through the installation block 2. A plurality of roller bodies 1 together constitute a transmission system. According to the model of the transmission equipment, the transmission equipment is connected to the spur gear 7 or the bevel gear 8, thereby driving the roller body 1 to rotate, and the silicon wafer is placed on the surface of the roller body 1. The roller body 1 rotates to transport the silicon wafer. The setting of the plastic hard tube 3 and the metal tube 4 makes the roller body 1 have high temperature resistance to avoid damage to the roller body 1 during long-term high temperature use. At the same time, by increasing the diameter of the roller body 1, the belt speed of the horizontal transmission of the equipment is effectively reduced while ensuring the stability of the line speed, making the silicon wafer transmission more stable and avoiding damage to the silicon wafer during the transmission process.
[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A high temperature resistant roller, comprising a roller body (1) for transmitting silicon wafers and mounting blocks (2) arranged on both sides of the roller body (1), characterized in that: The roller body (1) comprises a plastic hard tube (3) and a metal tube (4); the plastic hard tube (3) is nested outside the metal tube (4); PP plugs (5) are fixed at both ends of the metal tube (4); a PEEK shaft (6) is fixed inside the PP plug (5); and a spur gear (7) and a bevel gear (8) are respectively fixed to the outer wall of the PEEK shaft (6).
2. A high temperature resistant roller according to claim 1, characterized in that: The plastic hard tube (3) is made of PP material, and the wall thickness of the plastic hard tube (3) is 5 mm on one side.
3. The high temperature resistant roller according to claim 1, characterized in that: The metal tube (4) is made of stainless steel, and the wall thickness of the metal tube (4) is 2 mm.
4. A high temperature resistant roller according to claim 2, characterized in that: The outer wall of the plastic hard tube (3) is provided with a thread groove, and the depth of the thread groove on the outer wall of the plastic hard tube (3) is 0.15 mm.
5. The high temperature resistant roller according to claim 1, characterized in that: The mounting block (2) is provided with a through hole for the PEEK axis (6) to rotate, and the outer diameter of the roller body (1) is 40 mm.