Visual in-situ material synthesis growth device

Abstract

The utility model discloses a visual in-situ material synthesis growth device which comprises a growth furnace structure, the growth furnace structure is composed of a growth furnace main body and a closed upper cover hinged to the growth furnace main body, groove bodies are formed in the growth furnace main body and the closed upper cover and used for placing a growth crucible, a plurality of heating assemblies are arranged in the groove bodies, and the heating assemblies are connected with the growth furnace main body and the closed upper cover. A visual observation window for observing the interior of the tank body is arranged on the closed upper cover; and the growth visual monitoring assembly is arranged on the closed upper cover and located on the visual observation window, and comprises a mounting bracket and a microscope which is arranged on the mounting bracket and loaded with a CCD (Charge Coupled Device) camera, and the microscope is used for observing the synthetic growth process of the material in the growth crucible through the visual observation window. The microscope loaded with the CCD camera is used for recording and observing the synthetic growth process change of the material in the growth crucible, so that the temperature in the growth furnace is conveniently adjusted, the synthetic growth process and speed of the material are regulated and controlled, and the synthetic growth efficiency and quality of the material are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of material synthesis and growth, in particular to a visualized in-situ material synthesis and growth device. Background Art

[0002] Gas phase transport, also known as gas phase transmission or gas phase transportation, is a common method for the synthesis, growth and preparation of advanced materials. It can generally be divided into physical vapor transport (PVT) and chemical vapor transport (CVT). The growth raw materials are decomposed into gas phase components and then transported to the seed crystal driven by the axial temperature gradient inside the crucible tube to crystallize and grow semiconductor single crystal materials, or one or more compound raw materials containing crystal materials and a transport agent are used in a closed crucible tube container to pass into a reaction chamber where a substrate is placed to produce volatile products and transport them from one end of the container to the other end under a certain temperature gradient.

[0003] Therefore, during the in-situ material synthesis and growth process, for some special experimental requirements, it is generally necessary to observe and record the materials in the synthesis and growth process. However, in the prior art, since the in-situ materials are mostly prepared directly in the growth furnace during synthesis and growth, and the temperature in the traditional growth furnace is relatively high, it is impossible to directly observe, record and analyze the process, changes and quality of the material synthesis and growth.

[0004] To this end, the present application specifically proposes a visualized in-situ material synthesis growth device to solve the above-mentioned technical problems, and the above-mentioned content is only used to assist in understanding the technical solution of the present application, and does not represent an admission that the above-mentioned content is the closest prior art. Utility Model Content

[0005] The main purpose of the utility model is to provide a visualized in-situ material synthesis growth device which can use a microscope equipped with a CCD camera to record and observe material changes in a growth crucible during the in-situ material synthesis growth process.

[0006] In order to solve the above technical problems, the utility model provides a visualized in-situ material synthesis growth device, comprising:

[0007] The growth furnace structure is composed of a growth furnace body and a closed upper cover hingedly mounted on the growth furnace body, wherein a trough is provided on one side of the growth furnace body close to the closed upper cover for placing a growth crucible loaded with synthetic growth materials, and a plurality of heating components are provided in the trough on one side of the growth furnace body close to the closed upper cover for controlling the growth crucible to be at a constant temperature or a gradient temperature, and a visual observation window is provided on the closed upper cover for observing the interior of the trough;

[0008] The growth visualization monitoring component is arranged on the closed upper cover and located at the visual observation window, and comprises a mounting bracket and a microscope equipped with a CCD camera arranged on the mounting bracket. The microscope equipped with the CCD camera is used to observe the synthetic growth process of the material in the growth crucible through the visual observation window.

[0009] Furthermore, a plurality of vacuum holes are provided in the main body of the growth furnace, a vacuum machine for communicating with the outside of the main body of the growth furnace is provided in the vacuum hole, and a controller for driving the vacuum machine and the heating component is provided on the main body of the growth furnace.

[0010] Furthermore, a rubber sealing gasket is provided on one side of the growth furnace body close to the closed upper cover.

[0011] Furthermore, the growth furnace body and the closed upper cover are connected via a locking assembly;

[0012] The locking assembly includes a connection block installed on the closed upper cover, a locking block arranged on the growth furnace body and having a groove, and a connection control assembly for controlling the positioning of the connection block on the locking block, wherein the groove is used to accommodate the connection block.

[0013] Furthermore, the connection control component includes a receiving groove opened inside the locking block, a triangular block for sliding in the receiving groove along the vertical direction, a first extrusion spring located in the receiving groove for driving the triangular block to move upward through the locking block and enter the locking block groove, a limiting slide groove opened on the side wall of the receiving groove along the vertical direction, a limiting sliding block arranged at the bottom of the triangular block for sliding in the limiting slide groove, and a receiving groove arranged on the connecting block for accommodating the triangular block.

[0014] Furthermore, the connection control component also includes a pressure plate sliding in the accommodating groove along the vertical direction, a pressure rod through groove opened on the outer side wall of the connecting block along the vertical direction, a pressure rod body sliding in the pressure rod through groove along the vertical direction, a connecting shaft arranged at the end of the pressure rod body and passing through the connecting block in the middle for installing the pressure plate, and a second extrusion spring arranged in the pressure rod through groove for driving the pressure rod body to move upward under force when the growth furnace body and the closed upper cover are in a closed state.

[0015] Furthermore, the heating component is configured as an electric heating wire.

[0016] Furthermore, the visual observation window is configured as a long strip window;

[0017] The growth visualization monitoring component includes a sliding track parallel to the length of the visual observation window, card slots evenly distributed on the sliding track, at least one group of moving blocks sliding on the sliding track for loading the mounting bracket, and a positioning component arranged on the moving block for controlling the sliding positioning of the moving block on the sliding track.

[0018] Furthermore, the positioning assembly includes a mounting plate slide groove provided in the moving block, a block mounting plate sliding in the mounting plate slide groove, a block body arranged on the block mounting plate, a sliding groove provided on the outside of the moving block, a sliding block sliding in the sliding groove, a movable block arranged on the sliding block, a connecting rod sliding in the moving block for connecting the block mounting plate and the sliding block, and a tightening spring arranged in the sliding groove for connecting the sliding block; when the block mounting plate slides in the mounting plate slide groove, the block body passes through the moving block and is engaged in the slide groove.

[0019] The beneficial effects of the utility model are embodied in:

[0020] 1. The utility model sets a growth visualization monitoring component, and uses a microscope equipped with a CCD camera to record and observe the changes in the synthetic growth process of the material in the growth crucible during the synthetic growth of the material in the growth crucible, so as to facilitate the adjustment of the internal temperature of the growth furnace, regulate the synthetic growth process and speed of the material, meet the thermodynamic and kinetic requirements of the synthetic growth of the material, improve the synthetic growth efficiency and quality of the material, and facilitate the further observation and recording of the properties of the subsequent synthetic growth materials.

[0021] 2. The utility model provides a sliding track and a moving block moving on the sliding track, and uses a positioning component to control the moving block to move and position on the sliding track, so that during the process of material synthesis growth in the growth crucible, a microscope equipped with a CCD camera can be conveniently moved to the other end or different parts of the crucible for observation and recording, and is suitable for the use scenarios of synthetic growth of various materials; BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings constituting part of the present application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0023] Figure 1 It is an overall three-dimensional view of the first embodiment of the utility model;

[0024] Figure 2 It is a three-dimensional schematic diagram of the overall structure of the utility model;

[0025] Figure 3 It is a three-dimensional cross-sectional schematic diagram of the internal structure of the moving block of the utility model;

[0026] Figure 4 It is a cross-sectional schematic diagram of the internal structure of the moving block of the utility model;

[0027] Figure 5 It is a three-dimensional cross-sectional schematic diagram of the locking assembly of the utility model;

[0028] Figure 6 It is an overall three-dimensional view of the second embodiment of the utility model.

[0029] In the figure:

[0030] 1. Growth furnace structure; 11. Growth furnace body; 12. Closing cover; 13. Rubber sealing pad; 14. Controller; 15. Heating assembly; 16. Vacuuming hole; 17. Visual observation window; 18. Locking assembly; 1801. Locking block; 1802. Connecting block; 1803. Triangular block; 1804. First extrusion spring; 1805. Receiving groove; 1806. Limiting slide groove; 1807. Limiting slider; 1808. Receiving groove; 1809. Pressing plate; 1810. Coupling shaft; 1811. Pressure rod body; 1812. Pressure rod through groove; 1813. Second extrusion spring;

[0031] 2. Growth visualization monitoring component; 21. Sliding track; 22. Card slot; 23. Moving block; 24. Mounting bracket; 25. Microscope equipped with CCD camera; 26. Positioning component; 261. Card block body; 262. Card block mounting plate; 263. Mounting plate slide; 264. Connecting rod; 265. Sliding slot; 266. Sliding block; 267. Tightening spring; 268. Moving block;

[0032] 3. Growth crucible. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. In the absence of conflict, the embodiments in this application and the features in the embodiments can be combined with each other. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0034] In the first embodiment, see Figures 1 to 5 .

[0035] like Figure 1 and Figure 2 As shown, the utility model provides a visualized in-situ material synthesis growth device, comprising:

[0036] The growth furnace structure 1 is composed of a growth furnace body 11 and a closed upper cover 12 hingedly mounted on the growth furnace body 11. A trough is provided on one side of the growth furnace body 11 close to the closed upper cover 12 for placing a growth crucible 3 loaded with synthetic growth materials. A plurality of heating components 15 are provided in the trough on one side of the growth furnace body 11 close to the closed upper cover 12 for controlling the growth crucible 3 to be at a constant temperature or a gradient temperature. A visual observation window 17 is provided on the closed upper cover 12 for observing the interior of the trough.

[0037] The growth visualization monitoring assembly 2 is arranged on the closed upper cover 12 and located at the visual observation window 17, and includes a mounting bracket 24 and a microscope 25 equipped with a CCD camera arranged on the mounting bracket 24. The microscope 25 equipped with a CCD camera is used to observe the material synthesis growth process in the growth crucible 3 through the visual observation window 17.

[0038] In a specific implementation, a growth visualization monitoring component 2 is set up. During the material synthesis growth process in the growth crucible 3, a microscope 25 equipped with a CCD camera is used to record and observe the changes in the synthesis growth process of the material in the growth crucible 3, so as to facilitate the adjustment of the internal temperature of the growth furnace, regulate the synthesis growth process and speed of the material, meet the thermodynamic and kinetic requirements of the material synthesis growth, improve the synthesis growth efficiency and quality of the material, and facilitate the further observation and recording of the properties of the subsequent synthetic growth materials.

[0039] It should be noted that during the in-situ material synthesis growth process, the growth crucible 3 is controlled to be at a constant temperature or a gradient temperature by the heating component 15 and operated under vacuum conditions or a protective atmosphere, so that the in-situ material can be synthesized and grown in the growth crucible 3 .

[0040] Therefore, a plurality of vacuum holes 16 are provided in the tank of the growth furnace body 11 , and a vacuum machine for communicating with the outside of the growth furnace body 11 is provided in the vacuum hole 16 . The growth furnace body 11 is provided with a controller 14 for driving the vacuum machine and the heating component 15 to operate.

[0041] It can be further explained at this point that the vacuum hole 16 can also serve as a vacuum interface and a protective gas filling interface installed with a valve structure during use.

[0042] It should be noted that the heating component 15 at this time is generally configured as an electric heating wire structure.

[0043] At the same time, since the vacuum pump controls the vacuum inside the tank body of the growth furnace main body 11 in the closed state, in order to ensure the vacuum pump efficiency of the tank body of the growth furnace main body 11 in the closed state, a rubber sealing pad 13 can also be set on the side close to the growth furnace main body 11 and the closed upper cover 12.

[0044] It should also be noted that the above-mentioned microscope 25 equipped with a CCD camera belongs to the routine operation recorded by existing microscopes, so it is not described here in detail. Therefore, the microscope 25 equipped with a CCD camera in the prior art can be directly used here.

[0045] Further, such as Figure 2 and Figure 5 As shown, the growth furnace body 11 and the closed upper cover 12 are connected via a locking assembly 18, which includes a connecting block 1802 installed on the closed upper cover 12, a locking block 1801 arranged on the growth furnace body 11 and having a groove for accommodating the connecting block 1802, and a connection control assembly for controlling the positioning of the connecting block 1802 on the locking block 1801.

[0046] Among them, the connection control component includes a storage groove 1805 opened inside the locking block 1801, a triangular block 1803 used to slide in the storage groove 1805 along the vertical direction, a first extrusion spring 1804 located in the storage groove 1805 for driving the triangular block 1803 to move upward through the locking block 1801 and enter the groove of the locking block 1801, a limiting slide groove 1806 opened on the side wall of the storage groove 1805 along the vertical direction, a limiting slider 1807 set at the bottom of the triangular block 1803 for sliding in the limiting slide groove 1806, and a receiving groove 1808 set on the connecting block 1802 for accommodating the triangular block 1803.

[0047] Therefore, during the process of closing and connecting the growth furnace main body 11 and the closed upper cover 12, the bottom of the connecting block 1802 presses the triangular block 1803 to move into the receiving groove 1805. When the growth furnace main body 11 and the closed upper cover 12 are completely closed, the triangular block 1803 is squeezed into the receiving groove 1808 by the force of the first squeezing spring 1804. At this time, since the growth furnace main body 11 and the closed upper cover 12 are hinged to each other, the connecting block 1802 and the locking block 1801 cannot be separated.

[0048] Therefore, further, the connection control component also includes a pressure plate 1809 sliding in the accommodating groove 1808 along the vertical direction, a pressure rod through groove 1812 opened on the outer wall of the connecting block 1802 along the vertical direction, a pressure rod body 1811 sliding in the pressure rod through groove 1812 along the vertical direction, a connecting shaft 1810 arranged at the end of the pressure rod body 1811 and passing through the connecting block 1802 in the middle for installing the pressure plate 1809, and a second extrusion spring 1813 arranged in the pressure rod through groove 1812 for driving the pressure rod body 1811 to move upward under force when the growth furnace body 11 and the closed upper cover 12 are in a closed state.

[0049] In a specific implementation, by externally controlling the downward movement of the pressure rod body 1811 after the growth furnace body 11 and the closed upper cover 12 are completely closed, the pressure plate 1809 can be driven downward to squeeze the triangular block 1803 out of the receiving groove 1808. At this time, the connecting block 1802 and the locking block 1801 can be separated, so that the growth furnace body 11 and the closed upper cover 12 can be hinged.

[0050] It can be further explained in the specific part of the embodiment that the visual observation window 17 is set as a long strip window, so the growth visualization monitoring component 2 includes a sliding track 21 parallel to the length of the visual observation window 17, card slots 22 evenly distributed on the sliding track 21, at least one group of moving blocks 23 sliding on the sliding track 21 for loading the mounting bracket 24, and a positioning component 26 set on the moving block 23 for controlling the sliding positioning of the moving block 23 on the sliding track 21.

[0051] At this time, by setting a sliding track 21 and a moving block 23 that moves on the sliding track 21, and using the positioning component 26 to control the movement and positioning of the moving block 23 on the sliding track 21, it is convenient to move the microscope 25 equipped with a CCD camera to the other end or different parts of the crucible for observation and recording during the material synthesis growth process in the growth crucible 3, which is suitable for the use scenarios of synthetic growth of various materials.

[0052] The positioning assembly 26 includes a mounting plate slot 263 provided in the moving block 23, a block mounting plate 262 sliding in the mounting plate slot 263, a block body 261 provided on the block mounting plate 262 for passing through the moving block 23 and engaging in the slot 22 during the sliding process of the block mounting plate 262 in the mounting plate slot 263, a sliding slot 265 provided on the outer side of the moving block 23, a sliding block 266 sliding in the sliding slot 265, a movable block 268 provided on the sliding block 266, a connecting rod 264 sliding in the moving block 23 for connecting the block mounting plate 262 and the sliding block 266, and a tightening spring 267 provided in the sliding slot 265 for connecting the sliding block 266.

[0053] Under normal conditions, the tightening spring 267 controls the sliding block 266 to be located at one end in the sliding groove 265. At this time, the sliding block 266 drives the block body 261 on the block mounting plate 262 through the connecting rod 264 to pass through the moving block 23 and engage in the groove 22 to complete the positioning operation of the moving block 23 on the sliding track 21.

[0054] In the adjustment state, external force controls the sliding block 266 to move to the other end of the sliding groove 265. At this time, the movable block 268 can hide the sliding groove 265. At this time, the sliding block 266 drives the block body 261 on the block mounting plate 262 to be retracted into the moving block 23 through the connecting rod 264, and the moving block 23 can slide normally on the sliding track 21.

[0055] Based on the above first embodiment, a second embodiment is proposed. Figure 6 Different from the first embodiment, through holes are opened on the closed upper cover 12 at different positions where the crucible body is placed, and the visual observation window 17 is located in the through hole. At this time, the mounting bracket 24 and the microscope 25 equipped with a CCD camera are directly fixed in the through hole, which can play a role in multi-point observation and recording.

[0056] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

[0057] In addition, it should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0058] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or schemes that A and B meet at the same time. In addition, in the embodiments of the utility model, "multiple" refers to more than two. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

Claims

1. A visual in-situ material synthesis growth device, characterized in that: include: A growth furnace structure (1) is composed of a growth furnace body (11) and a closed upper cover (12) hingedly mounted on the growth furnace body (11); a trough is provided on the side of the growth furnace body (11) close to the closed upper cover (12) for placing a growth crucible (3) loaded with synthetic growth material; a plurality of heating components (15) are provided in the trough on the side of the growth furnace body (11) close to the closed upper cover (12) for controlling the growth crucible (3) to maintain a constant temperature or a gradient temperature; and a visual observation window (17) is provided on the closed upper cover (12) for observing the interior of the trough; A growth visualization monitoring assembly (2) is arranged on a closed upper cover (12) and located at a visual observation window (17), comprising a mounting bracket (24) and a microscope (25) equipped with a CCD camera and arranged on the mounting bracket (24); the microscope (25) equipped with a CCD camera is used to observe the material synthesis growth process in a growth crucible (3) through the visual observation window (17).

2. The visualized in-situ material synthesis growth device according to claim 1, characterized in that: A plurality of vacuum holes (16) are provided in the groove body of the growth furnace body (11), and a vacuum pump for communicating with the outside of the growth furnace body (11) is provided in the vacuum hole (16). A controller (14) is provided on the growth furnace body (11) for driving the vacuum pump and the heating component (15).

3. The visualized in-situ material synthesis growth device according to claim 2, characterized in that: A rubber sealing pad (13) is provided on one side of the growth furnace body (11) close to the closed upper cover (12).

4. The visualized in-situ material synthesis growth device according to claim 3, characterized in that: The growth furnace body (11) and the closed upper cover (12) are connected via a locking assembly (18); The locking assembly (18) comprises a connection block (1802) mounted on a closed upper cover (12), a locking block (1801) disposed on a growth furnace body (11) and having a groove, and a connection control assembly for controlling the positioning of the connection block (1802) on the locking block (1801), wherein the groove is used to accommodate the connection block (1802).

5. The visualized in-situ material synthesis growth device according to claim 4, characterized in that: The connection control assembly comprises a receiving groove (1805) provided inside the locking block (1801), a triangular block (1803) for sliding in the receiving groove (1805) along a vertical direction, a first extrusion spring (1804) located in the receiving groove (1805) for driving the triangular block (1803) to move upward into a groove, a limiting slide groove (1806) provided on a side wall of the receiving groove (1805) along a vertical direction, a limiting slider (1807) provided at the bottom of the triangular block (1803) for sliding in the limiting slide groove (1806), and a receiving groove (1808) provided on the connection block (1802) for receiving the triangular block (1803).

6. The visualized in-situ material synthesis growth device according to claim 5, characterized in that: The connection control component also includes a pressure plate (1809) sliding in the receiving groove (1808) in the vertical direction, a pressure rod through groove (1812) opened in the vertical direction on the outer wall of the connection block (1802), a pressure rod body (1811) sliding in the pressure rod through groove (1812) in the vertical direction, a connecting shaft (1810) arranged at the end of the pressure rod body (1811) and the middle part of which passes through the connection block (1802) for installing the pressure plate (1809), and a second extrusion spring (1813) arranged in the pressure rod through groove (1812) for driving the pressure rod body (1811) to move upward when the growth furnace body (11) and the closing upper cover (12) are in a closed state.

7. The visualized in-situ material synthesis growth device according to claim 1, characterized in that: The heating component (15) is configured as an electric heating wire.

8. The visualized in-situ material synthesis growth device according to claim 1, characterized in that: The visual observation window (17) is configured as a long strip window; The growth visualization monitoring component (2) comprises a sliding track (21) parallel to the length of the visual observation window (17), slots (22) evenly distributed on the sliding track (21), at least one group of moving blocks (23) sliding on the sliding track (21) for loading the mounting bracket (24), and a positioning component (26) arranged on the moving block (23) for controlling the sliding positioning of the moving block (23) on the sliding track (21).

9. The visualized in-situ material synthesis growth device according to claim 8, characterized in that: The positioning assembly (26) comprises a mounting plate sliding groove (263) provided in the moving block (23), a block mounting plate (262) sliding in the mounting plate sliding groove (263), a block body (261) provided on the block mounting plate (262), a sliding groove (265) provided on the outer side of the moving block (23), a sliding block (266) sliding in the sliding groove (265), a movable block (268) provided on the sliding block (266), a connecting rod (264) sliding in the moving block (23) for connecting the block mounting plate (262) and the sliding block (266), and a tightening spring (267) provided in the sliding groove (265) for connecting the sliding block (266). When the block mounting plate (262) slides in the mounting plate sliding groove (263), the block body (261) passes through the moving block (23) and is engaged in the clamping groove (22).

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