Furnace door water cooling device

Abstract

The utility model discloses a furnace door water cooling device, which relates to the technical field of furnace door water cooling process and comprises a heating furnace body, a silicon carbide pipe is mounted at the inner end of the heating furnace body, a left water jacket flange is mounted at one end of the silicon carbide pipe, a circulating water port is mounted at one end of the left water jacket flange, and a left sealing ring is mounted at one end of the circulating water port. And a left air exhaust flange is mounted at one end of the left sealing ring. By means of the left sealing ring, the right sealing ring and the sealing sleeve of the heating furnace body, high-temperature work can be conducted through the heating furnace body installed in the device, and meanwhile circulating cooling water is injected into a circulating water opening in the left water jacket flange, a cooling water connecting nozzle on the right water jacket flange and an annular cooling water connecting nozzle on the cooling sealing door at the same time. And after the process temperature rises, the left sealing ring, the right sealing ring and the sealing sleeve are prevented from being damaged by high temperature, so that the use efficiency of the device is improved, and the use cost of the device is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of furnace door water cooling technology, in particular to a furnace door water cooling device. Background Art

[0002] High temperature oxidation furnace and high temperature annealing furnace are mainly used for high temperature oxidation, annealing, alloy and other processes of integrated circuits, discrete devices, MEMS and other wafers of different sizes. High temperature oxidation furnace and high temperature annealing furnace have very high requirements on process temperature. The working temperature must reach above 1350℃. Conventional quartz tubes cannot meet the temperature requirements. Silicon carbide or other materials are often used as process chambers. However, too high process temperature will affect the life of the sealing ring, and the working vacuum degree will be limited, which will also lead to the failure of product performance to be further improved. It is necessary to add a cooling device to the outside of it. Generally, water cooling is used. However, the existing device for cooling the furnace door water cannot cool both ends synchronously. Therefore, a furnace door water cooling device is needed.

[0003] The existing furnace door water cooling device cannot effectively improve the service life of the device, cannot effectively improve the sealing effect of the device, and cannot improve the efficiency of the device during operation. Therefore, a furnace door water cooling device is urgently needed. Utility Model Content

[0004] Based on this, the purpose of the utility model is to provide a furnace door water cooling device to solve the problem that the existing furnace door water cooling device cannot effectively improve the service life of the device during use, cannot effectively improve the sealing effect of the device, and cannot improve the efficiency of the use of the device.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a furnace door water cooling device, comprising a heating furnace body, a silicon carbide tube is installed at one end of the heating furnace body, a left water jacket flange is installed at one end of the silicon carbide tube, a circulating water port is installed at one end of the left water jacket flange, a left sealing ring is installed at one end of the circulating water port, a left exhaust flange is installed at one end of the left sealing ring, a cooling water nozzle is installed at one end of the left exhaust flange, a right water jacket flange is installed at one end of the silicon carbide tube, a right sealing ring is installed at one end of the right water jacket flange, and a right sealing flange is installed at one end of the right sealing ring.

[0006] A cooling sealing door is installed at one end of the right sealing flange, a sealing sleeve is installed at one end of the cooling sealing door, a ring cooling water nozzle is installed at one end of the cooling sealing door, a supporting door rod is installed at one end of the cooling sealing door, a supporting rod is installed at one end of the supporting door rod, and a cantilever slurry feeding device is installed at one end of the cooling sealing door.

[0007] A solid pulp plate is installed at one end of the support rod, a threaded block rod is installed at one end of the solid pulp plate, a lower block is installed at one end of the threaded block rod, a hydraulic rod is installed at one end of the solid pulp plate, and a rod placement plate is installed at one end of the hydraulic rod.

[0008] Preferably, the silicon carbide tube is snap-connected to the left water jacket flange, and the left water jacket flange is sealingly connected to the left sealing ring via the left exhaust flange.

[0009] Preferably, the left end surface of the right sealing ring is tightly fitted with the right end surface of the right water jacket flange, and the right water jacket flange is snap-connected with the silicon carbide tube.

[0010] Preferably, the sealing sleeve is snap-connected to the cooling sealing door, and the right sealing flange is movably connected to the cooling sealing door.

[0011] Preferably, the support rod is threadedly connected to the cooling sealing door, and the door support rod is snap-connected to the support rod.

[0012] Preferably, the lower pressing block forms a lifting structure through a threaded pressing block rod and a slurry fixing plate, and the lower pressing block is engaged and connected with the supporting rod.

[0013] Preferably, the hydraulic rod is threadedly connected to the rod placing plate, and the slurry fixing plate forms a telescopic structure through the hydraulic rod and the rod placing plate.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The utility model can perform high-temperature operation through the heating furnace body installed in the device by arranging the left sealing ring, the right sealing ring and the sealing sleeve of the heating furnace body, and at the same time inject circulating cooling water into the circulating water inlet on the left water jacket flange, the cooling water nozzle on the right water jacket flange and the cooling water nozzle on the cooling sealing door. After the process temperature rises, it is ensured that the left sealing ring, the right sealing ring and the sealing sleeve will not be damaged due to high temperature, thereby improving the use efficiency of the device and reducing the use cost of the device;

[0016] 2. The utility model can fix the left end of the silicon carbide tube through the left water jacket flange through the left exhaust flange installed in the device, and the left exhaust flange, the left water jacket flange and the left port of the silicon carbide tube are sealed by the left sealing ring. Similarly, the right sealing flange is fixed to the right port of the silicon carbide tube through the right water jacket flange and is sealed by the right sealing ring. The cooling sealing door moves forward to fit closely with the right sealing flange and presses the sealing sleeve to improve the sealing effect of the device.

[0017] 3. The utility model is provided with a heating furnace body, a silicon carbide tube and a hydraulic rod. The hydraulic rod installed in the device can push the solid slurry plate and the cooling sealing door at the front end of the support rod forward to fit tightly with the right sealing flange, move the cantilever slurry to the inside of the silicon carbide tube, perform high-temperature operation through the heating furnace body, and improve the processing efficiency of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a front cross-sectional view of the utility model;

[0019] Figure 2 It is a schematic diagram of the use structure of the utility model;

[0020] Figure 3 It is a schematic diagram of the enlarged structure of point A of the utility model;

[0021] Figure 4 It is a schematic diagram of the enlarged structure of point B of the utility model.

[0022] In the figure: 1. Heating furnace body; 2. Silicon carbide tube; 3. Left water jacket flange; 4. Circulating water inlet; 5. Left sealing ring; 6. Left exhaust flange; 7. Cooling water nozzle; 8. Right water jacket flange; 9. Right sealing ring; 10. Right sealing flange; 11. Cooling sealing door; 12. Sealing sleeve; 13. Circular cooling water nozzle; 14. Door support rod; 15. Support rod; 16. Cantilever slurry feeding; 17. Slurry solidifying plate; 18. Threaded briquetting rod; 19. Lower briquetting; 20. Hydraulic rod; 21. Rod placement plate. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. The embodiments described below with reference to the drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model.

[0024] The following describes an embodiment of the utility model based on its overall structure.

[0025] See also Figure 1-4A furnace door water cooling device comprises a heating furnace body 1, a silicon carbide tube 2 is installed at the inner end of the heating furnace body 1, a left water jacket flange 3 is installed at one end of the silicon carbide tube 2, a circulating water inlet 4 is installed at one end of the left water jacket flange 3, a left sealing ring 5 is installed at one end of the circulating water inlet 4, a left exhaust flange 6 is installed at one end of the left sealing ring 5, a cooling water nozzle 7 is installed at one end of the left exhaust flange 6, a right water jacket flange 8 is installed at one end of the silicon carbide tube 2, a right sealing ring 9 is installed at one end of the right water jacket flange 8, a right sealing flange 10 is installed at one end of the right sealing ring 9, the silicon carbide tube 2 is connected with the left water jacket flange 3 by snapping, and the left water jacket flange 3 is connected with the left exhaust flange 6 by snapping. It is sealed and connected with the left sealing ring 5, the left end surface of the right sealing ring 9 is tightly fitted with the right end surface of the right water jacket flange 8, the right water jacket flange 8 is snap-connected with the silicon carbide tube 2, and the left exhaust flange 6 installed in the device is fixed to the left end of the silicon carbide tube 2 through the left water jacket flange 3, and the left exhaust flange 6, the left water jacket flange 3 and the left port of the silicon carbide tube 2 are sealed by the left sealing ring 5. Similarly, the right sealing flange 10 is fixed to the right port of the silicon carbide tube 2 through the right water jacket flange 8 and is sealed by the right sealing ring 9, and the cooling sealing door 11 moves forward to tightly fit the right sealing flange 10, and presses the sealing sleeve 12 to improve the sealing effect of the device.

[0026] See also Figure 1-4 A furnace door water cooling device, a cooling sealing door 11 is installed at one end of the right sealing flange 10, a sealing sleeve 12 is installed at one end of the cooling sealing door 11, a ring cold water nozzle 13 is installed at one end of the cooling sealing door 11, a door support rod 14 is installed at one end of the cooling sealing door 11, a support rod 15 is installed at one end of the door support rod 14, a cantilever slurry feeding 16 is installed at one end of the cooling sealing door 11, the sealing sleeve 12 is engaged with the cooling sealing door 11, and the right sealing flange 10 is movably connected to the cooling sealing door 11, and the support rod 15 is connected to the cooling The sealing door 11 is threadedly connected, and the support door rod 14 is snap-connected with the support rod 15. The device is operated at high temperature through the heating furnace body 1 installed in the device. At the same time, circulating cooling water is injected into the circulating water inlet 4 on the left water jacket flange 3, the cooling water nozzle 7 on the right water jacket flange 8 and the cooling water nozzle 13 on the cooling sealing door 11. After the process temperature rises, it is ensured that the left sealing ring 5, the right sealing ring 9 and the sealing sleeve 12 will not be damaged due to high temperature, thereby improving the use efficiency of the device and reducing the use cost of the device.

[0027] See also Figure 1-4A furnace door water cooling device, a support rod 15 is provided with a solid slurry plate 17 at one end, a threaded briquetting rod 18 is provided at one end of the solid slurry plate 17, a lower briquetting block 19 is provided at one end of the threaded briquetting rod 18, a hydraulic rod 20 is provided at one end of the solid slurry plate 17, a rod-setting plate 21 is provided at one end of the hydraulic rod 20, the lower briquetting block 19 forms a lifting structure with the solid slurry plate 17 through the threaded briquetting rod 18, the lower briquetting block 19 is connected with the support rod 15 by snapping, the hydraulic rod 20 is threadedly connected with the rod-setting plate 21, and the solid slurry plate 17 forms a telescopic structure with the rod-setting plate 21 through the hydraulic rod 20, the solid slurry plate 17 and the front end cooling sealing door 11 of the support rod 15 are pushed forward by the hydraulic rod 20 installed in the device to fit tightly with the right sealing flange 10, the cantilever slurry feeding 16 is moved to the inside of the silicon carbide tube 2, and the furnace body 1 is heated for high-temperature operation to improve the processing efficiency of the device.

[0028] Working principle: When in use, the left exhaust flange 6 is first fixed to the left end of the silicon carbide tube 2 through the left water jacket flange 3, and the left exhaust flange 6, the left water jacket flange 3 and the left port of the silicon carbide tube 2 are sealed by the left sealing ring 5. Similarly, the right sealing flange 10 is fixed to the right port of the silicon carbide tube 2 through the right water jacket flange 8 and is sealed by the right sealing ring 9. When working, the product is placed on the cantilever slurry feeding 16, and the hydraulic rod 20 is started to push the solid slurry plate 17 and the front end cooling sealing door 11 of the support rod 15 forward to fit closely with the right sealing flange 10, and the sealing sleeve 12 is pressed tightly to push the cantilever slurry feeding 16 Move to the inside of the silicon carbide tube 2, perform high-temperature operation by heating the furnace body 1, and simultaneously inject circulating cooling water into the circulating water inlet 4 on the left water jacket flange 3, the cooling water nozzle 7 on the right water jacket flange 8, and the cooling water nozzle 13 on the cooling sealing door 11. After the process temperature rises, it is ensured that the left sealing ring 5, the right sealing ring 9 and the sealing sleeve 12 will not be damaged due to high temperature, thereby improving the use efficiency of the device and reducing the use cost of the device. In this way, the use process of the device is completed. The contents not described in detail in this specification belong to the existing technology known to professional and technical personnel in this field.

[0029] The directions or positional relationships indicated by terms such as "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the directions or positional relationships shown in the accompanying drawings. They are merely simplified descriptions for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the protection content of the present invention.

[0030] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A furnace door water cooling device, comprising a heating furnace body (1), characterized in that: A silicon carbide tube (2) is installed at the inner end of the heating furnace body (1), a left water jacket flange (3) is installed at one end of the silicon carbide tube (2), a circulating water inlet (4) is installed at one end of the left water jacket flange (3), a left sealing ring (5) is installed at one end of the circulating water inlet (4), a left exhaust flange (6) is installed at one end of the left sealing ring (5), a cooling water nozzle (7) is installed at one end of the left exhaust flange (6), a right water jacket flange (8) is installed at one end of the silicon carbide tube (2), a right sealing ring (9) is installed at one end of the right water jacket flange (8), and a right sealing flange (10) is installed at one end of the right sealing ring (9); A cooling sealing door (11) is installed at one end of the right sealing flange (10), a sealing sleeve (12) is installed at one end of the cooling sealing door (11), a cooling water nozzle (13) is installed at one end of the cooling sealing door (11), a door support rod (14) is installed at one end of the cooling sealing door (11), a supporting rod (15) is installed at one end of the door support rod (14), and a cantilever slurry feeding (16) is installed at one end of the cooling sealing door (11); A slurry fixing plate (17) is installed at one end of the support rod (15), a threaded block rod (18) is installed at one end of the slurry fixing plate (17), a lower block (19) is installed at one end of the threaded block rod (18), a hydraulic rod (20) is installed at one end of the slurry fixing plate (17), and a rod placement plate (21) is installed at one end of the hydraulic rod (20).

2. A furnace door water cooling device according to claim 1, characterized in that: The silicon carbide tube (2) is snap-connected to the left water jacket flange (3), and the left water jacket flange (3) is sealedly connected to the left sealing ring (5) via the left exhaust flange (6).

3. A furnace door water cooling device according to claim 1, characterized in that: The left end surface of the right sealing ring (9) is tightly fitted with the right end surface of the right water jacket flange (8), and the right water jacket flange (8) is snap-fitted and connected with the silicon carbide tube (2).

4. A furnace door water cooling device according to claim 1, characterized in that: The sealing sleeve (12) is snap-connected with the cooling sealing door (11), and the right sealing flange (10) is movably connected with the cooling sealing door (11).

5. A furnace door water cooling device according to claim 1, characterized in that: The support rod (15) is threadedly connected to the cooling sealing door (11), and the door support rod (14) is snap-fittedly connected to the support rod (15).

6. A furnace door water cooling device according to claim 1, characterized in that: The lower pressing block (19) forms a lifting structure through a threaded pressing block rod (18) and a slurry fixing plate (17), and the lower pressing block (19) is snap-fitted and connected to the support rod (15).

7. A furnace door water cooling device according to claim 1, characterized in that: The hydraulic rod (20) is threadedly connected to the rod placement plate (21), and the slurry fixing plate (17) forms a telescopic structure through the hydraulic rod (20) and the rod placement plate (21).

Images