Semiconductor step measuring instrument

Abstract

The utility model relates to the technical field of step measuring instruments, in particular to a semiconductor step measuring instrument which comprises a workbench and a step measuring instrument body arranged on the workbench. The step gauge body comprises an XY-direction electric table which is mounted on the workbench and is used for controlling a sample to be detected to move, an electric rotary sample table which is mounted on the XY-direction electric table and is used for mounting the sample to be detected, and a detection assembly which is arranged above the electric rotary sample table; the detection assembly comprises a fixing frame arranged on the workbench in a crossing mode and a detector body installed on the fixing frame and located above the electric rotating sample table, a detection probe is arranged on the detector body, and a detection probe used for detecting a to-be-detected sample is installed on the detection probe. And the detection probe is detachably mounted on the detection probe. The probe has the advantage that the worn probe can be conveniently and rapidly replaced.

Description

Technical Field

[0001] The present application relates to the technical field of step measuring instruments, and in particular to a semiconductor step measuring instrument. Background Art

[0002] The step measuring instrument (probe profilometer) records the vertical displacement of the probe on the surface of the object, thereby measuring the physical parameters of the surface step height, roughness, etc. It is mainly used for thin film material thickness (2D) measurement and surface morphology measurement (3D). The step measuring instrument can accurately obtain quantitative step height, line roughness, film curvature radius, measure film stress, etc. Due to its simple operation, high resolution and good repeatability, the step measuring instrument is widely used in semiconductors, microelectronics, solar energy, LED, touch screens, medical and other fields.

[0003] The step measuring instrument is a contact surface topography measuring instrument. The step measuring instrument usually includes a probe and a probe. The probe is clamped and installed on the probe. The measuring principle of the step measuring instrument is: when the probe slides along the measured surface, the tiny peaks and valleys on the measured surface can make the probe move up and down along the peaks and valleys while sliding, that is, the probe can move telescopically relative to the probe; the movement of the probe reflects the contour of the measured surface.

[0004] The probe of the existing step measuring instrument often slides and generates friction with the surface of the object being measured. After long-term use, the accuracy of the probe detection will be reduced. The existing probe is fixedly connected to the probe head. When the probe is worn, the probe head needs to be removed and replaced, which makes the equipment inconvenient to use. Utility Model Content

[0005] In order to facilitate replacement of worn probes, the present application provides a semiconductor step measuring instrument.

[0006] The present application provides a semiconductor step measuring instrument, which adopts the following technical solution:

[0007] A semiconductor step measuring instrument comprises a workbench and a step meter body arranged on the workbench, wherein the step meter body comprises an XY electric stage installed on the workbench and controlling the movement of a sample to be tested, an electric rotating sample stage installed on the XY electric stage and used to install the sample to be tested, and a detection component arranged above the electric rotating sample stage, wherein the detection component comprises a fixed frame arranged across the workbench and a detector body installed on the fixed frame and located above the electric rotating sample stage, wherein a detection probe is arranged on the detector body, and a detection probe for detecting the sample to be tested is installed on the detection probe, wherein the detection probe is detachably mounted on the detection probe.

[0008] By adopting the above technical solution, when the step measuring instrument equipment is used to detect samples for a long time, the end of the detection probe will gradually wear out, which may easily cause inaccurate detection data. The detection probe and the detection probe provided in the present application are detachably connected to the shell. When the detection probe is worn out, the staff can replace the detection probe in time so that the equipment can be used again as soon as possible.

[0009] Optionally, the detection probe is a plate-like structure, with connecting rods symmetrically fixed at both ends of the detection probe. The detection probe is fixed to the detector body through the set connecting rods, and the connecting rods and the detection probe form a U-shaped structure. Multiple detection probes are arranged on the detection probe and are evenly arranged along the length direction of the detection probe.

[0010] By adopting the above technical solution, the connecting rod can form a stable U-shaped structure with the detection probe, which can avoid arbitrary changes in the position of the detection probe when testing the sample; the multiple detection probes arranged on the detection probe can simultaneously detect multiple points on the sample to be tested, thereby improving the detection efficiency.

[0011] Optionally, the detection probe is provided with a plurality of mounting components for mounting the detection probes, and the mounting components include mounting tubes vertically slidably disposed on the detection probe, and the detection probes are detachably fixed on the mounting tubes.

[0012] By adopting the above technical solution, when installing and fixing the detection probe, the detection probe can be plugged and fixed on the installation tube, which is convenient for the subsequent replacement of the worn detection probe.

[0013] Optionally, the mounting tube is slidably inserted into the detection probe, a clamping spring is sleeved on the mounting tube, the clamping spring is located below the detection probe, and the upper end of the clamping spring is fixed to the detection probe, and the lower end is fixed to the lower end of the mounting tube.

[0014] By adopting the above technical solution, the pressing spring is always in a rebounded state, so that the detection end of the detection probe can be pressed against the surface of the sample to be tested, thereby improving the accuracy of the detection and avoiding the problem that the end of the detection probe cannot contact the surface of the sample to be tested.

[0015] Optionally, the installation tube is a hollow structure with upper and lower ends opened, the detection probe is plugged into the interior of the installation tube, and a fixing piece for fixing the detection probe is threadedly connected to the upper end of the detection probe.

[0016] By adopting the above technical solution, when testing a sample to be tested, the fixing member can firmly fix the detection probe on the mounting tube to prevent the detection probe from falling off the mounting tube during the detection process.

[0017] Optionally, a limit plate is fixed on the detection probe at a position at the lower end of the mounting tube, and the limit plate abuts against the end of the mounting tube.

[0018] By adopting the above technical solution, after the detection probe is inserted into the installation tube, the limit plate can abut against the lower end surface of the installation tube, which can serve as a reminder to remind the staff that the detection probe is installed in place, and the limit plate is arranged at the same position of multiple detection probes. When the detection probe is installed in the installation tube, it can ensure that the length of the detection probe extending from the lower end of the installation tube is fixed, avoiding the situation of different extension lengths, thereby preventing the problem of inaccurate detection results.

[0019] Optionally, a second detection plate is vertically fixed on the detection probe, the second detection plate and the detection probe form a cross-shaped structure, and a plurality of detection probes and mounting components are evenly arranged on the second detection plate.

[0020] By adopting the above technical solution, when testing the sample to be tested, the detection probe and the multiple detection probes on the second detection plate can detect the sample to be tested at the same time, further improving the detection efficiency, and by using the multiple detection probes arranged in a cross structure, when detecting a circular object to be tested, the electric rotating sample table can be rotated to detect points along the circumference of the sample to be tested and along different diameters, thereby improving the detection efficiency.

[0021] Optionally, auxiliary microscopes are provided at both ends of the detection probe and both ends of the second detection plate, and the auxiliary microscopes are used to observe the detection probes.

[0022] By adopting the above technical solution, the lens of the auxiliary microscope points to the detection end of the detection probe, which makes it convenient for the staff to carefully check whether the end of the detection probe has been worn through the auxiliary microscope. When wear is detected, the detection probe can be replaced in time.

[0023] Optionally, the external cover of the workbench and the step meter body is provided with a protective part, and the protective part includes a base and a protective shell covering the base, the workbench and the step meter body are located on the base inside the protective shell, and a taking and placing opening is opened in the front of the protective shell, and a cover plate is hingedly arranged at the taking and placing opening.

[0024] By adopting the above technical solution, since the size range of the samples to be detected is between micrometers and nanometers, the provided protective member can prevent external impurities from entering the interior of the protective shell and affecting the detection accuracy.

[0025] Optionally, the protective shell and the base are detachably fixedly connected, and a plurality of connectors for fixing the two are arranged at the edge of the protective shell facing the base.

[0026] By adopting the above technical solution, the provided connecting piece can realize the detachable connection and fixation of the protective shell and the base. During detection, the protective shell and the base are fixed. When the detection probe needs to be replaced, the protective shell is removed through the connecting piece, and then the staff can quickly replace the detection probe.

[0027] In summary, the present application includes at least one of the following beneficial technical effects:

[0028] 1. After the step measuring instrument is used for a long time to test the sample, the end of the detection probe will be worn, which may easily cause inaccurate subsequent detection. The detachable fixed connection between the detection probe and the detection probe allows the staff to quickly replace the detection probe;

[0029] 2. The multiple detection probes arranged on the detection probe and the second detection board can detect multiple positions on the sample to be tested at the same time during the detection process, realize the detection of multiple positions at one time, and improve the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application.

[0031] Figure 2 It is a schematic diagram of the main structure of the step meter according to an embodiment of the present application.

[0032] Figure 3 yes Figure 2 A magnified schematic diagram of center A.

[0033] Figure 4 It is a schematic diagram of a limiting plate according to an embodiment of the present application.

[0034] Explanation of the reference numerals: 1. workbench; 2. step meter body; 21. detection assembly; 211. fixing bracket; 212. detection probe; 213. detection probe; 214. connecting rod; 22. XY electric stage; 23. electric rotating sample stage; 24. second detection plate; 3. protective part; 31. base; 32. protective shell; 33. cover plate; 34. connecting plate; 35. hand screw; 4. installation assembly; 41. installation cylinder; 42. tightening spring; 43. anti-drop plate; 44. fixing nut; 5. limit plate; 6. auxiliary microscope. DETAILED DESCRIPTION

[0035] The following is combined with Figure 1-4 This application is described in further detail.

[0036] The embodiment of the present application discloses a semiconductor step measuring instrument.

[0037] Reference Figure 1 and Figure 2A semiconductor step measuring instrument includes a horizontally arranged workbench 1, a step meter body 2 is installed on the workbench 1, a protective member 3 for protecting the step meter body 2 is provided on the outer cover of the workbench 1 and the step meter body 2, the step meter body 2 includes a detection component 21 for detecting a sample to be tested, and during the detection process, the staff places the sample to be tested on the workbench 1 and operates the detection component 21 to detect the sample to be tested.

[0038] An XY electric stage 22 is installed on the workbench 1, and an electric rotating sample stage 23 is installed on the XY electric stage 22. The sample to be tested can be placed on the electric rotating sample stage 23. The XY electric stage 22 can control the movement of the sample to be tested in the X direction and the Y direction on the horizontal plane, and control the movement of the sample to be tested and contact the detector assembly. The electric rotating sample stage 23 can control the rotation of the sample to be tested, so that the sample to be tested can be rotated to the angle required for measurement, which is convenient for all-round detection of the sample to be tested.

[0039] Reference Figure 1 , Figure 2 and Figure 3 The detection component 21 is arranged directly above the electric rotating sample stage 23. The detection component 21 includes a fixed frame 211 arranged across the workbench 1. The fixed frame 211 is U-shaped and arranged along the length direction of the workbench 1. A detector body for detecting the sample is fixed on the fixed frame 211 and located directly above the electric rotating sample stage 23. The detector body includes a detection probe 212 and a detection probe 213 installed on the detection probe 212. The detection probe 212 is horizontally arranged on the electric rotating sample stage 23, and the detection probe 212 is a rectangular plate structure. A pair of connecting rods 214 are vertically and symmetrically fixed at both ends of the detection probe 212. The two connecting rods 214 and the detection probe 212 form a stable U-shaped structure. The upper ends of the two connecting rods 214 are fixed to the detector body, so that the detection probe 212 can be close to the sample to be detected, and it is convenient to install the detection probe 213 on the detection probe 212.

[0040] There are multiple detection probes 213 on the detection probe 212, and the multiple detection probes 213 are evenly arranged along the length direction of the detection probe 212. When detecting the sample to be detected, multiple points on the sample to be detected can be detected at the same time through the set multiple detection probes 213, thereby improving the detection efficiency.

[0041] Reference Figure 1 , Figure 2 and Figure 3A second detection plate 24 arranged in a horizontal direction is fixed on the detection probe 212. The second detection plate 24 and the detection probe 212 are perpendicular to each other, and the second detection plate 24 and the detection probe 212 form a cross-shaped structure. A plurality of detection probes 213 are also fixed on the second detection plate 24. The spacing between the plurality of detection probes 213 on the second detection plate 24 is different from the spacing between the plurality of detection probes 213 on the detection probe 212. When detecting the sample to be detected, the detection probe 212 and the plurality of detection probes 213 on the second detection plate 24 can detect the sample to be detected at the same time, further improving the detection efficiency. Moreover, by using the plurality of detection probes 213 arranged in a cross-shaped structure, when detecting a circular object to be detected, the electric rotating sample stage 23 can be rotated to detect points along the circumference of the sample to be detected and along different diameters, thereby improving the detection efficiency.

[0042] Reference Figure 1 , Figure 2 and Figure 3 A mounting assembly 4 for mounting a detection probe 213 is provided on the detection probe 212 and the second detection plate 24. A plurality of mounting holes are provided on the second detection plate 24 and the detection probe 212. A plurality of detection probes 213 are installed in the corresponding mounting holes. The mounting assembly 4 includes a mounting cylinder 41 vertically slidably arranged in the mounting hole. The detection probe 213 is installed in the corresponding mounting cylinder 41. When the detection end of the detection probe contacts the uneven surface of the sample to be tested, the detection probe 213 can move upward with the mounting cylinder 41 through the vertically sliding mounting cylinder 41, thereby forming a record on the detector body.

[0043] A clamping spring 42 is provided on the outer sleeve of the mounting tube 41, and the clamping spring 42 is located below the detection probe 212 and the second detection plate 24, and the upper end of the clamping spring 42 is fixed to the detection probe 212 or the second detection plate 24, and the lower end is fixed to the lower end of the mounting tube 41. The clamping spring 42 is always in a pop-up state, so that the detection end of the detection probe 213 can be pressed onto the surface of the sample to be tested, thereby improving the accuracy of the detection and avoiding the problem that the end of the detection probe 213 cannot contact the surface of the sample to be tested. When the detection probe 213 contacts the protrusion on the surface of the sample to be tested, the clamping spring 42 is compressed and lifts up the detection probe 213, thereby accurately measuring the step height and roughness of the surface of the sample to be tested; an anti-slip plate 43 is fixed to the upper end of the mounting tube 41, and the anti-slip plate 43 can be snapped onto the upper surface of the detection probe 212 or the upper surface of the second detection plate 24 to prevent the elastic force of the clamping spring 42 from causing the mounting tube 41 to fall off the detection probe 212 or the second detection plate 24.

[0044] Reference Figure 1 , Figure 3 and Figure 4The mounting tube 41 is a structure with a hollow interior and openings at both ends. The detection probe 213 is plugged into the mounting tube 41. A fixing member for fixing the detection probe 213 is provided at the upper end of the mounting tube 41. The fixing member includes a fixing nut 44 threadedly connected to the upper end of the detection probe 213. The upper end of the detection probe 213 passes through the fixing nut 44. The detection probe 213 is fixed to the mounting tube 41 by the fixing nut 44 to prevent the detection probe 213 from falling off the mounting tube 41 during detection. An annular limit plate 5 is fixed on the detection probe 213 and at a position located at the lower end of the mounting tube 41. When the detection probe 213 is inserted into the mounting tube 41, the limit plate 5 can abut against the lower end surface of the mounting tube 41, which can serve as a reminder to remind the staff that the detection probe 213 is installed in place. Moreover, the limit plate 5 arranged at the same position of the detection probe 213 can ensure that the length of the detection probe 213 extending from the lower end of the mounting tube 41 is fixed when the detection probe 213 is installed in the mounting tube 41, thereby avoiding the situation where the extending length is different.

[0045] An auxiliary microscope 6 is fixed on the lower surface of the detection probe 212 near both ends and the lower surface of the second detection plate 24 near both ends. The lens of the auxiliary microscope 6 points to the detection end of the detection probe 213, which is convenient for the staff to carefully check whether the end of the detection probe 213 is worn through the auxiliary microscope 6. When wear is detected, the detection probe 213 can be replaced in time.

[0046] Reference Figure 1 , Figure 3 and Figure 4The protective member 3 includes a horizontally arranged base 31 and a protective shell 32 covering the base 31. The workbench 1 and the step meter body 2 are both arranged on the base 31 inside the protective shell 32. A take-in and put-out opening is provided on the side of the protective shell 32 facing the staff. When it is necessary to test the sample to be tested, the object is placed into the protective shell 32 through the take-in and put-out opening, and a cover plate 33 is hingedly provided on the protective shell 32 at the take-in and put-out opening. Since the size range of the sample to be tested is between microns and nanometers, the set cover plate 33 can prevent external impurities from entering the protective shell 32. During the testing process, the cover plate 33 needs to be buckled on the protective shell 32. The protective shell 32 and the base 31 are detachably fixedly connected. When the detection probe 213 needs to be replaced, the protective shell 32 can be removed to facilitate quick replacement by the staff. A plurality of connectors are arranged on the lower edge of the protective shell 32 facing the base 31. The connectors include a connecting plate 34 that is vertically fixed on the upper surface of the base 31 and is in a ring shape. The connecting plate 34 can be connected to the lower edge of the protective shell 32, and a plurality of hand screws 35 are arranged on the connecting plate 34. The hand screws 35 pass through the connecting plate 34 and the protective shell 32, and the hand screws 35 are threadedly connected to the two, so that quick connection and fixation can be achieved. When the protective shell 32 needs to be removed, the hand screws 35 are loosened.

[0047] The implementation principle of a semiconductor step measuring instrument in an embodiment of the present application is as follows: when it is necessary to test a sample to be tested, the sample to be tested is placed on the electric rotating sample stage 23, and the sample to be tested is moved and gradually contacts the detection probe 213 by controlling the XY direction electric stage 22 and the electric rotating sample stage 23, so that the detection probe 213 can pass through the surface of the sample to be tested, thereby realizing detection; after testing the sample for a long time, the staff can observe whether the end of the detection probe 213 is worn through the auxiliary microscope 6, and it can be replaced in time if worn.

[0048] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A semiconductor step measuring instrument, characterized in that: The invention comprises a workbench and a step meter body arranged on the workbench, wherein the step meter body comprises an XY electric stage installed on the workbench and controlling the movement of the sample to be tested, an electric rotating sample stage installed on the XY electric stage and used for installing the sample to be tested, and a detection component arranged above the electric rotating sample stage, wherein the detection component comprises a fixed frame arranged across the workbench and a detector body installed on the fixed frame and located above the electric rotating sample stage, wherein a detection probe is arranged on the detector body, and a detection probe for detecting the sample to be tested is installed on the detection probe, and the detection probe is detachably installed on the detection probe.

2. A semiconductor step measuring instrument according to claim 1, characterized in that: The detection probe is a plate-like structure, with connecting rods symmetrically fixed at both ends of the detection probe. The detection probe is fixed to the detector body through the set connecting rods. The connecting rods and the detection probe form a U-shaped structure. There are multiple detection probes on the detection probe, and they are evenly arranged along the length direction of the detection probe.

3. A semiconductor step measuring instrument according to claim 1, characterized in that: The detection probe is provided with a plurality of mounting components for mounting detection probes. The mounting components include a mounting tube which is vertically slidably arranged on the detection probe. The detection probes are detachably fixed on the mounting tube.

4. A semiconductor step measuring instrument according to claim 3, characterized in that: The installation tube is slidably inserted into the detection probe, and a tightening spring is sleeved on the installation tube. The tightening spring is located below the detection probe, and the upper end of the tightening spring is fixed to the detection probe, and the lower end is fixed to the lower end of the installation tube.

5. A semiconductor step measuring instrument according to claim 3, characterized in that: The installation tube is a hollow structure with upper and lower ends opened. The detection probe is plugged into the installation tube. A fixing piece for fixing the detection probe is threadedly connected to the upper end of the detection probe.

6. A semiconductor step measuring instrument according to claim 1, characterized in that: A limit plate is fixed on the detection probe at a position located at the lower end of the installation tube, and the limit plate abuts against the end of the installation tube.

7. A semiconductor step measuring instrument according to claim 1, characterized in that: A second detection plate is vertically fixed on the detection probe, the second detection plate and the detection probe form a cross-shaped structure, and a plurality of detection probes and mounting components are evenly arranged on the second detection plate.

8. The semiconductor step measuring instrument according to claim 1, characterized in that: Auxiliary microscopes are provided at both ends of the detection probe and both ends of the second detection plate, and the auxiliary microscopes are used to observe the detection probes.

9. A semiconductor step measuring instrument according to claim 1, characterized in that: The outer cover of the workbench and the step meter body is provided with a protective part, and the protective part includes a base and a protective shell covering the base. The workbench and the step meter body are located on the base inside the protective shell. A taking and placing opening is opened in the front of the protective shell, and a cover plate is hingedly provided at the taking and placing opening.

10. A semiconductor step measuring instrument according to claim 9, characterized in that: The protective shell and the base are detachably fixedly connected, and a plurality of connectors for fixing the two are arranged at the edge of the protective shell facing the base.

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