Thermocouple element and processing equipment
By designing multiple thermoelectric puppets and verification mechanisms in thermal treatment equipment, the problem of temperature control precision and temperature uniformity of thermal treatment equipment is difficult to meet the high requirements, and the accurate verification and temperature between the signal read instrument are realized. Read accurately.
Patent Information
- Application Number
- CN202421025942.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-11
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2034-05-11
AI Technical Summary
During the preparation of solar cell silicon wafers, the temperature control accuracy and temperature uniformity of the heat treatment equipment are difficult to meet the high requirements, resulting in errors when the thermostat reads the measurement signal, affecting the diffusion and deposition effect of the silicon wafer.
Design a kind of thermocouple component, including multiple first thermal electric puppets in the sleeve and at least one second thermal puppet wire. The two thermoelectric puppets are connected to different signal reading instruments, respectively. And verification to ensure that the temperature read is accurate.
The accuracy verification between the two signal reading instruments is implemented to ensure the accuracy of the reading temperature, and the temperature control accuracy and temperature uniformity of the thermal processing equipment are improved.
Smart Images
Figure CN222419304U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of heat treatment, and in particular to a thermocouple element and a processing device. Background Art
[0002] In the process of preparing solar cells, silicon wafers need to go through processes such as texturing, diffusion, etching, coating and printing. Processing equipment with heating function is required in multiple processes. With the update and iteration of process technology, higher requirements are placed on the temperature control accuracy and temperature uniformity of the equipment.
[0003] Taking the diffusion process as an example, the silicon wafer is placed in the diffusion furnace with a quartz boat as the carrier, and nitrogen, oxygen and diffusion source are introduced into the diffusion furnace at a certain temperature to diffuse and deposit PN junctions on the surface of the silicon wafer. The diffusion furnace uses a thermocouple to measure the temperature inside the furnace. After the temperature controller reads the measurement signal of the thermocouple, it controls the temperature inside the furnace according to the process requirements. Since there will be errors when the temperature controller reads the measurement signal, in order to ensure that the actual temperature in the furnace is consistent with the process requirements, the temperature controller needs to be calibrated for accuracy. Utility Model Content
[0004] In view of this, the purpose of this application is to provide a thermocouple element and processing equipment to achieve accuracy calibration between two signal reading instruments, ensuring that both signal reading instruments can read accurate temperatures. The specific scheme is as follows:
[0005] In one aspect, the present application provides a thermocouple element, comprising:
[0006] a sheath, a plurality of first thermocouple wires and at least one second thermocouple wire located within the sheath;
[0007] The plurality of first thermocouple wires correspond to a plurality of measurement positions;
[0008] The first thermocouple wire includes a target thermocouple wire; the second thermocouple wire and the target thermocouple wire correspond to the same measurement position; the second thermocouple wire and the target thermocouple wire are used to connect different signal reading instruments.
[0009] Optionally, the target thermocouple wire includes a plurality of wires, and the second thermocouple wire includes a plurality of wires;
[0010] The target thermocouple wire corresponds to the second thermocouple wire in one-to-one correspondence at the plurality of measurement positions.
[0011] Optionally, the plurality of measurement positions corresponding to the plurality of second thermocouple wires are evenly distributed in the sleeve.
[0012] Optionally, a single measurement position corresponds to a plurality of the second thermocouple wires.
[0013] Optionally, the thermocouple element further includes a compensation wire;
[0014] The compensation wire is used to connect the first thermocouple wire and the second thermocouple wire.
[0015] Optionally, the sleeve is a quartz sleeve.
[0016] Optionally, the signal reading instrument includes a temperature controller and a handheld thermometer.
[0017] In yet another aspect, an embodiment of the present application further provides a processing device, the processing device comprising a temperature controller and a thermocouple element;
[0018] The temperature controller of the current processing device is connected to multiple first thermocouple wires and is used to output the measured temperatures of multiple first thermocouple wires; the second thermocouple wire is configured to be connected to the temperature controller or the handheld thermometer outside the current processing device.
[0019] Optionally, the processing equipment is an atomic layer deposition equipment, a chemical vapor deposition equipment, a diffusion processing equipment or an annealing processing equipment.
[0020] Optionally, the inner cavity of the processing device is a tubular structure, the thermocouple element is located on the inner wall of the processing device, and the distribution direction of multiple measurement positions of the thermocouple element is consistent with the length direction of the inner cavity of the processing device.
[0021] An embodiment of the present application provides a thermocouple element and processing equipment. The thermocouple element includes a sleeve, a plurality of first thermocouple wires and at least one second thermocouple wire located in the sleeve, the plurality of first thermocouple wires correspond to a plurality of measurement positions, the first thermocouple wires include a target thermocouple wire, the second thermocouple wire and the target thermocouple wire correspond to the same measurement position, and the second thermocouple wire and the target thermocouple wire are used to connect different signal reading instruments.
[0022] In this way, two thermocouple wires can be set for measurement at the same measurement position, namely the second thermocouple wire and the target thermocouple wire. The two thermocouple wires are respectively connected to a signal reading instrument. In this way, the two signal reading instruments can be used to measure the two temperature values of the measurement position. The temperature measured by one of the calibrated signal reading instruments can be used as the reference measurement temperature, and the other signal reading instrument can be calibrated and adjusted, so that the accurate temperature can be read. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0024] Figure 1 A schematic diagram of the structure of a thermocouple element provided in an embodiment of the present application is shown;
[0025] Figure 2 Shows Figure 1 An enlarged view showing the right end of the thermocouple element;
[0026] Figure 3 A schematic diagram of a thermocouple element provided in an embodiment of the present application is shown;
[0027] Figure 4 A schematic diagram of the interior of a processing device provided in an embodiment of the present application is shown. DETAILED DESCRIPTION
[0028] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below with reference to the accompanying drawings.
[0029] In the following description, many specific details are set forth to facilitate a full understanding of the present application, but the present application may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.
[0030] Secondly, the present application is described in detail with reference to the schematic diagram. When describing the embodiments of the present application in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present application. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.
[0031] For ease of understanding, a thermocouple element and processing equipment provided in an embodiment of the present application are described in detail below with reference to the accompanying drawings.
[0032] refer to Figure 1 FIG. 1 is a schematic diagram of a thermocouple element provided in an embodiment of the present application, referring to FIG. Figure 2 As shown, Figure 1 The thermocouple element may include a sheath 100 , a plurality of first thermocouple wires 101 and at least one second thermocouple wire 102 .
[0033] A plurality of first thermocouple wires 101 and at least one second thermocouple wire 102 are arranged in a sleeve 100, and the sleeve 100 is used to protect the thermocouple wires. The sleeve 100 is a quartz sleeve, and can also be other materials. The plurality of first thermocouple wires 101 correspond to a plurality of measurement positions, that is, each first thermocouple wire 101 can measure the temperature at a measurement position, and the plurality of measurement positions do not overlap with each other. The first thermocouple wire 101 can be used to measure the temperature at a certain measurement position, that is, it can measure the temperature at a certain position inside a processing device such as a heating furnace.
[0034] The first thermocouple wire 101 has a target thermocouple wire 1011, and the second thermocouple wire 102 also has a corresponding measurement position. The measurement position of the second thermocouple wire 102 is the same as that of the target thermocouple wire 1011. For example, the measurement position of the target thermocouple wire 1011 is point T2, and the measurement position of the second thermocouple wire 102 is point T2'. Point T2 and point T2' can be regarded as the same measurement position. It can be understood that since the target thermocouple wire 1011 and the second thermocouple wire 102 will not completely overlap, the measurement positions of the target thermocouple wire 1011 and the second thermocouple wire 102 may not completely overlap. The same measurement position can be understood as the distance between the two measurement positions is very close (such as point T2 and point T2'), which is much smaller than the distance between point T2 and point T1, that is, it can be regarded as using two thermocouple wires to measure the temperature at the same measurement position.
[0035] The second thermocouple wire and the target thermocouple wire are used to connect to different signal reading instruments 104, wherein the signal reading instrument 104 is an instrument that can convert the read signal into a temperature value, and the signal reading instrument 104 can be a temperature controller or a handheld thermometer. The second thermocouple wire and the target thermocouple wire can be connected to a signal reading instrument 104 respectively, so as to realize the temperature reading, and two temperature values can be obtained for the same measurement position. Figure 1 , Figure 2 As shown, points T1, T2, T3, T4, T5 and T6 can be connected to the same signal reading instrument 104, that is, Figure 1 The signal reading instrument 104 on the left side of the middle, the T2' point, the T4' point and the T6' point can be connected to another signal reading instrument 104, that is, Figure 1 The signal reading instrument 104 on the right side of the middle, Figure 2 Points T2', T4' and T6' are shown. Point T2' is a point very close to point T2, point T4' is a point very close to point T4, and point T6' is a point very close to point T6.
[0036] That is to say, for the measurement position corresponding to the target thermocouple wire 1011, an additional thermocouple wire, i.e., the second thermocouple wire 102, can be set for the measurement position, so that the second thermocouple wire 102 and the target thermocouple wire 1011 can both measure the temperature at the same measurement position, that is, two thermocouple wires can be set for the same measurement position for measurement, namely, the second thermocouple wire and the target thermocouple wire, and the two thermocouple wires are respectively connected to a signal reading instrument 104, so that the two signal reading instruments 104 can be used to measure the two temperature values of the measurement position, and the temperature measured by one of the calibrated signal reading instruments 104 can be used as the reference measurement temperature, and the other signal reading instrument 104 can be calibrated and adjusted, so that the accurate temperature can be read. In addition, after the calibration and adjustment, the second thermocouple wire and the target thermocouple wire continue to be connected to a signal reading instrument 104 signal reading instrument 104 signal reading instrument 104 respectively, which can prevent the measurement of a single signal reading instrument 104 from being abnormal and improve the reliability of temperature measurement. For example, for a new machine, this type of thermocouple can be used in the debugging after installation. The first thermocouple wire of the thermocouple is connected to the machine's own temperature controller, and the second thermocouple wire is connected to the temperature controller of other calibrated machines or a calibrated handheld thermometer, so as to realize the calibration and adjustment of the machine's own temperature controller. After the calibration is completed, it can be replaced with a conventional single-point temperature measurement thermocouple on the market.
[0037] refer to Figure 3 , which is a schematic diagram of a thermocouple element provided in an embodiment of the present application, the thermocouple element has a sleeve 100, and the thermocouple element can measure 12 measurement positions, corresponding to the 12 temperature measurement points 301 in the figure.
[0038] In a possible implementation, the target thermocouple wire 1011 may include multiple ones, and the second thermocouple wire 102 may also include multiple ones, and the target thermocouple wire and the second thermocouple wire correspond one-to-one at multiple measurement positions.
[0039] That is to say, there can be multiple double points in the thermocouple element, that is, for each measurement position, two thermocouple wires (target thermocouple wire 1011 and second thermocouple wire 102) can be set to measure the temperature, so that two temperature values can be measured for multiple measurement positions, avoiding the failure of a single thermocouple wire to measure the temperature, and further improving the temperature measurement stability of the thermocouple element. In addition, multiple second thermocouple wires 102 can be connected to a signal reading instrument 104, and multiple first thermocouple wires 101 can be connected to another signal reading instrument 104, so that multiple pairs of temperature values can be obtained. Using multiple pairs of temperature value signal reading instruments 104 for calibration can greatly improve the accuracy of the calibration, and avoid the occurrence of inaccurate calibration that may be caused by only one pair of temperature values (that is, the thermocouple element has only one double point).
[0040] refer to Figure 1 As shown, the thermocouple element includes six first thermocouple wires 101 and three second thermocouple wires 102, and has three double points, which are measurement positions corresponding to points T2, T4 and T6.
[0041] In a possible implementation, the multiple measurement positions corresponding to the multiple second thermocouple wires 102 are evenly distributed in the sleeve, that is, the longitudinal distance between two adjacent second thermocouple wires 102 is substantially equal, that is, one second thermocouple wire 102 can be set at a certain interval.
[0042] Specifically, one or more first thermocouple wires 101 may be provided between adjacent second thermocouple wires 102, that is, a single-point measurement position may be provided between adjacent double-point measurement positions. By distributing the double points at different measurement positions, the temperature measurement accuracy of multiple measurement positions can be verified in the length direction of the thermocouple. At the same time, the double-point distribution density in different areas can be adjusted according to the requirements of temperature control accuracy.
[0043] In a possible implementation, more thermocouple wires may be arranged at one measurement position for temperature measurement, that is, a single measurement position corresponds to multiple second thermocouple wires.
[0044] In this way, at a single measurement position, there is at least one target thermocouple wire and two second thermocouple wires, that is, at least three thermocouple wires can measure the temperature at the measurement position, so that each thermocouple wire is connected to a different signal reading instrument 104, so that the temperature value measured by one of the signal reading instruments 104 is used as the reference temperature, and the other two signal reading instruments 104 can be calibrated at the same time, that is, multiple signal reading instruments 104 can be calibrated at the same time, thereby improving the calibration efficiency. In a possible implementation, the thermocouple element can also include a compensation wire 103, and the compensation wire 103 is used to connect the first thermocouple wire and the second thermocouple wire to lead out the first thermocouple wire 101 and the second thermocouple wire 102, realize the electrical connection between the first thermocouple wire 101 and the signal reading instrument 104, and the electrical connection between the second thermocouple wire 102 and the signal reading instrument 104, so that the signal reading instrument 104 can output the measured temperature.
[0045] refer to Figure 1In the figure, T1, T2, T3, T4, T5, and T6 are connected to the temperature controller of the current processing equipment through the compensation wire 103, and participate in the temperature control of the furnace as temperature control points. T2', T4', and T6' are connected to the temperature controller of another processing equipment or a handheld thermometer through the compensation wire 103, and serve as temperature monitoring points. Under different working conditions, the temperature difference between T2, T4, and T6 and T2', T4', and T6' can be checked to realize the calibration between the secondary instruments and prevent abnormal deviations in the measurement of a single thermostat.
[0046] In addition, the thermocouple element using this design can be made into an armored form to limit the position of the thermocouple wire for double-point temperature measurement, or it can be made into an assembled thermocouple to facilitate adjustment of the distribution of the thermocouple wire in the sheath according to the use environment and measurement and calibration requirements.
[0047] The embodiment of the present application provides a thermocouple element, which includes a sleeve, a plurality of first thermocouple wires and at least one second thermocouple wire located in the sleeve, the plurality of first thermocouple wires corresponding to a plurality of measurement positions, the first thermocouple wires including a target thermocouple wire, the second thermocouple wire and the target thermocouple wire corresponding to the same measurement position, the second thermocouple wire and the target thermocouple wire are used to connect different signal reading instruments 104. In this way, two thermocouple wires can be set for measurement at the same measurement position, namely the second thermocouple wire and the target thermocouple wire, and the two thermocouple wires are respectively connected to a signal reading instrument 104, so that two signal reading instruments 104 can be used to measure and obtain two temperature values of the measurement position, one of the temperatures can be used as a reference measurement temperature, and the two temperature values can be mutually verified, thereby achieving accuracy verification between the two signal reading instruments 104, and ensuring that both signal reading instruments 104 can read accurate temperatures.
[0048] Based on the above thermocouple element, an embodiment of the present application further provides a processing device, which may include a temperature controller and a thermocouple element.
[0049] Among them, the temperature controller of the current processing equipment can be connected to multiple first thermocouple wires, so as to convert the electromotive force change of the first thermocouple wires into temperature magnitude, so as to output the temperature at each measurement position, and the second thermocouple wire is configured to be connected to a temperature controller or a handheld thermometer other than the current processing equipment, that is, the second thermocouple wire can be electrically connected to the temperature controller of other processing equipment, and can also be connected to the handheld thermometer, so as to output the measured temperature of the second thermocouple wire, such as Figure 1 shown.
[0050] In one possible implementation, the processing equipment may include atomic layer deposition (ALD) equipment, chemical vapor deposition (CVD) equipment, diffusion processing equipment or annealing processing equipment, etc., that is, the processing equipment can be any semiconductor equipment that needs to measure the internal temperature, and no specific limitation is made here.
[0051] In a possible implementation, the inner cavity of the processing equipment can be a tubular structure. Taking CVD equipment as an example, the thermocouple element can be used in tubular thermal process equipment such as low pressure chemical vapor deposition (LPCVD) equipment and plasma enhanced chemical vapor deposition (PECVD). The thermocouple element can be located on the inner wall of the processing equipment, and the distribution direction of multiple measurement positions of the thermocouple element is consistent with the length direction of the inner cavity of the processing equipment.
[0052] refer to Figure 4 As shown, it is a schematic diagram of the interior of a processing device provided by an embodiment of the present application, wherein a thermocouple element 10 is provided inside the processing device 20, and the distribution direction of the measurement position of the thermocouple element 10 is the extension direction of the thermocouple element 10, and the extension direction of the thermocouple element 10 is the same as the length direction of the inner cavity of the processing device 20. The processing device 20 is an annealing furnace, and a quartz tube 204 is also provided inside the furnace body, and the thermocouple element 10 is fixed to the side wall of the quartz tube 204 by a collar 201. The thermocouple element 10 has 6 temperature measuring points, and the temperatures at 6 positions can be measured respectively. The insulation material 203 is fixed between the quartz tube 204 and the furnace body by a component 202 for fixing the insulation material.
[0053] The embodiment of the present application provides a processing device, which includes a temperature controller and a thermocouple element; the temperature controller of the current processing device is connected to multiple first thermocouple wires and is used to output the measured temperatures of the multiple first thermocouple wires; the second thermocouple wire is configured to be connected to a temperature controller or a handheld thermometer outside the current processing device. In this way, two thermocouple wires can be set for measurement at the same measurement position, namely the second thermocouple wire and the target thermocouple wire, and the two thermocouple wires are respectively connected to a signal reading instrument. In this way, the two signal reading instruments can be used to measure the two temperature values of the measurement position, and the temperature measured by one of the calibrated signal reading instruments can be used as the reference measurement temperature, and the other signal reading instrument can be calibrated and adjusted, so that the accurate temperature can be read.
[0054] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the processing equipment embodiment, since it is basically similar to the thermocouple element embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the thermocouple element embodiment.
[0055] The above is only a preferred implementation of the present application. Although the present application has been disclosed as a preferred embodiment, it is not intended to limit the present application. Any technician familiar with the art can use the above disclosed methods and technical contents to make many possible changes and modifications to the technical solution of the present application without departing from the scope of the technical solution of the present application, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application still falls within the scope of protection of the technical solution of the present application.
Claims
1. A thermocouple element, characterized in that: include: a sheath, a plurality of first thermocouple wires and at least one second thermocouple wire located within the sheath; The plurality of first thermocouple wires correspond to a plurality of measurement positions; The first thermocouple wire includes a target thermocouple wire; The second thermocouple wire and the target thermocouple wire correspond to the same measurement position; the second thermocouple wire and the target thermocouple wire are used to connect different signal reading instruments.
2. The thermocouple element according to claim 1, characterized in that The target thermocouple wire includes a plurality of wires, and the second thermocouple wire includes a plurality of wires; The target thermocouple wire corresponds to the second thermocouple wire in one-to-one correspondence at the plurality of measurement positions.
3. The thermocouple element according to claim 1, characterized in that The plurality of measurement positions corresponding to the plurality of second thermocouple wires are evenly distributed in the sleeve.
4. The thermocouple element according to claim 1, characterized in that A single measurement position corresponds to a plurality of the second thermocouple wires.
5. The thermocouple element according to claim 1, characterized in that The thermocouple element also includes a compensation wire; The compensation wire is used to connect the first thermocouple wire and the second thermocouple wire.
6. The thermocouple element according to claim 1, characterized in that The sleeve is a quartz sleeve.
7. The thermocouple element according to claim 1, characterized in that The signal reading instrument includes a temperature controller and a handheld temperature measuring instrument.
8. A processing device, characterized in that: The processing device comprises a temperature controller, and a thermocouple element according to any one of claims 1 to 7; The temperature controller of the current processing device is connected to multiple first thermocouple wires and is used to output the measured temperatures of the multiple first thermocouple wires; the second thermocouple wire is configured to be connected to a temperature controller or a handheld thermometer outside the current processing device.
9. The processing device according to claim 8, characterized in that The processing equipment is atomic layer deposition equipment, chemical vapor deposition equipment, diffusion processing equipment or annealing processing equipment.
10. The processing device according to claim 8, characterized in that The inner cavity of the processing device is a tubular structure, the thermocouple element is located on the inner side wall of the processing device, and the distribution direction of multiple measurement positions of the thermocouple element is consistent with the length direction of the inner cavity of the processing device.