Photomask clamp

Abstract

The utility model provides a photomask clamp, which is used for clamping a mask plate and comprises a handle, the two main clamping arms are fixedly connected to the first end of the handle, the distance between the two main clamping arms is matched with the size of a mask plate, and the two main clamping arms comprise first gas channels which are communicated with each other; the plurality of suction cups are arranged on the main clamping arm, and the suction cups are communicated with the first gas channel and are used for sucking the mask plate; the motor is communicated with the first gas channel and is used for adjusting the pressure in the first gas channel; and the control valve is used for controlling connection or disconnection between the first gas channel and the atmospheric environment. According to the photomask clamp, the defects caused by aging of a spring and a clamping head of an existing photomask clamp are overcome, and the problem that the space needed for opening clamping arms of the existing photomask clamp is too large is solved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a mask clamp for clamping a mask plate. Background Art

[0002] During the entire mask production process, the cleanliness requirements for the mask are very high. In order to reduce the risk of contaminant particles falling on the mask surface during the process of taking and placing the mask, a mask clamp is required to clamp the mask.

[0003] Take the common "Y" shaped mask clamp as an example. Figure 1 As shown, it includes a handle 10, the first end of which is connected to two clamping arms 30 through an elastic member 20, the two clamping arms are symmetrically arranged relative to the central axis of the handle 10, and the ends of the two clamping arms 30 are respectively provided with clamping heads 40 in opposite positions for clamping the mask. The elastic member 20 is connected to an adjusting member 50, and the adjusting member 50 drives the elastic member 20 to deform when subjected to force. Usually, the elastic member 20 is a spring, the clamping arm material is metal, and the clamping head 40 is made of hard plastic. This mask clamp has a simple structure. When used, it mainly relies on the elastic force of the spring to make the two clamping arms of the mask clamp clamp the two sides of the mask, and the clamping head clamps the side of the mask to realize the extraction and placement of the mask. However, the spring of this mask clamp will slowly decay with the increase of the number of uses, resulting in insufficient clamping and the risk of the mask falling. Moreover, the hard plastic clamp is easily scratched during use due to the aging of the hard plastic clamp.

[0004] In addition, during production, the mask may be stuck in the machine, such as Figure 2 As shown, due to the small space inside the machine 60, if the conventional mask clamp wants to clamp the mask 50, the two clamping arms 30 need to be opened at a certain angle first. However, in reality, there is not enough space inside the machine 60 to place the mask clamp, and the engineer needs to take it out manually, which increases the probability of contaminating the mask. Therefore, designing a mask clamp that can be used in any environment is a very meaningful topic at present. Utility Model Content

[0005] The purpose of the present application is to provide a photomask clamp to avoid the defects caused by aging of the existing photomask clamp spring and clamp head and the problem that the space required for opening the clamping arm of the existing photomask clamp is too large.

[0006] On the one hand, an embodiment of the present application provides a mask clamp for clamping a mask plate, comprising: a handle; two main clamping arms, wherein the main clamping arms are fixedly connected to the first end of the handle, the spacing between the two main clamping arms is adapted to the size of the mask plate, and the two main clamping arms include first gas channels that are interconnected; a plurality of suction cups are arranged on the main clamping arms, wherein the suction cups are connected to the first gas channel and are used to absorb the mask plate; a motor is connected to the first gas channel and is used to adjust the pressure in the first gas channel; and a control valve is used to control the connection or disconnection of the first gas channel and the atmospheric environment.

[0007] In some embodiments of the present application, the two main clamping arms are hollow structures, and the hollow structures constitute the first gas channel.

[0008] In some embodiments of the present application, the two main clamping arms are hollow structures, a first pipeline is disposed in the hollow structure, and the first pipeline constitutes the first gas channel.

[0009] In some embodiments of the present application, the plurality of suction cups are connected to the two main clamping arms respectively through sub-clamping arms, and the sub-clamping arms include a second gas channel that is connected to the first gas channel.

[0010] In some embodiments of the present application, the sub-clamping arm is a hollow structure, and the hollow structure constitutes the second gas channel; or the sub-clamping arm is a hollow structure, and a second pipeline is arranged in the hollow structure, and the second pipeline is connected to the first pipeline.

[0011] In some embodiments of the present application, the sub-clamping arm is vertically connected to the main clamping arm, and the sub-clamping arm is parallel to the clamped surface of the mask.

[0012] In some embodiments of the present application, the control valve is arranged at the second end of the handle, the handle includes a third pipeline, the third pipeline is connected to the first gas channel, and the control valve controls the opening or closing of the third pipeline.

[0013] In some embodiments of the present application, the handle includes a recess, and the motor is disposed in the recess.

[0014] In some embodiments of the present application, the suction cup is made of soft plastic.

[0015] The mask clamp provided in the embodiment of the present application utilizes a motor to evacuate the first gas channel and / or the second gas channel, thereby maintaining a negative pressure in the first gas channel and / or the second gas channel, so that the multiple suction cups can stably grasp the mask under negative pressure, and deflate the first gas channel and / or the second gas channel through a control valve, thereby controlling the suction cups to put down the mask after the first gas channel and / or the second gas channel restores normal pressure. This can stably achieve the grasping and putting down of the mask, not only can it well complete the task of grasping and putting down the mask, but it can also better protect the mask.

[0016] Furthermore, the two main clamping arms of the mask clamp do not need to be opened to grasp and put down the mask. The size change of the mask can be adapted only by moving the sub-clamping arms to the outside and inside of the mask, and can be used in a limited space.

[0017] The portion of the mask clamp described in the embodiment of the present application that is in direct contact with the mask is a suction cup made of soft plastic, which avoids damage to the mask during the process of taking and placing the mask. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0019] in:

[0020] Figure 1 It is a structural schematic diagram of an existing photomask clamp;

[0021] Figure 2 It is a schematic diagram of the structure of an existing mask clamp in a machine for clamping a mask plate;

[0022] Figure 3 is a schematic structural diagram of a photomask clamp according to some embodiments of the present application;

[0023] Figure 4 It is a schematic diagram of the structure of the mask clamp clamping the mask plate according to some embodiments of the present application;

[0024] Figure 5 It is a connection structure between a sub-clamping arm and any main clamping arm shown in some embodiments of the present application. DETAILED DESCRIPTION

[0025] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0026] In view of the technical defects that the spring of the existing mask clamp gradually decays with the increase in the number of uses, resulting in insufficient clamping and the risk of the mask falling off, and the existing mask clamp is accompanied by the aging of the hard plastic clamp head during use, which easily scratches the mask. The present application provides a mask clamp. The mask clamp provided in the embodiment of the present application utilizes the air pressure in the clamping arm and the suction cup connected to the clamping arm to clamp the mask. This mask clamp does not require a compression spring, and the clamping arm does not need to be opened when clamping the mask. The suction cup that the mask clamp contacts the mask is made of soft plastic, which not only overcomes the defect that the mask clamp is difficult to open due to insufficient space inside the machine, but can be used in a confined space; it also avoids the defect that the clamping is unstable due to the aging of the spring and the aging of the hard plastic clamp head easily scratches the mask.

[0027] The technical solution of the present invention is described in detail below in conjunction with the embodiments and drawings.

[0028] Reference Figure 3 As shown, an embodiment of the present application provides a mask clamp for clamping a mask plate, comprising: a handle 100; two main clamping arms 101, wherein the main clamping arms 101 are fixedly connected to the first end of the handle 100, the spacing between the two main clamping arms 101 is adapted to the size of the mask plate and the two main clamping arms 101 include a first gas channel 1011 that is interconnected; a plurality of suction cups 102, wherein the plurality of suction cups 102 are arranged on the main clamping arms, respectively connected to the two main clamping arms 101, and connected to the first gas channel 1011, for sucking the mask plate; a motor 103, connected to the first gas channel 1011, for adjusting the pressure in the first gas channel 1011; a control valve 104, for controlling the conduction or disconnection of the first gas channel 1011 with the atmospheric environment.

[0029] In some embodiments of the present application, the handle 100 is used as a gripping portion for picking up and using the mask clamp when the mask clamp is used. In order to save space and reduce the exposure of the mask clamp parts, the handle is also used as a housing for the control valve 104 and the motor 103. Based on this, in some embodiments of the present application, the handle 100 includes a recess (i.e., Figure 3The motor 103 is arranged in the recess. Preferably, the size of the recess matches the size of the motor 103. After the motor 103 is arranged in the recess, the surface of the recess is covered with a cover to protect the motor 103 and make the surface of the handle 100 smooth and suitable for the user to hold.

[0030] In an embodiment of the present application, the motor 103 is used to adjust the pressure in the first gas channel, the second gas channel and the third gas channel. When the motor 103 is started, the pressure in the first gas channel, the second gas channel and the third gas channel is in a negative pressure state, so that the multiple suction cups can stably absorb the side walls of the mask.

[0031] In some embodiments of the present application, the two main gripping arms 101 are hollow structures, and the hollow structure constitutes the first gas channel 1011. In order to facilitate the gripping of the mask, one of the two main gripping arms 101 can be set to an L-shape, and the other is a structure mirroring the L-shape. The two main gripping arms 101 are fixedly connected to the first end of the handle 100. When gripping the mask, there is no need to adjust the position and spacing of the two main gripping arms 101. The spacing between the two main gripping arms 101 is adapted to the size of the mask. When the size of the mask includes multiple specifications, the spacing between the two main gripping arms 101 described in the embodiment of the present application is set to different specifications, corresponding to different mask sizes. In some other embodiments of the present application, the two main gripping arms 101 can also be integrally connected to the first end of the handle 100.

[0032] In some other embodiments of the present application, the two main gripping arms 101 are hollow structures, and a first pipeline is arranged in the hollow structure so that the first pipeline constitutes the first gas channel. The first pipeline is, for example, a plastic hose with good sealing performance. By arranging the first pipeline in the hollow structure, the air tightness of the first gas channel can be better controlled.

[0033] In the embodiment of the present application, the material of the two main clamping arms 101 may include metal, hard plastic, etc.

[0034] In some embodiments of the present application, the photomask clamp further includes a plurality of suction cups 102, which are arranged on the main clamping arm, respectively connected to the two main clamping arms 101, and connected to the first gas channel 1011, for sucking the mask. Optionally, the plurality of suction cups 102 can be directly connected to the two main clamping arms 101, and the plurality of suction cups 102 include through holes, which are connected to the first gas channel 1011. When the first gas channel 1011 is under negative pressure, the plurality of suction cups 102 can be adsorbed on the side of the mask to stably clamp the mask by pressure.

[0035] In order to clamp the mask more stably, the plurality of suction cups 102 are evenly connected to the two main clamping arms 101 and are symmetrically distributed. For example, the number of the plurality of suction cups 102 is 4, 6 or 8, etc., and they are evenly connected to the two main clamping arms. Taking the number of the plurality of suction cups 102 as 4 as an example, 2 suction cups can be set on each main clamping arm, and the two suction cups on one main clamping arm correspond to the positions of the two suction cups on the other clamping arm. In some embodiments of the present application, the material of the suction cup is soft plastic.

[0036] In some embodiments of the present application, the plurality of suction cups 102 are respectively connected to the two main gripping arms 101 through the sub-gripping arms 105, and the sub-gripping arms 105 include a second gas channel that is connected to the first gas channel. In some embodiments of the present application, the sub-gripping arms 105 may be perpendicular to the two main gripping arms 101. That is, when gripping the mask, the sub-gripping arms 105 are parallel to the gripped surface of the mask.

[0037] In some embodiments of the present application, the sub-gripping arm 105 is a hollow structure, and the hollow structure constitutes the second gas channel, which is connected to the first channel and is connected to the through holes of the plurality of suction cups 102. The structure of the sub-gripping arm 105 enables the plurality of suction cups 102 to reach the side of the mask in a narrower space to clamp the mask, and when the mask is thick, the two main gripping arms will not contact the surface of the mask, thereby better protecting the mask.

[0038] In other embodiments of the present application, the sub-gripping arm 105 can move toward the center line between the two main gripping arms or away from the center line between the two main gripping arms relative to its connection point with any one of the two main gripping arms 101 to adjust the distance between the two relative suction cups, so that the mask clamp described in the embodiments of the present application is suitable for a wider range of mask plates, or there is no need to replace mask clamps of different specifications when the size of the mask plate is not adjusted much.

[0039] In some embodiments of the present application, the connection structure between the sub-gripping arm 105 and any one of the main gripping arms 101 is as follows: Figure 5 As shown, the sub-gripping arm 105 is partially embedded in the main gripping arm 101, and the part of the sub-gripping arm 105 embedded in the main gripping arm 101 is adapted to the inner wall of the main gripping arm 101, as shown in FIG. Figure 5 The connecting surface 1051 is shown so that the sub-gripping arm 105 can be movably connected to the main gripping arm 101 .

[0040] In other embodiments of the present application, the sub-gripping arm 105 is a hollow structure, in which a second pipeline 1021 is disposed, the second pipeline 1021 is connected to the first pipeline 1011 and is connected to the through holes of the plurality of suction cups. Optionally, the second pipeline can be integrally connected to the first pipeline.

[0041] The second pipeline is, for example, a plastic hose with good sealing performance. By arranging the second pipeline in the hollow structure of the sub-gripping arm 105, the air tightness of the second gas channel, the first gas channel and the entire gas channel between the through holes of the plurality of suction cups can be better controlled.

[0042] In the embodiment of the present application, the material of the sub-gripping arm 105 may include metal, hard plastic, etc.

[0043] In some embodiments of the present application, the mask clamp further includes a control valve 104, the control valve 104 is disposed at the second end of the handle 100, and the control valve 104 includes a third pipeline, the third pipeline is connected to the first pipeline. In some embodiments of the present application, the third pipeline is connected to the first pipeline in an integrated manner. The first pipeline is a plastic hose with good sealing performance.

[0044] The control valve 104 is used to control the connection or disconnection between the first gas channel 1011 and the atmosphere. When the grasped mask needs to be put down, the control valve 104 is opened, and the third pipeline is connected to the atmosphere, so that the negative pressure state in the third pipeline, the second pipeline, the first pipeline and the suction cup through hole is changed to the same as the atmospheric pressure, so that the grasped mask can be put down without causing any damage to the grasped mask.

[0045] The mask clamp provided in the embodiment of the present application utilizes a motor to evacuate the first gas channel and / or the second gas channel, thereby maintaining a negative pressure in the first gas channel and / or the second gas channel, so that the multiple suction cups can stably grasp the mask under negative pressure, and deflate the first gas channel and / or the second gas channel through a control valve, thereby controlling the suction cups to put down the mask after the first gas channel and / or the second gas channel restores normal pressure. This can stably achieve the grasping and putting down of the mask, not only can it well complete the task of grasping and putting down the mask, but it can also better protect the mask.

[0046] Furthermore, the two main clamping arms of the mask clamp do not need to be opened to grasp and put down the mask. The size change of the mask can be adapted only by moving the sub-clamping arms to the outside and inside of the mask, and can be used in a limited space.

[0047] The portion of the mask clamp described in the embodiment of the present application that is in direct contact with the mask is a suction cup made of soft plastic, which avoids damage to the mask during the process of taking and placing the mask.

[0048] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained.

[0049] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0050] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0051] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0052] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0053] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0054] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0055] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in the present application.

Claims

1. A mask clamp for clamping a mask plate, characterized in that: include: handle; Two main gripping arms, the main gripping arms are fixedly connected to the first end of the handle, the spacing between the two main gripping arms is adapted to the size of the mask, and the two main gripping arms include first gas channels that are interconnected; A plurality of suction cups are arranged on the main clamping arm, the suction cups are connected to the first gas channel and are used to absorb the mask; a motor, connected to the first gas channel, for adjusting the pressure in the first gas channel; A control valve is used to control the connection or disconnection between the first gas channel and the atmospheric environment.

2. The mask clamp according to claim 1, characterized in that: The two main clamping arms are hollow structures.

3. The photomask clamp according to claim 2, characterized in that: A first pipeline is arranged in the hollow structure, and the first pipeline constitutes the first gas channel.

4. The photomask clamp according to claim 3, characterized in that: The plurality of suction cups are respectively connected to the two main clamping arms through sub-clamping arms, and the sub-clamping arms include a second gas channel that is connected to the first gas channel.

5. The photomask clamp according to claim 4, characterized in that: The sub-clamping arm is a hollow structure.

6. The photomask clamp according to claim 5, characterized in that: A second pipeline is arranged in the hollow structure, and the second pipeline is communicated with the first pipeline.

7. The photomask clamp according to claim 4, characterized in that: The sub-clamping arm is vertically connected to the main clamping arm, and the sub-clamping arm is parallel to the clamped surface of the mask.

8. The photomask clamp according to claim 1, characterized in that: The control valve is arranged at the second end of the handle. The handle includes a third pipeline. The third pipeline is connected to the first gas channel. The control valve controls the opening or closing of the third pipeline.

9. The photomask clamp according to claim 1, characterized in that: The handle comprises a recess, and the motor is arranged in the recess.

10. The photomask holder according to claim 1, characterized in that: The material of the suction cup is soft plastic.

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