Detachable rotary etching device

Abstract

The utility model discloses a detachable rotary etching device which comprises a box body, a frame body is detachably placed in an inner cavity of the box body, the front inner wall and the rear inner wall of the frame body are jointly and rotationally connected with three sets of parallel middle rotating shafts, the axes of the sections of the three sets of middle rotating shafts form an inverted triangle structure, and one end of the middle rotating shaft is in transmission connection with a driving assembly. Through the detachable connection mode of the box body and the frame body, a worker can conveniently disassemble and assemble the box body and the frame body, the worker can conveniently carry out later maintenance, cleaning and other operations, through the detachable frame body, the product placing convenience of the worker is improved, the overall practicability of the device is further improved, and the practicability of the device is improved. Stable supporting force is provided for products through the three sets of middle rotating shafts with the inverted-triangle-shaped sections, the stability of placing the products is improved, the positions of the fixing rods are limited by adjusting the positions of the fixing blocks at the two ends, the use requirements of the products with different diameters are met, and the practicability of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor etching, in particular to a detachable rotary etching device. Background Art

[0002] If the core components used in semiconductor etching processes have surface damage, they will become a source of particle contamination in the initial process. Therefore, surface etching or polishing is required to remove surface damage, but the etching method will cause uneven surface etching or leave etching marks.

[0003] This uneven etching or etching marks can be made uniform by rotating the product, and the problem of etching marks left at the contact points when the product is fixed can also be eliminated. However, there is currently a lack of corresponding equipment for product rotation, which affects the work efficiency of the staff. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and proposes a detachable rotary etching device.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A detachable rotary etching device comprises a box body, wherein a frame body is detachably placed in the inner cavity of the box body, wherein the front and rear inner walls of the frame body are rotatably connected to three sets of mutually parallel rotating shafts, wherein the axes of the cross sections of the three sets of rotating shafts form an inverted triangle structure, and one end of the middle rotating shaft is transmission-connected to a driving assembly.

[0007] Preferably, the central shaft includes a left-right symmetrical sliding roller and a middle driving roller, the outer wall of the driving roller is fixedly connected to the rolling sleeve, one end of the driving roller passes through the side wall of the frame and the end is connected to a driving gear, and the driving gear transmission is connected to the driving assembly.

[0008] Preferably, the sliding roller comprises a fixing rod, both ends of which are threadedly connected to the fixing block, and the outer wall of the fixing rod is rotatably sleeved with the rolling sleeve.

[0009] Preferably, the front and rear side walls of the frame are both provided with an inverted eight-shaped sliding groove, the inner wall of the sliding groove is slidably connected to the outer wall of the fixing rod, and the inner wall of the fixing block is clamped with the outer wall of the sliding groove.

[0010] Preferably, the drive assembly includes a motor fixedly connected to the side wall of the box body, the output end of the motor is coaxially connected to the drive gear, the drive gear is connected to the transmission rod through a gear transmission, and the end of the transmission rod is connected to the transfer gear meshing with the driving gear.

[0011] Preferably, the inner bottom surface of the box body is connected to four groups of card blocks in a rectangular array, and card slots are provided at the bottom ends of the front and rear walls of the frame body corresponding to the card block positions, and the outer walls of the card blocks fit the inner walls of the card slots.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] 1. The present application adopts a detachable connection method between the box and the frame, which is convenient for the staff to disassemble and install the two, and is convenient for the staff to perform subsequent maintenance and cleaning operations. The detachable frame improves the convenience of the staff to place the product, further improves the overall practicality of the device, and provides a stable support force for the product through three sets of rotating shafts with an inverted triangle cross section, thereby improving the stability of product placement;

[0014] 2. The driving assembly drives the intermediate transfer shaft to rotate, thereby driving the product to rotate, improving the uniformity of the etching effect on the product surface and eliminating the problem of etching marks left at the contact points when the product is fixed;

[0015] 3. The staff can adjust the position of the fixed rod in the slide groove according to the diameter of the product, and by adjusting the position of the fixed blocks at both ends and the holding force of the fixed blocks on the side walls of the frame, the position of the fixed rod can be limited to meet the use of products of different diameters, improve the practicability of the device, and improve the efficiency of etching operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more specifically and intuitively illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.

[0017] Figure 1 It is a schematic diagram of the structure proposed by the utility model;

[0018] Figure 2 It is a schematic side cross-sectional view of the structure proposed by the utility model;

[0019] Figure 3 This is a top view schematic diagram of the box structure proposed by the utility model;

[0020] Figure 4 This is a schematic diagram of the frame structure proposed by the utility model;

[0021] Figure 5 This is a schematic diagram of the sliding roller structure proposed by the utility model.

[0022] In the figure: box body 1, frame body 2, transfer shaft 3, sliding roller 31, fixed rod 311, fixed block 312, rolling sleeve 313, driving roller 32, driving gear 33, slide groove 4, motor 5, driving gear 6, clamping block 7, clamping groove 8, transmission rod 9, transfer gear 10. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0024] Reference Figure 1 A detachable rotary etching device comprises a box body 1, a frame body 2 can be detachably placed in the inner cavity of the box body 1, the front and rear inner walls of the frame body 2 are rotatably connected to three sets of mutually parallel rotating shafts 3, the axes of the cross sections of the three sets of rotating shafts 3 form an inverted triangle structure, and one end of the middle rotating shaft 3 is transmission-connected to a driving assembly.

[0025] During the use of the device, the staff will vertically place the product to be processed inside the frame 2. At this time, the outer walls of the three groups of rotating shafts 3 are in contact with the outer walls of the products, and the supporting forces in three different directions give the product a stable upward force, meeting the requirement of stably placing the product inside the frame 2. Then the frame 1 is placed inside the box 1 as a whole, and one end of the middle rotating shaft 3 is connected to the output end of the driving component. After the etching solution is poured into the box 1, the middle rotating shaft 3 is driven to rotate by the driving component, and then the product is driven to rotate, thereby improving the uniformity of the etching effect on the product surface and eliminating the problem of etching marks left at the contact points when the product is fixed.

[0026] The present application adopts a detachable connection between the box body 1 and the frame body 2, which makes it easy for the staff to disassemble and install the two, and facilitates the staff to carry out subsequent maintenance and cleaning operations. The detachable frame body 2 improves the convenience of the staff in placing the product, further improves the overall practicality of the device, and provides a stable support force for the product through three groups of rotating shafts 3 with an inverted triangle cross-section, thereby improving the stability of product placement.

[0027] refer to Figure 2-5 ,

[0028] In this case, the central shaft 3 includes a left-right symmetrical sliding roller 31 and a middle driving roller 32. The outer wall of the driving roller 32 is fixedly connected to a rolling sleeve 313. One end of the driving roller 32 passes through the side wall of the frame 2 and the end is connected to a driving gear 33. The driving gear 33 is connected to the driving assembly.

[0029] The sliding roller 31 includes a fixing rod 311 , both ends of which are threadedly connected to a fixing block 312 , and an outer wall of the fixing rod 311 is rotatably sleeved with a rolling sleeve 313 .

[0030] In specific use, the rolling sleeve 313 is provided with a plurality of groups of positioning grooves at equal intervals corresponding to the thickness of the product, thereby improving the practicality of the device and the stability of product placement.

[0031] The front and rear side walls of the frame 2 are both provided with an inverted eight-shaped slide groove 4, the inner wall of the slide groove 4 is slidably connected to the outer wall of the fixing rod 311, and the inner wall of the fixing block 312 is clamped with the outer wall of the slide groove 4.

[0032] In the specific use process, the driving assembly is connected to drive the gear 33, thereby realizing the driving of the driving roller 32, and the staff can adjust the position of the fixing rod 311 in the slide groove 4 according to the diameter of the product, and adjust the position of the fixing blocks 312 at both ends to adjust the holding force of the fixing blocks 312 on the side wall of the frame 2, so as to realize the position limitation of the fixing rod 311;

[0033] The driving assembly is connected to the driving roller 32, and the outer wall of the driving roller 32 is in contact with the outer wall of the product, driving the product to rotate. At the same time, the rolling sleeves 313 in contact with the outer walls of the product on both sides rotate synchronously driven by the product, thereby improving the integrity of the product and the stability of the product during the etching operation.

[0034] refer to Figure 3 ,

[0035] In this case, the driving assembly includes a motor 5 fixedly connected to the side wall of the box body 1, the output end of the motor 5 is coaxially connected to the driving gear 6, the driving gear 6 is connected to the transmission rod 9 through a gear transmission, and the end of the transmission rod 9 is connected to the transfer gear 10 meshing with the driving gear 33. Through the close meshing relationship of the gear set and the transmission rod 9, the stability of the transmission connection between the driving assembly and the driving gear 33 is further improved, thereby improving the overall stability and service life of the driving assembly.

[0036] In this case, the inner bottom surface of the box 1 is connected to four groups of card blocks 7 in a rectangular array, and card slots 8 are provided at the bottom ends of the front and rear walls of the frame 2 corresponding to the positions of the card blocks 7, and the outer walls of the card blocks 7 are fitted with the inner walls of the card slots 8. The card blocks 7 and the card slots 8 improve the stability of the frame 2 placed in the box 1, and the convenience of the staff in placing the frame 2 is improved by providing a predetermined placement position for the frame 2.

[0037] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A detachable rotary etching device, comprising a housing (1), characterized in that: The inner cavity of the box body (1) is detachably provided with a frame body (2), and the front and rear inner walls of the frame body (2) are rotatably connected to three sets of mutually parallel rotating shafts (3), the axes of the cross sections of the three sets of rotating shafts (3) form an inverted triangle structure, and one end of the middle rotating shaft (3) is transmission-connected to a driving assembly.

2. A detachable rotary etching device according to claim 1, characterized in that: The central rotating shaft (3) comprises a left-right symmetrical sliding roller (31) and a middle driving roller (32); the outer wall of the driving roller (32) is fixedly connected to a rolling sleeve (313); one end of the driving roller (32) penetrates the side wall of the frame (2) and the end is connected to a driving gear (33); the driving gear (33) is transmission-connected to the driving assembly.

3. A detachable rotary etching device according to claim 2, characterized in that: The sliding roller (31) comprises a fixing rod (311), both ends of which are threadedly connected to a fixing block (312), and an outer wall of the fixing rod (311) is rotatably sleeved with a rolling sleeve (313).

4. A detachable rotary etching device according to claim 3, characterized in that: The front and rear side walls of the frame (2) are both provided with an inverted eight-shaped slide groove (4), the inner wall of the slide groove (4) is slidably connected to the outer wall of the fixing rod (311), and the inner wall of the fixing block (312) is clamped with the outer wall of the slide groove (4).

5. A detachable rotary etching device according to claim 2, characterized in that: The driving assembly comprises a motor (5) fixedly connected to the side wall of the box body (1); the output end of the motor (5) is coaxially connected to a driving gear (6); the driving gear (6) is connected to a transmission rod (9) through a gear transmission; the end of the transmission rod (9) is connected to a transfer gear (10) meshing with a driving gear (33).

6. A detachable rotary etching device according to any one of claims 1 to 5, characterized in that: The inner bottom surface of the box body (1) is connected to four groups of card blocks (7) in a rectangular array, and card slots (8) are provided at the bottom ends of the front and rear walls of the frame body (2) at positions corresponding to the card blocks (7), and the outer wall of the card block (7) is in contact with the inner wall of the card slot (8).

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