Spin-drying device for substrate slice

Abstract

The utility model relates to the technical field of semiconductor material manufacturing, and discloses a spin-drying device of a substrate slice, which comprises a support seat, a spin-drying device, a spin-drying device and a spin-drying device, and is characterized in that the support seat is provided with a gear ring; the rotating assembly is mounted on the supporting seat; a plurality of rotating shaft assemblies are arranged at the output end of the rotating assembly and located in the gear ring, each rotating shaft assembly comprises a transmission shaft and a gear, the transmission shafts are vertically arranged, the upper ends of the transmission shafts are rotationally connected with the supporting seat through bearing seats, the gears are fixedly arranged at the lower ends of the transmission shafts, and the supporting seat is fixedly connected with the gear. The gear is meshed with the gear ring; the placing jigs are used for placing substrate slices, the number of the placing jigs is the same as that of the rotating shaft assemblies, the placing jigs and the rotating shaft assemblies are in one-to-one correspondence in position, and the placing jigs are arranged at the upper end of the transmission shaft; the substrate slice drying device has the advantages that the placing jig fully loaded with the substrate slice rotates while revolving, moisture on the surface of the substrate slice is removed through superposition of revolving centrifugal force and rotating centrifugal force, the drying effect is good, and the drying efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor material manufacturing, in particular to a substrate sheet spin-drying device. Background Art

[0002] The substrate wafer is usually made of single crystal silicon or other semiconductor materials and is used for wafer manufacturing and the production of semiconductor devices. During the processing, the surface of the substrate wafer needs to be wet cleaned to remove impurities on the surface. After cleaning, the moisture on the surface of the substrate wafer needs to be removed and dried. In the prior art, the substrate wafers are generally cleaned and arranged on a jig for air drying. This drying method is time-consuming, and the air drying effect of the substrate wafer on the jig varies greatly, and the drying efficiency is low. Utility Model Content

[0003] The utility model aims to provide a substrate sheet drying device, which enables a placement fixture fully loaded with substrate sheets to rotate while revolving, and utilizes the centrifugal force of the revolution and rotation to remove moisture from the surface of the substrate sheets, thereby achieving good drying effect and improving drying efficiency.

[0004] In order to achieve the above object, the utility model provides a substrate sheet drying device, comprising:

[0005] A support seat, wherein a gear ring is provided on the support seat;

[0006] A rotating assembly is mounted on the support seat;

[0007] A plurality of rotating shaft assemblies are arranged at the output end of the rotating assembly and are located in the gear ring. The rotating shaft assembly includes a transmission shaft and a gear. The transmission shaft is arranged vertically, and the upper end of the transmission shaft is rotatably connected to the support seat through a bearing seat. The lower end of the transmission shaft is fixed with the gear, and the gear is meshed with the gear ring.

[0008] A plurality of placement jigs, used for placing substrate sheets, wherein the number of the placement jigs is the same as the number of the rotating shaft components, and the positions thereof correspond one to one, and the placement jigs are arranged at the upper end of the transmission shaft;

[0009] The rotating assembly drives the multiple rotating shaft assemblies to rotate, thereby driving the multiple placement jigs to revolve around the output end axis of the rotating assembly, and a single placement jig also rotates around the axis of the transmission shaft corresponding to one of them.

[0010] Furthermore, a T-shaped connecting portion is provided at the upper end of the transmission shaft, an upper end surface of the T-shaped connecting portion is in contact with the bottom surface of the placement fixture, and a threaded hole is provided on the T-shaped connecting portion for fixed connection with the placement fixture.

[0011] Furthermore, the outer wall of the lower end of the transmission shaft is provided with a limiting step for axial positioning with the gear installation.

[0012] Furthermore, the number of the rotating shaft assemblies and the placing jigs is at least 4.

[0013] Furthermore, the placement fixture includes a base and a plug, the base is fixedly connected to the transmission shaft, the base is provided with a mounting groove, the plugs are relatively provided on both sides of the mounting groove, and the plugs are evenly spaced along the length direction of the mounting groove to be used for the substrate sheet installation limit groove.

[0014] Furthermore, the support seat includes a plurality of support rods and a support plate, the plurality of support rods are vertically arranged, the support plate is located above the support rods and fixedly connected to the upper ends of the plurality of support plates, and the rotating assembly is installed on the support plate.

[0015] Furthermore, the rotating assembly includes a motor, a reducer and a turntable, the output end of the motor is connected to the input end of the reducer, the reducer is fixed in the middle of the support seat, and the turntable is installed at the output end of the reducer. The movement of the motor drives the reducer to work, and then drives the turntable to rotate.

[0016] Furthermore, a plurality of the placement jigs are located on the turntable and are arranged close to the edge of the turntable.

[0017] Compared with the prior art, the drying device for substrate sheets in the embodiment of the utility model has the following beneficial effects: multiple shaft assemblies are arranged at the output end of the rotating assembly, and each shaft assembly corresponds to a placement fixture, so that multiple substrate sheets on the placement fixtures can be dried simultaneously, thereby improving the drying efficiency. In addition, the shaft assembly includes a transmission shaft and a gear, the transmission shaft is vertically arranged, and the upper end of the transmission shaft is rotatably connected through a bearing seat and a support seat, and a gear is fixedly provided at the lower end of the transmission shaft, and the gear and the gear ring are meshed; the rotating assembly drives the multiple shaft assemblies to rotate, thereby driving the multiple placement fixtures to revolve around the axis of the output end of the rotating assembly, and a single placement fixture also rotates around the axis of the transmission shaft corresponding to it one by one, and the centrifugal force of the revolution and rotation is superimposed to remove moisture on the surface of the substrate sheet, thereby achieving a good drying effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a substrate sheet drying device according to an embodiment of the utility model;

[0019] Figure 2 It is a schematic diagram of parts of a substrate sheet drying device according to an embodiment of the utility model;

[0020] Figure 3is a cross-sectional view of a substrate sheet drying device according to an embodiment of the utility model;

[0021] Figure 4 It is a structural schematic diagram of a transmission shaft of a substrate sheet drying device according to an embodiment of the utility model.

[0022] In the figure, 1. support seat; 11. support rod; 12. support plate; 2. ring gear; 3. rotating assembly; 31. motor; 32. reducer; 33. turntable; 4. shaft assembly; 41. transmission shaft; 411. T-shaped connecting part; 412. limiting step; 42. gear; 43. bearing seat; 5. placement fixture; 51. base; 52. plug; a. substrate sheet. DETAILED DESCRIPTION

[0023] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0024] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "inside", "outside", etc. used in the present invention to indicate the orientation or positional relationship are based on the positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred devices and elements must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0025] like Figure 1As shown, a substrate sheet drying device according to a preferred embodiment of the utility model is used for drying substrate sheets a, and comprises a support base 1, a gear ring 2, a rotating assembly 3, a plurality of rotating shaft assemblies 4 and a plurality of placement jigs 5, wherein the support base 1 is used as a mounting carrier for mounting the above-mentioned components, specifically, a gear ring 2 is provided on the support base 1; the rotating assembly 3 is mounted on the support base 1, and the axis of the output end is coaxial with the gear ring 2, and is used for driving the substrate sheet to revolve around the axis of the rotating assembly 3, and the rotating shaft assembly 4 is used for cooperating with the gear ring 2, and driving the substrate sheet to realize self-rotation while revolving, thereby increasing the centrifugal force and improving the drying effect. Specifically, a plurality of rotating shaft assemblies 4 are arranged at the output end of the rotating assembly 3 and are located in the gear ring 2. The rotating shaft assembly 4 includes a transmission shaft 41 and a gear 42, wherein the transmission shaft 41 is arranged vertically, and the upper end of the transmission shaft 41 is rotatably connected to the support seat 1 through a bearing seat 43, and a gear 42 is fixedly arranged at the lower end of the transmission shaft 41, and the gear 42 is meshed with the gear ring 2. A plurality of placement jigs 5 are used to place substrate sheets, and the placement jigs 5 and the rotating shaft assemblies 4 are the same in number and have one-to-one corresponding positions, and the placement jigs 5 are arranged at the upper end of the transmission shaft 41. When the rotating assembly 3 is working, the rotating assembly 3 drives the plurality of rotating shaft assemblies 4 to rotate, and then drives the plurality of placement jigs 5 to revolve around the axis of the output end of the rotating assembly 3, and a single placement jig 5 also rotates around the axis of the transmission shaft 41 corresponding to it, so as to realize the operation of drying the substrate sheets.

[0026] Furthermore, in order to facilitate the connection between the transmission shaft 41 and the placement jig 5 and to support the placement jig 5, a T-shaped connection portion 411 is provided at the upper end of the transmission shaft 41, the upper end surface of the T-shaped connection portion 411 is in contact with the bottom surface of the placement jig 5, and a threaded hole for fixed connection with the placement jig 5 is provided on the T-shaped connection portion 411, that is, the placement jig 5 and the transmission shaft 41 are fixedly connected by screws. Furthermore, in some embodiments, in order to facilitate the axis limit of the transmission shaft 41 and the gear 42 when installing, a limit step 412 is provided on the outer wall of the lower end of the transmission shaft 41, and a key connection can be adopted between the gear 42 and the transmission shaft 41.

[0027] In some embodiments, in order to increase the amount of substrate sheets that are spun dry, the number of the shaft assemblies 4 can be adjusted according to the size of the output end of the rotating assembly 3. Since the number of the shaft assemblies 4 and the placement jig 5 are the same and their positions correspond one to one, the number of the shaft assemblies 4 and the placement jig 5 is at least 4. Preferably, in this embodiment, refer to Figure 1 The number of the rotating shaft assembly 4 and the placing fixture 5 is 4.

[0028] Furthermore, in order to facilitate the installation and arrangement of the substrate sheets, in the present embodiment, the placement jig 5 includes a base 51 and a plug 52, wherein the base 51 is fixedly connected to the transmission shaft 41, a mounting groove is provided on the base 51, plugs 52 are provided on both sides of the mounting groove, and the plugs 52 are evenly spaced along the length direction of the mounting groove to form the substrate sheet installation limit grooves, that is, one placement jig 5 can realize the installation of multiple substrate sheets, thereby increasing the number of substrate sheets spun each time and improving the drying efficiency.

[0029] Furthermore, in order to facilitate the design of the support base 1 and simplify the structure of the support base 1, in the present embodiment, the support base 1 includes a plurality of support rods 11 and a support plate 12, the plurality of support rods 11 are vertically arranged, the support plate 12 is located above the support rods 11 and is fixedly connected to the upper ends of the plurality of support plates 12, and the rotating assembly 3 is installed on the support plate 12.

[0030] Furthermore, in order to facilitate the setting of the rotating assembly 3 and to adjust the rotation speed, the rotating assembly 3 includes a motor 31, a reducer 32 and a turntable 33, wherein the output end of the motor 31 is connected to the input end of the reducer 32, the reducer 32 is fixed in the middle of the support seat 1, and the turntable 33 is installed at the output end of the reducer 32. The action of the motor 31 drives the reducer 32 to work, thereby driving the turntable 33 to rotate. Furthermore, in order to increase the centrifugal force of the revolution when the substrate sheet is dried, a plurality of placement jigs 5 are located on the turntable 33 and are arranged close to the edge of the turntable 33.

[0031] The working process of the utility model is as follows: the cleaned substrate sheet is installed in the placement fixture 5 on the drying device, and then the rotating component 3 is turned on. While the placement fixture 5 revolves around the output end axis of the rotating component 3, it rotates with the cooperation of the rotating shaft component 4 and the gear ring 2. The two centrifugal forces are superimposed to dry the moisture on the surface of the substrate sheet, thereby improving the drying efficiency of the substrate sheet.

[0032] In summary, the embodiment of the utility model provides a spin-drying device for substrate sheets, multiple shaft assemblies 4 are arranged at the output end of the rotating assembly 3, and each shaft assembly 4 corresponds to a placement fixture 5, and multiple substrate sheets on the placement fixtures 5 can be spun dry at the same time, thereby improving the drying efficiency. In addition, the shaft assembly 4 includes a transmission shaft 41 and a gear 42, the transmission shaft 41 is vertically arranged, and the upper end of the transmission shaft 41 is rotatably connected to the support seat 1 through a bearing seat 43, and the lower end of the transmission shaft 41 is fixed with a gear 42, and the gear 42 is meshed with the ring gear 2; the rotating assembly 3 drives the multiple shaft assemblies 4 to rotate, and then drives the multiple placement fixtures 5 to revolve around the axis of the output end of the rotating assembly 3, and a single placement fixture 5 also rotates around the axis of the transmission shaft 41 corresponding to it, and the centrifugal force of the revolution and rotation is superimposed to remove moisture from the surface of the substrate sheet, and the drying effect is good.

[0033] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A drying device for a substrate sheet, characterized in that: include: A support seat, wherein a gear ring is provided on the support seat; A rotating assembly is mounted on the support seat; A plurality of rotating shaft assemblies are arranged at the output end of the rotating assembly and are located in the gear ring. The rotating shaft assembly includes a transmission shaft and a gear. The transmission shaft is arranged vertically, and the upper end of the transmission shaft is rotatably connected to the support seat through a bearing seat. The lower end of the transmission shaft is fixed with the gear, and the gear is meshed with the gear ring. A plurality of placement jigs, used for placing substrate sheets, wherein the number of the placement jigs is the same as the number of the rotating shaft components, and the positions thereof correspond one to one, and the placement jigs are arranged at the upper end of the transmission shaft; The rotating assembly drives the multiple rotating shaft assemblies to rotate, thereby driving the multiple placement jigs to revolve around the output end axis of the rotating assembly, and a single placement jig also rotates around the axis of the transmission shaft corresponding to one of them.

2. The spin-drying device for substrate sheets according to claim 1, characterized in that: A T-shaped connecting portion is provided at the upper end of the transmission shaft, the upper end surface of the T-shaped connecting portion is in contact with the bottom surface of the placement fixture, and a threaded hole for fixed connection with the placement fixture is provided on the T-shaped connecting portion.

3. The spin-drying device for substrate sheets according to claim 1, characterized in that: The outer wall of the lower end of the transmission shaft is provided with a limiting step for axial positioning with the gear installation.

4. The spin-drying device for substrate sheets according to claim 1, characterized in that: The number of the rotating shaft assemblies and the placing fixtures is at least 4.

5. The spin-drying device for substrate sheets according to claim 1, characterized in that: The placement fixture includes a base and a plug, the base is fixedly connected to the transmission shaft, a mounting groove is provided on the base, the plugs are oppositely provided on both sides of the mounting groove, and the plugs are evenly spaced along the length direction of the mounting groove and are used for the substrate sheet to install the limiting groove.

6. The spin-drying device for substrate sheets according to claim 1, characterized in that: The support seat includes a plurality of support rods and a support plate. The plurality of support rods are vertically arranged. The support plate is located above the support rods and is fixedly connected to the upper ends of the plurality of support plates. The rotating assembly is installed on the support plate.

7. The spin-drying device for substrate sheets according to claim 6, characterized in that: The rotating assembly includes a motor, a reducer and a turntable. The output end of the motor is connected to the input end of the reducer. The reducer is fixed in the middle of the support seat. The turntable is installed at the output end of the reducer. The movement of the motor drives the reducer to work, thereby driving the turntable to rotate.

8. The spin-drying device for substrate sheets according to claim 7, characterized in that: A plurality of the placement jigs are located on the turntable and are arranged close to the edge of the turntable.

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