Wafer transmission device

Abstract

The utility model provides a wafer transmission device. The wafer transmission device comprises a movement mechanism, a driving platform and a mechanical arm, the mechanical arm is arranged on the movement mechanism through the driving platform; the mechanical arm comprises a first rotating arm and a second rotating arm which are rotationally connected through a first transmission assembly. The driving platform is provided with a second transmission assembly, and the second transmission assembly comprises a first transmission shaft and a second transmission shaft which are mutually sleeved and rotationally matched; the first transmission shaft is fixedly connected with the first rotating arm, and the second transmission shaft extends into the first rotating arm and is connected with the first transmission assembly through the second speed reduction assembly. The driving platform is further provided with a first driving part and a second driving part, the first driving part drives the first rotating arm to rotate, and the second driving part drives the second rotating arm to rotate. The strength and the rigidity of the whole device are improved through the integrated structural design of the horizontal axial device; the speed reduction assembly drives the mechanical arm to rotate, devices arranged in the mechanical arm are reduced, the thickness of the mechanical arm is reduced, and wafer carrying is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to a wafer transmission device. Background Art

[0002] The wafer transfer device is one of the important equipment in semiconductor manufacturing. It plays a bridge role in connecting the material handling system and the wafer processing system in the entire production line. With the continuous development of semiconductor manufacturing technology, the requirements for wafer transfer technology are getting higher and higher. High-precision and high-stability motion control technology is the key to achieving wafer transfer.

[0003] Furthermore, for wafers in different directions and positions, the wafer transfer device in the prior art uses multiple linked robotic arms when transporting wafers, and the wafers are picked up by the actuator at the end of the robotic arms.

[0004] However, the existing robotic arms take up a large space, cannot rotate or have a large rotation space, making it difficult to achieve mirror-image transfer of wafer boxes, and the repeatability during transfer is low. Patent No. CN116620859A provides a robotic arm device for wafer storage and transportation, including: a robotic arm structure, an internal cable structure; the robotic arm structure includes a base mechanism and a number of articulated arms, the base mechanism and the number of articulated arms are connected end to end in sequence, and any articulated arm is configured to rotate 360 ​​degrees on a fixed horizontal plane; the internal cable structure is integrated and enclosed and embedded in the robotic arm structure. The robotic arm is provided with multiple reducers, multiple rotating shafts, wire trough brackets and transmission wheels, which makes the arm thicker. In order to reserve arm space for other components, the oxidation furnace transmission system has to increase the overall size, which indirectly increases the volume of the overall wafer transmission device.

[0005] In order to solve the above problems, the prior art with patent number CN113611646A provides a wafer handling device, including a first support mechanism and a second support mechanism, the first support mechanism and the second support mechanism are arranged side by side along the translation direction, and the two opposite outer side walls of the first support mechanism and the second support mechanism are provided with a pick-up guide structure along the telescopic direction perpendicular to the translation direction; the first pick-up mechanism and the second pick-up mechanism are respectively movably arranged on the pick-up guide structure of the first support mechanism and the pick-up guide structure of the second support mechanism; the first pick-up mechanism and the second pick-up mechanism both include an end actuator, the end actuator of the first pick-up mechanism and the end actuator of the second pick-up mechanism are arranged relatively along the lifting direction and face opposite directions, so as to realize the handling of multiple silicon wafers in two directions. The device is provided with a multi-axial track, and the drive motor and the reducer are arranged inside the X-axis to avoid the confusion of the internal wiring of the clamping device and reduce the overall device volume.

[0006] However, the above-mentioned device is not equipped with a robotic arm, cannot adapt to complex environments and cannot achieve automated production; the support mechanism of the device is spliced, and the strength and rigidity are not strong, the stability is not high, and it is not convenient for subsequent maintenance; the device has only two movement directions, which limits the flexibility of the device in picking up wafers. Utility Model Content

[0007] The purpose of this application is to solve the problem in the prior art that how the wafer transfer device can make the wafer picking robot arm more compact and more adaptable to grabbing wafer boxes in different spaces, while ensuring the rigidity and stability of the wafer transfer device and facilitating subsequent maintenance work. Therefore, this application provides a wafer transfer device that adopts a multi-axial design, so that the device can adapt to grab wafer boxes in different spaces, operate more flexibly, and improve work efficiency; the main body of the horizontal moving device is designed to be integrated to improve the strength and rigidity of the overall device, and at the same time facilitate the subsequent maintenance of personnel; the drive device is set on the axial structure to reduce the thickness of the wafer picking robot arm, making the robot arm more compact, facilitating the wafer handling of the wafer storage area, and at the same time improving the rigidity and stability of the device.

[0008] The embodiment of the present application provides a wafer transfer device, including a motion mechanism, a driving platform and a mechanical arm;

[0009] The mechanical arm is arranged on the motion mechanism through the driving platform;

[0010] The mechanical arm comprises a first rotating arm and a second rotating arm rotatably connected via a first transmission assembly, and one end of the first rotating arm facing away from the second rotating arm is transmission-disposed on the driving platform;

[0011] The driving platform is provided with a second transmission assembly, the second transmission assembly includes a first transmission shaft and a second transmission shaft which are sleeved and rotatably matched with each other; the first transmission shaft is fixedly connected to the first rotating arm, the second transmission shaft extends into the first rotating arm, and is connected to the first transmission assembly through a second reduction assembly;

[0012] The driving platform is also provided with a first driving member and a second driving member. The first driving member is connected to the first transmission shaft through a first reduction assembly and drives the first rotating arm to rotate. The second driving member is directly connected to the second transmission shaft and drives the second rotating arm to rotate through the second transmission assembly.

[0013] By adopting the above technical solution, the driving platform is set on the motion device, and the robotic arm is set on the driving platform. The driving platform drives the robotic arm to move through the motion device, so that the device can adapt to different spaces to grab wafer boxes while improving the flexibility of the robotic arm in picking up wafers and the wafer transmission efficiency.

[0014] The robot arm includes a first rotating arm and a second rotating arm connected by a first transmission member, so that the rotating arm has higher flexibility, a larger extension distance, and a wider space for wafer picking.

[0015] Furthermore, a second transmission assembly is provided on the driving platform, and the second transmission assembly has a first transmission shaft and a second transmission shaft which are mutually nested, so that the transmission assembly structure is more compact; the first transmission shaft and the second transmission shaft rotate at intervals to avoid wear between the transmission shafts, thereby improving the durability and reliability of the transmission, and at the same time facilitating installation and disassembly, thereby improving convenience.

[0016] The first transmission shaft is fixedly connected to the first rotating arm and drives the first rotating arm to rotate, which simplifies the components for driving the first rotating arm to rotate, reduces power loss and error, realizes rapid response and precise control of the rotating arm, and ensures the accuracy and stability of transmission. The second transmission shaft is connected to the first transmission component through the second reduction component, which is arranged inside the first rotating arm, eliminating the use of the reducer, reducing the load of the first rotating arm, and reducing the thickness of the first rotating arm, making the mechanical arm more compact and flexible.

[0017] A first driving member and a second driving member are arranged in the driving platform. The first driving member is connected to the first transmission shaft through a first reduction assembly. The first reduction assembly is arranged inside the driving platform and drives the first rotating arm to rotate, thereby reducing the rotational inertia of the first rotating arm and achieving efficient deceleration. In addition, the first reduction assembly can also absorb part of the dynamic load to reduce damage to the first transmission shaft and the first driving member.

[0018] The second driving member is directly connected to the second transmission shaft and drives the second rotating arm to rotate through the second transmission assembly, thereby avoiding the second driving member being arranged inside the second rotating arm, reducing the thickness of the second rotating arm, and improving the flexibility of the second rotating arm.

[0019] In some embodiments, the motion mechanism includes a horizontal moving device and a lifting device, the horizontal moving device includes a body of an integrated structure, one end of the body of the integrated structure is connected to the lifting device, and the lifting device drives the body of the integrated structure to perform lifting motion;

[0020] The driving platform is arranged on the horizontal moving device, and the horizontal moving device drives the driving platform to move horizontally.

[0021] By adopting the above technical solution, the main body of the horizontal moving device is set as an integrated structure, which ensures the strength and rigidity of the horizontal moving device, avoids errors and failures caused by loose spliced ​​connecting parts of the horizontal moving device, ensures the performance of the device, and improves reliability and stability.

[0022] One end of the main body of the integrated structure is connected to the lifting device, and the lifting device drives the main body of the integrated structure to perform lifting movements. The horizontal moving device is integrated with the lifting device, so that the entire device has the function of moving in both horizontal and vertical directions, meeting a wider range of work needs, improving the adaptability and versatility of the device, and at the same time effectively utilizing space and reducing the footprint of the device.

[0023] In some embodiments, the horizontal moving device further comprises a first driving component, a moving slider and a moving guide rail, wherein the first driving component and the moving guide rail are disposed on the main body of the integrated structure, and the moving slider is slidably disposed on the moving guide rail;

[0024] The first driving assembly is connected to the moving slider and drives the moving slider to move horizontally on the moving guide rail.

[0025] By adopting the above technical solution, a first driving member and a movable slider are arranged on the main body of the integrated structure, and the movable slider is slidably arranged on the movable guide rail, thereby ensuring the accuracy and stability of the movable slider during the movement process, and at the same time ensuring that the main body of the integrated structure is not easily deformed or twisted during the movement, thereby improving the overall rigidity and strength of the equipment; in addition, the movable guide rail provides a guiding function, thereby ensuring the trajectory sliding of the movable slider, reducing the deviation during the movement process, and improving the accuracy and stability of the device.

[0026] The first driving component is connected to the moving slider, and drives the moving slider to move horizontally on the moving guide rail. The first driving component is directly connected to the moving slider, which simplifies the transmission system and improves the transmission efficiency and response speed.

[0027] In some embodiments, the first driving assembly includes a first driving motor disposed at one end of the moving guide rail, and a third transmission assembly drivingly connected to the moving slider;

[0028] The third transmission assembly includes transmission wheels disposed at both ends of the movable guide rail, and a transmission belt connecting the two transmission wheels;

[0029] The movable slider is fixedly arranged on the transmission belt, and the first driving motor drives one of the transmission wheels and drives the movable slider to move horizontally on the movable guide rail through the transmission belt.

[0030] By adopting the above technical solution, transmission wheels connected by transmission belts are arranged at both ends of the movable guide rail. The transmission wheels connected by the transmission belts reduce the number and complexity of mechanical parts, realize efficient transmission, and at the same time ensure the smooth operation of the movable guide rail and reduce errors; the first drive motor is arranged at one end of the movable guide rail and connected to one of the transmission wheels to drive the rotation. The first drive motor is electrically driven, which reduces energy consumption and noise pollution.

[0031] The moving slider is connected to the transmission belt, and the rotation of the transmission belt makes the moving slider move horizontally. Connecting the moving slider with the transmission belt can reduce friction and energy loss. When the moving slider encounters some resistance and the driving force is too large, the transmission belt can slide slightly, thereby protecting the drive system from overload damage and improving the transmission efficiency and response speed. In addition, the transmission belt can absorb part of the vibration, so that the moving slider moves more smoothly and continuously.

[0032] In some embodiments, the lifting device includes a lifting main structure, a second driving assembly, a lifting slider and a lifting guide rail, the lifting guide rail is arranged on the lifting main structure, and the lifting slider is transmission-arranged on the lifting guide rail;

[0033] The second driving component is connected to the lifting slider and drives the lifting slider to perform lifting motion on the lifting guide rail.

[0034] By adopting the above technical solution, the lifting slider is transmitted and arranged on the lifting guide rail, and the lifting guide rail is arranged on the lifting main structure. By arranging the lifting guide rail on the lifting main structure, a compact mechanical structure design can be achieved, which is beneficial to reduce the overall size and weight of the equipment; at the same time, the lifting guide rail provides stable guidance and support for the slider, ensuring the precise movement of the lifting slider during the lifting process, reducing the deviation or shaking of the lifting slider, and realizing precise control of the lifting slider.

[0035] The second driving component is arranged on the lifting body, and drives the lifting slider to perform lifting movement on the lifting guide rail. By integrating the second driving component with the lifting body, the overall structure is simplified, the number of external connection components is reduced, the compactness and reliability of the equipment are improved, and at the same time, the driving force for the moving slider is improved, ensuring the stability and accuracy of the moving slider during the lifting process.

[0036] In some embodiments, the second driving assembly includes a second driving motor disposed at one end of the lifting guide rail, and a lead screw transmission-connected to the lifting slider;

[0037] The lead screw is arranged in parallel with the lifting guide rail and is used for lifting the lifting slider;

[0038] The second driving motor drives the lead screw to rotate, and drives the lifting slide block to perform lifting motion on the lifting guide rail.

[0039] By adopting the above technical solution, the lead screw is connected to the lifting guide rail, and the lifting slider is connected to the lead screw. The spiral transmission of the lead screw can provide high-precision positioning and repeatability, ensuring the precise lifting and lowering of the lifting slider path. At the same time, the lead screw can withstand a large load, ensuring that the lifting slider has sufficient supporting force during the lifting process.

[0040] The second drive motor is arranged at one end of the lead screw to drive the lead screw to rotate, thereby driving the lifting slider to move up and down. The direct connection between the motor and the lead screw is conducive to quickly converting the rotational motion into the lifting motion of the slider, thereby improving the operating efficiency of the overall equipment.

[0041] In some embodiments, the mechanical arm further comprises an end effector, wherein an end of the end effector facing away from the first rotating arm is transmission-disposed at one end of the second rotating arm;

[0042] The first transmission assembly includes a third transmission shaft and a fourth transmission shaft which are sleeved and rotatably matched with each other, and the third transmission shaft extends into the second rotating arm and is connected to the end effector through a third reduction assembly;

[0043] The second reduction assembly is connected to the fourth transmission shaft and drives the end effector to rotate through the third reduction assembly.

[0044] By adopting the above technical solution, an end effector is arranged at one end of the second rotating arm away from one end of the first rotating arm, and the third transmission shaft extends into the second rotating arm, and is connected to the end effector through the third reduction assembly. By adjusting the reduction assembly, it is ensured that the end effector performs the task at the required position and speed, thereby improving the accuracy of positioning and operation; in addition, wear and heat of components during the transmission process are avoided, and unstable factors that may occur during operation are reduced.

[0045] The second reduction assembly is connected to the fourth transmission shaft, and drives the end effector to rotate through the third reduction assembly arranged in the second rotating arm. The multi-stage reduction design can better absorb and buffer vibrations during operation, reduce impact and noise during equipment operation, improve the stability of the entire system, and extend its service life. In addition, the third reduction assembly is arranged inside the second rotating arm to eliminate the use of the reducer, reduce the load on the second rotating arm, and at the same time reduce the thickness of the first rotating arm, making the second rotating arm more compact and flexible.

[0046] In some embodiments, the end effector is a triangular disk, a fifth transmission shaft is disposed in the middle of the triangular disk, the fifth transmission shaft extends into the second rotating arm, and is connected to the first transmission assembly through a third reduction assembly;

[0047] The edge of the triangular plate is provided with a plurality of positioning pins for locating the accurate position of the wafer.

[0048] By adopting the above technical solution, the end effector is set as a triangular disk, which has high rigidity and stability, is convenient for bearing external loads and maintaining the stability of its own structure, and improves the bearing capacity of the overall structure.

[0049] A fifth transmission shaft is arranged in the middle of the triangular disk and is connected to the first transmission assembly through a third reduction assembly, thereby reducing the number of components and connection points, simplifying the entire transmission system, and thereby improving the reliability and efficiency of the system; when the third reduction assembly drives the triangular disk to rotate, the rotation of the triangular disk becomes more stable, thereby making the wafer transmission more stable.

[0050] Multiple positioning pins are set on the edge of the triangular plate to increase the number of contact points with the wafer, thereby improving the positioning precision and accuracy, avoiding repeated positioning and taking, and thus speeding up work speed and efficiency.

[0051] In some embodiments, it is characterized in that it further comprises a position detection unit, the position detection unit comprises a first position detection device, a second position detection device and a third position detection device, the first position detection device is arranged on the horizontal moving device, and is used to detect the position of the driving platform;

[0052] The second position detection device is arranged on the lifting device and is used to detect the position of the horizontal moving device;

[0053] The third position detection device is arranged inside the driving platform, and is used for the in-place detection and limit detection of the robot arm and the fracture detection of the conveyor belt.

[0054] By adopting the above technical solution, a position monitoring unit is installed on the wafer transmission device to facilitate real-time monitoring of the position of the wafer, ensure its precise positioning during the transmission process, and avoid collision or accidental falling during the transmission and processing process, thereby protecting the wafer from damage, enhancing the maintainability of the equipment, and reducing the downtime and maintenance costs of wafer transmission failures.

[0055] The first position detection device is arranged on the horizontal moving device to detect the position of the driving platform on the driving platform to ensure the accuracy of its horizontal moving position; in addition, it is convenient to timely discover moving faults or positioning errors and enhance the maintainability of the device.

[0056] The second position detection device is arranged on the lifting device to detect the position of the horizontal moving device on the lifting device to ensure the positioning accuracy of the lifting device. In addition, it is convenient to timely discover lifting faults or positioning errors, thereby enhancing the maintainability of the equipment.

[0057] The third position detection device is arranged inside the driving platform, so as to detect the position of the robot arm with high precision and ensure its accuracy and stability when performing tasks; it is used for precise in-place detection, so as to reach the target position quickly and accurately and improve the overall production efficiency; it is used for limit detection, so as to timely detect whether the robot arm exceeds the preset range and prevent equipment damage or personal injury caused by exceeding the limit range; in addition, it is convenient to monitor the running status of the conveyor belt in real time. Once the conveyor belt shows signs of breakage, the operation of the robot arm can be stopped in time to avoid the expansion of the accident.

[0058] Other features and corresponding beneficial effects of the utility model are described in the latter part of the specification, and it should be understood that a small part of the beneficial effects become obvious from the records in this utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] Figure 1 A schematic diagram of the structure of a wafer transfer device provided in an embodiment of the present application;

[0060] Figure 2 A schematic diagram of the structure of a robotic arm of a wafer transfer device provided in an embodiment of the present application;

[0061] Figure 3 A schematic diagram of the structure of a drive platform of a wafer transfer device provided in an embodiment of the present application;

[0062] Figure 4 A schematic diagram of the structure of a horizontal moving device of a motion mechanism of a wafer transfer device provided in an embodiment of the present application;

[0063] Figure 5 A schematic diagram of the structure of the lifting device of the motion mechanism of the wafer transfer device provided in an embodiment of the present application.

[0064] Description of reference numerals:

[0065] 11. Horizontal moving device;

[0066] 111. A main body of the integrated structure; 112. A movable slider; 113. A movable guide rail;

[0067] 114, first driving assembly; 1141, first driving motor; 1142, transmission wheel; 1143, transmission belt;

[0068] 12. Lifting device;

[0069] 121. Lifting main structure; 122. Lifting slide block; 123. Lifting guide rail;

[0070] 124. Second driving assembly; 1241. Second driving motor; 1242. Lead screw;

[0071] 2. Driving platform;

[0072] 21. First driving member; 22. Second driving member; 23. First reduction assembly;

[0073] 24. Second transmission assembly; 241. First transmission shaft; 242. Second transmission shaft;

[0074] 3. Robotic arm;

[0075] 31. first rotating arm; 311. second speed reduction assembly;

[0076] 32. Second rotating arm;

[0077] 33. A first transmission assembly;

[0078] 34. End effector; 341. Triangular plate. DETAILED DESCRIPTION

[0079] The following is an explanation of the implementation of the present invention by specific specific embodiments. Those skilled in the art can easily understand other advantages and functions of the present invention from the contents disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this utility model are limited to this implementation. On the contrary, the purpose of introducing the utility model in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present invention. In order to provide a deep understanding of the present invention, the following description will include many specific details. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description. It should be noted that, in the absence of conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0080] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0081] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0082] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and arranged in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description created by the present application, unless otherwise specified, "multiple" means two or more.

[0083] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0084] In order to make the purpose, technical solution and advantages of the present invention more clear, the implementation mode of the present invention will be further described in detail below with reference to the accompanying drawings.

[0085] See also Figures 1 to 5 , Figure 1 A schematic diagram of the structure of a wafer transfer device provided in an embodiment of the present application; Figure 2 A schematic diagram of the structure of a robotic arm of a wafer transfer device provided in an embodiment of the present application; Figure 3 A schematic diagram of the structure of a drive platform of a wafer transfer device provided in an embodiment of the present application; Figure 4 A schematic diagram of the structure of a horizontal moving device of a motion mechanism of a wafer transfer device provided in an embodiment of the present application; Figure 5 A schematic diagram of the structure of the lifting device of the motion mechanism of the wafer transfer device provided in an embodiment of the present application.

[0086] like Figures 1 to 5As shown, an embodiment of the present application provides a wafer transmission device, including a motion mechanism, a driving platform 2 and a robot arm 3; the robot arm 3 is arranged on the motion mechanism through the driving platform 2; the robot arm 3 includes a first rotating arm 31 and a second rotating arm 32 rotatably connected through a first transmission component 33, and one end of the first rotating arm 31 away from the second rotating arm 32 is transmission-arranged on the driving platform 2; the driving platform 2 is provided with a second transmission component 24, and the second transmission component 24 includes a first transmission shaft 241 and a second transmission shaft 242 which are mutually sleeved and rotationally matched; and the first transmission shaft 241 is fixedly connected to the first rotating arm 31, and the second transmission shaft 242 extends into the first rotating arm 31 and is connected to the first transmission component 33 through a second reduction assembly 311; the driving platform 2 is also provided with a first driving member 21 and a second driving member 22, the first driving member 21 is connected to the first transmission shaft 241 through the first reduction assembly 23, and drives the first rotating arm 31 to rotate, and the second driving member 22 is directly connected to the second transmission shaft 242 and drives the second rotating arm 32 to rotate through the second transmission assembly 24.

[0087] It will be understood by those skilled in the art that by placing the robot arm 3 on the driving platform 2 and taking the wafer by the robot arm 3 , high-precision positioning and grasping can be achieved, and the stability and consistency of the wafer during the transmission process must be ensured.

[0088] The driving platform 2 is arranged on the motion device, and the driving platform 2 drives the mechanical arm 3 to move through the motion device. The multi-axial design is adopted, so that the device can adapt to different spaces to grab wafer boxes, and at the same time, the flexibility of the mechanical arm 3 in taking wafers and the wafer transmission efficiency must be improved. For example, the driving platform 2 is removed, one end of the mechanical arm 3 is rotated to connect the motion mechanism, and slides on the motion mechanism, and the driving platform 2 is arranged so that the driving component is arranged inside the motion mechanism.

[0089] Furthermore, those skilled in the art will appreciate that the robot arm 3 has a first rotating arm 31 and a second rotating arm 32 connected via a first transmission member, such that the rotating arm has higher flexibility, a larger extension distance, and a wider space for wafer handling.

[0090] A second transmission assembly 24 is provided on the driving platform 2. The second transmission assembly 24 includes a first transmission shaft 241 and a second transmission shaft 242 which are mutually sleeved, and can realize transmission in a smaller space, making the transmission assembly structure more compact. The first transmission shaft 241 and the second transmission shaft 242 rotate at intervals to avoid wear between the transmission shafts, thereby improving the durability and reliability of the transmission, and facilitating installation and disassembly, thereby improving the convenience of maintenance.

[0091] The first transmission shaft 241 is fixedly connected to the first rotating arm 31 and drives the first rotating arm 31 to rotate, thereby simplifying the components for driving the first rotating arm 31 to rotate, achieving rapid response and precise control of the rotating arm, ensuring transmission accuracy and stability, and reducing power loss and errors.

[0092] The second transmission shaft 242 is connected to the first transmission assembly 33 through the second reduction assembly 311. The second reduction assembly 311 is arranged inside the first rotating arm 31, eliminating the use of the reducer, reducing the load of the first rotating arm 31, and at the same time simplifying the internal transmission assembly of the robotic arm 3, reducing the thickness of the first rotating arm 31, and making the robotic arm 3 more compact.

[0093] In one embodiment, a first driving member 21 and a second driving member 22 are provided in the driving platform 2. The first driving member 21 is connected to the first transmission shaft 241 through a first reduction assembly 23. The first reduction assembly 23 is provided inside the driving platform 2 and drives the first rotating arm 31 to rotate, thereby reducing the rotational inertia of the first rotating arm 31. While achieving efficient deceleration, the first reduction assembly 23 can also absorb part of the dynamic load and reduce damage to the first transmission shaft 241 and the first driving member 21.

[0094] The second driving member 22 is directly connected to the second transmission shaft 242 and drives the second rotating arm 32 to rotate through the second transmission assembly 24, so as to avoid the second driving member 22 being arranged inside the second rotating arm 32, increase the thickness of the second rotating arm 32, and improve the flexibility of the second rotating arm 32.

[0095] In one embodiment, the driving platform 2 is arranged on the motion mechanism, and the driving platform 2 moves up, down, left, and right on the motion mechanism, and the robot arm 3 is arranged on the driving platform 2, and moves up, down, left, and right following the driving platform 2. The robot arm 3 is provided with a plurality of rotating arms, and the wafers inside the storage bin are positioned and taken by rotating and extending the plurality of rotating arms, and a deceleration component is arranged inside the rotating arm to decelerate the rotating arm, thereby reducing the internal component arrangement of the robot arm 3, and making the robot arm 3 thin and flexible.

[0096] In one embodiment, the motion mechanism includes a horizontal moving device 11 and a lifting device 12. The horizontal moving device 11 includes a main body 111 of an integrated structure. One end of the main body 111 of the integrated structure is connected to the lifting device 12. The lifting device 12 drives the main body 111 of the integrated structure to perform lifting and lowering movements. The driving platform 2 is arranged on the horizontal moving device 11, and the horizontal moving device 11 drives the driving platform 2 to perform horizontal movement.

[0097] The main body of the horizontal moving device 11 is set as an integrated structure, which ensures the strength and rigidity of the horizontal moving device 11, avoids the error of the horizontal moving device 11 caused by looseness or vibration of the spliced ​​connecting parts, ensures the performance of the device, and has high reliability and stability, while reducing the addition of unnecessary components and reducing the weight of the horizontal moving device 11.

[0098] One end of the main body 111 of the integrated structure is connected to the lifting device 12, and the lifting device 12 drives the main body 111 of the integrated structure to perform lifting movements. The horizontal moving device 11 and the lifting device 12 are integrated together, so that the entire device has the function of moving in both horizontal and vertical directions, meeting a wider range of work needs, improving the adaptability and versatility of the device, and at the same time effectively utilizing space and reducing the footprint of the equipment.

[0099] In one embodiment, the lifting device 12 is arranged to be longitudinally surrounded at both ends of the horizontal moving device 11. The horizontal moving device 11 is slidably connected to the lifting device 12 and can be connected to the lifting devices 12 at both ends to perform lifting movements, thereby avoiding instability caused by the driving platform 2 moving on the horizontal moving device 11, thereby increasing the movement accuracy of the device.

[0100] In one embodiment, the horizontal moving device 11 also includes a first driving component 114, a moving slider 112 and a moving guide rail 113. The first driving component 114 and the moving guide rail 113 are arranged on the main body 111 of the integrated structure, and the moving slider 112 is slidably arranged on the moving guide rail 113; the first driving component 114 is connected to the moving slider 112, and drives the moving slider 112 to move horizontally on the moving guide rail 113.

[0101] It can be understood by those skilled in the art that a first driving member 21 and a movable slider 112 are provided on the main body 111 of the integrated structure, and the movable slider 112 is slidably provided on the movable guide rail 113, thereby ensuring the accuracy and stability of the movable slider 112 during the movement process, ensuring that the main body 111 of the integrated structure is not easily deformed or twisted during the movement process, and improving the overall rigidity and strength of the equipment; the movable guide rail 113 can provide a guiding function, ensuring that the movable slider 112 slides along a predetermined trajectory, reducing errors and deviations during the movement process, and improving the accuracy and stability of the device.

[0102] The first driving assembly 114 is connected to the moving slider 112, and drives the moving slider 112 to move horizontally on the moving guide rail 113. The first driving assembly 114 is directly connected to the moving slider 112, and the transmission system must be simplified to make the entire device structure more compact, improve the transmission efficiency and response speed, and thus achieve precise position control. For example, a rotating chain is set on the integrated structure, and connected to the driving platform 2 through a connecting piece to drive the mechanical arm 3 to move horizontally.

[0103] In one embodiment, the first drive component 114 includes a first drive motor 1141 arranged at one end of the moving guide rail 113, and a third transmission component connected to the moving slider 112; the third transmission component includes a transmission wheel 1142 arranged at both ends of the moving guide rail 113, and a transmission belt 1143 connecting the two transmission wheels 1142; the moving slider 112 is fixedly arranged on the transmission belt 1143, and the first drive motor 1141 drives one of the transmission wheels 1142, and drives the moving slider 112 to move horizontally on the moving guide rail 113 through the transmission belt 1143.

[0104] Transmission wheels 1142 connected by transmission belts 1143 are arranged at both ends of the movable guide rail 113. The transmission wheels 1142 connected by the transmission belts 1143 reduce the number and complexity of mechanical parts, achieve efficient transmission, and at the same time ensure the smooth operation of the movable guide rail 113 and reduce vibration and error. The first drive motor 1141 is arranged at one end of the movable guide rail 113 and connected to one of the transmission wheels 1142 to drive the rotation. The first drive motor 1141 is electrically driven, which reduces energy consumption and noise pollution.

[0105] The movable slider 112 is connected to the transmission belt 1143. The rotation of the transmission belt 1143 enables the movable slider 112 to move horizontally. Connecting the movable slider 112 with the transmission belt 1143 can reduce friction and energy loss. When the movable slider 112 encounters some resistance and the driving force is too large, the transmission belt 1143 can slide slightly, thereby protecting the driving system from damage caused by overload and improving the efficiency and response speed of the transmission. In addition, the transmission belt 1143 can absorb part of the vibration, so that the movable slider 112 moves more smoothly and continuously.

[0106] In one embodiment, a driving wheel is provided on the first driving motor 1141, and the driving wheel is connected to a driven wheel provided at the other end of the horizontal movement through a track. The movable slider 112 is provided above the track and is supported by an integrated structural body and driven by the first driving motor 1141 to move horizontally on the track.

[0107] In one embodiment, the lifting device 12 includes a lifting main structure 121, a second driving component 124, a lifting slider 122 and a lifting guide rail 123. The lifting guide rail 123 is arranged on the lifting main structure 121, and the lifting slider 122 is transmission-arranged on the lifting guide rail 123; the second driving component 124 is connected to the lifting slider 122, and drives the lifting slider 122 to perform lifting and lowering movements on the lifting guide rail 123.

[0108] The lifting slider 122 is transmitted and arranged on the lifting guide rail 123, and the lifting guide rail 123 is arranged on the lifting main structure 121. By arranging the lifting guide rail 123 on the lifting main structure 121, a compact mechanical structure design can be achieved, which is beneficial to reducing the overall size and weight of the equipment; at the same time, the lifting guide rail 123 provides a stable guide and support for the slider, ensuring the precise movement of the slider during the lifting process, reducing the possibility of deviation or shaking, and realizing precise control of the slider.

[0109] The second driving component 124 is arranged on the lifting body, and drives the lifting slider 122 to perform lifting movement on the lifting guide rail 123. By integrating the second driving component 124 with the lifting body, the overall structure is simplified, the number of external connections and components is reduced, the compactness and reliability of the equipment are improved, and at the same time, the driving force of the moving slider is improved, ensuring the stability and accuracy of the moving slider 112 during the lifting process.

[0110] In one embodiment, the second drive assembly 124 includes a second drive motor 1241 arranged at one end of the lifting guide rail 123, and a screw 1242 that is transmission-connected to the lifting slider 122; the screw 1242 is arranged parallel to the lifting guide rail 123, and is used for lifting and lowering the lifting slider 122; the second drive motor 1241 drives the screw 1242 to rotate, and drives the lifting slider 122 to perform lifting and lowering movements on the lifting guide rail 123.

[0111] The lead screw 1242 is connected to the lifting guide rail 123, and the lifting slider 122 is connected to the lead screw 1242. The spiral transmission of the lead screw 1242 can provide high-precision positioning and repeatability, ensuring the accurate lifting and lowering of the lifting slider 122 path. At the same time, the lead screw 1242 can withstand a large load, ensuring that the lifting slider 122 has sufficient supporting force during the lifting process.

[0112] The second drive motor 1241 is set at one end of the screw 1242, and drives the screw 1242 to rotate, thereby driving the lifting slider 122 to move up and down. The direct connection between the motor and the screw 1242 is conducive to quickly converting the rotational motion into the lifting motion of the slider, thereby improving the operating efficiency of the overall equipment.

[0113] In one embodiment, the robotic arm 3 also includes an end effector 34, and one end of the end effector 34 is transmission-disposed at one end of the second rotating arm 32 away from the first rotating arm 31; the first transmission assembly 33 includes a third transmission shaft and a fourth transmission shaft that are mutually sleeved and rotatably matched, and the third transmission shaft extends into the second rotating arm 32 and is connected to the end effector 34 through a third reduction assembly; the second reduction assembly 311 is connected to the fourth transmission shaft, and drives the end effector 34 to rotate through the third reduction assembly.

[0114] An end effector 34 is arranged at one end of the second rotating arm 32 away from one end of the first rotating arm 31, and the third transmission shaft extends into the second rotating arm 32, and is connected to the end effector 34 through a third reduction assembly. By adjusting the reduction assembly, it is ensured that the end effector 34 performs the task at the required position and speed, thereby improving the accuracy of positioning and operation; in addition, wear and heat of components during the transmission process are avoided, and unstable factors that may occur during the operation are reduced.

[0115] The second reduction assembly 311 is connected to the fourth transmission shaft, and drives the end effector 34 to rotate through the third reduction assembly arranged in the second rotating arm 32. The multi-stage reduction design can better absorb and buffer the vibration during operation, reduce the impact and noise during equipment operation, improve the stability of the entire system, and extend the service life; in addition, the third reduction assembly is arranged inside the second rotating arm 32, the use of the reducer is eliminated, the load on the second rotating arm 32 is reduced, and at the same time, the internal transmission assembly of the robotic arm 3 is simplified, the thickness of the first rotating arm 31 is reduced, and the robotic arm 3 is smaller.

[0116] In one embodiment, the end effector is a triangular disk 341, a fifth transmission shaft is arranged in the middle of the triangular disk 341, the fifth transmission shaft extends into the second rotating arm 32, and is connected to the first transmission assembly 33 through the third reduction assembly; a plurality of positioning pins are arranged on the edge of the triangular disk 341 for accurately positioning the wafer.

[0117] Those skilled in the art may understand that the end effector 34 is configured as a triangular disk 341 , which has high rigidity and stability, is convenient for bearing external loads and maintaining the stability of its own structure, and improves the bearing capacity of the overall structure.

[0118] A fifth transmission shaft is arranged in the middle of the triangular disk 341, and is connected to the first transmission assembly 33 through the third reduction assembly, which reduces the number of components and connection points, simplifies the entire transmission system, and thus improves the reliability and efficiency of the system; when the third reduction assembly drives the triangular disk 341 to rotate, it is necessary to ensure that the rotation is more stable, and thus the wafer transmission is more stable. For example, the triangular disk 341 is arranged as a circular disk, and the fifth transmission shaft is arranged in the middle of the circular disk to connect the second rotating arm 32.

[0119] A plurality of positioning pins are arranged on the edge of the triangular plate 341 to increase the number of contact points with the wafer, thereby improving the precision and accuracy of positioning, avoiding repeated positioning and taking, and thus speeding up the working speed and efficiency.

[0120] In one embodiment, the wafer transfer device also includes a position detection unit to facilitate real-time monitoring of the position of the wafer, ensuring its precise positioning during the transfer process and avoiding collision or accidental falling during the transfer and processing process, thereby protecting the wafer from damage, enhancing the maintainability of the equipment, and reducing wafer transfer failure downtime and maintenance costs.

[0121] In one embodiment, a first position detection device is provided on the horizontal moving device 11 to detect the horizontal moving position of the driving platform 2 to ensure its precise movement, thereby improving the positioning accuracy of the entire wafer processing device; at the same time, it is convenient to timely discover movement failures or positioning errors, thereby enhancing the maintainability of the equipment.

[0122] In one embodiment, a second position detection device is provided on the lifting device 12 to detect the position of the horizontal moving device 11 to ensure its positioning accuracy, thereby improving the manufacturing accuracy of the entire wafer processing device; at the same time, it is convenient to timely detect lifting failures or positioning errors, thereby enhancing the maintainability of the equipment.

[0123] In one embodiment, a third position detection device is provided inside the driving platform 2 for in-place detection, limit detection of the robot arm 3 and break detection of the conveyor belt, so as to facilitate high-precision detection of the position of the robot arm 3 and ensure its accuracy and stability when performing tasks; through precise in-place detection, the robot arm 3 can quickly and accurately reach the target position, thereby improving overall production efficiency; through limit detection, it can be timely detected whether the robot arm 3 exceeds the preset range, thereby preventing equipment damage or personal injury caused by exceeding the limit range; in addition, it is convenient to monitor the operating status of the conveyor belt in real time. Once signs of breakage of the conveyor belt are found, the operation of the robot arm 3 can be stopped in time to avoid the expansion of the accident.

[0124] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A wafer transfer device, characterized in that: Including motion mechanism, driving platform and robotic arm; The mechanical arm is arranged on the motion mechanism through the driving platform; The mechanical arm comprises a first rotating arm and a second rotating arm rotatably connected via a first transmission assembly, and one end of the first rotating arm facing away from the second rotating arm is transmission-disposed on the driving platform; The driving platform is provided with a second transmission assembly, the second transmission assembly includes a first transmission shaft and a second transmission shaft which are sleeved and rotatably matched with each other; the first transmission shaft is fixedly connected to the first rotating arm, the second transmission shaft extends into the first rotating arm, and is connected to the first transmission assembly through a second reduction assembly; The driving platform is also provided with a first driving member and a second driving member. The first driving member is connected to the first transmission shaft through a first reduction assembly and drives the first rotating arm to rotate. The second driving member is directly connected to the second transmission shaft and drives the second rotating arm to rotate through the second transmission assembly.

2. A wafer transfer device according to claim 1, characterized in that: The motion mechanism includes a horizontal moving device and a lifting device, the horizontal moving device includes a main body of an integrated structure, one end of the main body of the integrated structure is connected to the lifting device, and the lifting device drives the main body of the integrated structure to perform lifting motion; The driving platform is arranged on the horizontal moving device, and the horizontal moving device drives the driving platform to move horizontally.

3. A wafer transfer device according to claim 2, characterized in that: The horizontal moving device further comprises a first driving assembly, a moving slider and a moving guide rail, wherein the first driving assembly and the moving guide rail are arranged on the main body of the integrated structure, and the moving slider is slidably arranged on the moving guide rail; The first driving assembly is connected to the moving slider and drives the moving slider to move horizontally on the moving guide rail.

4. A wafer transfer device according to claim 3, characterized in that: The first driving assembly includes a first driving motor disposed at one end of the moving guide rail, and a third transmission assembly drivingly connected to the moving slider; The third transmission assembly includes transmission wheels disposed at both ends of the movable guide rail, and a transmission belt connecting the two transmission wheels; The movable slider is fixedly arranged on the transmission belt, and the first driving motor drives one of the transmission wheels and drives the movable slider to move horizontally on the movable guide rail through the transmission belt.

5. The wafer transfer device according to claim 2, characterized in that: The lifting device comprises a lifting main structure, a second driving assembly, a lifting slider and a lifting guide rail, wherein the lifting guide rail is arranged on the lifting main structure, and the lifting slider is transmission-arranged on the lifting guide rail; The second driving component is connected to the lifting slider and drives the lifting slider to perform lifting motion on the lifting guide rail.

6. The wafer transfer device according to claim 5, characterized in that: The second driving assembly includes a second driving motor disposed at one end of the lifting guide rail, and a lead screw transmission-connected to the lifting slider; The lead screw is arranged in parallel with the lifting guide rail and is used for lifting the lifting slider; The second driving motor drives the lead screw to rotate, and drives the lifting slide block to perform lifting motion on the lifting guide rail.

7. The wafer transfer device according to claim 1, characterized in that: The mechanical arm further comprises an end effector, wherein one end of the end effector, which is away from the first rotating arm, is transmission-disposed at one end of the second rotating arm; The first transmission assembly includes a third transmission shaft and a fourth transmission shaft which are sleeved and rotatably matched with each other, and the third transmission shaft extends into the second rotating arm and is connected to the end effector through a third reduction assembly; The second reduction assembly is connected to the fourth transmission shaft and drives the end effector to rotate through the third reduction assembly.

8. The wafer transfer device according to claim 7, characterized in that: The end effector is a triangular disk, a fifth transmission shaft is arranged in the middle of the triangular disk, the fifth transmission shaft extends into the second rotating arm, and is connected to the first transmission assembly through a third reduction assembly; The edge of the triangular plate is provided with a plurality of positioning pins for locating the accurate position of the wafer.

9. The wafer transfer device according to claim 2, characterized in that: It also includes a position detection unit, which includes a first position detection device, a second position detection device and a third position detection device, wherein the first position detection device is arranged on the horizontal moving device and is used to detect the position of the driving platform; The second position detection device is arranged on the lifting device and is used to detect the position of the horizontal moving device; The third position detection device is arranged inside the driving platform, and is used for the in-place detection and limit detection of the robot arm and the fracture detection of the conveyor belt.

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