Clamp for metal stripping device

Abstract

The clamp for the metal stripping device comprises a base and two clamping blocks connected to the top of the base in a sliding mode, a sliding groove is formed in the top of the base, a through groove penetrating up and down is formed in the center of the sliding groove, and the clamping blocks are connected into the sliding groove located on the two sides of the through groove in a sliding mode. Screw holes are formed in the front side and the rear side of the top, located on the outer side of the sliding groove, of the base, a pull rod is in threaded connection with the interior of one screw hole, two lifting rods perpendicular to the pull rod are arranged on the two sides of the upper end of the pull rod, supporting plates are arranged at the two ends of the top of the base, and an adjusting assembly is arranged on each supporting plate; each adjusting assembly is rotatably connected with the clamping block on the same side, the opposite side faces of the two clamping blocks are arranged to be arc faces, the opposite side faces of the two clamping blocks are provided with a plurality of arc-shaped grooves which are aligned front and back side by side, and the two opposite arc-shaped grooves are closed to form a semicircle where a wafer can be placed.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor chip manufacturing, in particular to a clamp used for a metal stripping device. Background Art

[0002] Metal lift-off technology means that after a substrate is coated with photoresist, exposed and developed, a photoresist film with a certain pattern is used as a mask to evaporate the required metal with glue, and then the metal on the glue film is stripped off at the same time as the photoresist is removed, leaving only the metal with the original pattern on the substrate.

[0003] Currently, metal stripping is mainly a manual process: the wafer with metal growth needs to be immersed in a stripping solution, and after a certain period of time, the unnecessary metal on the surface is stripped off; the general stripping method is prone to scratches on the metal surface and residual metal debris, and the stripping time is long and the efficiency is low.

[0004] In this regard, a clamp for a metal stripping device is proposed to solve the above problems. Summary of the invention

[0005] The purpose of the utility model is to provide a clamp for a metal stripping device, so as to solve the problems mentioned in the background technology.

[0006] In order to achieve the above object, the technical solution of the utility model is:

[0007] 4. The repairing kit for automotive dents, according to claim 1, wherein the two trackballs are designed to be easily adjusted in size and size and are suitable for use with a user as the to-be-installed tool. The trackballs are designed to be easily adjusted in size and size and can be easily used for cleaning the to-be-installed tool.

[0008] The two support plates are provided with through holes that penetrate left and right, and the side surfaces of the slide groove located on the left and right sides of the through groove are provided with inclined surfaces, and the inclined surfaces are inclined from the top of the slide groove to the through groove.

[0009] The adjustment assembly includes a screw threadedly connected to the through hole, and the screws on both sides of the support plate are threadedly connected with fixing nuts, and the end of the screw close to the clamping block is provided with a connecting rod with a diameter smaller than the screw and extending to the inside of the clamping block, and the end of the connecting rod away from the screw is provided with a ball bearing that abuts the clamping block, and the end of the screw away from the clamping block is provided with a rotating handle.

[0010] A clamping groove for the balls to rotate is provided on the side of the clamping block close to the screw rod, and a clamping ring is provided at the opening of the clamping groove to prevent the balls from falling off.

[0011] The beneficial effects of the utility model are:

[0012] The utility model arranges the clamp to have a structure for vertically placing the wafer, which can effectively reduce or avoid scratches on the wafer during the peeling process on the one hand, and can perform peeling operations on multiple wafers on the other hand, greatly improving the peeling efficiency; the two clamping blocks for placing the wafers are arranged to be slidably connected to the base, and can be adjusted for use according to the sizes of wafers of different sizes, greatly improving the applicability of the entire clamp. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the structure of the utility model;

[0014] Figure 2 It is a structural schematic diagram of the base of the utility model;

[0015] Figure 3 It is a structural schematic diagram of the adjustment component of the utility model. DETAILED DESCRIPTION

[0016] In order to enable those skilled in the art to better understand the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and implementation methods.

[0017] like Figure 1-3As shown, a clamp for a metal stripping device comprises a base 1 and two clamping blocks 3 slidably connected to the top of the base 1, the top of the base 1 is provided with a slide groove 14, the center of the slide groove 14 is provided with a through groove 12 running through from top to bottom, the slide grooves 14 on both sides of the through groove 12 are slidably connected with clamping blocks 3, the front and rear sides of the top of the base 1 located outside the slide groove 14 are provided with screw holes 11, one of the screw holes 11 is threadedly connected with a pull rod 2, two lifting rods 21 perpendicular to the pull rod 2 are arranged on both sides of the upper end of the pull rod 2, support plates 13 are arranged at both ends of the top of the base 1, each of the support plates 13 is provided with an adjustment component 4, each of the adjustment components 4 is rotatably connected to the clamping block 3 on the same side, the opposite sides of the two clamping blocks 3 are arranged as arc surfaces 31, and a plurality of arc-shaped grooves 32 aligned front and back are arranged on the opposite sides of the two clamping blocks 3, and the two opposite arc-shaped grooves 32 are closed to form a semicircle for placing wafers.

[0018] The two support plates 13 are each provided with a through hole 16 that runs through the through groove 14 to the left and right. The side surfaces of the slide groove 14 on the left and right sides of the through groove 12 are each provided with an inclined surface 15. The inclined surface 15 is inclined from the top of the slide groove 14 toward the through groove 12. During implementation, the side surfaces of the slide grooves on the left and right sides of the through groove are set to inclined surfaces. When a wafer with a larger radius is placed, the spacing between the two clamps is larger, and the inclined surfaces can cooperate well with the placement of the wafer, thereby preventing the slide grooves on both sides of the through hole from pressing against the bottom of the wafer, making it impossible for the wafer to be well fixed in the clamps on both sides.

[0019] The adjusting assembly 4 includes a screw 41 threadedly connected to the through hole 16, and fixing nuts 43 are threadedly connected to the screws 41 on both sides of the support plate 13. A connecting rod 44 with a diameter smaller than the screw 41 and extending to the inside of the clamping block 3 is provided at one end of the screw 41 close to the clamping block 3, and a ball 45 abutting against the clamping block 3 is provided at one end of the connecting rod 44 away from the screw 41, and a rotating handle 42 is provided at one end of the screw 41 away from the clamping block 3. During implementation, rotating the fixing nut allows each adjusting assembly to slide left and right in the slide groove, and the rotating handle is rotated to adjust the approximate spacing between the two clamping blocks according to the size of the wafer to be placed, and the wafer is placed, and then the two clamping blocks are adjusted to the spacing that fixes the wafer. After each clamping block is positioned by rotating the fixing nut, it can be used.

[0020] A clamping groove 33 for the ball 45 to rotate is provided on the side of the clamping block 3 close to the screw rod 41 , and a clamping ring 34 is provided at the opening of the clamping groove 33 to prevent the ball 45 from falling off.

[0021] Working principle: By setting the fixture to a structure where the wafer is placed vertically, on the one hand, it can effectively reduce or avoid scratches on the wafer during the peeling process, and on the other hand, it can perform peeling operations on multiple wafers, greatly improving the peeling efficiency; the two clamps for placing the wafers are set to be slidably connected to the base, and can be adjusted and used according to the size of wafers of different sizes, greatly improving the applicability of the entire fixture. The utility model has a simple structure and is easy to operate. It can solve the problems that the existing general peeling method easily causes scratches on the metal surface and residual metal debris, and the peeling time is long and the efficiency is low.

[0022] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A clamp for a metal stripping device, comprising a base (1) and two clamping blocks (3) slidably connected to the top of the base (1), characterized in that: The base (1) is provided with a slide groove (14) at the top, a through groove (12) extending vertically through the slide groove (14) is provided in the center, clamping blocks (3) are slidably connected in the slide grooves (14) on both sides of the through groove (12), screw holes (11) are provided on the front and rear sides of the top of the base (1) outside the slide groove (14), a pull rod (2) is connected to the inner thread of one of the screw holes (11), and two lifting rods (21) perpendicular to the pull rod (2) are provided on both sides of the upper end of the pull rod (2). ), support plates (13) are provided at both ends of the top of the base (1), and each of the support plates (13) is provided with an adjustment component (4), and each of the adjustment components (4) is rotatably connected to a clamping block (3) on the same side, and the opposite sides of the two clamping blocks (3) are arranged to form arc surfaces (31), and the opposite sides of the two clamping blocks (3) are provided with a plurality of arc-shaped grooves (32) aligned in parallel front and back, and the two opposite arc-shaped grooves (32) are closed to form a semicircle for placing a wafer.

2. A clamp for a metal stripping device according to claim 1, characterized in that: The two support plates (13) are each provided with a through hole (16) extending therethrough to the left and right. The side surfaces of the slide groove (14) located on the left and right sides of the through groove (12) are each provided with an inclined surface (15). The inclined surface (15) is arranged to be inclined from the top of the slide groove (14) toward the through groove (12).

3. A clamp for a metal stripping device according to claim 2, characterized in that: The adjustment assembly (4) comprises a screw rod (41) threadedly connected to the through hole (16); fixing nuts (43) are threadedly connected to the screw rods (41) located on both sides of the support plate (13); a connecting rod (44) having a smaller diameter than the screw rod (41) and extending into the interior of the clamping block (3) is provided at one end of the screw rod (41) close to the clamping block (3); a ball (45) abutting against the clamping block (3) is provided at one end of the connecting rod (44) away from the screw rod (41); and a rotating handle (42) is provided at one end of the screw rod (41) away from the clamping block (3).

4. A clamp for a metal stripping device according to claim 3, characterized in that: A clamping groove (33) for the ball (45) to rotate is provided on the side surface of the clamping block (3) close to the screw rod (41), and a clamping ring (34) is provided at the opening of the clamping groove (33) to prevent the ball (45) from falling off.

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