Modular tail gas filtering treatment device

Abstract

The utility model provides a modular tail gas filtering treatment device which is internally provided with a first filtering module and a second filtering module, and tail gas enters the first filtering module and / or the second filtering module through a gas inlet pipe assembly and is exhausted through an exhaust pipe assembly. Thus, after filtering for a long time, when accumulated particles need to be cleaned or the filtering assembly needs to be replaced, only one filtering module needs to be controlled to be in a closed state and the other filtering module needs to be in a working state through the valve, the filtering module in the closed state is cleaned, and then the cleaned filtering module is started; after the filter module is cleaned, the filter module which is not cleaned is closed and cleaned, so that the device is still in a working state in the process of cleaning particles or replacing the filter assembly, shutdown is not needed, and the productivity is not influenced.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor exhaust gas filtration, and in particular to a modular exhaust gas filtration treatment device. Background Art

[0002] In the production process of chips, various acidic waste gases, alkaline waste gases or organic waste gases are generated in many processes. Various particulate matter may be mixed in these waste gases. For example, in the process of thin film deposition, the reaction raw materials are not completely reacted or the byproducts may form tiny particles. These particles may contain organic matter, metal salts, silicon-based or fluoride, etc.; dry or wet etching will produce reaction byproducts, some of which exist in the form of solid particles, especially plasma etching may produce polymer particles; in the chemical mechanical polishing process, various particulate pollutants are also produced. The size of these particles can range from a few nanometers to a few microns, which has a direct impact on the performance and yield of semiconductor devices. Therefore, effective filtration and control of particulate matter in exhaust gas is an important part of semiconductor manufacturing.

[0003] Normally, after filtering the exhaust gas for a period of time, the particles in the exhaust gas will accumulate in the filter device. If the particles are cleaned or the filter is replaced without stopping the machine, the subsequent filtering effect will be affected. However, if the particles are cleaned or the filter is replaced, the machine will need to be stopped, resulting in reduced production capacity. Utility Model Content

[0004] In order to solve the above-mentioned technical problems, the present application provides a modular exhaust gas filtering treatment device, including a shell, a first filter module, a second filter module, an intake pipe assembly and an exhaust pipe assembly; the first filter module and the second filter module are arranged in the shell; the intake pipe assembly is connected to one end of the first filter module and the second filter module respectively; the exhaust pipe assembly is connected to the other end of the first filter module and the second filter module respectively; the intake pipe assembly and the exhaust pipe assembly are respectively provided with valves for controlling the switching of the first filter module and the second filter module; the exhaust gas enters the first filter module and / or the second filter module through the intake pipe assembly, and is discharged through the exhaust pipe assembly.

[0005] In some embodiments of the present application, a first filter cavity is formed in the first filter module, and a first filter component is disposed in the first filter cavity.

[0006] In some embodiments of the present application, the first filter assembly includes a first filter part, a second filter part and a third filter part; the first filter part is arranged at one end of the first filter cavity and is fixedly arranged to the inner wall of the first filter module, and a first chamber is formed between the first filter part and the first filter module; the second filter part is arranged at the other end of the first filter cavity and is fixedly arranged to the inner wall of the first filter module, a second chamber is formed between the second filter part and the first filter part, and a third chamber is formed between the second filter part and the first filter module; the third filter part is arranged in the second chamber and is fixedly connected to the first filter part.

[0007] In some embodiments of the present application, the third filter portion is hollow and cylindrical with one end open, the first filter portion is provided with a through hole, and the open end of the third filter portion is provided on the through hole of the first filter portion. After the exhaust gas enters the first chamber, a part of it passes through the filter hole on the first filter portion and enters the second chamber, and the other part enters the third filter portion, and enters the second chamber through the filter hole on the third filter portion, and finally enters the third chamber through the filter hole on the second filter portion.

[0008] In some embodiments of the present application, a second filter cavity is formed in the second filter module, and a second filter component is disposed in the second filter cavity.

[0009] In some embodiments of the present application, a first cleaning valve and a second cleaning valve are provided on the first filter module, and the cleaning gas or liquid enters the first filter cavity from the first cleaning valve and is discharged from the second cleaning valve, forming a flow path opposite to the exhaust gas.

[0010] In some embodiments of the present application, a third cleaning valve and a fourth cleaning valve are provided on the second filter module, and the cleaning gas or liquid enters the second filter cavity from the third cleaning valve and is discharged from the fourth cleaning valve, forming a flow path opposite to the exhaust gas.

[0011] In some embodiments of the present application, the first cleaning valve and the second cleaning valve are both one-way solenoid valves.

[0012] In some embodiments of the present application, the air intake pipe assembly includes an air collecting barrel, which is used to collect and buffer exhaust gas.

[0013] In some embodiments of the present application, the exhaust pipe assembly includes a blower, and the blower is used to discharge the filtered exhaust gas.

[0014] Compared with the prior art, the utility model has the following advantages and beneficial effects: the modular exhaust gas filtration treatment device of the present application is provided with a first filter module and a second filter module, and the exhaust gas enters the first filter module and / or the second filter module through the intake pipe assembly, and is discharged through the exhaust pipe assembly. In this way, after a long period of filtration, when it is necessary to clean the accumulated particles or replace the filter assembly, it is only necessary to control one of the filter modules to be in a closed state and the other filter module to be in a working state through a valve, clean the filter module in a closed state, then open the cleaned filter module, close the uncleaned filter module and clean the filter module, so as to ensure that during the process of cleaning particles or replacing the filter assembly, the device is still in a working state, without stopping, and will not affect the production capacity.

[0015] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings constituting a part of this document are used to provide a further understanding of this document. The exemplary embodiments and descriptions of this document are used to explain this document and do not constitute an improper limitation on this document. In the accompanying drawings:

[0017] Figure 1 It is a front view of a modular exhaust gas filtering and processing device (hidden door panel) provided by an exemplary embodiment of the present application;

[0018] Figure 2 It is a front view of a modular exhaust gas filtering and processing device (hidden housing) provided by an exemplary embodiment of the present application;

[0019] Figure 3 yes Figure 2 Sectional view at AA;

[0020] Figure 4 It is a schematic structural diagram of a modular exhaust gas filtering and processing device (hidden housing) provided by an exemplary embodiment of the present application from a first angle;

[0021] Figure 5 It is a second angle structural schematic diagram of a modular exhaust gas filtering and processing device (hidden housing) provided by an exemplary embodiment of the present application;

[0022] Figure 6 It is a stereoscopic diagram of a modular exhaust gas filtration treatment device provided by an exemplary embodiment of the present application.

[0023] In the figure:

[0024] 100, shell; 10, air intake pipe assembly; 101, air collecting barrel; 20, first filter module; 201, first filter assembly; 2011, first filter part; 2012, second filter part; 2013, third filter part; 202, first chamber; 203, second chamber; 204, third chamber; 30, exhaust pipe assembly; 301, blower; 302, valve; 40, first cleaning valve; 50, second cleaning valve; 60, second filter module. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application. It should be noted that, in the absence of conflict, the embodiments in the present application and the features in the embodiments can be combined with each other arbitrarily.

[0026] In the production process of chips, various acidic waste gases, alkaline waste gases or organic waste gases are generated in many processes. Various particulate matter may be mixed in these waste gases. For example, in the process of thin film deposition, the reaction raw materials are not completely reacted or the byproducts may form tiny particles. These particles may contain organic matter, metal salts, silicon-based or fluoride, etc.; dry or wet etching will produce reaction byproducts, some of which exist in the form of solid particles, especially plasma etching may produce polymer particles; in the chemical mechanical polishing process, various particulate pollutants are also produced. The size of these particles can range from a few nanometers to a few microns, which has a direct impact on the performance and yield of semiconductor devices. Therefore, effective filtration and control of particulate matter in exhaust gas is an important part of semiconductor manufacturing.

[0027] Normally, after filtering the exhaust gas for a period of time, the particles in the exhaust gas will accumulate in the filter device. If the particles are cleaned or the filter is replaced without stopping the machine, the subsequent filtering effect will be affected. However, if the particles are cleaned or the filter is replaced, the machine will need to be stopped, resulting in reduced production capacity.

[0028] Based on this, the exemplary embodiment of the present application provides a modular exhaust gas filtration treatment device, in which a first filter module and a second filter module are provided, and the exhaust gas enters the first filter module and / or the second filter module through the intake pipe assembly, and is discharged through the exhaust pipe assembly. In this way, after a long period of filtration, when it is necessary to clean the accumulated particles or replace the filter assembly, it is only necessary to control one of the filter modules to be in a closed state and the other filter module to be in a working state through a valve, clean the filter module in the closed state, and then open the cleaned filter module, close the uncleaned filter module and clean the filter module, so as to ensure that during the process of cleaning particles or replacing the filter assembly, the device is still in a working state, without stopping, and will not affect production capacity.

[0029] An exemplary embodiment of the present application provides a modular exhaust gas filtration treatment device, such as Figure 1 and 6As shown, the device includes a shell 100, a first filter module 20, a second filter module 60, an intake pipe assembly 10 and an exhaust pipe assembly 30; the first filter module 20 and the second filter module 60 are arranged in the shell 100; the intake pipe assembly 10 is connected to one end of the first filter module 20 and the second filter module 60 respectively; the exhaust pipe assembly 30 is connected to the other end of the first filter module 20 and the second filter module 60 respectively; the intake pipe assembly 10 and the exhaust pipe assembly 30 are respectively provided with valves 302 for controlling the switching of the first filter module 20 and the second filter module 60; the exhaust gas enters the first filter module 20 and / or the second filter module 60 through the intake pipe assembly 10, and is discharged through the exhaust pipe assembly 30. In one embodiment, the first filter module 20 can be controlled to be in an open state and the second filter module 60 can be controlled to be in a closed state through the valve 302. At this time, the exhaust gas enters the first filter module 20 through the intake pipe assembly 10 and is discharged through the exhaust pipe assembly 30; In one embodiment, the first filter module 20 can be controlled to be in a closed state and the second filter module 60 can be controlled to be in an open state through the valve 302. At this time, the exhaust gas enters the second filter module 60 through the intake pipe assembly 10 and is discharged through the exhaust pipe assembly 30; In one embodiment, the first filter module 20 and the second filter module 60 can be controlled to be in an open state through the valve 302. At this time, the exhaust gas enters the first filter module 20 and the second filter module 60 through the intake pipe assembly 10 and is discharged through the exhaust pipe assembly 30. In this way, after a long period of filtration, when it is necessary to clean the accumulated particles or replace the filter component, it is only necessary to control one of the filter modules to be in a closed state and the other filter module to be in a working state through valve 302, clean the filter module in the closed state, and then open the cleaned filter module, close the uncleaned filter module and clean the filter module, so as to ensure that during the process of cleaning particles or replacing the filter component, the device is still in a working state, without stopping, and will not affect production capacity.

[0030] like Figure 2 and 3 As shown, a first filter cavity is formed in the first filter module 20, and a first filter assembly 201 is disposed in the first filter cavity. The first filter assembly 201 can filter particles in the exhaust gas.

[0031] The first filter assembly 201 includes a first filter part 2011, a second filter part 2012 and a third filter part 2013; the first filter part 2011 is arranged at one end of the first filter cavity and is fixedly arranged with the inner wall of the first filter module 20, and a first chamber 202 is formed between the first filter part 2011 and the first filter module 20; the second filter part 2012 is arranged at the other end of the first filter cavity and is fixedly arranged with the inner wall of the first filter module 20, and a second chamber 203 is formed between the second filter part 2012 and the first filter part 2011, and a third chamber 204 is formed between the second filter part 2012 and the first filter module 20; the third filter part 2013 is arranged in the second chamber 203 and is fixedly connected to the first filter part 2011. The exhaust gas enters the first chamber 202 through the intake pipe assembly 10, then passes through the first filter 2011 and the third filter 2013, enters the second chamber 203, passes through the second filter 2012 again, enters the third chamber 204, and finally enters the exhaust pipe assembly 30. The exhaust gas is discharged after multi-stage filtration, which can effectively filter particles in the exhaust gas and improve the particle filtering effect.

[0032] In one embodiment, the third filter portion 2013 is hollow and cylindrical with one end open. The first filter portion 2011 is provided with a through hole. The open end of the third filter portion 2013 is provided on the through hole of the first filter portion 2011. After the exhaust gas enters the first chamber 202, a part of it passes through the filter hole on the first filter portion 2011 and enters the second chamber 203, and the other part enters the third filter portion 2013 and enters the second chamber 203 through the filter hole on the third filter portion 2013, and finally enters the third chamber 204 through the filter hole on the second filter portion 2012.

[0033] In one embodiment, in order to further improve the filtering effect of particles, a porous material or fiberboard can be set in the second chamber 203 to further filter the particles in the exhaust gas. At the same time, when cleaning the first filter component 201, the porous material or fiberboard in the second chamber 203 can be cleaned, so that the porous material or fiberboard can achieve a self-cleaning effect.

[0034] A second filter cavity is formed in the second filter module 60, and a second filter assembly is disposed in the second filter cavity. The structure of the second filter assembly can be the same as or different from that of the first filter assembly 201. For example, the second filter assembly can be a multi-layer filter mesh arranged sequentially from bottom to top.

[0035] After long-term use, particles in the exhaust gas will accumulate on the first filter assembly 201, and mainly accumulate on the surface of the first filter assembly 201 along the exhaust gas flow direction. In order to clean the particles accumulated on the first filter assembly 201, such as Figure 4 and 5As shown, the first filter module 20 is provided with a first cleaning valve 40 and a second cleaning valve 50. When it is necessary to clean the particles accumulated on the first filter component 201, the first cleaning valve 40 can be connected to an external clean gas source or liquid, and the second cleaning valve 50 can be connected to an external gas or liquid recovery device, so that the clean gas or liquid enters the first filter cavity from the first cleaning valve 40 and is discharged from the second cleaning valve 50, forming a flow path opposite to the exhaust gas, so as to impact the particles attached to the first filter component 201, and make the particles discharged from the first filter cavity along with the air flow or liquid flow, so as to achieve the purpose of cleaning the first filter component 201 and achieve the effect of self-cleaning. At the same time, using this method to clean the first filter component 201, the cleaning time used is short, there is no need to regularly replace the first filter component 201, and there is no need to disassemble the first filter module 20, which saves the time of equipment downtime maintenance, and the first filter component 201 can be reused, saving the cost of replacing the first filter component 201.

[0036] The first cleaning valve 40 and the second cleaning valve 50 are both one-way solenoid valves. When the device is working normally, the first cleaning valve 40 and the second cleaning valve 50 are both in a closed state. When the first filter assembly 201 needs to be cleaned, the valves 302 on the intake pipe assembly 10 and the exhaust pipe assembly 30 are first closed, and the control system controls the first cleaning valve 40 and the second cleaning valve 50 to open, and a clean gas or liquid is introduced into the first filter chamber through an external device. The clean liquid or gas enters the third chamber 204 through the first cleaning valve 40 to clean the particles attached to the surface of the second filter part 2012, and then enters the second chamber 203 to clean the particles on the third filter part 2013 and the first filter part 2011, and finally enters the first chamber 202 and is discharged through the second cleaning valve 50. The flow direction of the clean gas or liquid is opposite to the flow direction of the exhaust gas, which can well clean the particles attached to the surface of the first filter assembly 201, so that the first filter assembly 201 achieves a self-cleaning effect.

[0037] In order to clean the second filter assembly, in one embodiment, a third cleaning valve and a fourth cleaning valve are provided on the second filter module 60, and the cleaning gas or liquid enters the second filter cavity from the third cleaning valve and is discharged from the fourth cleaning valve, forming a flow path opposite to the exhaust gas. In this way, the particles accumulated on the second filter assembly can be cleaned to achieve a self-cleaning effect.

[0038] like Figure 5 As shown, in one embodiment, the air intake pipe assembly 10 includes an air collecting barrel 101, which is used to collect and buffer the exhaust gas. The exhaust pipe assembly 30 includes a blower 301, which is used to discharge the filtered exhaust gas. The air intake pipe assembly 10 and the exhaust pipe assembly 30 both include a manual valve, which is used to control the opening and closing of the air intake pipe assembly 10 and the second air intake pipe assembly 70.

[0039] In the modular exhaust gas filtration treatment device of the present application, a first filter module 20 and a second filter module 60 are arranged so that the first filter module 20 and the second filter module 60 can be alternately in a working state. In this way, the first filter module 20 and the second filter module 60 can be cleaned or replaced alternately. In the process of cleaning particles or replacing filter components, the device does not need to be shut down and will not affect production capacity.

[0040] In this application, the terms "comprises", "comprising" or any other variations thereof are intended to cover non-exclusive inclusion, so that an article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such article or device. In the absence of more restrictions, the elements defined by the sentence "comprising..." do not exclude the presence of other identical elements in the article or device comprising the elements.

[0041] Although the preferred embodiments of the present application have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present application.

[0042] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the intention of the present application also includes these modifications and variations.

Claims

1. A modular exhaust gas filtration treatment device, characterized in that: The invention comprises a housing (100), a first filter module (20), a second filter module (60), an intake pipe assembly (10) and an exhaust pipe assembly (30); the first filter module (20) and the second filter module (60) are arranged in the housing (100); the intake pipe assembly (10) is communicated with one end of the first filter module (20) and the second filter module (60) respectively; the exhaust pipe assembly (30) is communicated with the other end of the first filter module (20) and the second filter module (60) respectively; the intake pipe assembly (10) and the exhaust pipe assembly (30) are respectively provided with valves (302) for controlling the switching of the first filter module (20) and the second filter module (60); the exhaust gas enters the first filter module (20) and / or the second filter module (60) through the intake pipe assembly (10) and is discharged through the exhaust pipe assembly (30).

2. The modular exhaust gas filtration treatment device according to claim 1, characterized in that: A first filter cavity is formed in the first filter module (20), and a first filter assembly (201) is arranged in the first filter cavity.

3. The modular exhaust gas filtration treatment device according to claim 2, characterized in that: The first filter assembly (201) comprises a first filter part (2011), a second filter part (2012) and a third filter part (2013); the first filter part (2011) is arranged at one end of the first filter cavity and is fixedly arranged with the inner wall of the first filter module (20), and a first chamber (202) is formed between the first filter part (2011) and the first filter module (20); the second filter part (2012) is arranged at the other end of the first filter cavity and is fixedly arranged with the inner wall of the first filter module (20), a second chamber (203) is formed between the second filter part (2012) and the first filter part (2011), and a third chamber (204) is formed between the second filter part (2012) and the first filter module (20); the third filter part (2013) is arranged in the second chamber (203) and is fixedly connected with the first filter part (2011).

4. The modular exhaust gas filtration treatment device according to claim 3, characterized in that: The third filter part (2013) is hollow and cylindrical with one end open. The first filter part (2011) is provided with a through hole. The open end of the third filter part (2013) is arranged on the through hole of the first filter part (2011). After the exhaust gas enters the first chamber (202), a part of it passes through the filter hole on the first filter part (2011) and enters the second chamber (203), and the other part enters the third filter part (2013), passes through the filter hole on the third filter part (2013) and enters the second chamber (203), and finally passes through the filter hole on the second filter part (2012) and enters the third chamber (204).

5. The modular exhaust gas filtration treatment device according to claim 1, characterized in that: A second filter cavity is formed in the second filter module (60), and a second filter assembly is arranged in the second filter cavity.

6. The modular exhaust gas filtration treatment device according to claim 2, characterized in that: The first filter module (20) is provided with a first cleaning valve (40) and a second cleaning valve (50); cleaning gas or liquid enters the first filter cavity from the first cleaning valve (40) and is discharged from the second cleaning valve (50), forming a flow path opposite to that of the exhaust gas.

7. The modular exhaust gas filtration treatment device according to claim 5, characterized in that: The second filter module (60) is provided with a third cleaning valve and a fourth cleaning valve, and the cleaning gas or liquid enters the second filter cavity from the third cleaning valve and is discharged from the fourth cleaning valve, forming a flow path opposite to that of the exhaust gas.

8. The modular exhaust gas filtration treatment device according to claim 6, characterized in that: The first cleaning valve (40) and the second cleaning valve (50) are both one-way solenoid valves.

9. The modular exhaust gas filtration treatment device according to claim 1, characterized in that: The air intake pipe assembly (10) comprises an air collecting barrel (101), and the air collecting barrel (101) is used to collect and buffer exhaust gas.

10. The modular exhaust gas filtering and treating device according to claim 1, characterized in that: The exhaust pipe assembly (30) comprises a blower (301), and the blower (301) is used to discharge filtered exhaust gas.

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