High-rigidity linear rotation actuator

Abstract

The utility model discloses a high rigidity linear rotation actuator, including casing, output shaft and drive mechanism, the casing has the cavity, the drive mechanism includes the linear drive mechanism, the rotation drive mechanism, connecting piece and guide rail that install in the cavity, the rotation drive mechanism and output shaft install on the connecting piece, the guide rail is connected with the linear drive mechanism, and the output shaft is connected with the linear drive mechanism and the rotation drive mechanism. The rotary driving mechanism is configured to drive the output shaft to rotate, the linear driving mechanism is configured to drive the connecting piece to linearly move along the guide rail, and the rotary driving mechanism is characterized in that a notch is formed in the bottom of the shell and communicated with the cavity, the guide rail, the connecting piece and the output shaft are arranged right opposite to the notch, and the guide rail is arranged in the cavity. The bottom of the output shaft penetrates through the notch to be arranged outside the shell, the bottom of the guide rail is flush with the notch, or the bottom of the guide rail penetrates through the notch to be arranged outside the shell. According to the utility model, the material taking and discharging precision and quality are improved.

Description

Technical Field

[0001] The utility model relates to an actuator, in particular to a high-rigidity linear rotary actuator. Background Art

[0002] Linear rotary actuators, also known as linear rotary actuators or ZR actuators, are used to achieve linear and rotary motion. They are mainly used in technical fields such as semiconductors, electronic equipment processing, biopharmaceuticals, etc., especially as core components of semiconductor chip mounting equipment.

[0003] In the prior art, the linear rotary actuator includes a linear motor and a rotary motor. A slider is fixed to the output end of the linear motor, the slider is connected to the rotary motor, and the output of the rotary motor is connected to the motor output shaft. The voice coil motor drives the slider to move linearly, and the slider drives the rotary motor and the motor output shaft to move linearly. At the same time, the rotary motor drives the motor output shaft to make a rotary motion, thereby realizing that the output shaft simultaneously makes a linear motion and a rotary motion. In the case of a long axle with a large stroke, the existing linear rotary motor has a relatively small output shaft diameter and a relatively long axle, forming a structure such as a slender shaft cantilever beam. Moreover, the existing linear rotary motor is a separate layout. The separate linear rotary motor connects the linear motor and the rotary motor through a connecting piece, and simultaneously completes the linear and rotary motions in a transmission manner. The connecting piece completes the linear movement through a slide rail fixed to the housing. When the output shaft extends, the longer the distance between the end of the output shaft and the slide rail, the lower the positioning accuracy of the output shaft.

[0004] For example, the patent application number: 202122966315.X, patent name: A linear rotary voice coil motor, has this problem. When the output shaft moves downward to the bottom, the distance between the bottom of the output shaft and the bottom of the slide rail is the longest, and the positioning accuracy of the output shaft is relatively low, which will affect the product grabbing, placement accuracy and stability.

[0005] Therefore, how to solve the above technical problems is the direction that technical personnel in this field need to work hard on. Summary of the invention

[0006] The utility model aims to provide a high-rigidity linear rotary actuator. By using the structure, the positioning accuracy of the output shaft can be improved, and the picking and placing accuracy and quality of the product can be improved.

[0007] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a high-rigidity linear rotary actuator, comprising a housing, an output shaft and a driving mechanism, wherein the housing has a cavity, the output shaft is connected to the driving mechanism, and the driving mechanism drives the output shaft to rotate and move linearly, wherein the moving direction of the output shaft away from the housing is a downward direction;

[0008] The driving mechanism comprises a linear driving mechanism, a rotary driving mechanism, a connecting member and a guide rail installed in the cavity, the rotary driving mechanism and the output shaft are installed on the connecting member, the rotary driving mechanism is configured to drive the output shaft to rotate, the connecting member is slidably installed on the guide rail, and the linear driving mechanism is configured to drive the connecting member to move linearly along the guide rail.

[0009] The output shaft is arranged parallel to one side of the guide rail, a notch is provided at the bottom of the shell and is connected to the cavity, the guide rail, the connecting piece and the output shaft are arranged opposite to the notch, the bottom of the output shaft passes through the notch and is arranged outside the shell, the bottom of the guide rail is arranged flush with the notch, or the bottom of the guide rail passes through the notch and is arranged outside the shell.

[0010] In the above technical solution, the connecting member includes a main body and a first mounting portion and a second mounting portion arranged on the left and right sides of the main body, the main body is slidably connected to the guide rail, the first mounting portion is connected to the output shaft, and the second mounting portion is connected to the linear drive mechanism.

[0011] In the above technical solution, a protective sheet is provided at the bottom of the connecting piece.

[0012] The protection sheet includes a first protection sheet and a second protection sheet, the first protection sheet corresponds to the bottom of the guide rail, and the second protection sheet corresponds to the output shaft.

[0013] In the above technical solution, the linear drive mechanism includes a stator and a mover, the stator is installed in a cavity beside the guide rail, the guide rail is arranged between the output shaft and the stator, one end of the mover is slidably arranged in the stator, and the other end of the mover is fixedly connected to the second mounting portion.

[0014] In the above technical solution, the lower end surface of the main body is located below the plane where the lower end surface of the second mounting portion is located.

[0015] In the above technical solution, the notch is arranged at the bottom of the shell beside the stator, and the connecting member, the guide rail and the output shaft are arranged opposite to the notch.

[0016] In the above technical solution, the notch is arranged at the bottom of the shell, and the stator, the connecting member, the guide rail and the output shaft are arranged opposite to the notch.

[0017] In the above technical solution, an elastic member is further installed in the cavity above the connecting member, and the elastic member is connected to the upper end of the connecting member to give the connecting member an upward pulling force.

[0018] In the above technical solution, when the output shaft is located at the top, the lower end surface of the output shaft is flush with the lower end surface of the guide rail, or the dimension of the lower end surface of the output shaft protruding from the lower end surface of the guide rail does not exceed one fifth of the length of the guide rail.

[0019] In the above technical solution, when the output shaft moves to the bottom, the bottom of the connecting member passes through the notch.

[0020] Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:

[0021] 1. In the utility model, a notch is provided at the bottom of the shell to extend the guide rail, so that when the output shaft extends and moves, the distance between the end of the output shaft and the guide rail will be shorter, so that the positioning accuracy of the output shaft will be higher, thereby improving the pick-and-place accuracy and quality of the product;

[0022] 2. In the utility model, the bottom of the guide rail is flush with the notch, or the notch is outside the shell, so that when the output shaft extends, the bottom of the connector can also extend out of the shell, and the connector is limited by the guide rail to shorten the distance between the output shaft and the guide rail as much as possible, thereby ensuring the positioning accuracy of the output shaft and improving the product's pick-and-place stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic diagram of the structure of the first embodiment of the present utility model (the guide rail does not extend out of the notch);

[0024] Figure 2 yes Figure 1 Schematic diagram of the three-dimensional structure;

[0025] Figure 3 yes Figure 1 Schematic diagram of the back structure (shell not shown);

[0026] Figure 4 It is a schematic diagram of the structure of the first embodiment of the utility model (the guide rail extends out of the notch outside the housing);

[0027] Figure 5 This is a schematic diagram of the structure of the second embodiment of the present utility model (the housing is not provided with a bottom plate);

[0028] Figure 6 This is a schematic diagram of the structure in Embodiment 3 of the present utility model (the bottom of the output shaft is flush with the bottom of the guide rail).

[0029] Wherein: 1. shell; 2. output shaft; 3. cavity; 4. linear drive mechanism; 5. rotary drive mechanism; 6. connector; 7. guide rail; 8. notch; 9. first mounting part; 10. second mounting part; 11. first protective sheet; 12. second protective sheet; 13. through slot; 14. coupling; 15. stator; 16. mover; 17. elastic member; 18. slider; 19. air pipe; 20. first detection end; 21. second detection end; 22. main board; 23. left side board; 24. right side board; 25. top board; 26. bottom board; 27. U-shaped slot; 28. PCB board; 29. ​​rotary detection mechanism; 41. main body. DETAILED DESCRIPTION

[0030] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0031] Example 1: See Figures 1 to 4 As shown, a high-rigidity linear rotary actuator comprises a housing 1, an output shaft 2 and a driving mechanism, wherein the housing 1 has a cavity 3, the output shaft 2 is connected to the driving mechanism, and the driving mechanism drives the output shaft 2 to rotate and move linearly, wherein the moving direction of the output shaft away from the housing is defined as a downward direction;

[0032] The driving mechanism includes a linear driving mechanism 4 installed in the cavity 3, a rotary driving mechanism 5, a connecting member 6 and a guide rail 7, the rotary driving mechanism 5 and the output shaft 2 are installed on the connecting member 6, the rotary driving mechanism 5 is configured to drive the output shaft 2 to rotate, the connecting member 6 is slidably installed on the guide rail 7, and the linear driving mechanism 4 is configured to drive the connecting member 6 to move linearly along the guide rail 7.

[0033] The output shaft 2 is arranged parallel to one side of the guide rail 7. A notch 8 is provided at the bottom of the housing 1 and is connected to the cavity 3. The guide rail 7, the connecting member 6 and the output shaft 2 are arranged opposite to the notch 8. The bottom of the output shaft 2 passes through the notch 8 and moves outside the housing 1 under the action of the linear drive mechanism 4. The bottom of the guide rail 7 is arranged flush with the notch 8, or the bottom of the guide rail 7 passes through the notch 8 and is arranged outside the housing 1. In the present utility model, the guide rail has two forms, one is that the bottom of the guide rail is flush with the bottom of the notch, and the other is that the bottom of the guide rail extends out of the notch and is arranged at the bottom of the housing.

[0034] When the output shaft 2 moves to the bottom, the bottom of the connecting member 6 passes through the notch 8 and is disposed outside the housing 1 .

[0035] In this embodiment, the output shaft is a hollow cylindrical structure, and the connecting piece has an air cavity inside. The top of the connecting piece is provided with an air pipe 19, and the air pipe is connected to the air cavity, and the air cavity is communicated with the output shaft. The top of the air pipe is connected to the external air system, and the air system gives the output shaft air blowing, negative pressure, etc. through the air pipe and the air cavity, which is used to grab and discharge the product. In actual use, the shell is installed on the corresponding equipment. When in use, the linear drive mechanism drives the connecting piece and the output shaft to move down. After moving down to a predetermined position, the bottom of the output shaft contacts the product, and then negative pressure is given to the output shaft to suck the product, and then the connecting piece and the output shaft are driven to move upward, driving the product to move up, and then when it moves to the corresponding position where unloading is required, the rotary drive mechanism drives the output shaft to rotate, that is, drives the product to rotate to a predetermined angle, and then the linear drive mechanism drives the connecting piece, the output shaft and the product to move down to a predetermined position, and the air system stops the negative pressure, so that the product can fall, and the air system can also give positive pressure blowing to blow the product down to achieve unloading. Of course, there are other ways, the rotary drive mechanism drives the output shaft to rotate, and the linear drive mechanism drives the output shaft to move linearly. In this embodiment, a notch is set at the bottom of the shell, the notch is opposite to the guide rail, the connector and the output shaft, the bottom of the guide rail is flush with the bottom of the notch, or extends out of the notch, so that when the linear drive mechanism drives the output shaft to extend (move downward), the bottom of the connector can pass through the notch and move to the bottom of the shell, so that the distance between the bottom of the output shaft and the bottom of the guide rail will be relatively short (that is, the vertical distance between the end of the output shaft and the guide rail is very short), so that the positioning accuracy of the output shaft will be relatively high, thereby improving the pick-and-place accuracy and quality of the product. In addition, the bottom of the connector is close to the notch or extends out of the notch, which can improve the overall rigidity.

[0036] Furthermore, in this embodiment, a limit member is also provided in the shell. When the limit member senses the connecting member or touches the connecting member, the linear drive mechanism stops driving, thereby preventing the connecting member from exceeding the operating range.

[0037] Among them, a detection mechanism for detecting the displacement of the connecting member will also be set, which includes a first detection end 20 and a second detection end 21. The first detection end is installed on the shell in the cavity, and the second detection end is installed on the connecting member. The second detection end will move with the connecting member, and the first detection end and the second detection end cooperate with each other to obtain the movement amount of the connecting member. In this embodiment, the first detection end is a magnetic grid, and the second detection end is a magnetic encoder reader. The linear drive mechanism has an extremely fast reciprocating frequency and has precise force control feedback. It can complete precise stroke position control in conjunction with the magnetic encoder reader and the magnetic grid, so that materials can be accurately picked up and placed, and can be used for various force detection, distance detection, position accuracy detection, etc., such as touch screen detection, button detection, size measurement, etc. Of course, it can also be a displacement sensor or other mechanism to detect the displacement of the connecting member.

[0038] See also Figures 1 to 4 As shown, the connecting member includes a main body 41 and a first mounting portion 9 and a second mounting portion 10 arranged on the left and right sides of the main body, the main body 41 is slidably connected to the guide rail 7, the first mounting portion 9 is connected to the output shaft 2, and the second mounting portion 10 is connected to the linear drive mechanism. The bottom surface of the second mounting portion 10 is arranged at the upper left of the bottom surface of the main body, that is, the lower end surface of the main body is located below the plane where the lower end surface of the second mounting portion is located; the bottom of the first mounting portion 9 is arranged below the right side of the bottom surface of the main body 41.

[0039] In this embodiment, the output shaft 2 and the rotary drive mechanism 5 are mounted on the first mounting portion 9, the output shaft 2 is rotationally connected to the first mounting portion 9, and the bottom of the output shaft 2 is arranged below the bottom surface of the first mounting portion. In this way, in the initial state, the bottom of the output shaft will also be outside the shell, and when the output shaft is extended to the limit position that can be extended, the bottom of the first mounting portion will be arranged close to the bottom of the guide rail, or the bottom of the first mounting portion has a part extending out of the guide rail, but it does not affect the upward movement and reset of the connecting member along the guide rail. In this way, the strength and stability of the output shaft can be effectively guaranteed, thereby ensuring the accuracy and quality of material loading and unloading.

[0040] In the present invention, the connecting piece can be a split structure, that is, the first mounting portion, the second mounting portion and the main body are split structures and then connected together. Of course, the connecting piece can also be an integrated structure.

[0041] See also Figures 1 to 4 As shown, a protective sheet is provided at the bottom of the connecting member 6.

[0042] The protective sheet includes a first protective sheet 11 and a second protective sheet 12, wherein the first protective sheet corresponds to the bottom of the guide rail and the second protective sheet corresponds to the output shaft. The first protective sheet 11 is disposed on the bottom surface of the main body 41, and the second protective sheet 12 is disposed on the bottom surface of the first mounting portion 9.

[0043] Among them, since the main body and the guide rail are slidably connected, and the output shaft and the first mounting part are rotatably connected, lubricating oil is added to the connection to ensure the smoothness of sliding and rotation. Therefore, the first protective sheet and the second protective sheet are provided to prevent the lubricating oil from overflowing and polluting the product and the processing environment. Furthermore, in this embodiment, a notch is provided so that the bottom of the connecting piece is exposed from inside and outside the shell. Therefore, the provision of the first protective sheet and the second protective sheet can also prevent the connecting piece from being directly exposed and prevent the connecting piece from being worn.

[0044] In the present invention, the rotary drive mechanism is a rotary motor. The rotary drive mechanism 5 is mounted on the top of the first mounting portion 9, and the rotary drive mechanism 5 is connected to the top of the output shaft 2; the first mounting portion 9 is provided with a through slot 13, and a coupling 14 is provided in the through slot 13, and the coupling 14 connects the top of the output shaft 2 with the rotary drive mechanism 5.

[0045] The rotary drive mechanism and the output shaft are connected by a coupling, and a through groove is formed on the first mounting portion, so that the coupling is convenient for connecting the output shaft and the rotary drive mechanism, and is also convenient for subsequent disassembly, maintenance and replacement.

[0046] Among them, there is a rotation detection mechanism 29 in the shell at the top of the rotation drive mechanism. The rotation detection mechanism can use an angular encoder to control the rotation speed and angle of the rotation drive mechanism in real time through the angular encoder, thereby realizing the control and detection of the rotation angle and speed of the output shaft.

[0047] See also Figures 1 to 4 As shown, the linear drive mechanism 4 is a voice coil motor, which includes a stator 15 and a mover 16. The stator 15 is installed in the cavity beside the guide rail 7. The guide rail 7 is arranged between the output shaft 2 and the stator 15. The left side of the mover 16 is slidably arranged in the stator, and the right side of the mover is fixedly connected to the second mounting portion. At the same time, the stator 15 is arranged parallel to the guide rail 7.

[0048] The stator is fixed in the cavity of the shell, and the mover is connected to the connecting piece, so that when the stator drives the mover to move linearly, the stator drives the connecting piece to move linearly along the guide rail seat, thereby realizing the linear movement of the output shaft.

[0049] Furthermore, the connecting member 6 is slidably connected to the guide rail 7 via the slider 18. Furthermore, in order to further improve the smoothness of sliding between the slider and the guide rail, a cross roller is provided between the guide rail and the slider, which can improve the sliding smoothness and stability of the slider. At the same time, a V-shaped groove is provided on both sides of the guide rail, and a V-shaped groove is also provided at the connection between the slider and the guide rail. The cross roller is provided in the V-shaped groove to achieve rolling contact, which can not only ensure the smoothness of sliding, but also improve the rigidity between the guide rail and the slider, and avoid deformation.

[0050] See also Figures 1 to 4 As shown, an elastic member 17 is installed in the cavity above the connecting member 6. The elastic member is connected to the upper end of the connecting member. The elastic member 17 applies an upward pulling force to the connecting member 6.

[0051] Among them, the elastic part can be a spring, a tension spring or other elastic component, one end of which is connected to the top of the cavity, and the other end is connected to the top of the connecting part, giving the connecting part an upward pulling force. After the linear drive mechanism drives the connecting part to move downward, when it moves upward, the elastic part gives the connecting part an upward pulling force, which can reduce the load of the linear drive mechanism and improve the smoothness and stability of the upward movement of the connecting part.

[0052] See also Figures 1 to 4 As shown, the notch 8 is arranged at the bottom of the housing 1 beside the stator 15 , and the connecting member 6 , the guide rail 7 and the output shaft 2 are arranged opposite to the notch 8 .

[0053] In this embodiment, the housing 1 includes a main board 22, a front board, a left side board 23, a right side board 24, a top board 25 and a bottom board 26. The left side board and the right side board are respectively mounted on the left side and the right side of the main board. The top board is mounted on the top of the main board, and its two ends are connected to the left side board and the right side board. The bottom board is mounted on the bottom of the main board, and its left end is connected to the bottom of the left side board, and there is a gap between the right end and the right side board, and a gap is formed between the right side of the bottom board and the right side board. The front board is located at the front side of the main board (not shown in the figure of the front board), and its rear end surface is respectively connected to the left side board, the right side board, the top board and the bottom board, so as to form a cavity.

[0054] The bottom of the stator will be against the bottom plate, or will be arranged close to the bottom plate, so as to reduce the vertical distance between the stator and the bottom surface of the guide rail as much as possible, and further improve the positioning accuracy of the output shaft.

[0055] Among them, in this embodiment, there is a U-shaped groove 27 on the bottom surface of the top plate, and a PCB board 28 is installed in the cavity for electronically connecting with the driving mechanism, and a cable is connected to the outside of the PCB board, and is connected with the external device through the cable. The top of the PCB board is directly connected to the U-shaped groove, and when it needs to be disassembled for maintenance, the top plate can be directly disassembled without disassembling the main board and the front plate, which facilitates the disassembly, maintenance and replacement of the PCB board and the corresponding cable.

[0056] See also Figure 3 As shown, the end of the output shaft slightly protrudes from the end of the guide rail, and the protruding length does not exceed one fifth of the overall length of the guide rail. That is, in this embodiment, the dimension of the lower end surface of the output shaft 2 protruding from the lower end surface of the guide rail 7 does not exceed one fifth of the length of the guide rail 7. In this way, the vertical spacing between the output shaft and the guide rail is shorter, the positioning accuracy of the output shaft will be higher, and the pick-up and placement accuracy and quality of the product can be improved.

[0057] At the same time, in order to match the position of the output shaft, the notch on the housing can be adaptively changed, and the design of the notch can make the end of the output shaft exposed outside the housing.

[0058] Example 2: See Figure 5 The steel stiffness linear rotary actuator has a structure that is basically the same as that of the first embodiment, except that the notch 8 is disposed at the bottom of the housing 1 , and the stator 15 , the connector 6 , the guide rail 7 and the output shaft 2 are disposed opposite to the notch 8 .

[0059] In this embodiment, no bottom plate is arranged on the shell, but only a main plate, a front plate, a left plate, a right plate and a top plate are arranged, so that the bottom between the left plate, the right plate, the main plate and the front plate is a gap.

[0060] Example 3: See Figure 6 As shown, a high-rigidity rotary actuator has a structure that is basically the same as other embodiments, except that: in the initial state of the output shaft, when the output shaft 2 is at the top of the stroke, the lower end surface of the output shaft 2 is flush with the lower end surface of the guide rail 7. In this embodiment, the vertical spacing between the output shaft and the guide rail is minimized, thereby reducing the vertical spacing between the remaining guide rail ends when the output shaft moves to the end, thereby improving the positioning accuracy of the output shaft.

[0061] Among them, Figure 6 In the embodiment, the notch extending from the bottom of the guide rail is located below the bottom of the shell.

[0062] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0063] In the present utility model, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, or a detachable connection, or an integral one; it can be a mechanical connection, or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, for example, the two can form a mechanical abutment or abutment connection through abutment, contact, etc., the two can also be directly hung or hung through an intermediate medium, etc., or it can be the internal connection of the two elements or the interaction relationship between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

Claims

1. A high-rigidity linear rotary actuator, comprising a housing (1), an output shaft (2) and a driving mechanism, wherein the housing (1) has a cavity (3), the output shaft (2) is connected to the driving mechanism, and the driving mechanism drives the output shaft (2) to rotate and move linearly, wherein: The direction in which the output shaft (2) moves away from the housing (1) is a downward direction; The driving mechanism comprises a linear driving mechanism (4), a rotary driving mechanism (5), a connecting member (6) and a guide rail (7) installed in the cavity (3); the rotary driving mechanism (5) and the output shaft (2) are installed on the connecting member (6); the rotary driving mechanism (5) is configured to drive the output shaft (2) to rotate; the connecting member (6) is slidably installed on the guide rail (7); the linear driving mechanism (4) is configured to drive the connecting member (6) to move linearly along the guide rail (7); and the invention is characterized in that: The output shaft (2) is arranged parallel to one side of the guide rail (7); a notch (8) is provided at the bottom of the housing (1) and is connected to the cavity (3); the guide rail (7), the connecting member (6) and the output shaft (2) are arranged opposite to the notch (8); the bottom of the output shaft (2) passes through the notch (8) and is arranged outside the housing (1); the bottom of the guide rail (7) is arranged flush with the notch (8), or the bottom of the guide rail (7) passes through the notch (8) and is arranged outside the housing (1).

2. The high-rigidity linear-rotary actuator according to claim 1, characterized in that: The connecting member (6) comprises a main body (41) and a first mounting portion (9) and a second mounting portion (10) arranged on the left and right sides of the main body (41); the main body (41) is slidably connected to the guide rail (7); the first mounting portion (9) is connected to the output shaft (2); and the second mounting portion (10) is connected to the linear drive mechanism (4).

3. The high-rigidity linear-rotary actuator according to claim 2, characterized in that: A protective sheet is provided at the bottom of the connecting member (6). The protective sheet comprises a first protective sheet (11) and a second protective sheet (12), wherein the first protective sheet (11) corresponds to the bottom of the guide rail, and the second protective sheet (12) corresponds to the output shaft (2).

4. The high-rigidity linear-rotary actuator according to claim 2, characterized in that: The linear drive mechanism (4) comprises a stator (15) and a mover (16); the stator (15) is installed in a cavity beside the guide rail (7); the guide rail (7) is arranged between the output shaft (2) and the stator (15); one end of the mover (16) is slidably arranged in the stator (15); and the other end of the mover (16) is fixedly connected to the second mounting portion (10).

5. The high-rigidity linear-rotary actuator according to claim 4, characterized in that: The lower end surface of the main body (41) is located below the plane where the lower end surface of the second mounting portion (10) is located.

6. The high-rigidity linear-rotary actuator according to claim 4, characterized in that: The notch (8) is arranged at the bottom of the housing (1) beside the stator (15), and the connecting piece (6), the guide rail (7) and the output shaft (2) are arranged opposite to the notch (8).

7. The high-rigidity linear-rotary actuator according to claim 4, characterized in that: The notch (8) is arranged at the bottom of the housing (1), and the stator (15), the connecting piece (6), the guide rail (7) and the output shaft (2) are arranged opposite to the notch (8).

8. The high-rigidity linear-rotary actuator according to claim 1, characterized in that: An elastic member (17) is also installed in the cavity above the connecting member (6). The elastic member (17) is connected to the upper end of the connecting member to apply an upward pulling force to the connecting member (6).

9. The high-rigidity linear-rotary actuator according to claim 1, characterized in that: When the output shaft (2) is located at the top, the lower end surface of the output shaft (2) is flush with the lower end surface of the guide rail (7), or the dimension of the lower end surface of the output shaft (2) protruding from the lower end surface of the guide rail (7) does not exceed one fifth of the length of the guide rail (7).

10. The high-rigidity linear-rotary actuator according to claim 1, characterized in that: When the output shaft (2) moves to the bottom, the bottom of the connecting member (6) passes through the notch (8).

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