Clamp for prolonging service life of vacuum resistance evaporation boat

Abstract

The utility model discloses a clamp for prolonging the service life of a vacuum resistance evaporation boat, which comprises two water-cooled copper electrode bars, the tops of the two water-cooled copper electrode bars are fixedly connected with lower copper clamps, and the interiors of the lower copper clamps are connected with upper copper clamps in a sliding manner. When in use, the two water-cooled copper electrode bars are used as electrodes, the water-cooled copper electrode bars are fixedly provided with the clamps to clamp the two ends of the resistance boat, after voltage is applied to the two water-cooled copper electrode bars, current flows through the resistance boat, and the resistance boat is heated by means of the high resistance characteristic of the resistance boat; when the resistance boat is in use, a temperature change area can be transferred from the resistance boat to the transition block, the transition block has enough thickness, so that the temperature change is much slower than that of a very thin resistance boat, the transition block cannot be broken due to the temperature change, and due to the existence of the transition block, all parts on the resistance boat do not have large temperature difference, so that the resistance boat is more stable in temperature change. And the service life is greatly prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of clamps, in particular to a clamp for extending the service life of a vacuum resistance evaporation boat. Background Art

[0002] In vacuum equipment, a resistance evaporation source is often needed. The resistance evaporation source is made of thin sheets of high-melting-point conductive materials such as tungsten, molybdenum, and tantalum. The resistance boat is made of a resistor. The low-melting-point coating materials such as gold, silver, and aluminum placed on its heating surface are heated and evaporated by direct current until they are deposited on the substrate to form the required film layer.

[0003] At present, the structure adopted by the industry for the resistor boat fixture is to use a pair of water-cooled copper electrode rods as electrodes. Copper clamps are fixed on the electrode rods to clamp the two ends of the resistor boat. After the voltage is applied to the two electric rods, the current flows through the resistor boat, and the resistor boat 4 is heated by relying on the high resistance characteristics of the resistor boat. The resistor boat uses tungsten, molybdenum, and tantalum, which have high melting point materials above 2500℃. The melting point of the copper fixture and copper electrode of the resistor boat is lower than 1500℃, and the difference between the two melting points is more than 1000℃. Therefore, in order to prevent the copper fixture and copper electrode from melting when a large current is passed, there will be circulating water inside the copper electrode to directly cool the copper electrode, and also help the copper fixture that the copper electrode contacts to do indirect cooling, which will cause the following problems:

[0004] 1. The copper fixture will be cooled by water cooling of the copper electrode rod, and the part of the resistor boat clamped by the copper fixture will also be cooled due to contact heat conduction. In this way, after power is turned on, the clamped part of the resistor boat is at a relatively low temperature, while the other parts are at a high temperature, with a temperature difference of several hundred degrees. The resistor boat is very thin, which will lead to a sharp change in local thermal stress in the transition area from the clamped part to other parts, causing cracks in the metal structure until it breaks completely.

[0005] Second, the energy consumption is high. Due to the effect of heat conduction, part of the heat on the resistor boat will be taken away by the water cooling of the copper electrode through the copper fixture, thus affecting the energy conversion ratio.

[0006] 3. After the work is completed and the power is turned off, the resistor boat cools down too quickly, which will also cause high stress between the resistor boat and the molten metal on it that has not been used up due to the different shrinkage rates, and it is also easy to cause the resistor boat to rupture. Utility Model Content

[0007] The utility model aims to provide a fixture for extending the service life of a vacuum resistance evaporation boat, which has the advantages of slowing down heat conduction, increasing service life, and low energy consumption, thus solving the problems in the background technology.

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a fixture for extending the service life of a vacuum resistance evaporation boat, comprising: two water-cooled copper electrode rods, the tops of the two water-cooled copper electrode rods are fixedly connected to a lower copper fixture, and the interior of the lower copper fixture is slidably connected to an upper copper fixture; a protective component, the protective component comprises four clamping holes, and the four clamping holes are respectively opened in the interior of the two upper copper fixtures and the two lower copper fixtures. When in use, two water-cooled copper electrode rods are used as electrodes. The water-cooled copper electrode rods are fixed with clamps to clamp the two ends of the resistor boat. After voltage is applied to the two water-cooled copper electrode rods, current flows through the resistor boat, relying on the high resistance characteristics of the resistor boat to make the resistor boat heat up. Since the thermal conductivity of the transition block tungsten-copper alloy is relatively poor, the area of ​​temperature change will be transferred from the resistor boat to the transition block. Because the transition block has sufficient thickness, this temperature change will be much milder than that on a very thin resistor boat, and the transition block will not break due to this temperature change. Due to the presence of the transition block, there is no large temperature difference between the various parts of the resistor boat, and the service life is greatly extended. At the same time, energy consumption is small. Due to the presence of the transition block made of tungsten-copper alloy, the amount of heat on the resistor boat that is taken away by the water cooling of the water-cooled copper electrode rods through the clamp will be weakened, which plays a role in energy saving. In addition, after the work is completed and the power is turned off, the transition block made of tungsten-copper alloy will slowly transfer the coldness of the water cooling to the resistor boat, and the resistor boat will slowly cool down as a whole, and it will no longer be easy to break.

[0009] Preferably, the protective component includes four transition blocks, and the four transition blocks are respectively clamped inside four clamping holes, and the four transition blocks are opposed to each other to clamp the resistor boat. When in use, two water-cooled copper electrode rods are used as electrodes, and the water-cooled copper electrode rods are fixed with clamps to clamp the two ends of the resistor boat. After voltage is applied to the two water-cooled copper electrode rods, current flows through the resistor boat, and the resistor boat heats up by relying on the high resistance characteristics of the resistor boat.

[0010] Preferably, two insertion holes are provided inside the two lower copper clamps, and two insertion rods are fixedly connected to the bottom of the two upper copper clamps. The insertion rods can be completely clamped inside the insertion holes, so that the upper copper clamps can slide up and down along the inside of the lower copper clamps, and the combination of the two realizes the clamping effect.

[0011] Preferably, the two lower copper clamps and the two upper copper clamps are each provided with a first threaded hole, and the first threaded holes inside the upper copper clamp and the lower copper clamp are connected to each other for rotation with an adjusting screw, and the adjusting screw can be rotated to limit the position of the upper copper clamp and the lower copper clamp after clamping the resistor boat.

[0012] Preferably, the two lower copper clamps and the two upper copper clamps are each provided with a second threaded hole, and the transition block is provided with a limiting threaded hole. The second threaded hole and the limiting threaded hole are jointly threadedly connected to a limiting screw, and the limiting screw can be rotated to firmly clamp the transition block inside the clamping hole.

[0013] Preferably, an insulating rubber block is fixedly connected to the interior of the transition block, a limiting threaded hole is opened inside the insulating rubber block, and the limiting screw can be threadedly clamped inside the limiting threaded hole.

[0014] Preferably, the outside of the transition block is evenly and fixedly connected with ribs, and the transition block is made of a tungsten-copper alloy material. The tungsten-copper alloy has relatively poor thermal conductivity, a high melting point, and high hardness.

[0015] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0016] 1. When the utility model is used, two water-cooled copper electrode rods are used as electrodes. The water-cooled copper electrode rods are fixed with a clamp to clamp the two ends of the resistor boat. After voltage is applied to the two water-cooled copper electrode rods, current flows through the resistor boat, and the resistor boat is heated by relying on the high resistance characteristics of the resistor boat. Since the thermal conductivity of the tungsten-copper alloy of the transition block is relatively poor, the area of ​​temperature change will be transferred from the resistor boat to the transition block. Because the transition block has sufficient thickness, this temperature change will be much milder than that on a very thin resistor boat, and the transition block will not break due to this temperature change. Due to the existence of the transition block, there is no large temperature difference between the various parts of the resistor boat, and the service life is greatly extended.

[0017] 2. The utility model has low energy consumption. Due to the presence of the transition block made of tungsten-copper alloy, the amount of heat on the resistance boat that is taken away by the water-cooled copper electrode rod through the fixture will be reduced, which plays a role in energy saving. In addition, after the work is completed and the power is turned off, the transition block made of tungsten-copper alloy will slowly transfer the cold water to the resistance boat, and the resistance boat will slowly cool down as a whole, so it will no longer be easy to break. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of a fixture structure for extending the service life of a vacuum resistance evaporation boat according to the utility model;

[0019] Figure 2 It is a schematic diagram of the disassembly structure of the upper copper fixture and the lower copper fixture of a fixture for extending the service life of a vacuum resistance evaporation boat according to the utility model;

[0020] Figure 3 This is a schematic diagram of the external structure of a transition block of a fixture for extending the service life of a vacuum resistance evaporation boat according to the utility model;

[0021] Figure 4The utility model is a schematic diagram of the internal structure of a copper clamp of a clamp for extending the service life of a vacuum resistance evaporation boat.

[0022] In the figure: 1. water-cooled copper electrode rod; 2. lower copper fixture; 3. transition block; 4. resistor boat; 5. jack; 6. plug rod; 7. upper copper fixture; 8. adjusting screw; 9. first threaded hole; 10. second threaded hole; 11. limiting screw; 12. insulating rubber block; 13. limiting threaded hole; 14. rib; 15. clamping hole. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figures 1 to 4 The utility model provides a technical solution: a fixture for extending the service life of a vacuum resistance evaporation boat, comprising: two water-cooled copper electrode rods 1, the tops of the two water-cooled copper electrode rods 1 are fixedly connected with a lower copper fixture 2, and the interior of the lower copper fixture 2 is slidably connected with an upper copper fixture 7; a protective component, the protective component comprises four clamping holes 15, and the four clamping holes 15 are respectively opened in the interiors of the two upper copper fixtures 7 and the two lower copper fixtures 2. When in use, the two water-cooled copper electrode rods 1 are used as electrodes, and the water-cooled copper electrode rods 1 are fixed with a fixture to clamp the two ends of the resistance boat 4. After the two water-cooled copper electrode rods 1 are applied with voltage, current flows through the resistance boat 4, and the resistance boat 4 is heated by relying on the high resistance characteristics of the resistance boat 4. Since the thermal conductivity of the tungsten-copper alloy of the transition block 3 is relatively poor , the area of ​​temperature change will be transferred from the resistor boat 4 to the transition block 3, and because the transition block 3 has sufficient thickness, the temperature change will be much milder than that on a very thin resistor boat 4, and the transition block 3 will not break due to the temperature change. Due to the existence of the transition block 3, there will not be a large temperature difference between the various parts of the resistor boat 4, and the service life will be greatly extended. At the same time, the energy consumption is small. Due to the existence of the transition block 3 made of tungsten-copper alloy, the amount of heat on the resistor boat 4 that is taken away by the water-cooled copper electrode rod 1 through the fixture will be weakened, which plays a role in energy saving. In addition, after the work is completed and the power is turned off, the transition block 3 made of tungsten-copper alloy will slowly transfer the coldness of the water cooling to the resistor boat 4, and the resistor boat 4 will slowly cool down as a whole, and it will no longer be easy to break.

[0025] The protection component includes four transition blocks 3, and the four transition blocks 3 are respectively clamped inside four clamping holes 15. The four transition blocks 3 are opposed to each other to clamp the resistor boat 4. When in use, two water-cooled copper electrode rods 1 are used as electrodes. The water-cooled copper electrode rods 1 are fixed with clamps to clamp the two ends of the resistor boat 4. After voltage is applied to the two water-cooled copper electrode rods 1, current flows through the resistor boat 4, and the resistor boat 4 is heated up by relying on the high resistance characteristics of the resistor boat 4.

[0026] Two insertion holes 5 are provided inside the two lower copper clamps 2, and two insertion rods 6 are fixedly connected to the bottom of the two upper copper clamps 7. The insertion rods 6 can be completely clamped inside the insertion holes 5, so that the upper copper clamps 7 slide up and down along the inside of the lower copper clamps 2, and the combination of the two realizes the clamping effect.

[0027] A first threaded hole 9 is provided inside the two lower copper clamps 2 and the two upper copper clamps 7. An adjusting screw 8 is rotatably connected inside the first threaded holes 9 inside the upper copper clamps 7 and the lower copper clamps 2. The adjusting screw 8 can be rotated to limit the position of the upper copper clamps 7 and the lower copper clamps 2 after clamping the resistor boat 4.

[0028] A second threaded hole 10 is provided inside the two lower copper clamps 2 and the two upper copper clamps 7, and a limiting threaded hole 13 is provided inside the transition block 3. The second threaded hole 10 and the limiting threaded hole 13 are threadedly connected to a limiting screw 11, and the limiting screw 11 can be rotated to firmly clamp the transition block 3 inside the clamping hole 15.

[0029] An insulating rubber block 12 is fixedly connected inside the transition block 3 . A limiting threaded hole 13 is provided inside the insulating rubber block 12 . The limiting screw 11 can be threadedly clamped inside the limiting threaded hole 13 .

[0030] The outside of the transition block 3 is evenly and fixedly connected with ribs 14. The transition block 3 is made of a tungsten-copper alloy material. The tungsten-copper alloy has relatively poor thermal conductivity, a high melting point, and high hardness.

[0031] When the fixture for extending the service life of the vacuum resistor evaporation boat is used, two water-cooled copper electrode rods 1 are used as electrodes. The water-cooled copper electrode rods 1 are fixed with a fixture to clamp the two ends of the resistor boat 4. After the two water-cooled copper electrode rods 1 are voltaged, current flows through the resistor boat 4, and the resistor boat 4 is heated by the high resistance characteristic of the resistor boat 4. Since the thermal conductivity of the tungsten-copper alloy of the transition block 3 is relatively poor, the area of ​​temperature change will be transferred from the resistor boat 4 to the transition block 3. Since the transition block 3 has sufficient thickness, this temperature change will be milder than that on a very thin resistor boat 4. A lot, the transition block 3 will not be broken due to this temperature change, and due to the existence of the transition block 3, there is no large temperature difference between the various parts of the resistor boat 4, the service life is greatly extended, and the energy consumption is small. Due to the existence of the transition block 3 made of tungsten-copper alloy, the heat on the resistor boat 4 is taken away by the water-cooled copper electrode rod 1 through the clamp. The amount will be weakened, which plays a role in energy saving. In addition, after the work is completed and the power is turned off, the transition block 3 made of tungsten-copper alloy will slowly transfer the coldness of the water cooling to the resistor boat 4, and the resistor boat 4 will slowly cool down as a whole, and it will no longer be easy to break.

[0032] The standard parts used in this embodiment can be purchased directly from the market, and the non-standard structural components recorded in the specification and the drawings can also be directly processed according to the existing technical common sense. At the same time, the connection method of each component adopts the mature conventional means in the prior art, and the machinery, parts and equipment all adopt the conventional models in the prior art, so no specific description will be given here.

[0033] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A fixture for extending the service life of a vacuum resistance evaporation boat, characterized in that: include: Two water-cooled copper electrode rods (1), the tops of the two water-cooled copper electrode rods (1) are fixedly connected to lower copper clamps (2), and the interior of the lower copper clamps (2) is slidably connected to an upper copper clamp (7); A protection component, the protection component comprising four clamping holes (15), the four clamping holes (15) being respectively opened inside two upper copper clamps (7) and two lower copper clamps (2), the protection component comprising four transition blocks (3), the four transition blocks (3) being respectively clamped inside the four clamping holes (15), and the four transition blocks (3) being opposed to each other and clamping the resistor boat (4).

2. The fixture for extending the service life of a vacuum resistance evaporation boat according to claim 1, characterized in that: Two insertion holes (5) are provided inside the two lower copper clamps (2), and two insertion rods (6) are fixedly connected to the bottoms of the two upper copper clamps (7).

3. The fixture for extending the service life of a vacuum resistance evaporation boat according to claim 1, characterized in that: The two lower copper clamps (2) and the two upper copper clamps (7) are each provided with a first threaded hole (9), and an adjusting screw (8) is rotatably connected to the first threaded holes (9) inside the upper copper clamps (7) and the lower copper clamps (2).

4. The fixture for extending the service life of a vacuum resistance evaporation boat according to claim 1, characterized in that: The two lower copper clamps (2) and the two upper copper clamps (7) are each provided with a second threaded hole (10), the transition block (3) is provided with a limit threaded hole (13), and the second threaded hole (10) and the limit threaded hole (13) are threadedly connected to the limit screw (11) in a common manner.

5. The fixture for extending the service life of a vacuum resistance evaporation boat according to claim 1, characterized in that: An insulating rubber block (12) is fixedly connected to the interior of the transition block (3), and a limiting threaded hole (13) is provided inside the insulating rubber block (12).

6. The fixture for extending the service life of a vacuum resistance evaporation boat according to claim 1, characterized in that: The outside of the transition block (3) is evenly and fixedly connected with ribs (14), and the transition block (3) is made of tungsten-copper alloy material.

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