Workpiece support for preparing surface coating and surface coating equipment

Abstract

The utility model belongs to the field of surface coating equipment, and particularly relates to a workpiece bracket for preparing a surface coating and surface coating equipment. Wherein the workpiece bracket comprises a base, a transmission seat, a fixed disc, a movable disc, a fixed rod and a movable rod; the base comprises a bottom plate and a supporting base. The fixing disc is fixedly arranged at the upper end of the supporting base. The transmission seat comprises a transmission plate and a sliding rod, the sliding rod is arranged on the base in a lifting mode, and the movable disc is fixedly arranged at the upper end of the sliding rod and located between the fixed disc and the bottom plate; clamping grooves I are formed in the inner sides of the multiple fixed rods, clamping grooves II are formed in the inner sides of the multiple movable rods, and when the transmission seat ascends and descends, the heights of the groove bottoms of the multiple clamping grooves II are larger than, smaller than or flush with the heights of the groove bottoms of the multiple clamping grooves I. The whole workpiece support can horizontally rotate, and meanwhile, the movable rod and the fixed rod periodically support a workpiece to be coated, so that the supporting position of the workpiece to be coated can be continuously changed when the workpiece to be coated is in a rotating state.

Description

Technical Field

[0001] The utility model belongs to the field of surface coating equipment, and specifically relates to a workpiece support and surface coating equipment used for surface coating preparation. Background Art

[0002] The graphite tray is a component used to support and heat the single crystal substrate in metal organic chemical vapor deposition equipment. It plays the role of load bearing, heat conduction, and flow conduction. Its dimensional accuracy, thermal conductivity, and purity directly affect the quality of the final product. In order to meet the requirements of application scenarios, the chemical vapor deposition process (CVD) is currently commonly used to prepare a layer of coating on the outer surface of the high-purity graphite tray.

[0003] There are two key problems in the existing technology for preparing the outer surface coating of graphite trays: first, the graphite tray products must be fixed and supported by a fixture, and it is difficult to deposit the coating at the support position, and the coating cannot be fully coated, which affects the service life of the product; second, during the CVD process, the concentration of the deposition atmosphere decreases along the flow direction, and the coating deposition rate decreases, resulting in large differences in coating thickness at different positions of the graphite tray, affecting the thermal conductivity uniformity of the product. Therefore, it is urgent to develop a set of devices that can achieve full coating while fixing and supporting the graphite tray and solve the problem of large differences in coating thickness. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a workpiece support and surface coating equipment for surface coating preparation, which can switch the supporting point of the workpiece to be coated during continuous rotation.

[0005] The utility model provides a workpiece support for surface coating preparation, comprising a base, a transmission seat, a fixed plate, a movable plate, a fixed rod and a movable rod;

[0006] The base comprises a bottom plate and a support seat arranged at the upper end of the bottom plate, the bottom plate is fixed in the surface coating device in a horizontally rotatable manner, and the fixed plate is fixedly arranged at the upper end of the support seat;

[0007] The transmission seat comprises a transmission plate and a sliding rod arranged on the upper end of the transmission plate, the sliding rod is lifted and lowered on the base, the movable plate is fixedly arranged on the upper end of the sliding rod, and the movable plate is located between the fixed plate and the bottom plate;

[0008] The fixed rods are provided in a plurality of structures in a surrounding structure, the lower ends of the fixed rods are fixedly arranged on the upper end of the fixed plate, the fixed plate is provided with a plurality of through holes, the movable rods are provided in a plurality of structures in a surrounding structure, the lower ends of the movable rods are fixedly arranged on the upper end of the movable plate, and the movable rods pass through the through holes one by one;

[0009] Multiple fixed rods and multiple movable rods are parallel to each other and arranged in an alternating manner. Multiple fixed rods are provided with a slot I facing inward, and multiple movable rods are provided with a slot II facing inward. When the transmission seat is raised or lowered, the height of the bottom of the multiple slots II is higher, lower or flush with the height of the bottom of the multiple slots I.

[0010] Furthermore, a lifting and lowering matching hole is arranged in the middle of the bottom plate, and the supporting seat includes a plurality of columns arranged outside the lifting and lowering matching hole;

[0011] The sliding rod is slidably matched with the lifting matching hole;

[0012] The movable plate is provided with a plurality of sliding holes for slidingly matching with the upright posts.

[0013] Furthermore, at least three columns are arranged in a circular array outside the lifting matching hole.

[0014] Furthermore, the fixing rods are provided with at least three;

[0015] At least three movable rods are provided.

[0016] Furthermore, the bottoms of the slots I and II are inclined.

[0017] Furthermore, it also includes a top plate;

[0018] The top plate is fixedly connected to a plurality of fixed rods and slidably connected to a plurality of movable rods;

[0019] Alternatively, the top plate is fixedly connected to a plurality of movable rods and slidably connected to a plurality of fixed rods;

[0020] Alternatively, the top plate is slidably connected to a plurality of movable rods and is slidably connected to a plurality of fixed rods.

[0021] Furthermore, when the top plate is fixedly connected to a plurality of fixing rods, the top plate and the fixing rods are detachably connected;

[0022] When the top plate is fixedly connected to the plurality of movable rods, the top plate and the movable rods are detachably connected.

[0023] Furthermore, the card slot I is provided in plurality along the axial direction of the fixing rod;

[0024] The clamping slot II is arranged in plurality along the axial direction of the movable rod.

[0025] The utility model also provides a surface coating device, comprising a coating chamber, a driving mechanism and the workpiece support for surface coating preparation arranged in the coating chamber;

[0026] A coating mechanism is provided in the coating cavity;

[0027] The bottom plate is horizontally rotatably arranged in the coating chamber;

[0028] The driving mechanism drives the transmission plate to rotate and rise and fall.

[0029] The beneficial effect of the utility model is that the workpiece support for surface coating preparation provided by the utility model can rotate horizontally, and the movable disk and the movable rod can perform reciprocating lifting and lowering motions on the basis of rotation, so that the movable rod and the fixed rod periodically support the workpiece to be coated, so that the supporting position of the workpiece to be coated can be continuously changed in the rotating state, so as to achieve full coverage of the surface coating of the workpiece to be coated, improve the uniformity of the surface coating, and solve the problem that the supporting parts of the conventional workpiece to be coated cannot be coated.

[0030] In addition, the structural design of the workpiece holder allows the workpiece to be coated to be directly installed above multiple movable rods and multiple fixed rods, which can simplify the installation of the workpiece to be coated. The entire structure is supported by a base, and the driving mechanism only needs to drive the transmission seat to drive the entire workpiece holder to rotate at the same time. In addition, the movable plate and movable rods can be driven to rise and fall separately, which makes the structure of the driving component simple and easy to install. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Attached Figure 1 This is a front view of the utility model when the movable disk is in the lower position;

[0032] Attached Figure 2 This is a front view of the movable disk in the utility model when it is in the upper position;

[0033] Attached Figure 3 This is the front view of the transmission seat in the utility model;

[0034] Attached Figure 4 It is a top view of the transmission seat in the utility model;

[0035] Attached Figure 5 It is a structural schematic diagram of the base in the utility model;

[0036] Attached Figure 6 It is a top view of the movable disk in the utility model;

[0037] Attached Figure 7 It is a top view of the fixed plate in the utility model;

[0038] Attached Figure 8 It is a structural schematic diagram of the movable rod in the utility model;

[0039] Attached Fig. 9 It is a structural schematic diagram of the fixing rod in the utility model;

[0040] Attached Fig.10 It is a top view of the top plate in the utility model.

[0041] In the figure, 1-transmission seat; 11-transmission plate; 12-sliding rod; 121-first threaded hole; 2-base; 21-bottom plate; 211-lifting matching hole; 22-column; 221-second threaded hole; 3-movable plate; 31-sliding hole; 32-third threaded hole; 33-fourth threaded hole; 4-fixed plate; 41-through hole; 42-fifth threaded hole; 43-sixth threaded hole; 5-movable rod; 51-slot II; 52-first screw rod; 53-first sliding rod; 6-fixed rod; 61-slot I; 62-second screw rod; 63-second sliding rod; 7-top plate; 71-sliding hole; 8-workpiece to be coated. DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0043] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back...) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0044] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0045] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, a physical connection, or a wireless communication connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] In addition, the technical solutions between the various embodiments of the present invention can be combined with each other, but it must be based on the fact that ordinary technicians in the field can implement it. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0047] As attached Figure 1 -Attached Fig.10 As shown, the utility model provides a workpiece support for surface coating preparation, comprising a base 2, a transmission seat 1, a fixed plate 4, a movable plate 3, a fixed rod 6 and a movable rod 5;

[0048] The base 2 includes a bottom plate 21 and a support seat arranged at the upper end of the bottom plate 21, the bottom plate 21 is fixed in the surface coating device in a horizontally rotatable manner, and the fixed plate 4 is fixedly arranged at the upper end of the support seat;

[0049] The transmission seat 1 includes a transmission plate 11 and a sliding rod 12 arranged at the upper end of the transmission plate 11. The sliding rod 12 is lifted and lowered on the base 2, that is, the sliding rod 12 can only slide up and down along the base 2, but cannot rotate relative to the axial direction. Therefore, when the transmission plate 11 rotates, the sliding rod 12 drives the base 2 to rotate. The movable disk 3 is fixedly arranged at the upper end of the sliding rod 12, and the movable disk 3 is located between the fixed disk 4 and the bottom plate 21. When the sliding rod 12 is lifted and lowered, the movable disk 3 is lifted and lowered between the fixed disk 4 and the bottom plate 21.

[0050] The fixed rods 6 are provided in a plurality of structures in an enclosing structure, and the plurality of fixed rods 6 are parallel to each other and are not in the same plane. The lower ends of the plurality of fixed rods 6 are fixedly provided at the upper end of the fixed disk 4, and the plurality of fixed rods 6 rotate along with the fixed disk 4. The fixed disk 4 is provided with a plurality of through holes 41. The movable rods 5 are provided in a plurality of structures in an enclosing structure, and the plurality of movable rods 5 are parallel to each other and are not in the same plane. The lower ends of the plurality of movable rods 5 are fixedly provided at the upper end of the movable disk 3, and the plurality of movable rods 5 are lifted and rotated along with the movable disk 3, and the plurality of movable rods 5 pass through the through holes 41 one by one. When the plurality of movable rods 5 are lifted and lowered, the plurality of movable rods 5 slide in the through holes 41.

[0051] The plurality of fixed rods 6 and the plurality of movable rods 5 are parallel to each other and staggered. The plurality of fixed rods 6 are provided with a slot I 61 facing inward, and the plurality of movable rods 5 are provided with a slot II 51 facing inward. The plurality of slots I 61 are located on a plane and are used to carry the workpiece 8 to be coated. The plurality of slots II 51 are also located on a plane and are also used to carry the workpiece 8 to be coated. The plurality of slots I 61 can horizontally clamp the workpiece 8 to be coated. Specifically, when the workpiece 8 to be coated is a circular plate, the plurality of fixed rods 6 and the plurality of movable rods 5 are arranged in a circular array. When the workpiece 8 to be coated is other special-shaped plates, the plurality of fixed rods 6 and The arrangement of the multiple movable rods 5 is consistent with the cross-sectional shape of the workpiece 8 to be coated. When the transmission seat 1 is raised or lowered, the height of the bottom of the multiple slots Ⅱ51 is higher, lower or flush with the height of the bottom of the multiple slots Ⅰ61, that is, when the transmission seat 1 rises, the height of the bottom of the multiple slots Ⅱ51 is higher than the bottom of the multiple slots Ⅰ61. At this time, the workpiece 8 to be coated is carried on the multiple slots Ⅱ51 and separated from the multiple slots Ⅰ61; when the transmission seat 1 descends, the height of the bottom of the multiple slots Ⅱ51 is lower than the bottom of the multiple slots Ⅰ61. At this time, the workpiece 8 to be coated is carried on the multiple slots Ⅰ61 and separated from the multiple slots Ⅱ51.

[0052] The workpiece support for surface coating preparation provided by the utility model can rotate horizontally, and the movable disk 3 and the movable rod 5 can perform reciprocating lifting and lowering motions on the basis of rotation, so that the movable rod 5 and the fixed rod 6 periodically support the workpiece 8 to be coated, so that the supporting position of the workpiece 8 to be coated can be continuously changed in the rotating state, so as to achieve full coverage of the surface coating of the workpiece 8 to be coated, improve the uniformity of the surface coating, and solve the problem that the supporting parts of the conventional workpiece 8 to be coated cannot be coated.

[0053] In addition, the structural design of the workpiece holder is that the workpiece 8 to be coated can be directly installed above the multiple movable rods 5 and the multiple fixed rods 6, which can simplify the installation of the workpiece 8 to be coated, and the entire structure is supported by the base 2. The driving mechanism only needs to drive the transmission seat 1 to drive the entire workpiece holder to rotate at the same time. In addition, the movable disk 3 and the movable rod 5 can be driven to rise and fall separately, which makes the structure of the driving component simple and easy to install.

[0054] In one embodiment, a lifting and lowering matching hole 211 is provided in the middle of the bottom plate 21, and the support seat includes a plurality of columns 22 provided outside the lifting and lowering matching hole 211, and the columns 22 are provided outside the lifting and lowering matching hole 211, so as to prevent the columns 22 from blocking the movement of the sliding rod 12;

[0055] The sliding rod 12 is slidably matched with the lifting matching hole 211, wherein the cross-sections of the lifting matching hole 211 and the sliding rod 12 are non-circular, preferably a rectangular structure, and the lifting matching hole 211 is slightly larger than the sliding rod 12, so that the sliding rod 12 can slide up and down along the lifting matching hole 211;

[0056] The movable plate 3 is provided with a plurality of sliding holes 31 which are slidably matched with the uprights 22 , so that the movable plate 3 is fixedly connected to the sliding rod 12 and can be lifted and slid between the bottom plate 21 and the fixed plate 4 .

[0057] In one of the embodiments, at least three columns 22 are arranged in a circular array outside the lifting matching hole 211, and preferably four are arranged in a rectangular array, which not only improves the connection strength between the fixed plate 4 and the support seat, but also improves the sliding guidance and sliding stability of the movable plate 3.

[0058] In one embodiment, at least three fixed rods 6 are provided, thereby improving the receiving stability of multiple slots I 61 on a plate-shaped workpiece 8 to be coated; at least three movable rods 5 are provided, thereby improving the receiving stability of multiple slots II 51 on a plate-shaped workpiece 8 to be coated. In this embodiment, when the workpiece 8 to be coated is a circular plate, at least three fixed rods 6 and at least three movable rods 5 are arranged in a ring array.

[0059] In one of the embodiments, the bottoms of the grooves I 61 and II 51 are tilted, thereby reducing the contact area between the workpiece 8 to be coated and the grooves I 61 and II 51, further improving the uniformity of the surface coating of the workpiece 8 to be coated, and also being able to adapt to small-range dimensional errors of the workpiece 8 to be coated.

[0060] In one of the embodiments, it also includes a top plate 7;

[0061] The top plate 7 is fixedly connected to the plurality of fixed rods 6 and slidably connected to the plurality of movable rods 5. Preferably, the top plate 7 is detachably connected to the fixed rods 6 to facilitate disassembly of the top plate 7. In this embodiment, the concealed installation stability of the top plate 7 can be improved.

[0062] Alternatively, the top plate 7 is fixedly connected to the plurality of movable rods 5 and slidably connected to the plurality of fixed rods 6. Preferably, the top plate 7 is detachably connected to the movable rods 5, so as to facilitate the disassembly of the top plate 7. In this embodiment, the concealed installation stability of the top plate 7 can be improved;

[0063] Alternatively, the top plate 7 is slidably connected to the plurality of movable rods 5 and is slidably connected to the plurality of fixed rods 6 at the same time. At this time, the top plate 7 can be directly taken out upwards, which greatly improves the disassembly and assembly efficiency.

[0064] In this embodiment, by setting a top plate 7, the structural stability of the upper ends of the fixed rods 6 and the movable rods 5 can be improved, so that when carrying the workpiece 8 to be coated, multiple fixed rods 6 and multiple movable rods 5 can always be parallel to each other, thereby preventing the workpiece 8 to be coated from stretching the fixed rods 6 and the movable rods 5 apart.

[0065] In one embodiment, the clamping groove I 61 is provided in plurality along the axial direction of the fixed rod 6; the clamping groove II 51 is provided in plurality along the axial direction of the movable rod 5. Thus, a plurality of workpieces 8 to be coated can be installed at one time, and the plurality of workpieces 8 to be coated can be rotated and the support positions can be switched at the same time, so that the coating effects of the plurality of workpieces 8 to be coated can be consistent.

[0066] The utility model also provides a surface coating device, comprising a coating chamber, a driving mechanism and a workpiece support for surface coating preparation as described above, which is arranged in the coating chamber;

[0067] The coating chamber is provided with a coating mechanism for coating the workpiece 8 to be coated, and specifically a vapor deposition device can be used;

[0068] The bottom plate 21 is horizontally rotatably disposed in the coating chamber, and is used to support the entire workpiece support and carry the entire workpiece support to rotate;

[0069] The driving mechanism drives the transmission plate 11 to rotate and rise and fall. The driving mechanism can be a linear motion mechanism and a rotary motor arranged at the output end of the linear motion mechanism. The body of the linear motion mechanism is fixedly arranged on the coating chamber, and the rotary motor is connected to the transmission plate 11. When in use, the linear motion mechanism drives the transmission plate 11 to rise and fall periodically, and the rotary motor drives the transmission plate 11 to rotate at a constant speed.

[0070] The utility model also provides a surface coating method, using the above surface coating device, comprising the following steps:

[0071] S1, placing the workpiece 8 to be coated between the plurality of fixed rods 6 and the plurality of movable rods 5, and overlapping the plurality of slots Ⅰ 61, at which time the workpiece 8 to be coated only contacts the bottom of the plurality of slots Ⅰ 61;

[0072] S2, turn on the coating mechanism, the driving mechanism drives the transmission plate 11 to rotate and periodically rise and fall. When the driving transmission plate 11 rises, the multiple movable rods 5 rise synchronously, the multiple slots II 51 lift the workpiece 8 to be coated, and the workpiece 8 to be coated is separated from the multiple slots I 61. At this time, the workpiece 8 to be coated only contacts the bottom of the multiple slots II 51, and the support range is small; when the driving transmission plate 11 descends, the multiple movable rods 5 descend synchronously, the multiple slots II 51 are separated from the workpiece 8 to be coated, and the workpiece 8 to be coated is supported by the multiple slots I 61. At this time, the workpiece 8 to be coated only contacts the bottom of the multiple slots I 61. In this way, during the process of meteorological deposition coating, the workpiece 8 to be coated continues to rotate to ensure the uniformity of the coating, and the support points of the workpiece 8 to be coated and the workpiece support are periodically switched to further ensure the uniformity of the entire outer surface of the workpiece 8 to be coated.

[0073] The utility model also provides a specific embodiment:

[0074] The assembly diagram of the lifting and rotating device in this embodiment is as follows Figure 1 As shown, the upper surface of the sliding rod 12 and the central area of ​​the movable disk 3 are respectively provided with four first threaded holes 121 and a fourth threaded hole 33, and are connected and fixed by screws; the base 2 is provided with four columns 22, and the columns 22 can move up and down through the sliding hole 31 of the movable disk 3, and the upper surface of the columns 22 and the central area of ​​the fixed disk 4 are respectively provided with four second threaded holes 221 and a sixth threaded hole 43, and are connected and fixed by screws; three third threaded holes 32 are evenly arranged on the outer edge of the movable disk 3, and the three movable rods 5 are fixed on the third threaded holes 32 by the first screws 52; the outer edge of the fixed disk 4 is provided with three fifth threaded holes 42 and three through holes 41 , three fixed rods 6 are fixed to the fifth threaded hole 42 through the second screw rod 62, and the three movable rods 5 can move up and down through the corresponding through holes 41; six sliding holes 71 are provided on the outer edge of the top plate 7, the first sliding rod 53 at the upper end of the movable rod 5 can move up and down through the sliding hole 71, and the second sliding rod 63 at the upper end of the fixed rod 6 can move up and down through the sliding hole 71; the movable rod 5 and the fixed rod 6 are respectively provided with two card grooves II51 and card grooves I61. After the assembly is completed, all the card grooves II51 and card grooves I61 are facing the central axis direction of the device, the card grooves II51 on the movable rod 5 are correspondingly in the same horizontal plane, and the card grooves I61 on the fixed rod 6 are correspondingly in the same horizontal plane.

[0075] The above is only an embodiment and does not limit the present invention in any way. Any person skilled in the art can make many possible changes, modifications or modifications to the present invention without departing from the scope of the present invention by using the above disclosed technical contents. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the present invention should fall within the scope of protection of the present invention.

Claims

1. A workpiece support for surface coating preparation, characterized in that: It comprises a base (2), a transmission base (1), a fixed plate (4), a movable plate (3), a fixed rod (6) and a movable rod (5); The base (2) comprises a bottom plate (21) and a support seat arranged at the upper end of the bottom plate (21); the bottom plate (21) is fixed in the surface coating device in a horizontally rotatable manner; and the fixed plate (4) is fixedly arranged at the upper end of the support seat; The transmission seat (1) comprises a transmission plate (11) and a sliding rod (12) arranged at the upper end of the transmission plate (11); the sliding rod (12) is arranged on the base (2) in a lifting manner; the movable plate (3) is fixedly arranged at the upper end of the sliding rod (12), and the movable plate (3) is located between the fixed plate (4) and the bottom plate (21); The fixed rods (6) are arranged in a plurality of structures in an enclosing manner, the lower ends of the plurality of fixed rods (6) are fixedly arranged on the upper end of the fixed plate (4), the fixed plate (4) is provided with a plurality of through holes (41), the movable rods (5) are arranged in a plurality of structures in an enclosing manner, the lower ends of the plurality of movable rods (5) are fixedly arranged on the upper end of the movable plate (3), and the plurality of movable rods (5) pass through the through holes (41) one by one; The plurality of fixed rods (6) and the plurality of movable rods (5) are parallel to each other and arranged in an interlaced manner. The plurality of fixed rods (6) are provided with a clamping groove I (61) facing inwardly, and the plurality of movable rods (5) are provided with a clamping groove II (51) facing inwardly. When the transmission seat (1) is raised or lowered, the height of the bottom of the plurality of clamping grooves II (51) is higher, lower or flush with the height of the bottom of the plurality of clamping grooves I (61).

2. The workpiece support for surface coating preparation as claimed in claim 1, characterized in that: A lifting matching hole (211) is arranged in the middle of the bottom plate (21), and the support seat comprises a plurality of columns (22) arranged outside the lifting matching hole (211); The sliding rod (12) is slidably matched with the lifting matching hole (211); The movable plate (3) is provided with a plurality of sliding holes (31) for slidingly matching with the upright posts (22).

3. The workpiece support for surface coating preparation as claimed in claim 2, characterized in that: At least three upright posts (22) are arranged in a ring array outside the lifting matching hole (211).

4. The workpiece support for surface coating preparation as claimed in claim 1, characterized in that: At least three fixed rods (6) are provided; and at least three movable rods (5) are provided.

5. The workpiece support for surface coating preparation as claimed in claim 1, characterized in that: The bottoms of the slots I (61) and II (51) are inclined.

6. The workpiece support for surface coating preparation as claimed in claim 1, characterized in that: Also includes a top plate (7); The top plate (7) is fixedly connected to a plurality of fixed rods (6) and slidably connected to a plurality of movable rods (5); Alternatively, the top plate (7) is fixedly connected to the plurality of movable rods (5) and slidably connected to the plurality of fixed rods (6); Alternatively, the top plate (7) is slidably connected to the plurality of movable rods (5) and is simultaneously slidably connected to the plurality of fixed rods (6).

7. The workpiece support for surface coating preparation as claimed in claim 6, characterized in that: When the top plate (7) is fixedly connected to the plurality of fixing rods (6), the top plate (7) and the fixing rods (6) are detachably connected; When the top plate (7) is fixedly connected to the plurality of movable rods (5), the top plate (7) and the movable rods (5) are detachably connected.

8. A workpiece support for surface coating preparation as claimed in any one of claims 1 to 7, characterized in that: A plurality of the clamping grooves I (61) are arranged axially along the fixing rod (6); A plurality of the clamping slots II (51) are arranged along the axial direction of the movable rod (5).

9. A surface coating device, characterized in that: A workpiece support for surface coating preparation as claimed in any one of claims 1 to 8, comprising a coating chamber, a driving mechanism and a workpiece support for surface coating preparation as set in the coating chamber; A coating mechanism is provided in the coating cavity; The bottom plate (21) is horizontally rotatably arranged in the coating chamber; The driving mechanism drives the transmission plate (11) to rotate and rise and fall.

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